This invention relates to the field of
semiconductor and circuit technology, and discloses an integrated sensing, storage, and computing device and method based on
amorphous oxide semiconductors (AOS). The device includes a substrate, a back gate
electrode, a
gate dielectric layer, an AOS
active layer, and source / drain electrodes. The AOS
active layer responds to an externally input optical
signal to generate photogenerated carriers and trigger charge
trapping, causing a controllable shift in the
transistor threshold voltage. This shift is stored non-volatilely as analog weighting information. During the computation phase, the device utilizes the
transistor's transfer characteristics and the principle of array bit-
line current superposition to perform vector-
matrix multiplication operations in situ without analog-to-
digital conversion. This invention achieves
deep integration of
optical sensing, analog storage, and in-situ computing within a single
physical unit, eliminating the data transfer path between the sensor and memory, significantly reducing the
power consumption and latency of the
edge computing system, and its low-temperature fabrication process is compatible with back-end complementary
metal-
oxide-
semiconductor (
CMOS) integration.