Hexafluoroethane purifying method

A technology of hexafluoroethane and metal catalysts, applied in the disproportionation separation/purification of halogenated hydrocarbons, organic chemistry, etc., can solve the problems of unfavorable industrialization, reduced catalytic ability of catalysts, complex reaction devices, etc., and achieve easy operation and long service life , The effect of simple removal process

Active Publication Date: 2015-04-22
昊华气体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the catalyst used in this method needs to control the mixing ratio, and the reaction device is relatively complicated, which is not conducive to industrialization
[0007] Karmakar S, Greene H L (Catalyst.J Catal, 1995, 151 (2): 394 ~ 406) mentioned that when the r

Method used

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  • Hexafluoroethane purifying method

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Experimental program
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Effect test

Embodiment 1

[0015] Hexafluoroethane first passes through the water washing tower, the alkali washing tower, and then through the reactor, and the reactor is equipped with loaded Fe 2 o 3 and SrTiO 3 Activated alumina catalyst, after the gas passes through the reactor, it first enters the adsorption tower, and then enters the rectification tower for rectification. Specific steps:

[0016] (1) will contain H 2 , O 2 , N 2 、CH 4 、CF 4 , CO, CO 2 , SF 6 , HCFCs, C 3 f 8 、H 2 Hexafluoroethane gas with impurities such as O and HF is passed into the water washing tower and alkali washing tower to remove HF;

[0017] (2) The hexafluoroethane gas at the outlet of the alkali washing tower is passed into the reactor, and the reactor is equipped with a load Fe 2 o 3 and SrTiO 3 Activated alumina catalyst, the reactor temperature is controlled at 400°C, the flow rate of hexafluoroethane is controlled at 15kg / h, and the content of chlorofluorocarbons in the gas after the reactor is reduc...

Embodiment 2

[0020] The temperature of the reactor is controlled at 650°C, and the reactor is loaded with WO 3 And the zeolite molecular sieve catalyst of ZnO, hexafluoroethane flow rate is 15kg / h, other is the same as embodiment 1, and the results are shown in Table 1.

Embodiment 3

[0022] The temperature of the reactor is controlled at 300°C, and the reactor is loaded with TiO 2 active carbon catalyst, hexafluoroethane flow rate is 20kg / h, other with embodiment 1, the results are shown in Table 1.

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Abstract

The invention discloses a hexafluoroethane purifying method which includes the following steps that crude hexafluoroethane is sequentially introduced into a water washing tower and an alkaline washing tower, acid gas in the hexafluoroethane is washed way, the washed gas enters a reactor which is filled with a metal catalyst, reaction temperature is controlled between 300 DEG C and 8000 DEG C, the flow rate of the hexafluoroethane is 15-30kg/h, then the gas sequentially adsorbs CO2, H2O and HF through an adsorption tower, impurities such as H2, O2, N2, CH4, CF4, SF6 and C3F8 are removed through rectification in a rectifying tower, and hexafluoroethane gas with the purity of 99.999% can be obtained. The metal catalyst is supported, a carrier is one of active aluminum oxide, a zeolite molecular sieve and active carbon, and a body is one or more of TiO2, ZnO, WO3, SnO2, Fe2O3 or SrTiO3. By means of the method, the content of hydrochlorofluorocarbons in the hexafluoroethane can be removed to be under 1ppmv.

Description

technical field [0001] The invention relates to a method for purifying hexafluoroethane. Background technique [0002] High-purity (above 99.999%) hexafluoroethane is mainly used as a plasma etchant in the semiconductor equipment manufacturing process. In the production process of hexafluoroethane, some by-products, such as carbon tetrafluoride (CF 4 ), octafluoropropane (C 3 f 8 ), trifluoromethane (CHF 3 ), difluorodichloromethane (CF 2 Cl 2 ), trifluorochloromethane (CF 3 Cl) or trichlorofluoromethane (CFCl 3 ) such as fluorocarbons or chlorofluorocarbons. Most of the impurities can be removed through purification processes such as conventional adsorption and rectification, but some impurities are relatively stable in nature and can form azeotropic mixtures with hexafluoroethane, which are difficult to remove by ordinary purification methods. [0003] In terms of purifying hexafluoroethane, the patent document CN1165509A introduces a method of azeotropic distilla...

Claims

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Application Information

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IPC IPC(8): C07C19/08C07C17/38
Inventor 袁胜芳张金彪黄晓磊赵国辉吴旭飞张景利李贤武汤月贞
Owner 昊华气体有限公司
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