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254 results about "Ceramic sintering" patented technology

Sintering of ceramics. Sintering (Firing) of ceramic materials is the method involving consolidation of ceramic powder particles by heating the “green” compact part to a high temperature below the melting point, when the material of the separate particles difuse to the neghbouring powder particles.

High-thermal-conductivity silicon carbide ceramic material and preparation method thereof

The invention belongs to the field of ceramic material production, and relates to a high-thermal-conductivity silicon carbide ceramic material and a preparation method thereof. The preparation method comprises the following steps: mixing silicon carbide powder, cane sugar, boric acid, a dispersing agent and water to prepare slurry; on the basis that the total mass of the silicon carbide powder, the carbon element obtained after cane sugar is debonded, the boron element in the boric acid and the dispersing agent is 100 wt.%, the adding amount of the carbon element obtained after cane sugar is debonded is 1.0 wt.%-2.5 wt.%, and the adding amount of the boron element in the boric acid is 0.1 wt.%-0.3 wt.%; drying, sieving, forming and debonding the slurry to obtain a ceramic body; and sintering the ceramic green body at normal pressure to obtain the high-thermal-conductivity silicon carbide ceramic material. The water-soluble sucrose and boric acid are added as sintering aids to be mixed with the silicon carbide powder, so that the uniform dispersity of the sintering aids is improved, and finally, the use amount of the sintering aids is effectively reduced while the sintering densification of the ceramic is ensured, thereby reducing the adverse effect of a second phase and internal impurities on the thermal conductivity of the silicon carbide ceramic as much as possible.
Owner:SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI

Temperature field real-time monitoring method and system based on special ceramic sintering

The invention discloses a temperature field real-time monitoring method and system based on special ceramic sintering, and relates to the field of temperature monitoring of special ceramic sintering, and the method specifically comprises the following steps: S1, processing a sensor array; s2, construction of multi-parameter data acquisition; s3, a temperature field reconstruction and prediction model based on multi-physics field coupling; and S4, temperature field real-time monitoring and abnormity early warning are carried out. According to the temperature field real-time monitoring method and system based on special ceramic sintering, the temperature sensor is preset in the green body, a three-dimensional temperature field reconstruction function is combined, discrete sensor node real-time temperature data can be converted into a continuous three-dimensional temperature field cloud picture, temperature distribution of the surface of the green body can be clearly presented, and the temperature field can be monitored in real time. And the temperature gradient change from the surface layer to the core can be more accurately restored, so that an operator can intuitively master the temperature state of the whole green body, the situation that the whole process is misjudged due to local data is avoided, and the comprehensiveness and accuracy of temperature field monitoring are fundamentally improved.
Owner:XIANG QIANG CERAMIC MFG CO LTD

Ceramic sintering process thermal deformation intelligent prediction and adaptive temperature precise regulation and control system

The invention relates to the technical field of ceramic intelligent manufacturing, in particular to a ceramic firing process thermal deformation intelligent prediction and self-adaptive temperature precise regulation and control system, which comprises a multi-source sensing module (a thermal infrared camera array, a temperature sensor, a laser displacement meter and a powder characteristic analyzer); a hybrid prediction model (a space-time convolutional neural network constrained by a physical mechanism); and the self-adaptive temperature control actuator comprises a partitioned burner group, a quenching / slow cooling pipeline and a gas-air volume decoupling controller. According to the scheme, through a multi-mode perception-hybrid modeling-dynamic optimization full-process closed-loop architecture, the single-point technical limitation of existing patents is broken through, and the zero-defect precise manufacturing target of ceramic firing is achieved.
Owner:JINGDEZHEN CERAMIC UNIV

Nano additive with core-shell structure as well as preparation method and application of nano additive

The invention belongs to the field of preparation of nano composite materials, and mainly relates to a nano additive with a'core-shell 'structure as well as preparation and application of the nano additive. And the core-shell structure nano additive comprises three kinds of core part materials and a shell layer coating material. For example, the material of the core part comprises nano natural tourmaline powder, nano selenium and nano silver, and the material of the shell part is silicon dioxide. Wherein the three core part materials respectively have the effects of generating and releasing negative ions, releasing selenium elements and resisting bacteria. In the ceramic sintering process, the coating'shell 'layer protects the chemical composition and the phase structure of the'core' material from being damaged; and the material coated with the'shell 'layer can be diffused into the ceramic material in the ceramic sintering process, so that the selenium element and the antibacterial metal element of the'core' part are controllably released. The core-shell structure nano additive is added into the pottery clay, and the multifunctional health-care ceramic material is obtained by sintering under the condition of medium and high temperature, so that the aim of controlling the release of selenium, antibacterial agent silver and negative ions is fulfilled.
Owner:NORTHWEST UNIV

Ceramic sintering performance prediction method based on GA-BP neural network

The invention discloses a ceramic firing performance prediction method based on a GA-BP neural network, and the method comprises the steps: data collection and preprocessing, gray correlation analysis and screening of key process parameters, construction of a GA-BP neural network model, model training and verification, prediction model testing, and firing performance index prediction. By means of unique intelligent algorithm fusion, the problems of high experience dependence, high experiment cost, long period, low efficiency, time consumption, energy consumption, high efficiency and the like of a method for judging the ceramic firing performance through artificial experience in actual ceramic firing production are effectively solved. The technical problem that multi-target collaborative optimization is difficult to realize at the same time in the prior art is solved, remarkable advantages are shown in the aspects of prediction precision, intelligent degree and the like, the requirements of intelligent, green and high-quality ceramic firing process optimization are met, and the method has wide application prospects and important practical value.
Owner:南宁桂电电子科技研究院有限公司 +1

Semiconductor substrate processing base, substrate holding member, and method for manufacturing the same

To provide a semiconductor substrate processing base in which even when an unintended external force is applied to the semiconductor substrate processing base, internal stress is relieved and the effect of the external force is suppressed, a substrate holding member, and a method for manufacturing the same.SOLUTION: A semiconductor substrate processing base 100 comprises a ceramic base 110 formed by a ceramic sintered body having a media flow path 118, and an Al film 120 formed on the surface of media flow path 118. This allows unintended external forces applied to the media semiconductor substrate processing base to be mitigated by the plastic deformation of the Al film, thereby suppressing the effects of stress.SELECTED DRAWING: Figure 1
Owner:NITERRA CO LTD

Manufacturing method for multilayer electronic component and mold release film

To provide a manufacturing method for a multilayer electronic component in which reduction in quality caused by a mold release film is prevented and provide a mold release film used for the same.SOLUTION: A manufacturing method for a multilayer electronic component 1 includes a step for coating one surface of a mold release film 100 with a ceramic slurry and forming a ceramic green sheet 10, a step for printing an internal electrode pattern 12 on the ceramic green sheet 10, a step for laminating the ceramic green sheets 10 and obtaining a laminated body 2, a step for obtaining a ceramic sintered body 4, and a step for forming an external electrode 6. The mold release film 100 includes a substrate 102 and a mold release layer 110. A counter layer 2000 is provided on the surface of the substrate 102 on which the mold release layer 110 is not provided.SELECTED DRAWING: Figure 3
Owner:MURATA MFG CO LTD

Method for manufacturing ceramic ball material and method for manufacturing ceramic ball

A method for manufacturing a ceramic ball material according to an embodiment, includes: a step of producing a ceramic green compact; a step of performing a plurality of times of a CIP process on the ceramic green compact to produce a CIP (cold isostatic pressing) green compact; and a step of sintering a CIP green compact produced by a final CIP process among the plurality of times of the CIP process to produce a ceramic sintered compact. In the step of producing the CIP green compact, after a former CIP process among the plurality of times of the CIP process is performed, an orientation of a CIP green compact produced by the former CIP process is changed, and a latter CIP process is performed.
Owner:NITERRA MATERIALS CO LTD

Preparation method of MgO-MgA12O4-ZrO2 nano ceramic eutectic composite material

The invention discloses a preparation method of a MgO-MgA12O4-ZrO2 nano ceramic eutectic composite material. The preparation method comprises the following steps: S1, preparing powder; s2, flash firing preparation; and S3, high-temperature melting preparation. According to the invention, two technologies of flash sintering and high-temperature melting are combined, the problems of high sintering temperature, easy growth of crystal grains, difficult densification and the like of the traditional eutectic ceramic are solved, and an excellent composite material with a nanoscale eutectic structure is finally obtained; a nanocrystalline blank obtained through flash sintering is crushed and then subjected to high-temperature melting, microdefects and air holes possibly existing in the flash sintering blank are eliminated, the chemical components and the microstructure of a final product are more uniform, and compared with traditional selective laser melting, the method is more convenient and faster to implement and lower in cost.
Owner:JIANGSU NUOMING HIGH TEMPERATURE MATERIALS CO LTD

Ceramic granule, method for producing ceramic granule, method for producing ceramic molded body, and method for producing ceramic sintered body

The ceramic granules are configured such that: (1) the average packing ratio is 25-60 vol%, the average disintegration strength is 0.01-0.60 MPa, and the ratio of the in-granule defect diameter to the granule diameter is 0.30 or less; or (2) the average disintegration strength is 0.01-0.60 MPa, the ratio of the in-granule defect diameter to the granule diameter is 0.30 or less, and the flow function in a ceramic granular layer formed by filling the ceramic granules and compacting the ceramic granules at a vertical stress (load) of 1-90 kPa is 3.0 or more.
Owner:AGC INC

Water-saving type ceramic sintered blank grinding machine

The utility model relates to the technical field of ceramic production, in particular to a water-saving type ceramic firing blank grinding machine which comprises an operation table, a first clamping block is arranged above one end of the operation table, the middle of one side of the first clamping block is rotationally installed on a connecting base through a connecting shaft, and a pushing mechanism is vertically installed in the middle of the other side of the connecting base. The pushing mechanism is fixed to the operation table through a first fixing base. A second clamping block is correspondingly arranged on the side, away from the connecting base, of the first clamping block, a driving shaft is connected to the middle of the other side of the second clamping block, and the other end of the driving shaft is rotationally installed on the second fixing base. When the water-saving type ceramic sintered blank grinding machine is used and the ceramic sintered blank is ground through the elastic effect of the elastic piece, the end opening of the ceramic sintered blank can be inserted from the second clamping block, so that the elastic piece can be supported on the inner wall of the ceramic sintered blank, and the side wall of the ceramic sintered blank is supported; and the ceramic body cannot be broken due to pressure in the polishing process.
Owner:NANTONG JINNUO FINE CERAMIC CO LTD

Ceramic sintered body and plasma-generating electrode

A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more. The ceramic sintered body has a plurality of microstructures having respective compositions different from one another. One of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
Owner:NITERRA CO LTD

Ceramic sintered body and plasma-generating electrode

A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more. The ceramic sintered body has a plurality of microstructures having respective compositions different from one another. One of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
Owner:NITERRA CO LTD

Microwave-assisted sintering device for low-temperature fast-fired conductive ceramics

The utility model relates to the technical field of ceramic sintering, and discloses a low-temperature fast-firing conductive ceramic microwave-assisted sintering device which comprises a microwave sintering furnace and a furnace chamber arranged on the microwave sintering furnace, the furnace chamber comprises a sintering chamber, a placing frame is connected in the furnace chamber in a sliding mode, and the placing frame comprises placing plates and sealing plates which are fixed alternately. The sealing plate is used for shielding the furnace chamber; the placing frame is arranged in the furnace chamber of the microwave sintering furnace, the placing frame is formed by alternately fixing the placing plates and the sealing plates, a plurality of conductive ceramics can be placed on the placing plates, the placing frame is moved to enable the conductive ceramics to sequentially enter the sintering chamber of the furnace chamber to be sintered, and the conductive ceramics are directly moved out after being sintered. The efficient sintering of the conductive ceramic is realized by adopting a reciprocating translation mode, the conductive ceramic is convenient to take, and the sintered conductive ceramic is still sintered when the sintered conductive ceramic is taken, so that the sintering efficiency is improved, and the phenomena of heat dissipation and energy waste caused by repeatedly opening the furnace chamber are avoided.
Owner:ZHEJIANG UNIV OF TECH

Sintering tool for ceramic sand finishing sheet

The utility model provides a sintering tool for a ceramic sand finishing sheet, and relates to the field of ceramic sintering auxiliary jigs, the sintering tool for the ceramic sand finishing sheet comprises a base, the surface of the base is provided with at least two slide rail grooves in opposite directions; the bottom of the fixing block is arranged in the sliding rail groove, a through hole is formed in the fixing block, and a clamping area is defined by the fixing block; the plurality of pressing plates are positioned in the clamping area; and the plug pin is inserted into the through hole and extends into the sliding rail groove. The sintering tool for the ceramic sand finishing sheet is simple in structure, stable, reliable and wide in application range, the ceramic sand finishing sheet can be subjected to retention sintering, the shrinkage direction of the ceramic sand finishing sheet can be controlled, and the production efficiency is improved.
Owner:JIANGSU SANJING SEMICON MATERIALS CO LTD

Ceramic sintering kiln

The utility model discloses a ceramic sintering kiln which comprises a base, a sintering chamber is arranged at the tail end of the base, a kiln door mechanism is arranged at an inlet of the sintering chamber, a lifting frame is vertically connected to the top face of the sintering chamber in a sliding mode, the bottom of the lifting frame penetrates into the sintering chamber to be connected with two parallel suspension rails, and a heating assembly is connected between the two suspension rails in a sliding mode. A conveying groove is formed in the top face of the base, the two ends of the conveying groove are rotationally connected with a driving shaft in a driving mechanism, the driving shaft is in threaded connection with the bottom of a conveying table, and the conveying table is in sliding connection with the conveying groove. According to the sintering kiln, the driving shaft is driven by the driving mechanism to rotate, so that the conveying table loaded with the ceramic green body is conveyed into the sintering chamber, the heating assembly capable of freely adjusting parameters such as interval and height is arranged in the sintering chamber, the close-range sintering requirements of ceramics of different sizes are met, and the sintering kiln has the characteristics of energy conservation, emission reduction and high applicability.
Owner:HUNAN HONGFENG PORCELAIN CO LTD

Ceramics firing method

This invention provides a method for firing ceramics that can suppress the generation of exhaust gases. [Solution] The ceramic firing method utilizes a firing furnace 10 capable of performing both gas firing, which is carried out by burning gas G in a burner 12, and electric firing, which is carried out by applying electricity to a heater 13. In the ceramic firing method, gas firing and electric firing are carried out simultaneously when the temperature inside the firing furnace 10 is 1100°C (heater heating dominant temperature) or higher.
Owner:LIXIL CORP

Kiln for ceramic sintering

The utility model relates to the technical field of ceramic processing, in particular to a kiln for ceramic sintering, which comprises a kiln car arranged in the kiln, and a kiln top is arranged at the top of the kiln car. The stabilizing assembly is arranged between the kiln car and the kiln top, and the stabilizing assembly is used for limiting the kiln top; a damping assembly is arranged at the bottom of the kiln car and used for damping the kiln car. According to the kiln for ceramic sintering, the stabilizing assembly convenient to adjust is arranged between the kiln car and the kiln top, and the kiln top is placed on the stabilizing rod on the stabilizing assembly in an inserted mode, so that the kiln top can be stably placed, and the stability of the kiln top in the moving and feeding process is improved; and meanwhile, the damping assembly is arranged at the bottom of the kiln car, damping can be conducted on the pulley base and the kiln car through a damper and a damping spring on the damping assembly, vibration of the pulley base during rolling feeding is reduced, and the stability of the kiln car during moving is further improved.
Owner:TANGSHAN PERMANENT AUSPICIOUS PORCELAIN IND LIMITED

Sintering kiln for special ceramic production

The invention discloses a sintering kiln for special ceramic production, and relates to the technical field of ceramic sintering, the sintering kiln comprises a kiln, at least one sintering channel is arranged in the kiln, longitudinally distributed heating pieces are fixedly connected to the furnace wall of the kiln, motors symmetrically distributed along the kiln are fixedly connected to the kiln, and a motor output shaft on one side is fixedly connected with a first connecting shaft; a motor output shaft on the other side is fixedly connected with a second connecting shaft, at least one propelling belt is connected between the first connecting shaft and the second connecting shaft through a belt wheel, and at least one guiding belt is connected between the first connecting shaft and the second connecting shaft through a belt wheel. Rotating torque is generated through friction force between the guide belt and the ceramic body, so that the ceramic body rotates while moving backwards, uniform heating in the sintering process is achieved, the cracking risk caused by temperature difference is reduced, and the product yield is increased.
Owner:JINGDEZHEN JIAHUA SPECIAL CERAMICS CO LTD

Wafer support body and method for manufacturing wafer support body

A wafer support body 10 is provided with: a substrate 16 that comprises a ceramic sintered compact; and a conducting member 18 that encapsulates at least part of the substrate. The substrate 16 contains at least 96% by mass of aluminum oxide, contains 0.47–1.83% by mass of zirconium as the zirconium oxide equivalent, and contains 0–0.48% by mass of yttrium or ytterbium as the yttrium oxide or ytterbium oxide equivalent.
Owner:FERROTEC CORPORATION

Ceramic sintered compact, bearing ball, and cutting tool

This ceramic sintered compact contains: zirconia crystal particles containing yttria; and alumina crystal particles. The ratio ({Y / (Zr+Y) × 100} between elemental yttrium (Y) and elemental zirconium (Zr) contained in the zirconia crystal particles is 1.5-20 at%.
Owner:NITERRA CO LTD

Water electrolysis hydrogen production and gas supply system for ceramic sintering furnace

The invention discloses an electrolytic water hydrogen production and gas supply system for a ceramic sintering furnace, which belongs to the technical field of special gas delivery and comprises an electrolytic bath, a hydrogen storage tank and a power system. The interior of the hydrogen storage tank is divided into a first hydrogen storage cavity and a water storage cavity through a first piston. The power system comprises a water storage tank, a pump machine and a push cylinder. The system produces hydrogen through the electrolytic cell and conveys the hydrogen to the first hydrogen storage cavity, volume and pressure adjustment is achieved by means of liquid force transmission, and linkage control over storage, pressurization and conveying of the hydrogen is completed. The first piston physically isolates hydrogen from liquid, water vapor is prevented from being mixed into hydrogen, the low-dew-point requirement is guaranteed, and the stable reducing atmosphere in the sintering furnace is maintained. And oxygen generated by electrolysis is further introduced into a push cylinder to serve as a driving source, oxygen pressure energy is converted into mechanical energy to assist hydrogen pressurization and conveying, and efficient utilization of system energy and stable regulation and control of gas supply are achieved through the synergistic effect with liquid regulation.
Owner:CHUNHUA HYDROGEN ENERGY TECH (HUNAN) CO LTD

Preparation method for large beryllium oxide structural member

PendingCN120607398ACeramic sinteringSlurry
The invention discloses a preparation method for a large beryllium oxide structural member, and belongs to the technical field of production processes of electronic functional ceramic materials. According to the preparation method for the large beryllium oxide structural part, the large beryllium oxide structural part can be produced, the internal stress of a green body can be effectively reduced in the production process, and then the ceramic sintering cracking risk is reduced. The preparation method comprises the following steps: dispersing and slurrying beryllium oxide powder, granulating and screening beryllium oxide slurry, and preparing a large-scale beryllium oxide structural part blank from qualified beryllium oxide granules in a cold isostatic pressing manner; and the large beryllium oxide structural part blank is subjected to segmented sintering forming in a kiln at least in three heating temperature sections with the heating rates gradually reduced. Wherein the beryllium oxide powder is dispersed by adopting a UP circulating stirring mill, and 0.3% of a magnesium and silicon eutectic mixture is added before stirring. In the forming process, only particles screened by 60-40 meshes and 40-20 meshes are selected to be mixed with slurry according to the proportion of 1: (3-5) to serve as a forming raw material.
Owner:宜宾红星电子有限公司

Manufacturing method for multilayer electronic component and mold release film

To provide a manufacturing method for a multilayer electronic component in which reduction in quality caused by a mold release film is prevented and provide a mold release film used for the same.SOLUTION: A manufacturing method for a multilayer electronic component 1 includes a step for coating one surface of a mold release film 100 with a ceramic slurry and forming a ceramic green sheet 10, a step for printing an internal electrode pattern 12 on the ceramic green sheet 10, a step for laminating the ceramic green sheets 10 and obtaining a laminated body 2, a step for obtaining a ceramic sintered body 4, and a step for forming an external electrode 6. The mold release film 100 includes a substrate 102 and a mold release layer 110. A counter layer 3000 is provided between the substrate 102 and the mold release layer 110. A material for forming the counter layer 3000 is a material that expands under predetermined conditions.SELECTED DRAWING: Figure 3A
Owner:MURATA MFG CO LTD

Method for producing mixed ceramic powder and method for producing sintered ceramic

PCT designated stageWO2025197879A1Ceramic sinteringComposite material
Provided is a method whereby a ceramic powder can be more evenly mixed with a sintering aid. This method for producing a mixed ceramic powder includes: a step in which a sintering aid comprising granules of a sintering-aid powder is prepared; and a step in which a ceramic powder serving as a base material is mixed with at least one such sintering aid to produce a mixed ceramic powder.
Owner:NITERRA MATERIALS CO LTD

Uniform sintering equipment for large-size ultrathin ceramics

The utility model is suitable for the technical field of ceramic sintering, and provides uniform sintering equipment for large-size ultrathin ceramic. The large-size ultra-thin ceramic uniform sintering equipment comprises a heating assembly and a sintering assembly, wherein the heating assembly is used for uniformly radiating heat in the heating assembly; the at least one burning tray is arranged in the heating assembly; the upper surface of the burning tray is a plane and is used for bearing workpieces, and the center thickness of the lower surface is smaller than the edge thickness. The edge of the burning tray is thick, the middle of the burning tray is thin, the temperature correspondence of the burning tray is improved, and the temperature difference on the horizontal plane of a workpiece is reduced.
Owner:ADVANCED FOR MATERIALS & EQUIP CO LTD

Wafer support

A wafer support includes a base material made of a machinable ceramic including boron nitride; a first layer covering the base material; and a conductive member placed at least partially inside the base material. The first layer is made of an aluminum nitride-based ceramic sintered body, and the proportion of boron nitride included in the base material is higher than the proportion of boron nitride included in the first layer.
Owner:FERROTEC CORPORATION

A method for simulating and testing ceramic sintering stress and a method for reducing ceramic sintering stress.

This invention discloses a method for simulating and testing ceramic sintering stress and a method for reducing ceramic sintering stress. The simulation and testing method includes: 1. Measuring the grain size, relative density, and geometric dimensions before and after sintering; 2. Using Abaqus to establish the ceramic geometry and construct a transient heat conduction model; 3. Establishing the viscoelastic constitutive equation for the sintering shrinkage deformation of zirconia ceramics and constructing a sintering shrinkage model; 4. Sequentially coupling the transient heat conduction model and the sintering shrinkage model to perform joint simulation of solid-state sintering, obtaining the simulation results of ceramic sintering stress. The method for reducing ceramic sintering stress includes: 5. Establishing a finite element model of ceramic sintering shrinkage with proportionally distributed grain sizes and calculating the average sintering stress distribution of the grain size proportional distribution model; 6. Comparing the average sintering stress of sintering shrinkage models with different grain size proportions to determine the method for reducing sintering stress. This invention improves ceramic sintering quality and production efficiency.
Owner:CHONGQING UNIV

Equipment structure with glue discharging and vacuum atmosphere sintering functions

The utility model belongs to the technical field of ceramic sintering equipment, and particularly relates to an equipment structure with glue discharging and vacuum atmosphere sintering functions. Through the integrated arrangement of the glue discharging furnace and the vacuum atmosphere sintering furnace, the glue discharging process and the sintering process can be optimized into one process, the overall structure is compact, the occupied area of equipment is saved, defects of large-size ceramic green bodies after glue discharging can be effectively avoided in the transfer process, and the qualified rate of products is increased; the glue discharging furnace and the vacuum atmosphere sintering furnace share one movable furnace door, the function of transversely moving the furnace door is achieved through the gear and rack mechanism, the function of vertically lifting the furnace door is achieved through the corresponding lead screw mechanism, operation is convenient, the time cost and the labor cost for transferring large-size ceramic green bodies can be greatly saved, and the production efficiency is improved. And the glue discharging and sintering efficiency of the ceramic body is improved.
Owner:WUHAN HAILING HUIZHI NEW MATERIAL CO LTD

Wafer support

A wafer support (30) is provided with a base material (14) formed of a machinable ceramic containing boron nitride, a first layer covering the surface of the base material, and conductive members (18, 20) at least partially enclosed in the base material. The first layer is composed of a ceramic sintered body having aluminum nitride as the main component, and the ratio of boron nitride contained in the base material (14) is higher than the ratio of boron nitride contained in the first layer.
Owner:FERROTEC CORPORATION