773 results about "Aluminum fluoride" patented technology

Embodiments of the present invention provide a method of reducing damage to the substrate support by the cleaning gas during a cleaning process of the processing chamber, such as by reducing aluminum fluoride formation on the substrate support. In one embodiment, a method of cleaning a semiconductor process chamber which is used for processing a substrate disposed on a surface of a substrate support comprises introducing a cleaning gas into a process chamber through an inlet facing a surface of a substrate support. The inlet is spaced from the surface of the substrate support by a clean spacing. Reactive species are provided from the cleaning gas to clean the process chamber. The clean spacing is substantially greater than a process spacing between the inlet and the surface of the substrate support during processing of a substrate on the substrate support in the process chamber.

A method of cleaning the inside of a reaction chamber includes reducing the temperature of a susceptor to 470° C. or lower for cleaning; contacting the inside of the reaction chamber including the showerhead with fluorine radicals; cleaning the unwanted deposits by the fluorine radicals, wherein gaseous aluminum fluoride is inhibited from being emitted from the susceptor and solidified on the showerhead by maintaining the temperature of the susceptor at 470° C. or lower; and raising the temperature of the susceptor to 500-650° C. for film formation.

Aqueous liquid compositions for increasing the permeability of a subterranean formation are disclosed, the compositions being characterized by provision of fluoborate anion (fluoboric acid) and a specified compound or compounds, or mixture thereof, which chelate aluminum ions and aluminum fluoride species. Methods of treating a subterranean formation by injection of the composition(s) into the formation are also described.

The invention discloses a method for recycling waste cathode carbon blocks of an aluminum electrolysis cell. The method comprises the following steps: 1, grinding the waste cathode carbon blocks into powder of 100-200 meshes through superfine grinding, and then winnowing the powder to separate the carbon powder from aluminum and aluminum carbide; 2, adding the fine carbon powder into water, stirring the fine carbon powder, then filtering the obtained solution, and preparing filtrate and filter residues for later use; 3, adding the filter residues in the step 2 into an aluminum sulfate solution, leaving the mixed solution to stand at normal temperature for 20-30 hours, then filtering the mixed solution, washing obtained filter residues to obtain the carbon powder with the carbon content higher than 90% and preparing filtrate for later use; 4, mixing the filtrate obtained in the step 2 and the filtrate obtained in the step 3, adjusting the pH value to be 5.5, increasing the temperature to 90 DEG C, then carrying out reaction for 3 hours to obtain flocculent hydroxyl aluminum fluoride, and carrying out filtering to obtain filter residues; and 5, calcining the filter residues obtained in the step 3 at 485 DEG C to obtain AlF3 and Na5Al3F14 and using AlF3 and Na5Al3F14 as raw materials of aluminum electrolysis. Through the method, the waste cathode carbon blocks of the aluminum electrolysis cell can be efficiently recycled.

Disclosed is a filter including a second layer disposed between a first layer and a third layer. The first layer is composed of iron. The second layer is composed of 1 part by volume of lithium fluoride, 20 to 50 parts by volume of aluminum, and 50 to 80 parts by volume of aluminum fluoride. The third layer is composed of 1 part by weight of lithium fluoride and 99 to 100 parts by weight of magnesium fluoride.

The invention relates to a method for using X-ray fluorescence spectrum method to measure the components of aluminum fluoride, characterized in that the test process comprises that a, fusing a standard sample and a sample borate mixture solvent into a glass sample at 980-1000Deg. C, b, using X-ray fluorescence spectrum method to measure the fluorescence strength of standard sample to make a correct curvature, c, using a X-ray fluorescence spectrometer to measure the strength and the component contents of the sample. The invention can accurately and quickly measure the component contents of aluminum fluoride, to improve measurement accuracy, meet the demands of aluminum fluoride industry and user, improve working efficiency and save test cost.

The invention discloses a mullite setter plate with high thermal shock resistance and a preparation method thereof. The preparation method comprises the following steps: mixing sillimanite, alpha-Al2O3 powder, micro-silicon powder, clay and aluminum fluoride in a ball mill according to mass percentages; then evenly mixing andalusite particles, sheet-like corundum particles and mullite particles in a mixer based on mass percentages, adding a binding agent yellow dextrin solution for stirring, and then adding powder evenly mixed in the ball mill for even stirring, sealing material package, and shock shaping by double-surface pressurization on a shock press, and obtaining the mullite setter plate by high-temperature burning. The setter plate prepared in the high-temperature mullitization process by adopting andalusite aggregate and the sillimanite has the advantages of good stability and high strength of thermal shock resistance, good temperature resistance, long service life, simple preparation process and low cost, and is suitable for mass production; and when high-grade electronic components are calcined by the setter plate, the setter plate has stable performance, the sintered electronic components have higher yields and better electrical property.

The invention discloses a process method for producing fluorine compounds and silicon compounds by cleanly utilizing fluosilicic acid. The process method comprises the following steps of: preparing fluosilicic acid as a phosphorus chemical by-product into an anhydrous aluminum fluoride product, a sodium fluoride product and a cryolite product, and combining with other industrial waste silicon slags and aluminum slags to prepare a 4A zeolite product. The process method comprehensively utilizes the fluosilicic acid and has high resource recovery rate, wherein the recovery rate of the fluorine element reaches higher than 90 percent. Waste silicon dioxide slags generated in the process can be recycled to produce white carbon black and the 4A zeolite, and a mother liquor, a cleaning solution and waste gas which are generated in the production process are all recycled, thereby the environmental pollution is reduced, and the purposes of zero emission and no pollution are truly achieved, thus the method completely meets the requirement for clean production. The invention has the advantages of advanced production process, good product quality and high value, wherein the fluorine content of the aluminum fluoride is high and between 63-65 percent; the quality index of the obtained white carbon black meets the requirement on the standard of the chemical industry; and the quality of the 4A zeolite product meets the requirements on the national standard and the standard of European and American developed countries.

A welding stainless steel electrode with improved slag detachability and welding quality is composed of a core and a coated flux layer prepared proportionally from rutile, feldspar, marble, fluorite, wollastonite, megnesite, titaniunm oxide powder, hematite, aluminum fluoride, mice, barium carbonate, Cr, Ni, sodium carbonate, electrolytic manganese and ferrotitanium.

The invention discloses a harmlessness and reclamation treatment method of aluminum scrap electrolyte and belongs to the technical field of inorganic chemistry. The method comprises the main steps that 1, aluminum scraps are electrolyzed and subjected to crushing and screening, and aluminum electrolyte particles are obtained; 2, acid liquor with the concentration of 1 mol/L and an aluminum salt solution with the concentration of 1 mol/L are prepared for standby application; 3, the aluminum electrolyte particles obtained in the step 1 are placed in the acid liquor prepared in the step 2 and leached on the heating and stirring conditions, the PH of the solution is controlled to be smaller than 5, when the fluorinion leaching rate is higher than 94%, leaching is finished, impurities are filtered, and a leaching solution is obtained; 4, the aluminum salt solution prepared in the step 2 is added to the leaching solution in the step 3, the mixture is heated and stirred, Al3+/Na+ is controlled to be larger than 0.3, when sediment is generated in the solution, the solution is filtered, filter residues and filter liquor are obtained, and the filter residues are washed and dried to obtain alkali type aluminum fluoride products; and 5, the filter liquor in the step 4 is evaporated and crystallized to obtain sodium salt products.

The invention discloses a brazing flux-containing aluminum alloy soldering wire and a preparation method thereof, which belong to the technical field of brazing materials. The soldering wire consists of uniformly mixed aluminum silicon brazing material powder and fluoride brazing flux powder, wherein the content of the aluminum silicon brazing material powder is 93 to 85 percent; the content of fluoride brazing flux powder is 7 to 15 percent; the aluminum accounts for 88 percent and the silicon accounts for 12 percent of the aluminum silicon brazing material powder; the fluoride brazing flux powder is potassium aluminum fluoride mixed salt consisting of KF-AlF3 series; and the molar ratio of AlF3 to KF is 44.5 to 55.5. The preparation process comprises the following steps of: preparing the aluminum silicon brazing material powder and the fluoride brazing flux powder; uniformly mixing the two kinds of powder, and performing cold isostatic pressing and vacuum sintering to prepare a blank; and extruding and drawing the blank on a thermal extruder to obtain a product. The soldering wire and the method have the advantages of shortening processing time and reducing waste treatment, along with high surface accuracy, no need of head rolling machine between passes, high material utilization ratio and high performance of soldering process.

The invention discloses a lithium ion battery ternary material with a double-coated surface. The lithium ion battery ternary material with the double-coated surface comprises a nickel-cobalt-manganeseternary material, wherein a lithium-rich layered oxide coating layer is covered on a surface of the nickel-cobalt-manganese ternary material; an aluminum fluoride coating layer is covered on a surface of the lithium-rich layered oxide coating layer; the lithium ion battery ternary material with the double-coated surface is not easy to fall off, and has good chemical stability and high capacity. The invention also discloses a preparation method of the lithium ion battery ternary material. The method comprises the steps of firstly adopting an organic complexing agent-auxiliary sol-gel method for covering lithium-rich layered oxide on the surface of the ternary material so as to form the lithium-rich coating layer; then using a liquid phase method for coating aluminum fluoride on the surfaceof the lithium-rich layered oxide coating layer, and obtaining the double-coated lithium ion battery ternary material. The preparation method is simple in process, high in operation feasibility, andhigh in element utilization rate.

Disclosed is a process for making thin hard pellicle for photomasks used in projection photolithography. The process can be used for making thin hard pellicles comprising a pellicle layer having a thickness in the range of about 5 to 120 μm and a mount frame attached to the peripheral area of a surface of the pellicle layer. The pellicle layer can consist essentially of a material selected from silica, fluorine doped silica, aluminum doped silica, methylated silica, fluorinated and methylated silica, fluorinated aluminum doped silica, CaF₂, MgF₂, BaF₂ and SiC. The mount frame is preferred to have substantially the same CTE of the pellicle layer to minimize stress caused by temperature change. The mount frame is preferred to be porous to the purging gas. The process for making the hard pellicle involves deposition of an intermediate layer comprising a hydrogenated amorphous silicon layer on a flat substrate, deposition of the pellicle layer on the intermediate layer, mounting the frame to the pellicle layer and the separation of the pellicle from the substrate by heat treatment.

The invention provides a hollow spheroidal mullite whisker material and a preparation method thereof. The preparation method comprises steps as follows: silica sol, water and ethanol are added to a container and stirred uniformly, the pH value is regulated to 2, and silica sol is formed; alumina powder, aluminum fluoride trihydrate and ethanol are mixed and subjected to ball milling, and mixed slurry is obtained; the silica sol and the mixed slurry are mixed uniformly in a volume ratio of 1:(0.5-1.4), the pH value is regulated to 7-9, gelatinization is performed, and precursor powder is obtained; a polyvinyl alcohol solution is uniformly sprayed to the surfaces of polystyrene spheres, starch spheres, phenol-formaldehyde resin spheres or urea spheres, then the spheres are put in the precursor powder to adhere to the precursor powder, the operation is repeated multiple times, then ball milling, drying and calcining are performed in sequence, and the hollow spheroidal mullite whisker material is obtained. According to the hollow spheroidal mullite whisker material, the volume density is 0.34-0.85 g/cm<3>, the room-temperature thermal conductivity is 0.184-0.485 W/(m<-1>.K<-1>), and the open porosity is 62.33%-81.86%.

A cleaning process for recovering an anodized aluminum part is particularly useful when the part has been exposed to a fluorine-containing plasma in etch reactor. The part is bathed in an agitated solution of a fluoride acid, such as ammonium fluoride, which converts aluminum fluoride to a soluble fluoride. The part is rinsed in water. The pores of the cleaned anodization may be resealed by a submerging the part in hot agitated deionized water.

The invention relates to a production process for the aluminum electrolytic industry, in particular to an energy balance controlling way for aluminum electrolytic tanks, which comprises a tank controller and an up-level unit. The process comprises: 1) the adjusting of the operation voltage of the tank; 2) the adjusting of the concentration or addition volume of aluminum fluoride. The benefits with the invention are: 1. that the balance controlling of the energy for the pre-baked aluminum electrolytic tank is efficiently controlled; 2. that the controlling accuracy of plus or minus 5 Celsius system for the electrolyte temperature, the primary crystal temperature of the electrolyte and the overheat rate is up to 80% above; 3. that the average thickness of the side furnace ledge of the aluminum electrolytic tank is 120 swung dash 150 mm, a regular structure in the inside of the furnace chamber is formed; 4. that the operation voltage of the aluminum electrolytic tank is controlled to be 4.04 swung dash 4.06V, the average voltage drop for the cathode is 390 mV, and the DC consumption reduces 50kWh/t is multiplied by Al. The invention is applicable for energy-balancing control for pre-baked aluminum electrolytic tanks.

The invention relates to the technical field of the positive electrode material of a lithium ion battery, and particularly to a preparation method for an aluminum-fluoride-coated lithium nickel cobalt manganate positive electrode material. The preparation method for the aluminum-fluoride-coated lithium nickel cobalt manganate positive electrode material comprises the following steps of (1) adding the lithium nickel cobalt manganate positive electrode material into a prepared aluminium salt compound solution to be stirred at a uniform speed; (2) adding a fluorine source compound solution to the mixed solution in a dropwise manner, evaporating the solution after the dropwise adding is finished until the solution is in an evaporated state, then allowing the solution to age and drying the solution; and crushing the sample and sieving the sample by a 400-mesh screen to obtain solid powder; and (3) putting the solid powder obtained in the step (2) in a tubular furnace, roasting the solid powder under a nitrogen atmosphere, and naturally cooling to the room temperature to obtain the aluminum-fluoride-coated lithium nickel cobalt manganate positive electrode material. By adoption of the preparation method, the cycling stability and the rate capability of lithium nickel cobalt manganate are improved; the preparation method is simple in process; and compared with the common coating process, the preparation method provided by the invention is environment-friendly and less in time consumption, low in energy consumption and low in cost, and industrialized production is facilitated.

The invention belongs to the technical field of novel materials, particularly relates to a novel anti-radiation material and gloves made from the novel anti-radiation material, wherein the novel anti-radiation material comprises components with weight by percentage: nanometer bismuth oxide 55-73%, aluminum fluoride 20-35%, lanthanum trioxide 3-10%, nano tungsten trioxide 3-10%, fuller alcohol nanoparticles 1-2%. Anti-radiation gloves are prepared by adding the novel anti-radiation material into raw materials of latex gloves, and the novel anti-radiation material can keep flexibility and malleability of the latex gloves, and guarantees operation elaboration and safety of operators.

The invention discloses a high-performance chlorine-free alkali-free liquid accelerating agent which is prepared from the following materials by weight percent: 6 to 15 percent of magnesium aluminum fluoride, 20 to 50 percent of aluminum sulfate, 2 to 6 percent of organic amines, 0 to 2 percent of stabilizer, and the balance of water. The production process comprises the following steps of: adding water at the given weight percent to a stirring drum, adding magnesium aluminum fluoride and stirring to dissolve, adding organic amines and stirring to dissolve, adding aluminum sulfate and stirring to dissolve, and making the final product. The high-performance chlorine-free alkali-free liquid accelerating agent is free of chlorine and alkali and non-corrosive to human beings and steel-bar-made machines, and has the advantages of long holding period, low addition amount, quick setting action, low rebound rate, high one-day strength, substantially no loss of long-term strength and good material compatibility. The production process is simple, pollution-free and noise-free, does not produce gas discharge or waste water, and is safe and environment-friendly. The materials are abundant, the production cost is low, and the social and economic benefits are extremely good.

This invention exposed a kind of simple hopper of aluminium fluoride. The structure is: there is pull- rod (1) in taper hopper (2). The pull- rod (1) is placed in guiding device and connected with sealed end cover (8). The guiding device is composed by guidance set (3), sleeve (4), and trumpet end (5). The guidance set (3) is connected with taper hopper (2) by ribbed plate (11), and the Sleeves (4) are connected with taper hopper (2) by ribbed plate (10). The lower part of taper hopper (2) is jointed with ring-form base (6) by supporting plate (9). The upper part of taper hopper (2) is jointed by enforcing ring (12). The upper part of pull- rod (1) is bent to ring form hook, the head of which is connected with neck part. The lower part of pull- rod (1) is screw threaded, and connected with sealed end cover (8) by nut. This invention used to produce electrolytic aluminium, and compact, easy to use and maintain.

The present invention relates to process of producing aluminum fluoride with fluorosilicic acid and aluminum hydroxide as material. The process includes the following steps: 1. reacting fluorosilicic acid solution and sodium sulfate for 10-60 min, filtering to obtain solid sodium fluorosilicate and waste sulfuric acid solution to be treated and drained; 2. decomposing aluminum fluorosilicate at 300-800 deg.c for 1-5 hr to produce solid sodium fluoride and silicon tetrafluoride gas; 3. absorbing silicon tetrafluoride gas with water and hydrolyzing, filtering to obtain fluorosilicic acid solution to be returned to the step 1 and solid silica, and washing and drying silica to obtain carbon white; 4. reacting solid sodium fluoride and sulfuric acid, condensing, rectifying to obtain anhydrous hydrofluoric acid and solid sodium sulfate returned to the step 1; and 5. reacting anhydrous hydrofluoric acid and aluminum hydroxide to produce aluminum fluoride product. The process is environment friendly.

The invention discloses a nanometer aluminum fluoride-based catalyst with large specific surface area, and a preparation method and applications thereof. The preparation method is used for solving problems in conventional preparation methods of aluminum fluoride-based catalysts that high temperature specific area is small, thermal stability is poor, and the conventional preparation method is complex, and is high in cost. The preparation method comprises following steps: (1) a solution containing an aluminium source precursor, an organic solvent, and a doping ingredient is prepared, and is subjected to refluxing at 20 to 80 DEG C; (2 ) an aqueous solution of a fluorinating reagent is added into the solution obtained in (1) dropwise for fluorination, and a liquid sol is obtained via aging at 60 to 90 DEG C; and (3) the liquid sol is dried at 100 to 160 DEG C so as to obtain a solid gel, and roasting is carried out at 350 to 450 DEG C so as to obtain the nanometer aluminum fluoride-based catalyst.

An embodiment of the invention includes a particle. The particle includes a first yttria core; and a fluoride salt coating on the first yttria core. The coating is sufficiently continuous to prevent a large number of sites where a second yttria core may come into contact with the first yttria core. Optionally, the particle has been heated in an oxidizing atmosphere to a temperature in the range of about 400° C. to about 750° C. Optionally, the particle is substantially free of at least one of carbon-containing species and water. Optionally, the fluoride salt is lithium fluoride. Optionally, the fluoride salt is aluminum fluoride.