Preparation method of carbonyl fluoride

A technology of carbonyl fluoride and sulfuryl fluoride, which is applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve the problems of high safety risk, use of large equipment, and low product purity, so as to reduce reaction heat and increase Productivity, the effect of reducing exhaust emissions

Active Publication Date: 2013-07-24
PERIC SPECIAL GASES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0022] The method for preparing carbonyl fluoride by direct fluorination of carbon monoxide and fluorine in the prior art requires expensive corrosion-resistant materials, high safety risks, low product purity, low yield, and the need to use large-scale equipment to control the reaction heat.

Method used

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  • Preparation method of carbonyl fluoride
  • Preparation method of carbonyl fluoride

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Experimental program
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Effect test

Embodiment 1

[0052] 200g of AgF 2 Put it into the reaction chamber as a catalyst, start the reaction when both the reactants and the device are in a dry state, supply carbon monoxide to the reaction chamber through the first raw material gas inlet pipe, and supply tetrafluoroethylene to the reactor through the second raw material gas inlet pipe. Carbon dioxide, calculated according to the amount converted to fluorine atoms, the gas supply flow rate under the standard state is 10m 3 / h, the ratio of fluorine atoms in carbon tetrafluoride to the amount of carbon monoxide is 20:1, at this time, the pressure of the reaction chamber is 1MPa (gauge pressure), and the reaction temperature is 500°C; The reaction product is collected by a cryogenic cold trap to obtain a collection, and the collection is vaporized to obtain a gas.

[0053] The obtained gas is tested and it can be known that COF 2 The purity is 90%, and the yield is 91%.

Embodiment 2

[0055] While reacting, phosphorus pentafluoride was supplied to the reaction chamber through the first dilution medium inlet pipe as a dilution medium, and the ratio of the amount of phosphorus pentafluoride to carbon monoxide in the dilution medium was 60:1, and the rest were the same as in Example 1.

[0056] The obtained gas is tested and it can be known that COF 2 The purity is 90%, and the yield is 91%.

Embodiment 3

[0058] 200g of CoF 3 Put it into the reaction chamber as a catalyst, start the reaction when both the reactants and the device are in a dry state, supply carbon monoxide to the reaction chamber through the first raw material gas inlet pipe, and supply trifluorine to the reactor through the second raw material gas inlet pipe. Boron, calculated according to the amount converted to fluorine atoms, the gas supply flow rate under standard conditions is 0.1m 3 / h, the ratio of fluorine atoms to carbon monoxide in boron trifluoride is 0.1:1, at this time, the pressure of the reaction chamber is 0.5MPa (gauge pressure), and the reaction temperature is 400°C; the reaction derived from the product gas outlet The product is collected by a cryogenic cold trap to obtain a collection, and the collection is vaporized to obtain a gas.

[0059] After the gas is tested, it can be known that the COF 2 The purity is 89%, and the yield is 91%.

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Abstract

The invention relates to a preparation method of carbonyl fluoride and belongs to the fluorine chemical field and the field of electronic industrial gas. The preparation method is used for preparing carbonyl fluoride through the reaction of carbon monoxide and fluorine-containing substance, wherein the fluorine-containing substance is at least one of carbon tetrafluoride, boron trifluoride, nitrogen trifluoride, sulfur tetrafluoride, sulfur hexafluoride, phosphorus trifluoride, phosphorus pentafluoride, sulfuryl fluoride or hexafluoroethane; the favourable conditions including temperature, pressure, a proportion of fluorine-containing substance to carbon monoxide and gas supply flow rate of the fluorine-containing substance are selected; dilution medium is further added in the method for diluting or carrying out catalytic reaction by virtue of catalyst. The preparation method of the carbonyl fluoride is free of fluorine gas, capable of lowering the corrosion to a reactor, reaction heat, reaction intensity, potential explosive risk and yield drop caused by side reaction, and capable of safely, economically and effectively preparing the carbonyl fluoride. The invention further provides dilution medium which is used in the preparation of the carbonyl fluoride through the reaction of carbon monoxide and fluorine gas.

Description

technical field [0001] The invention relates to a preparation method of carbonyl fluoride, which belongs to the fields of fluorine chemical industry and electronic industry gas. Background technique [0002] At present, in semiconductor manufacturing equipment and liquid crystal manufacturing processes, gases represented by perfluorocarbons, such as perfluorocarbons (PFC) or nitrogen trifluoride (NF 3 ), as a conventional etching gas and cleaning gas, but the above-mentioned conventional gases usually have a large global warming potential (GWP, Global Warming Potential) value, all of which are greenhouse gases. In order to reduce the greenhouse effect, it is necessary to develop substitute products. [0003] Carbonyl fluoride (COF 2 ), also known as carbonyl fluoride, fluorophosgene, has excellent cleaning properties, the cleaning effect is not inferior to perfluorocarbon and nitrogen trifluoride, and has a low GWP value. Carbonyl fluoride decomposes into carbon dioxide (...

Claims

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Application Information

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IPC IPC(8): C01B31/00C01B32/00
Inventor 蒋玉贵孟祥军董云海李丹丹朱文东乔蓓蓓
Owner PERIC SPECIAL GASES CO LTD
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