The invention relates to the technical field of electronic-grade
fluorine-containing special gas synthesis, in particular to an electronic-grade
hexafluoroethane directional synthesis process based on a composite catalyst, which comprises the following steps: S1, carrying out
reflux treatment on
activated carbon by
hydrofluoric acid-
nitric acid mixed liquor, sequentially loading
aluminum trichloride, cesium
fluoride,
lanthanum oxide and
graphene quantum dots, and
roasting in a
nitrogen atmosphere to prepare the composite catalyst; s2, mixing
tetrafluoroethylene and
hydrogen fluoride in proportion, dehydrating through a
molecular sieve, and removing impurities through a nano-
zinc oxide coating purification
tower; s3, introducing the raw materials into a
fixed bed with a guide plate, and carrying out segmented
temperature control reaction under the adjustment of a composite catalyst and
perfluorohexane; and S4, condensing, alkali-washing and
drying the
reaction product, and rectifying in a rectifying
tower to obtain the electronic-grade
hexafluoroethane. And S5, adsorbing the rectification
tail gas by a composite adsorbent, and resolving and recycling the raw materials for pretreatment. The process improves the selectivity and purity of
hexafluoroethane, prolongs the service life of the catalyst, is good in regeneration effect, reduces
energy consumption and
raw material loss, reduces
wastewater discharge, and meets the requirements of the
semiconductor industry.