Hexafluoroethane production technology
A hexafluoroethane and production process technology, applied in the field of hydrofluorocarbon production process, can solve problems such as increased equipment investment and complicated process flow
Active Publication Date: 2014-05-07
SINOCHEM LANTIAN +1
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The invention discloses a hexafluoroethane production technology, and the purity of a hexafluoroethane product can reach more than 99.99% by two-stage separation and purification. The hexafluoroethane production technology simplifies a conventional technological process, saves equipment investment, makes the reaction smooth, and improves the production efficiency.
Description
technical field [0001] The invention relates to a production process of hydrofluorocarbons, in particular to a process for producing hexafluoroethane. Background technique [0002] Hexafluoroethane can be used as a cleaning or etching gas for semiconductors. For its preparation method, report has following several kinds at present: (1) Anhydrous hydrogen fluoride in the presence of a fluorination catalyst to fluorinate hydrochlorofluorocarbons such as dichlorotetrafluoroethane or chloropentafluoroethane; (2) Direct fluorination of tetrafluoroethane and / or pentafluoroethane with fluorine gas. When the method (1) is adopted, since the sources of hydrochlorofluorocarbons in each process are different, the organic impurities brought in from the raw materials are different. To obtain higher purity hexafluoroethane, the raw material must be purified. The raw material purification process includes simple distillation, rectification, and adsorption of activated carbon and mo...
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Inventor 柴华杨会娥李峰李忠陈蜀康张文庆王刚
Owner SINOCHEM LANTIAN
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