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Purification method of industrial grade hexafluoroethane

A technology for purification of hexafluoroethane, which is applied in the field of purification of industrial-grade hexafluoroethane, can solve the problems of unfavorable industrial production and limited catalyst life, and achieve simple adsorption and regeneration operations, reduced equipment investment, and high adsorption efficiency Effect

Inactive Publication Date: 2019-07-05
ZHEJIANG LANTIAN ENVIRONMENTAL PROTECTION HI TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The life of the catalyst used in this method is limited, and the decomposed products need to be further removed, and hexafluoroethane also has the risk of decomposition, which is not conducive to industrial production

Method used

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  • Purification method of industrial grade hexafluoroethane
  • Purification method of industrial grade hexafluoroethane
  • Purification method of industrial grade hexafluoroethane

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Feed the raw material stream 5 containing hexafluoroethane and hydrochlorofluorocarbons into the rectification separation tower 1, at a rectification temperature of 36°C, a rectification pressure of 1.5MPa, and an outlet flow rate of the external reflux pump 2 of 2m 3 / h, the liquid level of the external reflux tank 3 is 40% to 60%, and the venting flow rate of the stream 10 containing non-condensable gas and low-boiling hydrochlorofluorocarbons is 1Nm 3 / h conditions for rectification. Pass the rectified hexafluoroethane stream 6 into the adsorber 4, under the conditions of temperature -10°C, pressure 1.5MPa, and molecular sieves mixed with 4A and 5A molecular sieves at a mass ratio of 1:2 as the adsorbent Adsorption under pressure is carried out to obtain the hexafluoroethane product stream 9.

[0043] After analysis, in the hexafluoroethane product stream 9, the purity of the hexafluoroethane product is above 99.95%, and the mass concentration of each impurity is: C...

Embodiment 2

[0046] Feed the raw material stream 5 containing hexafluoroethane and hydrochlorofluorocarbons into the rectification separation tower 1, at a rectification temperature of 40°C, a rectification pressure of 2.0MPa, and an outlet flow rate of the external reflux pump 2 of 1.8m 3 / h, the liquid level of the external reflux tank 3 is 50% to 60%, and the venting flow rate of the stream 10 containing non-condensable gas and low-boiling hydrochlorofluorocarbons is 0.6Nm 3 / h conditions for rectification. Pass the rectified hexafluoroethane stream 6 into the adsorber 4, under the conditions of temperature -15°C, pressure 1.6MPa, and molecular sieve mixed with 5A and NaX molecular sieve at a mass ratio of 2:1 as the adsorbent Adsorption under pressure is carried out to obtain the hexafluoroethane product stream 9.

[0047] After analysis, in the hexafluoroethane product stream 9, the purity of the hexafluoroethane product is above 99.9995%, and the mass concentration of each impurity ...

Embodiment 3

[0050] Feed the raw material stream 5 containing hexafluoroethane and hydrochlorofluorocarbons into the rectification separation tower 1, at a rectification temperature of 42.5°C, a rectification pressure of 2.05MPa, and an outlet flow rate of the external reflux pump 2 of 1.85m 3 / h, the liquid level of the external reflux tank 3 is 50% to 60%, and the venting flow rate of the stream 10 containing non-condensable gas and low-boiling hydrochlorofluorocarbons is 0.5Nm 3 / h conditions for rectification. Pass the rectified hexafluoroethane stream 6 into the adsorber 4, under the conditions of temperature -16°C, pressure 1.8MPa, and molecular sieve mixed with 5A and 13X molecular sieve at a mass ratio of 3:2 as the adsorbent Adsorption under pressure is carried out to obtain the hexafluoroethane product stream 9.

[0051] After analysis, in the hexafluoroethane product stream 9, the purity of the hexafluoroethane product is above 99.9995%, and the mass concentration of each impur...

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Abstract

The invention discloses a purification method of industrial grade hexafluoroethane. The method comprises the two steps of rectification separation and pressure adsorption, wherein the pressure adsorption step uses a molecular sieve adsorbent to remove impurities. The method provided by the invention has the advantages of short flow, convenient operation, low energy consumption and strong treatmentcapability.

Description

technical field [0001] The invention relates to a separation technology of hydrofluorocarbons, in particular to a purification method of industrial-grade hexafluoroethane. Background technique [0002] Hexafluoroethane, also known as perfluoroethane, is the product of all six hydrogen atoms in ethane being replaced by fluorine atoms. It is a non-flammable gas that is hardly soluble in water and slightly soluble in alcohol. As a substitute for chlorofluorocarbons CFCs, hexafluoroethane has zero ODP value (ozone layer destruction potential value) and a GWP value (greenhouse effect capability) of 9200. It is mainly used as a plasma etchant in semiconductor equipment manufacturing processes. It has the advantages of high etching rate, high precision and minimal edge lateral erosion, and can perfectly meet the high-precision process requirements of deep submicron integrated circuits. [0003] In the production process of hexafluoroethane, various by-products will be produced, su...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C17/38C07C17/383C07C17/389C07C19/08
CPCC07C17/38C07C17/383C07C17/389C07C19/08
Inventor 袁光伟刘建鹏蒋争光夏帅李霞
Owner ZHEJIANG LANTIAN ENVIRONMENTAL PROTECTION HI TECH
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