Production method for recovering and purifying electronic-grade hexafluoroethane from carbon tetrafluoride production industrial waste gas

Abstract

The invention discloses a production method for recovering and purifying electronic-grade hexafluoroethane from carbon tetrafluoride production industrial waste gas, and belongs to the field of hexafluoroethane production. The method comprises the following steps: a thermal decomposition purification device and a micro-aerobic adsorption regeneration device are adopted; after precision filtration,a product enters a fractionating device, and carbon tetrafluoride gas generated by the fractionating device returns to a carbon tetrafluoride production line, so that the recovery rate of the carbontetrafluoride is increased; hexafluoroethane containing a small amount of impurities sequentially passes through a vaporizer to be vaporized and then enters a buffer tank; pressurizing is performed byusing a diaphragm type compressor to enable hexafluoroethane in the buffer tank to enter an adsorption tower running under pressure; and after precooling is performed by a precooler, impurities are removed by a high-boiling rectifying tower and a low-boiling rectifying tower in sequence. The recovery rate of carbon tetrafluoride is improved; the technical requirements of the electronic-grade hexafluoroethane are met; the produced electronic-grade hexafluoroethane does not contain a chlorine element which can cause damage to an ozone layer; greenhouse gas emission can be reduced, and industrial waste gas resource utilization, energy conservation and emission reduction can be achieved.

Description

technical field [0001] The invention relates to the field of hexafluoroethane production, and more specifically, relates to a production method for recovering and purifying electronic-grade hexafluoroethane from carbon tetrafluoride production industrial waste gas. Background technique [0002] In today's society, electronic industries such as ultra-large-scale integrated circuits, flat-panel display devices, compound semiconductor devices, solar cells, and optical fibers are booming, and are widely used in electronic gases such as thin films, etching, doping, vapor deposition, diffusion, and cleaning. It is an indispensable raw material for the above industries. Electronic gas has always played an important role in the semiconductor manufacturing process, especially the semiconductor manufacturing process has been widely used in various industries. Electronic grade hexafluoroethane is widely used in semiconductors because of its non-toxic, odorless and high stability. In t...

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Problems solved by technology

[0004] In order to overcome the defects of the prior art, a production method of recovering and purifying electronic-grade hexafluoroethane from carbon tetrafluoride production industrial waste gas of the present invention solves the high cost and many by-products of the traditional hexafluoroethane production method in the technology , the impurity element chlorine will destroy the ozone layer; developed countries in the world and domestic companies with large-scale production of carbon tetrafluoride all use hexafluoroethane in the production of carbon tetrafluoride as industrial waste gas for direct emptying treatment

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