The invention relates to an ultra-high-purity silver target material and a preparation method thereof, and belongs to the field of target materials, and the ultra-high-purity silver target material comprises the following raw materials in percentage by weight: 99.99% of high-purity silver, 0.05%-0.15% of
palladium, 0.025%-0.075% of
iridium, 0.1%-0.3% of
neodymium and 0.1%-0.3% of
praseodymium. According to the ultra-high-purity silver target material and the preparation method thereof, 5N-grade high-purity silver is adopted as a base material, trace
palladium,
iridium,
neodymium,
praseodymium and other elements are accurately added, the purity of the target material is remarkably improved and exceeds the purity range in the prior art, the
hardness, strength and abrasion resistance of the target material are optimized through the innovative
material design, and the service life of the target material is prolonged. The compact uniformity of the material is effectively improved and the
internal stress is eliminated through grain refinement and multi-stage heat treatment, in addition, the
isotropy of the target material is enhanced through the multi-directional
forging process, the consistency of the performance in different directions is ensured, the mechanical performance of the target material is remarkably improved through the improvements, the target material can better adapt to the application environment with the
high wear resistance requirement, and the service life of the target material is prolonged. And meanwhile, the
conductivity, the
reflectivity and the uniformity of a thin film prepared by using the target material are improved.