19 results about "Carbonyl fluoride" patented technology

The invention provides a green and efficient production method of hexafluoropropylene oxide, and belongs to the technical field of synthesis of organic fluorine compounds. The method comprises the following steps: carrying out a continuous oxidation reaction on hexafluoropropylene, oxygen and a perfluoro solvent in an immersed supergravity reactor to generate HFPO and byproducts carbonyl fluoride and trifluoroacetyl fluoride, removing the solvent from the reacted liquid, feeding the liquid into an acyl fluoride rectifying tower, separating low-boiling-point acyl fluoride from the tower top, enriching HFPO, unreacted HFP and a small amount of acyl fluoride from the tower bottom, and carrying out a continuous oxidation reaction on the HFPO and the byproducts carbonyl fluoride and trifluoroacetyl fluoride. Converting acyl fluoride into anhydrous trifluoroacetic acid from a high-boiling-point substance at the bottom of the tower through a hydrolysis tower, carrying out alkali washing on the synthesis gas to obtain an HFPO crude product, and further carrying out drying and extractive distillation to obtain an HFPO product; acyl fluoride rectified by an acyl fluoride rectifying tower is directly used for producing PAVE, and long-chain perfluoroacyl fluoride accumulated in a solvent of oxidation reaction is hydrolyzed to synthesize a non-PFOA emulsifier. The method has the advantages of high HFPO selectivity, short reaction time and high safety; the method realizes resource comprehensive utilization of byproducts, and is environment-friendly and economical.

The invention belongs to the technical field of fluorine chemical industry, and particularly relates to a continuous production process of heptafluoroisobutyryl fluoride. The process is carried out in a tubular reactor, the tubular reactor is divided into a first preheating section, a second reaction section and a third reaction section, a fluorinated molecular sieve catalyst is filled in the second reaction section and the third reaction section, each reaction section is respectively heated to a corresponding preset temperature, carbonyl fluoride and hexafluoropropylene which are mixed and preheated are introduced into the tubular reactor, and a fluorinated molecular sieve catalyst is introduced into the tubular reactor. Enabling the gas to sequentially flow through each section of the tubular reactor, contacting and reacting with the fluorinated molecular sieve catalyst in the second reaction section and the third reaction section, and condensing the gas discharged from the outlet end of the tubular reactor to obtain a heptafluoroisobutyryl fluoride product. According to the process, carbonyl fluoride and hexafluoropropylene are used as gas-phase reaction raw materials, and heptafluoroisobutyryl fluoride is synthesized through a one-step continuous flow rapid reaction. The reaction route is short, the reaction conversion rate and selectivity are high, and industrial large-scale production is easy to realize.

Mixtures configured to etch a thin film of an integrated circuit material are disclosed. The mixtures may include a first compound comprising one or more of: A, B, and C; and a second compound comprising one or more of: oxygen, argon, helium, nitrogen, octafluorocyclobutane (C4F8), hexafluorobutadiene (C4F6), carbonyl fluoride (COF2), difluoromethane (CH2F2), trifluoromethane (CHF3), carbon tetrafluoride (CF4), methyl fluoride (CH3F), octafluorocyclopentene (C5F8), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), hexafluoropropene (C3F6), hexafluorocyclopropane (C3F6), or 1,1,3,3,3-pentafhioropropene (C3HF5).

The invention relates to methods for processing ammonium polyfluoride and producing nitrogen trifluoride (NF3). The technical result is the creation of a comprehensive, low-waste, explosion-proof technology for producing nitrogen trifluoride and, additionally, a group of inorganic fluorides: nitrogen trifluoride, carbon tetrafluoride, carbonyl fluoride, hydrogen fluoride and hydrofluoric acid. The proposed method envisages removing excess liquid ammonium polyfluoride from a reactor and sending it to be flaked or reacting it with oxygen, or with oxygen and carbon, or with oxygen and hydrogen-containing substances, or with oxygen and carbon and hydrogen-containing substances, or with fluorine, or with fluorine and hydrogen-containing substances, and recovering low-boiling substances by distillation and isolating hydrogen fluoride or hydrofluoric acid.

The invention discloses a zinc-based modified molecular sieve adsorbent for removing tetrafluoroethylene in carbonyl fluoride and application of the zinc-based modified molecular sieve adsorbent in an adsorber, and belongs to the technical field of adsorption materials for electronic-grade gas purification. The preparation method comprises the following steps: (1) soaking a 5A molecular sieve in an ammonium citrate aqueous solution, treating at 60-90 DEG C for 4-8 hours, and drying to obtain a pretreated molecular sieve; (2) putting the pretreated molecular sieve into a zinc source aqueous solution, reacting at 70-90 DEG C for 12-24 hours, and drying after the reaction is finished; (3) roasting the dried product in an air atmosphere for 6-10 hours; and (4) circularly carrying out the steps (1)-(3) for 1-5 times to obtain a finished product. The prepared zinc-based modified molecular sieve has the advantages of high adsorption selectivity, long penetration time, excellent regeneration performance and the like, and is suitable for a refining process of electronic-grade carbonyl fluoride (the purity is greater than or equal to 99.99%) in semiconductor manufacturing.

The invention relates to a preparation method of carbonyl fluoride and trifluoromethylsulfonyl fluoride, which comprises the following steps: reacting tetrafluorosultone with fluorine gas to obtain products carbonyl fluoride and trifluoromethylsulfonyl fluoride. According to the preparation method, the reaction conditions are mild, high-temperature and high-pressure equipment is not needed, the equipment investment and the operation cost are reduced, and meanwhile, the safety of the production process is also improved; the method is carried out under an anhydrous condition, is free of waste water, and is green and environment-friendly; the raw materials tetrafluorosultone and fluorine gas are low in cost and wide in source, and favorable conditions are provided for large-scale production; the separation method adopted by the product is simple and effective, efficient separation and purification of the product can be realized through fractionation, complex separation steps and expensive separation equipment are reduced, the production cost is further reduced, and the method is suitable for industrial production; according to the method, high-selectivity synthesis of carbonyl fluoride and trifluoromethylsulfonyl fluoride is realized, the product yield is high, the purity is high, and the application requirements in different fields can be met.

A simple, safe, and industrially feasible method for manufacturing trifluoroacetyl fluoride (TFAF) and carbonyl fluoride (COF2) is provided. One method for manufacturing trifluoroacetyl fluoride and carbonyl fluoride comprises the following steps: introducing at least one reactant selected from hexafluoropropylene and hexafluoropropylene oxide with oxygen and a diluent compound into a reactor to obtain a product gas containing trifluoroacetyl fluoride and carbonyl fluoride.

The utility model relates to the technical field of carbonyl fluoride purification devices, and discloses a carbonyl fluoride purification device which comprises a box body, an air inlet pipe is fixedly assembled on the outer wall of the box body, an air outlet pipe is fixedly assembled on the outer wall of the box body, a driving oil cylinder is fixedly assembled on the inner wall of the box body, and a compression plate is movably connected with an inner cavity of the box body in a sleeved mode. According to the carbonyl fluoride purification device, the fixing seat and the supporting seat are arranged in the inner cavity of the box body, the pulling plate is supported and fixed under the action of the fixing seat and the supporting seat, and when an adsorbent in the inner cavity of the pulling plate needs to be replaced, only the pulling plate needs to be moved out of the inner cavity of the box body, so that the replacement is convenient. According to the technical scheme, the locking rod is moved out of the inner cavity of the fixing base, the pulling plate is moved outwards, the supporting wheel is retracted into the inner cavity of the supporting cylinder, and therefore the pulling plate can be moved out of the inner cavity of the box body more conveniently, and an adsorbent in the inner cavity of the pulling plate can be replaced more conveniently.

The invention relates to the technical field of fluorine chemical industry, in particular to a method for preparing methyl trifluoromethyl ether, which comprises the following step of: reacting trifluoromethyl fluoroformate with a methylation reagent in the presence of villiaumite to obtain the methyl trifluoromethyl ether. The trifluoromethyl fluoroformate is used for replacing carbonyl fluoride, so that the use of a highly toxic raw material carbonyl fluoride is avoided, and meanwhile, the requirement on equipment is reduced. The reaction conditions are mild, the process is simple, and the product is easy to separate.

The application belongs to the technical field of fluorine chemical industry, and particularly relates to a continuous production process of heptafluoroisobutyryl fluoride. The process is carried out in a tubular reactor, which is divided into a first preheating section, a second reaction section and a third reaction section. Fluorinated molecular sieve catalyst is loaded in the second reaction section and the third reaction section, each reaction section is heated to a corresponding preset temperature, mixed and preheated carbonyl fluoride and hexafluoropropene are introduced into the tubular reactor, and flow through each section of the tubular reactor in sequence, and react with the fluorinated molecular sieve catalyst in the second reaction section and the third reaction section. The gas discharged from the outlet end of the tubular reactor is condensed to obtain heptafluoroisobutyryl fluoride product. The process uses carbonyl fluoride and hexafluoropropene as the gas phase reaction raw material, and synthesizes heptafluoroisobutyryl fluoride by one-step continuous flow rapid reaction; the reaction route is short, the reaction conversion rate and selectivity are high, and industrial large-scale production is easy to realize.

The invention provides a method for preparing perfluoromethyl vinyl ether, which comprises the following steps: carrying out ozone cracking reaction by using perfluoroolefin as a raw material, and separating and purifying to obtain trifluoromethyl fluoroformate, the preparation method comprises the following steps: reacting trifluoromethyl fluoroformate with hexafluoropropylene oxide to obtain perfluoro-2-methoxypropionyl fluoride, and further carrying out pyrolysis decarboxylation on the perfluoro-2-methoxypropionyl fluoride to obtain the perfluoromethyl vinyl ether. The method for preparing trifluoromethyl fluoroformate through ozone oxidative cracking of perfluoroolefin is mild in reaction condition, good in selectivity, simple in process, safe and reliable, the product is easy to separate, and the yield is high. Other products related in the process, such as trifluoroacetyl fluoride and heptafluoroisobutyryl fluoride, are also very important industrial intermediates which are difficult to obtain; the trifluoromethyl fluoroformate is used for replacing carbonyl fluoride to prepare perfluoro-2-methoxypropionyl fluoride, so that the defects that carbonyl fluoride is high in toxicity and has potential safety hazards in production and use are overcome, and the whole process of PMVE is safe and reliable.

The invention discloses a microwave-assisted preparation method of alpha-carbonyl fluoride, and relates to the field of preparation of related products of pharmacy, agriculture, material science and the like, in particular to a preparation method for introducing fluorine atoms to the alpha position of alpha-carbonyl bromide and preparing an alpha-carbonyl fluorine compound. According to the alpha-carbonyl fluorine compound disclosed by the invention, a target product can be rapidly obtained in a microwave synthesizer at a high yield under normal pressure, the preparation method of the alpha-carbonyl fluorine compound is simple, the yield is excellent, and a new thought is provided for fluorination reaction.

Mixtures configured to etch a thin film of an integrated circuit material are disclosed. The mixtures may include a first compound corresponding in structure to Formula (I): (I), wherein R may be CnF2n+1-mHm, wherein n is greater than, or equal to, 1, and less than, or equal to, 3, and wherein m is greater than, or equal to, 0, and less than, or equal to, (2n+1); wherein R may be CH2-CF=CF2; or wherein R may be CH2-CH=CH2. The mixture may additionally include a second compound comprising one or more of: oxygen (O2), argon (Ar), helium (He), nitrogen (N2), octafluorocyclobutane (C4F8), hexafluorobutadiene (C4F6), carbonyl fluoride (COF2), difluoromethane (CH2F2), trifluoromethane (CHF3), carbon tetrafluoride (CF4), octafluorocyclopentene (C5F8), 2,3,3,3-tetrafluoropro-1-ene (C3H2F4), hexafluoropropene (C3F6), hexafluorocyclopropane (C3F6), or 1,1,3,3,3- pentafluoropropene (C3HF5), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6).

The utility model discloses carbonyl fluoride gas treatment equipment, and relates to the technical field of carbonyl fluoride gas treatment, the carbonyl fluoride gas treatment equipment comprises a fixed screen plate, the fixed screen plate is fixedly mounted in a reaction tank, and a limiting rod is longitudinally mounted in the fixed screen plate in a sliding manner through a clamping groove. Brush wires outside the bubble shattering brush can finely shatter bubbles, so that the carbonyl fluoride bubbles are finer, the buoyancy of the carbonyl fluoride bubbles is reduced, the carbonyl fluoride bubbles can stay in water for a longer time, carbonyl fluoride can make full contact with the carbonyl fluoride, the total contact area of the carbonyl fluoride and the water is increased, the reaction efficiency of the carbonyl fluoride and the water is improved, and the service life of the carbonyl fluoride is prolonged. And the rotating disc is installed to drive the jacking boss to continuously extrude the lower end of the limiting rod, so that the limiting rod can jump up and down, the limiting rod drives the bubble shattering brush to vibrate, and the practicability of the device is enhanced.

The invention provides a method for preparing nonafluoroisobutyl ether from hexafluoropropylene, which comprises the following steps: S1) carrying out ozone cracking reaction by using hexafluoropropylene as a raw material to obtain a crude product containing carbonyl fluoride, trifluoroacetyl fluoride and trifluoromethyl fluoroformate, and carrying out low-temperature condensation recovery and rectification to obtain trifluoromethyl fluoroformate; s2) enabling trifluoromethyl fluoroformate to react with hexafluoropropylene under the catalytic action of alkali metal fluoride or IB group transition metal halide to obtain heptafluoroisobutyryl fluoride; and S3) carrying out a reaction on heptafluoroisobutyryl fluoride and fluoroformate under the catalytic action of alkali metal fluoride to obtain nonafluoroisobutyl ether. The method has the following advantages: 1) hexafluoropropylene is low in price and easy to obtain; 2) the ozone cracking reaction condition is mild, and the product is easy to separate; 3) high-toxicity raw materials do not need to be used, and high-toxicity solid byproducts are not generated; (4) the dosage of fluoride salt is small; products are easy to separate and purify; and (5) the process is safe and reliable, few in byproducts, high in technical economy and suitable for industrial production.

The invention belongs to the technical field of fluorine chemical industry, and particularly relates to a continuous synthesis method of carbonyl fluoride. The method is carried out in a reaction tube, the reaction tube is divided into a preheating section, a reaction initiation section, a continuous reaction section and a reaction quenching section, a catalyst is filled in the reaction initiation section and the continuous reaction section, and a fluorine-containing organic compound and oxygen are mixed and then are introduced from an inlet end of the reaction tube and sequentially flow through each section of the reaction tube, collecting a product gas at the outlet end of the reaction tube, refluxing a part of the collected product gas, enabling the product gas to enter the reaction tube again, and enabling the product gas which is not refluxed to enter a distillation tower to be separated, so as to obtain a carbonyl fluoride product; in the reaction process, redundant heat can be removed in time through the segmented independent temperature control device, and generation of by-products due to excessive oxidation is prevented. Meanwhile, the reflux of the product gas can dilute the reaction raw materials to avoid temperature runaway caused by overhigh local concentration, and can enable the reaction materials to quickly enter and exit from the reaction tube for multiple times, which is equivalent to the reaction of the raw materials for multiple times, so that the reaction is more sufficient and the conversion rate is higher.

The invention belongs to the technical field of organic fluorine chemical industry, and particularly relates to a preparation method of perfluoroalkyl vinyl ether. Adding the compound catalyst into a tubular reactor, introducing hexafluoropropylene and O2, raising the temperature, controlling the pressure, and carrying out a continuous reaction to obtain a mixed gas of hexafluoropropylene oxide, carbonyl fluoride and trifluoroacetyl fluoride; introducing the mixed gas into a tubular reactor containing a compound catalyst, and carrying out addition reaction to obtain an acyl fluoride intermediate; and adding solid alkali metal carbonate into the tubular reactor, heating, introducing the acyl fluoride intermediate, carrying out a decarboxylation reaction to obtain a crude perfluoroalkyl vinyl ether product, and carrying out rectification purification to obtain the perfluoroalkyl vinyl ether. The compound catalyst is a homogeneous mixture of a difluoro ion solvent, strong acid and alkali metal fluoride. The tubular reactor and the compound catalyst cooperate to realize continuous preparation of the perfluoroalkyl vinyl ether, the conversion rate and selectivity are remarkably improved, and the method is suitable for industrial amplification.

The present application relates to the field of gas impurity removal, and more specifically, to a method and apparatus for removing carbon dioxide from carbonyl fluoride. The method comprises the following steps: 1. preheating; 2. fluidized bed separation; 3. primary gas-solid separation; and 4. secondary gas-solid separation. The apparatus comprises a preheating device, a gas-solid fluidized bed reactor, a primary cyclone separator, and a secondary cyclone separator, which are connected in sequence. The present application utilizes sodium methoxide solid particles to react and separate carbon dioxide from carbonyl fluoride to obtain sodium methyl carbonate solid. The carbonyl fluoride and solid particles are further separated via subsequent primary cyclone separators and secondary cyclone separators. The residual sodium methoxide solid particles and the generated sodium methyl carbonate can be recovered. The reaction process is green and pollution-free, effectively remedying the lack of safety in removing carbon dioxide from carbonyl fluoride in existing technologies.

The invention discloses a continuous preparation method of an acyl fluoride compound, according to the continuous preparation method, in the presence of a catalyst, perfluoroolefin with a general formula of R1R2C = CR3R4 and carbonyl fluoride are subjected to an addition reaction to prepare the acyl fluoride compound with a general formula of CFR3R4-CR1R2-COF, R1, R2, R3 and R4 are independently selected from CnF2n + 1, and n is 0-6; the catalyst is a non-loaded body porous catalyst and consists of bicarbonate and hydrofluoride, and the bicarbonate is selected from one or more of lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, cesium bicarbonate, magnesium bicarbonate, calcium bicarbonate, strontium bicarbonate and barium bicarbonate; the hydrogen fluoride salt is selected from one or more of lithium fluoride, sodium fluoride, potassium fluoride, cesium fluoride, magnesium fluoride, calcium fluoride, strontium fluoride and barium fluoride; the mass percentage ratio of the bicarbonate to the hydrofluoride is (0-60%): (40-100%). The method is mild in continuous reaction condition, easy to operate, almost free of byproducts and suitable for continuous production.