A zirconia base
ceramic target material for
electron beam
physical vapor deposition comprises Y2O3 and ZrO2. On the basis that the weight of the target material accounts for 100%, the content of Y2O3 is 6 wt%-9 wt%. A preparing method of the target material comprises the steps that
raw material powder is weighed; part of the weighed
raw material powder is dried for 10-12 h at the temperature
ranging from 500 DEG C to 700 DEG C, original
fine powder A is obtained, and the average grain size ranges from 10 nm to 30 nm; part of the weighed
raw material powder is dried for 1-2 h at the temperature
ranging from 1,400 DEG C to 1,500 DEG C, the
coarse particle powder B is obtained, and the average grain size ranges from 400 nm to 1,500 nm; the
coarse particle powder B and the original
fine powder A are mixed according to the
mass proportion of 9:1-1:1,
polyvinyl alcohol accounting for 1-5% of the total
mass of the
coarse particle powder B and the original
fine powder A is added, centrifugal
spray drying granulating treatment is conducted, and spherical aggregated powder C is obtained; the spherical aggregated powder C is dried for 60-120 min under the condition that the temperature ranges from 80 DEG C to 100 DEG C and placed in a
chloroprene rubber sleeve to be compacted by vibration; under the condition of 100-150 MPa and 10-40 min or under the condition of 150-200 MPa and 5-10 min, pressing forming is conducted, and a
ceramic pressed blank is obtained; and the
ceramic pressed blank is sintered for 5-15 h at the temperature
ranging from 1,100 DEG C to 1,300 DEG C, and the target material is manufactured.