Method for preparing powder metallurgy of titanium-aluminium alloy target material

Abstract

The invention belongs to the preparing field of powder metallurgy, in particular to the powder metallurgy preparing method for titanium aluminum alloy target material. The components of the titanium aluminum alloy target material relates to: Ti to Al is equal to 80 percent to 20 percent or Ti to Al is equal to 20 to 80 percent. The powder metallurgy preparing method for the titanium aluminum alloy target material is to adopt a pulverization method to acquire the titanium aluminum alloy or mix the titanium powder and the aluminum powder and then pre-pressing through powder mounting and isostatic cool pressing, and then carries out hot isostatic pressing forming after the technique of desaeration and finally carries out sintering process and machining to acquire the titanium aluminum alloy target material. Compared with the exiting casting target material, the titanium aluminum alloy target material of the invention has the advantages of good compactness, no air holes, no loosening and aliquation, uniform component, petty crystal particle, big specification dimension, etc., and is suitable for hard coat needed by various tools and dies.

Description

technical field [0001] The invention belongs to the field of powder metallurgy preparation, in particular to a powder metallurgy preparation method of a titanium-aluminum alloy target. Background technique [0002] Coated targets are the basis for obtaining thin-film materials. With the rapid development of thin-film science and the continuous advancement of thin-film technology, the market demand for targets has increased sharply, and many manufacturers have also carried out research and production of various targets. Among them, titanium-aluminum alloy targets are often used to obtain hard coatings, which can greatly improve the wear resistance and high temperature resistance of tools or molds. [0003] According to different composition ratios, a variety of intermetallic compounds can be formed between titanium and aluminum, such as Ti 3 Al, TiAl, TiAl 2 、TiAl 3 etc., the existence of these intermetallic compounds has led to the processing brittleness of titanium-alumi...

AI Technical Summary

Problems solved by technology

When manufacturing titanium-aluminum alloy targets by melting and casting process, bubbles, porosity and segregation are prone to occur during the casting process; at the same time, it is difficult to ensure the uniformity of the composition and structure of the alloy, resulting in unstable target quality, and the small size limits its size. industrial applications at scale

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