Disclosed in the present invention is a
physics-informed neural network-based thermo-mechanical
coupling analysis method for an inertial
microsystem, the method comprising: S1, configuring material parameters and boundary conditions of an inertial
microsystem, and establishing a thermo-mechanical
coupling analysis model; S2, performing electro-
thermal coupling analysis to obtain a temperature distribution of the inertial
microsystem; S3, performing thermo-mechanical
coupling simulation analysis to obtain a thermal
stress distribution of the microsystem; S4, predicting temperature fields of the microsystem by means of a
physics-informed neural network; S5, using the temperature fields as boundary conditions for mechanical
simulation of the microsystem, obtaining mechanical properties such as stress and strain of the microsystem; and S6, performing
electromechanical coupling simulation analysis to analyze the
impact of
structural deformation on various parameters of
electrical performance. The present invention improves the solution accuracy of the neural network by means of an improved
adaptive weighting strategy, combines a complete polynomial
basis function with the neural network, and introduces an expanded
basis function to reduce the state dimensionality, thus reducing computational costs and time, achieving accurate prediction of temperature fields of microsystems at multiple moments, and allowing for computation of the performance of microsystems under electro-thermal-mechanical multi-
physics coupling.