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8590 results about "Nanotechnology" patented technology

Nanotechnology ("nanotech") is manipulation of matter on an atomic, molecular, and supramolecular scale. The earliest, widespread description of nanotechnology referred to the particular technological goal of precisely manipulating atoms and molecules for fabrication of macroscale products, also now referred to as molecular nanotechnology. A more generalized description of nanotechnology was subsequently established by the National Nanotechnology Initiative, which defines nanotechnology as the manipulation of matter with at least one dimension sized from 1 to 100 nanometers. This definition reflects the fact that quantum mechanical effects are important at this quantum-realm scale, and so the definition shifted from a particular technological goal to a research category inclusive of all types of research and technologies that deal with the special properties of matter which occur below the given size threshold. It is therefore common to see the plural form "nanotechnologies" as well as "nanoscale technologies" to refer to the broad range of research and applications whose common trait is size.

Semiconductor structure manufacturing method and semiconductor structure

The invention discloses a semiconductor structure manufacturing method and a semiconductor structure, and the manufacturing method comprises the steps: carrying out the periodic cycle etching of a preset number of times on a substrate through employing an etching technology, forming a first intermediate structure on the substrate, and carrying out the first processing of the first intermediate structure, including employing a first gas and a second gas, removing a part of thickness of the passivation layer deposited on the side wall of the first intermediate structure, and reacting with the substrate material which exists on the side wall and is exposed on the surface of the convex part to generate a reaction product layer; and removing the reaction product layer by using a third gas and a fourth gas so as to remove at least part of the lug boss, and repeatedly executing the etching process and the first processing process until a high aspect ratio etching structure is formed on the substrate. According to the method, the etching process and the side wall processing technology are organically combined, the etching rate and the side wall quality are balanced through alternate circulation, and deep silicon etching with the higher aspect ratio and the smaller nanoscale size can be achieved.
Owner:SHANGHAI BANGXIN SEMI TECHNOLOGY CO LTD

Spatial targeting of analytes

Systems and methods are provided for targeting one or more features in a region of interest, and efficiently removing the features from an array of features. The systems and methods can remove one or more beads that contain analytes, intermediate agents, or a combination thereof, from the region of interest of a substrate by emitting light toward the beads on the substrate.
Owner:10X GENOMICS INC

Devices and methods for analyzing biological samples

Described herein are systems and methods for analyzing biological samples. Including a method for processing an analyte, comprising providing a fluidic device comprising the analyte and one or more polymer precursors; selecting a discrete area within said fluidic device; providing an energy source in optical communication with fluidic device; and selectively supplying a unit of energy generated from the energy source to the fluidic device to generate a polymer matrix within the fluidic device, wherein the polymer matrix is within the discrete area or adjacent to the discrete area.
Owner:CELLANOME INC

Bake strategies to enhance lithographic performance of metal-containing resist

Various embodiments herein relate to methods, apparatus, and systems for baking metal-containing on a semiconductor substrate in the presence of a reactive gas species. For example, the method may include receiving the substrate in a process chamber, the substrate having a photoresist layer thereon, where the photoresist layer includes a metal-containing photoresist material; flowing a reactive gas species from a gas source, through a gas delivery line, into the process chamber, and exposing the substrate to the reactive gas species in the process chamber; and baking the photoresist layer while the substrate is exposed to the reactive gas species.
Owner:LAM RES CORP

Preparation method of semiconductor structure and semiconductor structure

The invention discloses a preparation method of a semiconductor structure and the semiconductor structure, and the preparation method comprises the steps: carrying out the etching of a substrate through employing an etching technology, so as to form a high-aspect-ratio etching structure on the substrate; after a periodic cycle step of a preset number of times of etching process is completed every time, a treatment process different from the etching process is used, and partial thickness of a passivation layer deposited on the side wall of an intermediate structure formed before the high aspect ratio etching structure is formed is removed. And removing at least part of the protruding part which exists on the side wall and is exposed from the surface of the residual passivation layer. According to the method, the etching process and the side wall processing technology are organically combined, the etching rate and the side wall quality are balanced through alternate circulation, and deep silicon etching with the higher aspect ratio and the smaller nanoscale size can be achieved.
Owner:SHANGHAI BANGXIN SEMI TECHNOLOGY CO LTD

Photoresist development with organic vapor

Development of resists are useful, for example, to form a patterning mask in the context of high-resolution patterning. Development can be accomplished using an organic vapor such as a carboxylic acid. In some implementations, the organic vapor is trifluoroacetic acid. In some implementations, the organic vapor is hexafluoro-acetylacetone. A metal-containing resist film such as an EUV-sensitive organo-metal oxide may be deposited on a semiconductor substrate using a dry or wet deposition technique. The metal-containing resist film on the semiconductor substrate may be developed using the organic vapor, or residue of metal-containing resist material formed on surfaces of a process chamber may be removed using the organic vapor.
Owner:LAM RES CORP

Layered drug-loading microneedle patch as well as preparation method and application thereof

The invention relates to a layered drug-loading microneedle patch as well as a preparation method and application thereof. The preparation method of the layered drug-loading microneedle patch comprises the following steps: S1, dissolving a drug and a soluble high-molecular polymer in a solvent according to a mass ratio of (2: 1)-(1: 12) to form a needle tip solution, then filling a needle tip cavity of a microneedle mold with the needle tip solution, drying, and removing redundant drug residues on the surface to form a drug-loading needle tip layer; and S2, filling a mold containing the drug-loading needle tip layer with a photocurable polymer, performing ultraviolet curing for 10-30 seconds under the wavelength of 365-405 nm, and then performing demolding to form a substrate layer, thereby obtaining the layered drug-loading microneedle patch. According to the method, one-time filling of the needle tip part is successfully achieved by combining needle tip auxiliary material proportion optimization, meanwhile, the curing process is rapid, the medicine utilization rate and the process stability are remarkably improved, the medicine stability is good, and the method is suitable for industrial production.
Owner:BEIJING CAS MICRONEEDLE TECH LTD

Difunctional filler synergistically enhanced polymer solid electrolyte and solid-state battery

The invention discloses a difunctional filler synergistically enhanced polymer solid electrolyte and a solid-state battery, and belongs to the field of solid-state batteries. The electrolyte adopts a polymer matrix, a lithium salt and two functional fillers: the first filler has a high dielectric constant, and can accelerate dissociation of the lithium salt, fix negative ions of the lithium salt and improve the transference number of lithium ions under the action of self polarization; and the second filler has high electrochemical window and ionic conductivity, can inhibit high-voltage decomposition, and is adaptive to a high-voltage positive electrode material. Through cooperation and balance design of the two kinds of filler, ion transmission, interface stability and high-pressure compatibility can be considered at the same time. In addition, the invention further designs a composite negative pole piece, the surface of the negative pole piece is coated with the solid electrolyte, and the ion transmission kinetics in the pole piece can be remarkably improved. On the basis, the invention develops a high-performance solid-state battery which is excellent in electrochemical performance and can play an important role in the fields of consumer electronics, electric automobiles, energy storage systems, low-altitude flight and the like.
Owner:ZHONGYU PEGASUS NEW MATERIALS TECH INNOVATION CENT (ZHENGZHOU) CO LTD

SERS (Surface Enhanced Raman Scattering) sensing chip with stable reusability as well as preparation method and application thereof

The invention discloses an SERS (Surface Enhanced Raman Scattering) sensing chip with stable reusability as well as a preparation method and application of the SERS sensing chip, and belongs to the technical field of photoelectric sensing devices. Comprising a substrate; the semiconductor photocatalyst is positioned on the surface of the substrate; the co-oxidant and the co-reducing agent are positioned on the surface of the semiconductor photocatalyst; the occupying molecule is covalently connected with an exposure site of the auxiliary reducing agent in space; the template molecule is in covalent linkage or coordination linkage with an exposure site of the pro-oxidant in space; wherein the template molecule can be subjected to photocatalytic degradation, so that the pro-oxidant obtains the exposure site again. The template molecules in the sensing chip can be quickly removed through space confinement photocatalytic degradation, and the accuracy of quantitative analysis is improved by using the inorganic imprinted polymer as internal standard molecules.
Owner:JIANGNAN UNIV

Ultrasonic response adhesion integrated hydrogel as well as preparation method and application thereof

The invention belongs to the technical field of biomedical materials, and relates to ultrasonic response adhesion integrated hydrogel as well as a preparation method and application thereof, the hydrogel comprises a hydrogel matrix, an interface anchoring agent and a functional load component; the preparation method comprises the following steps: 1, preparing a hydrogel precursor solution, and preparing a hydrogel matrix into a solution; 2, carrying out mold molding or injection crosslinking on the solution prepared in the step 1 to form hydrogel; 3, preparing an interface anchoring agent solution, and dissolving or dispersing an interface anchoring agent in a solvent to prepare the interface anchoring agent solution; the ultrasonic responsive adhesive hydrogel platform provided by the invention can provide an efficient, controllable and universal solution for tissue adhesion, targeted therapy, wearable attachment and the like in a complex microenvironment, and is suitable for a plurality of clinical scenes such as chronic wound management, surgical postoperative closure, infection control, adhesive bioelectronic fixation, soft tissue engineering and the like.
Owner:XI AN JIAOTONG UNIV

Functionalized graded porous carbon microspheres as well as preparation method and application thereof

The invention provides a functional graded porous carbon microsphere and a preparation method and application thereof, the preparation method comprises the following steps: S1, mixing a soft template, a phenolic compound, a cross-linking agent and a basic catalyst, and reacting to obtain a thermosetting phenolic resin microsphere; s2, carrying out pre-carbonization treatment on the thermosetting phenolic resin microspheres to obtain a carbonized material; s3, performing physical activation on the carbonized material to obtain graded porous carbon microspheres; s4, performing heat treatment on the graded porous carbon microspheres to obtain functionalized graded porous carbon microspheres; the preparation method has the characteristics of simple process, environmental protection and economical efficiency, the functionalized porous carbon microspheres prepared by the method are uniform in morphology, and the pore volume, pore diameter and pore structure of the functionalized graded porous carbon microspheres can be accurately regulated and controlled, so that the functionalized graded porous carbon microspheres meeting application requirements are obtained.
Owner:INSTITUTE OF PROCESS ENGINEERING CHINESE ACADEMY OF SCIENCES

Activated carbon fiber capable of efficiently removing formaldehyde and preparation method of activated carbon fiber

The invention provides an activated carbon fiber capable of efficiently removing formaldehyde and a preparation method thereof, the activated carbon fiber is of a composite material fiber structure of porous TiO2 derived from activated carbon and a metal organic framework (MOF), and the preparation method of the composite material comprises pretreatment of activated carbon, preparation of a Ti-MOF precursor and preparation of TiO2 / activated carbon fiber. According to the invention, the MOF-derived porous TiO2 / activated carbon composite fiber structure is constructed, physical adsorption and photocatalytic degradation functions are cooperated, and the limitation of single adsorption capacity is broken through; the interface bonding problem of the MOF derivative and the activated carbon is solved, and high-dispersion loading and stable and firm compounding of the active components are realized; a process path capable of realizing large-scale preparation is provided, and continuous production of the composite fiber is realized through an electrostatic spinning technology.
Owner:HANGZHOU XINGYU CARBON TECH GREEN CO LTD +1

Semiconductor device based on two-dimensional semimetal interface optimized contact and preparation method thereof

PendingCN120456587ADevice materialEngineering
The invention discloses a semiconductor device based on two-dimensional semi-metal interface optimized contact and a preparation method thereof, which are applied to devices including a two-dimensional semiconductor-based metal-semi contact structure, such as thin film transistors, Schottky junction diodes / transistors and the like. According to the invention, the two-dimensional semi-metal interface layer is introduced between the metal electrode (source and drain electrodes) and the two-dimensional material (conductive channel) through PVD and CVD processes, so that pollution and defects caused by additional transfer steps are avoided, preparation of the interface layer with large area, high uniformity and controllable thickness can be realized, and industrial requirements are met. According to the semiconductor device provided by the invention, the two-dimensional semimetal is introduced as the interface layer, so that the contact resistance between the source and drain electrodes and the conductive channel is obviously optimized, Fermi level pinning is eliminated, and the adjustable Schottky barrier height is realized; and a brand new solution is provided for development and industrial application of a metal-semiconductor contact structure device of a high-performance two-dimensional semiconductor.
Owner:UNIV OF SCI & TECH OF CHINA

Spatial targeting of analytes

Systems and methods are provided for targeting one or more features in a region of interest, and efficiently removing the features from an array of features. The systems and methods can remove one or more beads that contain analytes, intermediate agents, or a combination thereof, from the region of interest of a substrate by emitting light toward the beads on the substrate.
Owner:10X GENOMICS INC

Semiconductor nanoparticle, production method thereof, electroluminescent device and display device including the same

PendingUS20250250481A1Electrical apparatusElectroluminescent light sourcesDisplay deviceSemiconductor Nanoparticles
A semiconductor nanoparticle, a production method, and an electroluminescent device including the same. The semiconductor nanoparticle includes zinc, sulfur, and selenium, and the semiconductor nanoparticle comprises a first semiconductor nanocrystal; and a semiconductor nanocrystal shell including zinc and sulfur disposed on the first semiconductor nanocrystal, and the semiconductor nanoparticle does not include cadmium; the semiconductor nanoparticle further includes a plurality of organic ligands (or a ligand system), that include a first organic ligand having a carboxylate moiety and a second organic ligand having a carboxylate moiety different from the first organic ligand. In a gas chromatography analysis, the semiconductor nanoparticle exhibits a first peak assigned to the first organic ligand and a second peak assigned to the second organic ligand, wherein an area percentage of the first peak relative to the second peak is greater than or equal to about 1% and less than or equal to about 300%.
Owner:SAMSUNG DISPLAY CO LTD

Metal-doped carbon quantum dots, preparation thereof and application of metal-doped carbon quantum dots in nano antibacterial agent

The invention discloses a metal-doped carbon quantum dot as well as preparation and application of the metal-doped carbon quantum dot in a nano antibacterial agent, citric acid, urea and tea polyphenol are taken as precursors, metal salt is added, carbon dot synthesis and metal ion doping are synchronously completed in one step through a hydrothermal method, and the metal-doped carbon quantum dot is prepared; the surfaces of the metal-doped carbon quantum dots are negatively charged, and the metal-doped carbon quantum dots have peroxidase-like activity and catalase-like activity at the same time; the metal ions adopt any one of Fe < 3 + >, Cu < 2 + > and Ce < 3 + >; the metal-doped carbon quantum dots are in a sphere-like shape. The metal-doped carbon quantum dots prepared by the preparation method disclosed by the invention have peroxidase-like activity and catalase-like activity at the same time through precise doping of metal ions, and the two activities have a synergistic effect in an oral periodontitis microenvironment, so that a good antibacterial effect is achieved.
Owner:HEFEI UNIV OF TECH

Photoresist development with halide chemistries

Development of resists are useful, for example, to form a patterning mask in the context of high-resolution patterning. Development can be accomplished using a halide-containing chemistry such as a hydrogen halide. A metal-containing resist film may be deposited on a semiconductor substrate using a dry or wet deposition technique. The resist film may be an EUV-sensitive organo-metal oxide or organo-metal-containing thin film resist. After exposure, the photopatterned metal-containing resist is developed using wet or dry development.
Owner:LAM RES CORP

Preparation method of photocatalytic nanofiltration membrane based on IL-GQDs

The invention discloses a preparation method of a photocatalytic nanofiltration membrane based on IL-GQDs. The method comprises the following steps: pretreating bagasse, and applying the pretreated bagasse and imidazole ionic liquid (IL) to preparation of ionic liquid functionalized graphene quantum dots (IL-GQDs); the IL-GQDs are uniformly distributed on the surface of the base membrane by utilizing a vacuum-assisted low-temperature interfacial polymerization technology to form an ultrathin photocatalytic active layer; and finally, curing and cleaning to obtain the photocatalytic nanofiltration membrane based on the IL-GQDs. According to the prepared IL-GQDs, the membrane surface is endowed with high specific surface area and excellent photocatalytic activity, and meanwhile, an additional water transmission channel can be established under the condition that the pore diameter of the membrane is not changed, so that the problem of trade-off of a traditional membrane is solved. In addition, through combination of low-temperature and vacuum-assisted interfacial polymerization technologies, the membrane structure is more uniform and compact, defects on the surface of the membrane are reduced, and the stability and the anti-pollution capacity of the membrane are improved. The membrane disclosed by the invention shows relatively high water flux, salt recovery rate and long-term stability in water treatment application.
Owner:XIAN UNIV OF SCI & TECH

Layered medical appliances and methods

Medical appliances may be formed of multilayered constructs. The layers of the constructs may be configured with various physical properties or characteristics. The disposition and arrangement of each layer may be configured to create an overall construct with a combination of the individual properties of the layers. Constructs may be used to create vascular prostheses or other medical devices.
Owner:MERIT MEDICAL SYSTEMS INC

Injectable short-fiber-based hydrogel tissue repair material with electric response characteristic as well as preparation method and application of injectable short-fiber-based hydrogel tissue repair material

The invention provides an injectable short-fiber-based hydrogel tissue repair material with an electric response characteristic as well as a preparation method and application thereof, and the injectable short-fiber-based hydrogel tissue repair material with the electric response characteristic is prepared by taking a natural polymer material loaded with bioactive factors as a core layer material and a biodegradable material as a shell layer material through a coaxial electrostatic spinning technology. The method comprises the following steps: preparing short fibers with a core-shell structure, uniformly mixing the short fibers with a hydrogel matrix, injecting and filling a tissue defect part, and carrying out ultraviolet curing to form the tissue repair material. The injectable short-fiber-based hydrogel tissue repair material with the electrical response characteristic provided by the invention has piezoelectric characteristic and injectable characteristic, can generate electrical response through mechanical stimulation so as to promote cell proliferation and tissue repair, and also has controllable drug release capacity and good mechanical adaptability; the method is suitable for application scenes of complex tissue damage repair such as diabetes infected wound repair, articular cartilage repair, oral barrier membrane repair, abdominal wall defect repair and the like.
Owner:EIGHTH AFFILIATED HOSPITAL SUN YAT SEN UNIV (SHENZHEN FUTIAN)

Method for synthesizing n-type conductive conjugated polymer and screening catalyst

The invention discloses a method for synthesizing an n-type conductive conjugated polymer and screening a catalyst, and belongs to the technical field of synthesis of conductive polymer materials. Redox potentials of various metal compounds are studied, the screening method of the catalyst in synthesis of the n-type conductive conjugated polymer is provided, and the n-type conductive conjugated polymer such as poly (benzodifuran diketone) (PBFDO) is efficiently synthesized by introducing a trace and cheap metal compound as the catalyst. The method has the advantages that the problem that a large amount of catalyst is left in a conventional synthesis method is solved, the operation is simple, the conductivity of the synthesized PBFDO exceeds # imgabs0 #, the problem that most n-type organic conductive polymers are low in conductivity is solved, high-performance conductivity matched with p-type organic conductive polymers can be realized, and the method can be widely applied to various organic functional materials and organic electronic devices.
Owner:PEKING UNIV

Metal polyphenol network coated self-assembled nano-drug as well as preparation method and application thereof

The invention provides a metal polyphenol network coated self-assembled nano-drug as well as a preparation method and application thereof, and belongs to the technical field of nano-drugs. The self-assembled nano-drug provided by the invention is of an organic-inorganic hybrid core-shell nano-structure; the core of the organic-inorganic hybrid core-shell nano structure is BC NPs; the BC NPs is formed by self-assembly of BBR (Boron Butadiene Rubber) and Cur (Carbon); a shell layer of the organic-inorganic hybrid core-shell nanostructure is a dynamic cross-linked network formed by self-assembly of metal ions and polyphenol through coordination. Metal ions and polyphenol are self-assembled through coordination to form a dynamic cross-linked network, and the dynamic cross-linked network coats the outer layer of the BC NPs nano-particles, so that the BC NPs nano-particles have good biocompatibility and biological safety; and the self-assembled nano-drug shows an obviously enhanced antibacterial effect under the combined treatment of NIR and H2O2.
Owner:NORTHEAST FORESTRY UNIV

Bionic bimodal hydrogel-based triboelectricity-supercapacitor sensor and preparation method thereof

The invention discloses a bionic bimodal hydrogel-based triboelectricity-super-capacitance sensor and a preparation method of the bionic bimodal hydrogel-based triboelectricity-super-capacitance sensor. A hydrogel-based sensor high-charge sensitive layer is used as a triboelectric layer, a flexible hydrogel-based high-conductivity hydrogel electrode layer is used as an upper electrode layer, a hydrogel-based sensor elastic spacing layer, a hydrogel-based sensor dielectric layer is used as an ion conductive layer, and the flexible hydrogel-based high-conductivity hydrogel electrode layer is used as a lower electrode layer. An integrated multi-layer device structure is stacked from top to bottom; a silver wire is led out from each of the two layers of flexible hydrogel-based high-conductivity hydrogel electrodes, and the bionic bimodal hydrogel-based triboelectricity-super-capacitance sensor is obtained. The sensor integrates two sensing mechanisms of triboelectricity and a super capacitor, can detect dynamic and static pressure at the same time, has the advantages of high sensitivity, wide detection range, quick response and the like, and is expected to be widely applied to the fields of human-computer interaction, robot sensing and the like.
Owner:HEBEI UNIV OF TECH

Platinum-carbon catalyst taking hollow carbon nanospheres as carrier and preparation method of platinum-carbon catalyst

The invention provides a platinum-carbon catalyst taking hollow carbon nanospheres as a carrier and a preparation method of the platinum-carbon catalyst. The method comprises the following steps: adding a polymer monomer into a nano template dispersion liquid with a uniform size; then adding a proper amount of platinum salt into the solution to obtain a mixed solution, and stirring to react for 0.5-30 hours to obtain a reaction product; and annealing the reaction product, and then removing the nano template to obtain the platinum-carbon catalyst. The obtained platinum-carbon catalyst takes the hollow carbon nanospheres as a carrier and has a larger specific surface area, the platinum catalyst is loaded on the surfaces of the carbon nanospheres and can be in better contact with an electrolyte, and the obtained catalyst has good electrochemical activity and shows excellent electro-catalytic hydrogen evolution performance and oxygen reduction performance; and the related preparation method is simple and reliable, is suitable for preparation of an electrocatalytic hydrogen evolution electrode and an oxygen reduction electrode, and has a good application prospect in the fields of proton exchange membrane electrolytic cells, hydrogen fuel cells and the like.
Owner:WUHAN UNIV OF SCI & TECH

Supported nickel catalyst for preparing 1, 3-propylene glycol through hydrogenation of 3-hydroxypropionaldehyde as well as preparation method and application of supported nickel catalyst

The invention discloses a supported nickel catalyst for preparing 1, 3-propylene glycol through hydrogenation of 3-hydroxypropionaldehyde as well as a preparation method and application of the supported nickel catalyst, and relates to the technical field of catalysts. The modified long-chain multi-carbon inducer is used, and a special long-chain molecular structure and a branched chain group of the inducer can effectively and selectively adsorb and occupy a micropore impregnation site; the preparation method has the beneficial effects that more active component nickel species are obviously promoted to be dispersed in main reaction confinement spaces such as mesopores and macropores and interact with the carrier to form effective active sites, and active component steeping liquor is inhibited from entering micropore channels due to capillary action; the active site failure caused by agglomeration of nickel species in micropores in the subsequent drying and roasting process of the catalyst precursor is avoided, the efficient and directional reaction is ensured, the generation of by-products is greatly reduced, the pressure is relieved for the subsequent product rectification separation, and the final product purity is improved. The catalyst provided by the invention can still keep an excellent catalytic effect when the air speed of a 3-hydroxypropionaldehyde solution is increased to 6.5 h <-1 >.
Owner:FUHAI (DONGYING) TECHNICAL SERVICES CO LTD

Self-generating interbody fusion cage and preparation method thereof

The invention relates to a self-generating interbody fusion cage and a preparation method thereof, the interbody fusion cage comprises a porous tantalum support and bioactive piezoelectric ceramic arranged on the porous tantalum support, and the bioactive piezoelectric ceramic comprises hydroxyapatite and barium titanate; the preparation method comprises the following steps that the porous tantalum support is obtained through 3D printing, assembling positions of the bioactive piezoelectric ceramics are reserved on the upper surface and the lower surface of the porous tantalum support, the bioactive piezoelectric ceramics are embedded into the assembling positions of the upper surface and the lower surface of the porous tantalum support, and the weight ratio of barium titanate to hydroxyapatite is (92-98): (2-8). Compared with the prior art, the vertebral fusion cage has the advantages of promoting vertebral fusion by utilizing mechanical force in a human body to generate electricity, matching mechanical properties of a contact surface of the fusion cage, providing osteogenesis related ions, being relatively good in interface combination and the like.
Owner:SHANGHAI TENTH PEOPLES HOSPITAL

Discontinuous metal film with tunneling effect, tunneling electrode chip and preparation method thereof

The invention provides a discontinuous metal film with a tunneling effect, a tunneling electrode chip and a preparation method of the tunneling electrode chip. A large-area uniform discontinuous metal film grows in situ on a glass substrate through a magnetron sputtering deposition method, and a charge tunneling structure with a random nano array is constructed. The discontinuous metal thin film comprises a substrate and a nano gap thin film arranged on the substrate, the nano gap thin film comprises a plurality of nano islands and a plurality of nano gaps which are randomly distributed, and a nano gap is formed between any two adjacent nano islands and a nano gap lt; 10 nm; the thickness of the nano-gap film is lt; the wavelength is 100 nm. According to the tunneling electrode chip, atomic-scale thickness control is achieved through high-precision thin film deposition, the uniformity of multi-batch devices is remarkably improved, the yield is improved by 50% or above compared with a traditional method, the limitation of high cost of micro-nano machining faced by a traditional tunneling device is broken through, and the tunneling electrode chip has the sensitive response capacity for different small molecule media and is suitable for large-scale popularization and application. Molecular information can be presented in the form of transient conductance information.
Owner:ZHEJIANG UNIV