The invention relates to the technical field of preparation of
silicon carbide ceramics, in particular to a
silicon carbide ceramic setter plate based on a
tape casting process, a preparation method and application of the
silicon carbide ceramic setter plate based on the
tape casting process. The thermal stress is eliminated in a dynamic process of forming a
liquid phase of the auxiliary agent and rearranging matrix particles, so that the catalytic densification effect of the auxiliary agent is maximized, the abnormal growth of matrix grains at high temperature is avoided, the accurate regulation and control of the structure and the performance of the
silicon carbide ceramic setter plate are realized, and the service life of the
silicon carbide ceramic setter plate is prolonged. Meanwhile, a
tape casting process is combined to provide a high-quality structural basis for the synergistic effect of matrix-additive-
calcination, so that the
silicon carbide powder and the composite additive form a uniformly-distributed
microstructure in a
green body, the synergistic effect of the silicon carbide
powder, the composite additive and the
green body is further strengthened, and the density uniformity, the
mechanical strength, the high-temperature stability and the like of the large-size ultrathin
load bearing plate are improved; the problem that a silicon carbide setter plate prepared through an existing method is prone to deformation and
cracking at high temperature is solved.