Zirconia base ceramic target material for electron beam physical vapor deposition and preparing method of zirconia base ceramic target material

Abstract

A zirconia base ceramic target material for electron beam physical vapor deposition comprises Y2O3 and ZrO2. On the basis that the weight of the target material accounts for 100%, the content of Y2O3 is 6 wt%-9 wt%. A preparing method of the target material comprises the steps that raw material powder is weighed; part of the weighed raw material powder is dried for 10-12 h at the temperature ranging from 500 DEG C to 700 DEG C, original fine powder A is obtained, and the average grain size ranges from 10 nm to 30 nm; part of the weighed raw material powder is dried for 1-2 h at the temperature ranging from 1,400 DEG C to 1,500 DEG C, the coarse particle powder B is obtained, and the average grain size ranges from 400 nm to 1,500 nm; the coarse particle powder B and the original fine powder A are mixed according to the mass proportion of 9:1-1:1, polyvinyl alcohol accounting for 1-5% of the total mass of the coarse particle powder B and the original fine powder A is added, centrifugal spray drying granulating treatment is conducted, and spherical aggregated powder C is obtained; the spherical aggregated powder C is dried for 60-120 min under the condition that the temperature ranges from 80 DEG C to 100 DEG C and placed in a chloroprene rubber sleeve to be compacted by vibration; under the condition of 100-150 MPa and 10-40 min or under the condition of 150-200 MPa and 5-10 min, pressing forming is conducted, and a ceramic pressed blank is obtained; and the ceramic pressed blank is sintered for 5-15 h at the temperature ranging from 1,100 DEG C to 1,300 DEG C, and the target material is manufactured.

Description

technical field [0001] The invention relates to a zirconia-based ceramic target material for electron beam physical vapor deposition and a preparation method thereof. Background technique [0002] Thermal Barrier Coating (TBC) is an essential means and method to improve the thermal efficiency of gas turbine engines and the temperature before the turbine, and is the most core and critical protective coating material technology in gas turbine engines. The preparation process of thermal barrier coating mainly includes plasma spraying (Plasma spraying, PS) and electron beam physical vapor deposition (Electron beam-physical vapor deposition, EB-PVD). Nanostructure or prefabricated vertical crack structure, this method has low thermal conductivity and low cost of coating, but the coating strain tolerance is poor, usually this process is applied to the surface of gas turbine engine stationary parts, including guide vanes, etc.; electron beam physics The thermal barrier coating pre...

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Problems solved by technology

[0004] Due to the late start of research on electron beam physical vapor deposition technology in my country, there is currently a small gap with foreign countries in terms of technology research, which can meet the needs of small batch engineering applications, but as a key factor affecting EB-PVD thermal barrier coatings—ceramic target In-depth research has not been carried out on the control of material properties, especially in the control of target batch quality stability, composition control, stabilizer segregation control and target microstructure uniformity control, etc., including the use of zirconia and stabilizer Preparation of target materials from raw materials after mixing or solid-phase synthesis, resulting in segregation of stabilizer components in the coating, low purity and large pores leading to splashing, etc.

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