6941 results about "Thermocouple" patented technology

An upper chamber section of a plasma reaction chamber includes a ceramic window with blind bores in an upper surface for receipt of a thermal couple and a resistance temperature detector, a top chamber interface which comprises an upper surface which vacuum seals against the bottom of the window and a gas injection system comprising 8 side injectors mounted in the sidewall of the top chamber interface and a gas delivery system comprising tubing which provides symmetric gas flow to the 8 injectors from a single gas feed connection.

This ceramic sheath type thermocouple has a long service life, an improved temperature measuring responsibility and an improved temperature measuring precision, and enables repetitive use. The ceramic sheath type thermocouple has its protective tube 1 formed of a heat resisting ceramics selected from silicon nitride, sialon and silicon carbide. In the protective tube 1 are installed a pair of W-Re wires that are connected to form a joint portion constituting a temperature measuring point 5. A filler made of Si3N4 reaction-sintered ceramics is loaded into the front end portion of the protective tube to enclose the W-Re wires. Another filler made of SiC whisker with a heat conductivity smaller than that of the filler of the front end portion is loaded into the rear portion of the protective tube. An inert gas is sealed in the protective tube. Alternatively, the temperature measuring portion may be formed by exposing from the front end portion of the protective tube the joint portion where the ends of the W-Re wires are connected. The temperature measuring portion is coated with a cover film that is made of silicon carbide, silicon nitride or a composite of these, all having excellent heat resisting and corrosion resisting properties.

A thermocouple disposed on a substrate comprises a first leg of thermoelectric material, a second leg of thermoelectric material, and a thermocouple junction electrically connecting the first leg and the second leg, wherein a height of the thermocouple junction is substantially a height of the first or second legs.

Temperature gauge, and ceramic susceptors and semiconductor manufacturing equipment utilizing the temperature gauge, in which the thermocouple may be easily replaced even if damaged, and in which heat from the temperature-gauging site is readily transmitted to the temperature-gauging contact, shortening time until the measurement temperature stabilizes. A temperature-gauging contact (12) in the tip of the thermocouple contacts, in an exposed-as-it-is state, a temperature-gauging site on a ceramic susceptor (1), and by means of a circular cylindrical-shaped retaining member (11) screwed into female threads in the ceramic susceptor (1) is detachably pressed upon and retained against the ceramic susceptor. Thermocouple lead lines (13), passing through a through-hole (14) in the retaining member (11), stretch from one end face to the other end face thereof. The retaining member may be provided with a flange having threaded holes and screwlocked into female screws in the ceramic susceptor.

Systems are provided for measuring temperature in a semiconductor processing chamber. Embodiments provide a multi-junction thermocouple comprising a first junction and a second junction positioned to measure temperature at substantially the same portion of a substrate. A controller may detect failures in the first junction, the second junction, a first wire pair extending from the first junction, or a second wire pair extending from the second junction. The controller desirably responds to a detected failure of the first junction or first wire pair by selecting the second junction and second wire pair. Conversely, the controller desirably responds to a detected failure of the second junction or second wire pair by selecting the first junction and first wire pair. Systems taught herein may permit accurate and substantially uninterrupted temperature measurement despite failure of a junction or wire pair in a thermocouple.

A thermocouple for use in a semiconductor processing reactor is described. The thermocouple includes a sheath having a measuring tip at one end and an opening at the other end. A support member having bores formed along the length is disposed within the sheath. A pair of wires formed of dissimilar metals are disposed within the bores, and one end of the wires is fused together to form a junction. The wires extend along the length of the bores. As the wires exit the bore, they are spatially or physically separated to prevent a short circuit therebetween. The ends of the wires exiting the bore are also free to thermally expand in the longitudinal manner, thereby reducing or eliminating the potential for the wires to fail due to grain slip.

An object of the invention is to calibrate an upper pyrometer for indirectly measuring a substrate temperature at the time of epitaxial growth in a comparatively short time and with accuracy to thereby improve the quality of an epitaxial substrate. After calibrating an upper pyrometer by a thermocouple mounted to a temperature calibrating susceptor, a measured value of a lower pyrometer is adjusted to a calibrated value of the upper pyrometer. Then, a correlation line between substrate temperature indirectly measured by the upper pyrometer at the time of epitaxial growth onto a sample substrate and haze of a sample substrate measured immediately after epitaxial growth is set to indirectly measure a substrate temperature by the upper pyrometer at the time of epitaxial growth onto a mass-production substrate. Moreover, substrate temperature at the time of epitaxial growth onto the mass-production substrate is estimated by applying the haze of the mass-production substrate measured immediately after epitaxial growth to the correlation line and then a measured temperature of the upper pyrometer is adjusted to the estimated temperature.

A thermocouple having a support tube configured to receive a pair of wires of dissimilar metals. The pair of wires of the thermocouple connected at a junction adjacent to one end of the support tube. The thermocouple further including a cap attached to the opposing end of the support tube, wherein the cap receives the free ends of the pair of wires. The cap allowing the pair of wires to translate freely therethrough to accommodate the difference in thermal expansion and contraction of the pair of wires relative to the thermal expansion and contraction of the support tube.

A method for fabricating a thermocouple capable of long-term operation in high temperature, hostile environments without significant signal degradation or shortened thermocouple lifetime due to heat induced brittleness.

An apparatus for processing a substrate. The apparatus comprising a tubular member with a first end and a second end. The first end comprising an opening; and a temperature sensor disposed in the opening. The temperature sensor comprising a resilient member. The resilient member comprising a surface made of a ceramic material wherein the surface made of a ceramic material extends through the opening to provide a substrate contact surface.

A thermocouple for measuring temperature at a position adjacent to a substrate being processed in a chemical vapor deposition reactor is provided. The thermocouple includes a sheath having a measuring tip. The thermocouple also includes a support tube disposed within the sheath. The thermocouple further includes first and second wires supported by the support tube. The first and second wires are formed of different metals. A junction is formed between the first and second wires, wherein the junction is located adjacent to a distal end of the support tube. A spring is disposed about a portion of the support tube. The spring is compressed to exert a spring force on the support tube to bias the junction against the measuring tip to maintain the junction in continuous contact with the measuring tip. The spring force is small enough to prevent significant deformation of the junction as well as reducing variation of spring force or junction location from one thermocouple to another.

A thermocouple having a support tube configured to receive a pair of wires of dissimilar metals. The pair of wires of the thermocouple connected at a junction adjacent to one end of the support tube. The thermocouple further including a cap attached to the opposing end of the support tube, wherein the cap receives the free ends of the pair of wires. The cap allowing the pair of wires to translate freely therethrough to accommodate the difference in thermal expansion and contraction of the pair of wires relative to the thermal expansion and contraction of the support tube.

A thermocouple for use in a semiconductor processing reactor is described. The thermocouple includes a sheath having a measuring tip at one end and an opening at the other end. A support member having bores formed along the length is disposed within the sheath. A pair of wires formed of dissimilar metals are disposed within the bores, and one end of the wires is fused together to form a junction. The wires extend along the length of the bores. As the wires exit the bore, they are spatially or physically separated to prevent a short circuit therebetween. The ends of the wires exiting the bore are also free to thermally expand in the longitudinal manner, thereby reducing or eliminating the potential for the wires to fail due to grain slip.

A thermocouple for use in a semiconductor processing reaction is described. The thermocouple includes a sheath having a measuring tip and an opening at the opposing end. A support member that receives a portion of a first wire and a second wire is received within the sheath. The first and second wires form a junction that contacts the inner surface of the sheath at the measuring tip. A spacing member is secured at the opening of the sheath and receives the support member. The spacing member allows the support member, first wire, and second wire to freely thermally expand relative to each other without introducing compression or tension stresses therein.

An object of the invention is to calibrate an upper pyrometer for indirectly measuring a substrate temperature at the time of epitaxial growth in a comparatively short time and with accuracy to thereby improve the quality of an epitaxial substrate.After calibrating an upper pyrometer by a thermocouple mounted to a temperature calibrating susceptor, a measured value of a lower pyrometer is adjusted to a calibrated value of the upper pyrometer. Then, a correlation line between substrate temperature indirectly measured by the upper pyrometer at the time of epitaxial growth onto a sample substrate and haze of a sample substrate measured immediately after epitaxial growth is set to indirectly measure a substrate temperature by the upper pyrometer at the time of epitaxial growth onto a mass-production substrate. Moreover, substrate temperature at the time of epitaxial growth onto the mass-production substrate is estimated by applying the haze of the mass-production substrate measured immediately after epitaxial growth to the correlation line and then a measured temperature of the upper pyrometer is adjusted to the estimated temperature.

Method and calculations determine an individual's, or several individuals' simultaneous rates of oxygen consumption, maximum rates of oxygen consumption, heart rates, calorie expenditures, and METS (multiples of metabolic resting rate) in order to determine the amounts of work that is performed by the individual's body. A heart monitor measures the heart rate, and an accelerometer measures the acceleration of the body along one or more axes. An altimeter measures change in altitude, a glucose monitor measures glucose in tissue and blood, and thermometers, thermistors, or thermocouples measure body temperature. Data including body fat and blood pressure measurements are stored locally and transferred to a processor for calculation of the rate of physiological energy expenditure. Certain cardiovascular parameters are mathematically determined. Comparison of each axis response to the individual's moment can be used to identify the type of activity performed and the information may be used to accurately calculate total energy expenditure for each physical activity. Energy expenditure may be calculated by assigning a separate proportionality coefficient to each axis and tabulating the resulting filtered dynamic acceleration over time, or by comparison with previously predetermined expenditures for each activity type. A comparison of total energy expenditure from the current activity is compared with expenditure from a previous activity, or with a baseline expenditure rate to assess the level of current expenditure. A measure of the individual's cardio-vascular health may be obtained by monitoring the heart's responses to various types of activity and to total energy expended.

A thermocouple vacuum sensor is provided, the thermocouple being surrounded by a gas or mixture of gases the pressure of which is to be measured. Cyclically the thermocouple is heated until its temperature reaches an upper temperature threshold. The thermocouple is subsequently cooled until its temperature reaches a lower temperature threshold. The heating time required to heat the thermocouple from the lower to the upper temperature threshold is measured. The cooling time required to cool the thermocouple from the upper temperature threshold to the lower temperature threshold may also be measured. The pressure surrounding the thermocouple may then be determined as a function of either the heating time, or the cooling time, or both.

An apparatus and method for one or more externally mounted temperature sensors in a substrate support utilized in a chemical vapor deposition (CVD) chamber is provided. In one embodiment, a substrate support for a vacuum chamber is provided. The substrate support comprises a body having a substrate receiving surface and an opposing bottom surface, a support stem coupled to and extending away from the bottom surface, one or more thermal control devices embedded within the body, at least one temperature sensor interfaced with the bottom surface of the body, and a removable hermitic enclosure fastened to the second side of the body and covering the at least one temperature sensor.

An improved thermocouple assembly for providing a temperature measurement is provided. The thermocouple assembly includes a sheath having a measuring tip, a support member received within the sheath, and first and second wires disposed within the support member. An end of each of the first and second wires are fused together to form a thermocouple junction therebetween. A recessed region is formed in a distal end of the support member, and the thermocouple junction is fixedly located at the base of the recessed region such that the recessed region maintains the thermocouple junction in a substantially fixed position relative to the measuring tip of the sheath.

A probe for use in medical procedures includes a longitudinal member, a flexible sheath, and a flexible circuit. The longitudinal member includes at least one electrode and at least one thermocouple disposed thereon. The flexible sheath is coupled to and at least partially surrounding the longitudinal member. The flexible circuit is coupled to the sheath and also to the at least one electrode and the at least one thermocouple. The flexible circuit is configured to provide power to the at least one electrode and a return path to the at least one thermocouple.

A system for enabling reliable skin contact of an electrical wearable device associated with physiological information detected by the wearable device. The system includes a wearable tightness detector powered by a power supply for the wearable device, and a controller for monitoring electrical signals emanating from the power supply and the wearable tightness detector. Also, at least two thermocouples electrically coupled to the wearable tightness detector, along with at least two skin contact modules electrically coupled to the wearable tightness detector. The at least two thermocouples provide the physiological information detected by the wearable device in relation to a subject. An adjustable wearable band is included in the system. The tightness of the wearable band is detected by the wearable tightness detector and an output signal from the at least two thermocouples to ensure reliable physiological information from the subject during the subject's wearing of the wearable device.

A system, a method, a device and a computer program are provided for detecting and monitoring medium flow. The device comprises a flow sensor (350) that includes a thermopile (352), wherein the thermopile (352) may include a first thermocouple and a second thermocouple. The device can further comprise a microcontroller (340) that can be configured to generate a reference baseline and can further be configured to compare an output of the mass airflow sensor to the reference baseline (503). The heater element may comprise a heater resistor.

The present invention provides a protection circuit disposed in a lithium-ion cell for protection of the lithium-ion cell. The protection circuit includes a first protection module, a second protection module, an integrated circuit module, a thermal sensor or thermocouple, a switch, a fuse and / or a resistor.

The present invention relates to minimally invasive surgery techniques. It provides a method for manufacturing an antenna for percutaneous acute hyperthermia microwave applications of the monopole or dipole co-axial type provided with trap, commonly called choke, for blocking the propagation of the backwards reflecting wave towards the generator. The miniaturisation of the device allows a use minimally invasive for interstitial hyperthermia in medicine and surgery, in particular for oncology. The method of manufacturing the antenna provides a metal needle (1) for the introduction of the antenna (2, 3, 4) in the target tissue. On the external conductor (4) of the antenna (2) a metal collar (6) is connected in a predetermined position; a plastics sheath (5) is applied in order to cover the external conductor (2) in the portion between the feed (7) and the collar (6); the inner wall of the metal needle (1) wherein the antenna is inserted is then used for containing and guiding the collar (6) and the sheath (5); in particular, the collar (6) being in electrical contact with the inner wall of the metal needle (1). An antenna is thus obtained with choke of variable length and with miniaturized diameter. A thermocouple can be introduced through the choke that protrudes the directly in the "feed" zone.

A thermoelectric semiconductor module (10) includes a plurality of semiconductor pellets (14, 18) having Peltier characteristics are mechanically interconnected and arranged in an electrical series circuit with heat transferring means (12, 16, 20) with all interconnections being directly made. The means (12, 16, 20) can be of platelike construction with an L-shaped cross-section or, alternatively, with a U-shaped cross-section. A large number of modules (10) can be arranged in a two-dimensional or three-dimensional stack (30) with adjacent lines or planes of modules electrically interrelated by end segment connectors (32). In a further version, one side of a modular plane has heat exchanger fins (44-50) while the other side is electrically connected by ceramic segments (58) with deposited conductors (56). In yet another version, the modules are mounted onto rotating discs (94, 96) so as to act as a fluid impeller moving therepast enhancing thermal efficiency.

The present invention provides systems and methods for radiometrically measuring temperature during ablation. An interface module includes a processor; a first input / output (I / O) port configured to receive digital radiometer and thermocouple signals from an integrated catheter tip (ICT) that includes a radiometer; a second I / O port configured to receive ablative energy from an electrosurgical generator; a temperature display; a patient relay in communication with the first and second I / O ports and the processor; and a computer-readable medium storing radiometer and thermocouple operation parameters and instructions for causing the processor to: calculate a temperature adjacent to the ICT based on the radiometer and thermocouple signals and the operation parameters, causing the temperature display to display the calculated temperature, and closing the patient relay so as to pass ablative energy received on the second I / O port to the first I / O port.

Game controllers having a communication link to a game systems, a processor, and a photoelectric plethysmography, a galvanometer, or a thermocouple. Video game systems having a video game processor, a computer readable medium containing executable instructions for providing a video game and the game controller.

Methods and devices for controlling thermal conductivity and thermoelectric power of semiconductor nanowires are described. The thermal conductivity and the thermoelectric power are controlled substantially independently of the electrical conductivity of the nanowires by controlling dimensions and doping, respectively, of the nanowires. A thermoelectric device comprising p-doped and n-doped semiconductor nanowire thermocouples is also shown, together with a method to fabricate alternately p-doped and n-doped arrays of silicon nanowires.

A method and system for environmental control and supplementary power generation in conventional and hybrid vehicle applications is presented. A thermoelectric heat pump function regulates vehicular interior temperature environments and uses the waste heat from a vehicles engine to power thermocouples and generate supplemental electrical current to power electrical devices. Thermocouples are used to gauge changes in temperature. The Peltier Effect is used to provide both primary cabin environmental control and supplementary power generation for motorized vehicle applications. Thermoelectric generators can be used for both primary internal climate control and supplementary power generation in the vehicular environment. Thermoelectric heat pumps' special characteristics are used to provide (a) primary cabin environment control including cooling, heating, dehumidifying, defrosting, pre-heating / pre-cooling and (b) supplemental DC power generation functions for conventional fossil fueled and / or biomass-fueled vehicles as well as emerging hybrid or all electric vehicle applications.