364 results about "High frequency power" patented technology

The invention discloses a control system and method for a thermal power generating unit and flywheel energy storage to cooperatively participate in power grid frequency modulation and a power grid frequency modulation method. According to the method, a low-pass filtering algorithm is abandoned, a tracking differentiator is used for decomposing a primary frequency modulation instruction of the thermal power generating unit, and decomposed low-frequency power components are distributed to the thermal power generating unit; high-frequency power components are distributed to the flywheel for energy storage, action times and output abrasion of the thermal power generating unit are reduced, and the service life of the unit is prolonged. A gain coefficient which adaptively changes along with the state of charge (SOC) and frequency deviation is introduced into the decomposed high-frequency power component, so that accurate matching requirements are facilitated, the energy utilization efficiency is improved, the frequency fluctuation of a power grid is better stabilized, and the quality of the power grid is improved; and meanwhile, a Logistic function for preventing the flywheel from being overcharged and overdischarged is introduced to restrain the theoretical response power of flywheel energy storage, deep charging and discharging of the flywheel are avoided, and therefore the loss of the flywheel is reduced.

The invention relates to the technical field of power grid energy storage, in particular to a voltage fluctuation rapid suppression method based on a composite energy storage system, which realizes targeted response to voltage fluctuation of different frequencies by setting a dual-time scale power distribution strategy, improves the improvement efficiency of the energy storage system, and improves the suppression efficiency of the composite energy storage system. Through a composite control structure of an adaptive PI controller and a feedforward compensation link, the voltage control precision and the harmonic suppression rate are improved, and according to peak-valley electricity price characteristics and load fluctuation rules of different scenes, the power grid line voltage fluctuation type is monitored in real time, and a dynamic parameter library and an online identification algorithm are combined. The system can automatically adapt to factors such as hardware aging and environment change, a long-term control effect is maintained, and the charging and discharging frequency of the lithium iron battery is reduced by setting the high-frequency power buffer effect of the super capacitor, so that the cycle life of the lithium iron battery is prolonged; meanwhile, the overall energy conversion efficiency of the system is improved through cooperative control of the modular multilevel converter topology and the double energy storage elements.

The invention provides a control method and device for a photovoltaic hybrid energy storage system, and belongs to the field of power systems. The method comprises the following steps: respectively obtaining a frequency variation and a frequency change rate of an alternating current side of the photovoltaic hybrid energy storage system; determining an expected battery power variation of the energy storage battery unit based on the frequency variation and the dynamic inertia coefficient, and controlling the energy storage battery unit to operate according to the expected battery power variation, so that the energy storage battery unit absorbs a low-frequency power variation caused by the frequency variation; the value of the dynamic inertia coefficient is determined by the frequency change rate and the frequency change quantity; and based on the frequency change rate, determining an expected capacitance power variable quantity of the super-capacitor unit, and controlling the super-capacitor unit to operate according to the expected capacitance power variable quantity, so that the super-capacitor unit consumes a high-frequency power variable quantity caused by the frequency change rate. The stability of the power grid system can be effectively guaranteed.

The invention discloses an extended double-side asymmetric phase shift modulation method for a dual-active bridge converter, and belongs to the technical field of isolated high-frequency power conversion in a power electronic technology. According to the symmetric phase shift modulation method, under the condition that the voltage conversion ratio is not matched, the zero voltage switching range of a switching tube is small, the light load efficiency is low, and variable abrupt change can occur during mode switching to cause the uncontrollable oscillation problem of inductive current. The invention provides an extended double-side asymmetric phase shift modulation method for a dual-active bridge converter in a wide voltage range. A multi-objective optimization scheme is established based on the provided modulation method, and an approximation method is provided to solve a full power range analytical solution. A smooth switching method between modes is realized, and uncontrollable oscillation of inductive current can be effectively avoided. And the conversion efficiency in a full-power range is improved.

A plasma processing apparatus comprises a plasma processing chamber, a substrate support, an electrode or an antenna, a high frequency power supply, a consuming member, an electricity storage unit and a power receiving coil. The electrode or an antenna is disposed such that a space within the plasma processing chamber is located between the electrode or the antenna and the substrate support. The high frequency power supply is configured to generate high frequency power and is electrically connected to the substrate support, the electrode or the antenna. The power consuming member is disposed within the plasma processing chamber or the substrate support. The electricity storage unit is electrically connected to the power consuming member. The power receiving coil is electrically connected to the electricity storage unit and capable of receiving power from a power transmitting coil by electromagnetic induction coupling.

The present invention involves method and system for contactless bidirectional transfer of power between DC source (3700) and rotor coils of electric motor-generator by simultaneous bimodal capacitive and inductive power transfer of high frequency power signals from resonators (3545) stationary with respect to the motor-generator stator to resonators (3585) on the motor-generator rotor according to an adjustable transfer mode ratio at a variable resonant power signal oscillation frequency. Power from DC source is converted into high frequency power signals by high frequency continuous auto-adjusting bimodal stator transmitter-receiver modules under control of systems controller (3572) and provided to corresponding one or more high frequency stator resonators. High frequency power signals received by high frequency rotor resonators are converted in corresponding high frequency auto-adjusting bimodal rotor transmitter-receiver modules to electrical signals to provide to drive circuitry of induction coils on rotor.

The invention discloses an island micro-grid frequency coordination control method based on flywheel and battery hybrid energy storage, and provides a hybrid energy storage coordination control method for solving the problem that a diesel generator in an island micro-grid is low in inherent response speed and difficult to deal with rapid load disturbance in time. The method combines the advantages of a flywheel energy storage system (FESS) and a battery energy storage system (BESS) to construct a multi-time-scale frequency regulation mechanism: the FESS is responsible for absorbing or releasing a high-frequency power component and quickly responding to instantaneous fluctuation; the BESS bears an intermediate-frequency power component and realizes medium-term energy regulation; and the diesel generator compensates the low-frequency power component and maintains long-term steady-state operation. Through the multi-unit collaborative hierarchical control, the frequency stability and the operation reliability of the island micro-grid are remarkably improved, the dynamic regulation pressure of the diesel engine is reduced, and the frequent charge-discharge cycle of the battery is reduced, so that the service life of the energy storage system is prolonged.

The invention relates to the technical field of electronic power, in particular to a positive and negative voltage output circuit based on coreless transformer isolation, which comprises a cross-coupled oscillation circuit, a coreless transformer and a rectification filter circuit, and is characterized in that the cross-coupled oscillation circuit generates sine wave oscillation, and energy is transmitted to a secondary coil through a primary coil of the coreless transformer. The secondary coil adopts a center tap structure, the rectification filter circuit receives signals transmitted by the secondary coil, and stable positive and negative voltage output is realized through rectification and filtering processing. High-efficiency energy transmission is achieved through the coreless transformer, the voltage isolation capacity is improved, electromagnetic interference is reduced, and the coreless transformer has the advantages of being compact in structure, low in cost, high in power density and the like and is suitable for solid-state switch driving, high-frequency power conversion and other electronic power systems.

A plasma processing apparatus comprises a plasma processing chamber, a substrate support, a high frequency power supply, an electrode or an antenna, a power consuming member, an electricity storage unit, a power transmitting coil, a power receiving coil and at least one driving system. The power transmitting coil is provided outside the plasma processing chamber. The power receiving coil is electrically connected to the electricity storage unit and capable of receiving power from the power transmitting coil by electromagnetic induction coupling. The at least one driving system is configured to change a distance between the power transmitting coil and the power receiving coil by moving at least one of the power transmitting coil and the power receiving coil.

The high-frequency power calibration system comprises an illuminometer module, a voltage regulator module, a standard load module, a high-frequency source placement frame, a high-frequency current acquisition module, a control system and a computer, and all the modules are connected through signals to form the complete calibration system. The calibration method comprises the steps of load impedance standard power data acquisition, high-frequency power data acquisition, high-frequency power precision verification and high-frequency source module numbering and calibration data configuration. According to load impedance standard power data acquisition, different power frequency voltages are set, power frequency power and illuminometer data are acquired, and a relation function between the power frequency power and the illuminometer data is established; in high-frequency power data acquisition, different DA voltages are set, illuminometer data are acquired, and a relation function is established; the high-frequency power precision verification verifies the power precision by fitting the function relationship; and finally, the calibration data and the high-frequency source module number are correspondingly stored. The problem that the power calibration precision of the in-vitro high-frequency thermal therapy machine is insufficient is solved.

The invention belongs to the technical field of new energy automobiles, and particularly relates to a multi-axle hybrid vehicle real-time energy management strategy based on hierarchical control, which specifically comprises the following steps of: (1) calculating load power based on a whole vehicle dynamic balance equation, dividing the load demand power into a high part and a low part by adopting Haar wavelet filtering, high-frequency power and low-frequency power are obtained by decomposing and reconstructing an original signal; (2) distributing high-frequency power to a super capacitor, performing secondary optimization distribution on low-frequency power by taking fuel economy, a battery charge state and bus voltage as optimization targets, and solving an optimal power distribution ratio of an engine-generator set and a power battery pack in real time by utilizing a model prediction control method; and (3) establishing a layered energy management strategy by adopting a mode of combining front wavelet filtering and rear model predictive control. On the premise that the dynamic property of the whole vehicle is met, the fuel economy is improved and the multi-power-source characteristic is exerted by reasonably distributing energy flow between the power assemblies.

The invention provides a power distribution method, device and equipment of an electricity-hydrogen hybrid energy storage system and a medium, and belongs to the technical field of energy storage. The electricity-hydrogen hybrid energy storage system comprises a super capacitor, a lithium battery and a hydrogen energy storage subsystem, and the method comprises the following steps: decomposing the total regulation power of the electricity-hydrogen hybrid energy storage system to obtain high-frequency power, intermediate-frequency power and low-frequency power; correcting the high-frequency power according to a first charge state value of the super capacitor to obtain a first power correction value and a first optimal adjustment power of the super capacitor; according to the first power correction value and a second charge state value of the lithium battery, correcting the intermediate frequency power to obtain a second power correction value and a second optimal adjustment power of the lithium battery; and correcting the low-frequency power according to the second power correction value and the health state value of the hydrogen energy storage subsystem to obtain third optimal adjustment power of the hydrogen energy storage subsystem. The energy utilization rate and the operation stability of the electricity-hydrogen hybrid energy storage system can be improved.

To remove burrs generated in a workpiece.SOLUTION: A deburring device 22 comprises: an ultrasonic oscillation unit 50; and a water layer formation part 31 that forms a water layer 34 between an upper surface of a workpiece 1 and a lower surface of the ultrasonic oscillation unit 50. The ultrasonic oscillation unit 50 comprises two column-like ultrasonic horns arranged with an interval. The deburring device 22 comprises: a control part 59 that relatively moves the ultrasonic oscillation unit 50 and a table 27 with a horizontal movement mechanism; and a power control part 583 that continuously changes a phase of a high-frequency power to the other ultrasonic horn with respect to the phase of the high frequency power to one ultrasonic horn. By continuously changing the phase of the high frequency power of the one ultrasonic horn of the two ultrasonic horns, a place where an ultrasonic vibration vibrated from the two ultrasonic horns is increased is moved on the upper surface of the workpiece 1 to remove burrs.SELECTED DRAWING: Figure 3

There is a plasma processing apparatus comprising: a processing chamber that has a stage on which a substrate is placed; a first electrode to which high-frequency power for plasma generation is supplied; a second electrode that faces the first electrode and is configured to form a plasma generation space between the first electrode and the second electrode; and a radiation part that is formed of a dielectric and is configured to radiate the high-frequency power into the plasma generation space from a waveguide formed along an outer periphery of the first electrode, wherein the second electrode is configured to form a processing space between the stage and the second electrode, and has a structure causing a first processing gas to flow in a direction opposite to a direction from the plasma generation space toward the processing space, to supply the first processing gas to the plasma generation space.

Provided is a plasma processing apparatus comprising: a plasma processing chamber; a substrate support; a high frequency power supply; an electrode or an antenna electrically connected to the high frequency power supply; a power consuming member disposed within the plasma processing chamber or the substrate support; an electricity storage unit electrically connected to the power consuming member; a power transmitting coil provided outside the plasma processing chamber; a power receiving coil electrically connected to the electricity storage unit and capable of receiving power from the power transmitting coil; at least one metal case that provides a shielded space and accommodates the power transmitting coil and the power receiving coil within the shielded space; and at least one ferrite material that is disposed within the shielded space and is provided to close a space in which the power transmitting coil and the power receiving coil are disposed.

A plasma processing apparatus comprises a first plasma processing apparatus and a second plasma processing apparatus. Each of the first plasma processing apparatus and the second plasma processing apparatus comprises a plasma processing chamber, a substrate support, a high frequency power supply, an electrode or an antenna, a power consuming member, a ground frame, an electricity storage unit, a power receiving coil and a rectifying and smoothing unit. The ground frame is grounded and surrounding the substrate support together with the plasma processing chamber. Each of the first plasma processing apparatus and the second plasma processing apparatus is configured such that, with respect to the power consuming member thereof, the electricity storage unit thereof and the electricity storage unit of a remaining one of the first plasma processing apparatus and the second plasma processing apparatus are connectable in parallel.

The invention discloses a high-frequency power control system and a high-frequency power control method based on an MOS (Metal Oxide Semiconductor) transistor, which relate to the technical field of MOS transistor control, and are characterized in that the system has quick response and self-adaptive regulation and control capabilities on abnormal power consumption behaviors by performing targeted feedback regulation on gate driving parameters of a target MOS transistor and combining synchronous updating of a driving control logic strategy; and finally, a dynamic correction mechanism taking the periodic dynamic loss integral evaluation value TDE as a feedback basis is formed, the optimization effect of a driving control strategy can be verified by comparing the periodic dynamic loss integral evaluation values TDE before and after adjustment, repeated triggering of a parameter adjustment process is realized, a power control path capable of realizing closed-loop operation is constructed, and the power control efficiency is improved. According to the invention, loss sensing precision, strategy adjustment targeting and driving control closed loop of the MOS tube in a high-frequency working scene are realized, and multiple defects in time precision, energy identification and response path in the existing power control technology are effectively overcome.

A method for providing high frequency high voltage alternating high current to a powered device the operation of which may generate a substantial change in inductance with common switching devices while exceeding their typically characterized datasheet specifications.

A high-frequency power supply system according to the present disclosure supplies high-frequency power to a load. The high-frequency power supply system comprises: a first high-frequency power supply that can supply first high-frequency power to the load by outputting a first high-frequency voltage having a first fundamental frequency from a first high-frequency voltage output unit toward the load; and a first slave device. The first high-frequency power supply has: a first high-frequency power supply setting value information output unit that outputs a first high-frequency power supply setting value corresponding to the elapsed time or a command signal corresponding to the first high-frequency power supply setting value on the basis of first high-frequency power supply setting value information indicating the relationship between the elapsed time from a starting point of a cycle within the time of one cycle of amplitude modulation and the first high-frequency power supply setting value; and a first slave device synchronization signal output unit that outputs a first slave device synchronization signal in accordance with the time at which the first slave device setting value should be changed on the basis of first slave device time information indicating the relationship between the elapsed time and the time at which the first slave device setting value used in the first slave device should be changed. The first slave device has a first slave device setting value information output unit that outputs the first slave device setting value corresponding to the elapsed time or a command signal corresponding to the first slave device setting value on the basis of the first slave device synchronization signal, and first slave device setting value information indicating the relationship between the elapsed time and the first slave device setting value.

This invention relates to the field of power electronics technology, and more particularly to a combined superimposed waveform control system suitable for high-voltage, high-frequency power supplies. The system includes a voltage amplitude control module, a phase angle control module, a modulation signal generation module, and a sorting algorithm module. The voltage amplitude control module takes as input the voltage amplitude setpoint and feedback for each frequency band, and outputs the amplitude of the modulation voltage for each frequency band. The phase control module takes as input the phase setpoint and feedback for each frequency band voltage, and outputs the phase of the modulation voltage for each frequency band. The modulation signal generation module takes as input the amplitude and phase of the modulation voltage for each frequency band, and outputs the target modulation signal required by the high-voltage, high-frequency power supply. The sorting algorithm module takes as input the target modulation signal and the feedback voltage of each module, and outputs the on / off commands for each power module. This invention can effectively avoid the influence of sampling delay and noise, generating a rich variety of voltage waveforms acting on power equipment.

The present invention provides a high-frequency power supply in which a user can arbitrarily set a pattern of changes in the power value of the high-frequency power output over time. The high-frequency power supply (10A) involved in the present invention comprises: an output unit (20) that outputs high-frequency power to a load (40) via an impedance matcher (30); a data storage unit (13A) that stores instruction data generated by the user; and a control unit (12A) that controls the output unit (20) and the impedance matcher (30) based on the instruction data stored in the data storage unit (13A). The plurality of records constituting the instruction data respectively include power instruction data related to the power value of the high-frequency power to be output and matching action instruction data related to the presence or absence of the operation of the impedance matcher (30). The control unit sends a power signal generated based on the power instruction data to the output unit, and sends a synchronization signal generated based on the matching action instruction data to the impedance matcher.

The invention discloses a hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation, and belongs to the technical field of energy storage control, and the method comprises the steps: collecting new energy output data and electric load data on a power supply bus in real time, and calculating a stabilizing error; decomposing the stabilizing error into a high-frequency power instruction, an intermediate-frequency power instruction and a low-frequency power instruction by adopting a variable filtering time constant method; the high-frequency power instruction is sent to a bidirectional converter of a super capacitor, the intermediate-frequency power instruction is sent to a bidirectional converter of lithium ion energy storage, and the low-frequency power instruction is sent to a heat pump electricity storage system; energy storage states of the three hybrid energy storage systems are obtained, and a filtering time constant of a coupling control layer is periodically updated according to a preset safety threshold; through operation strategies of the system super capacitor, the lithium ion energy storage system and the heat pump power storage system, fluctuation stabilization of photovoltaic, wind power and other new energy power stations in different time scales is achieved, and stable output of energy and safe and reliable operation of a power grid are guaranteed.

The present invention relates to the field of semiconductor device manufacturing technology, and in particular to a method for preparing a high-frequency response power transistor. First, an N-drift layer is grown on an N+ silicon substrate with a resistivity of >1000Ω·cm. An isolation trench with a depth of 12μm and a depth-to-width ratio of 5.9:1 is etched by ICP, and a SiO2 / Si3N4 composite dielectric layer is filled to expand the depletion layer to 18.5μm, thereby reducing the collector junction capacitance to 68pF and the breakdown voltage to 205V. Secondly, an interdigitated emitter is formed on the front side, and the back side is thinned to 100±2μm and then laser drilled. The through-holes are filled with pulse electroplated copper, and the copper pillar array compresses the loop inductance to 2.7nH. Finally, a Ti / Ni / Au transition layer is sputtered, and a diamond-copper composite substrate is hot-pressed and bonded. An 80nm TiC phase is formed at the interface, with a thermal conductivity of 635W / m·K and a thermal resistance reduced to 0.61K / W. The present invention optimizes capacitance, inductance, and thermal resistance, reducing switching losses by 57.8% and increasing power density to 51.2W / cm 2 , suitable for MHz-level high-frequency power systems.

An impedance matching circuit for a plasma process supply system and a plasma process system, configured for powers≥500 W and frequencies in a range from 2 MHz to 100 MHz, the impedance matching circuit including a matching unit having one or more reactances and a resonator. The impedance matching circuit is configured for operation at a predetermined high frequency (HF) power signal with a predetermined basic frequency and auto-frequency tuning (AFT) bandwidth, limited by a predetermined upper AFT frequency and a predetermined lower AFT frequency. The resonator is configured to not influence the HF power signal at the predetermined basic frequency and to damp the HF power signal and / or influence the HF power signal in a phase at both the predetermined upper and lower AFT frequencies.

The disclosed plasma processing apparatus includes a chamber, a substrate support, an edge ring, a lift mechanism, a plasma generating unit, and a bias power supply. The substrate support is disposed in the chamber. The lift mechanism is configured to move the edge ring up and down relative to the substrate support. The substrate support includes a base electrically coupled to the bias power supply and / or the high frequency power supply of the plasma generating unit, and an electrostatic chuck on the base. The lift mechanism includes a conductive ring and a connecting member, the conductive ring supporting the edge ring placed thereon and electrically connecting to the edge ring. The connecting member is configured to maintain an electrical connection between the conductive ring and the base in response to the movement of the edge ring and the conductive ring by the lift mechanism.

The utility model relates to high frequency power converter technical field, concretely is a kind of magnetic core structure suitable for high frequency power converter.The utility model, including coil and fixed frame, the coil is installed in the inner wall of fixed frame, the lower surface of fixed frame is fixedly connected with two connecting seats, the inside of connecting seat is installed with several pins, the inner wall of fixed frame is covered with insulating coating, the inner wall of fixed frame is movably installed with two ferrite magnetic cores, two the ferrite magnetic core adsorbs and connects, the surface of pin is covered with protection tube, the protection tube is silica gel tube, the surface of two the ferrite magnetic core is wound with fixed band, the fixed band is magnetic core fixed band.Solved under high frequency operating condition, the magnetic hysteresis loss and eddy current loss of magnetic core sharply increase, lead to the serious heating of magnetic core, not only reduce the conversion efficiency of power converter, also possibly influence its long-term reliability problem.

The utility model relates to the technical field of electronic power, in particular to a positive and negative voltage output circuit based on coreless transformer isolation, which comprises a cross-coupled oscillation circuit, a coreless transformer and a rectification filter circuit, the cross-coupled oscillation circuit generates sine wave oscillation, and energy is transmitted to a secondary coil through a primary coil of the coreless transformer. The secondary coil adopts a center tap structure, the rectification filter circuit receives signals transmitted by the secondary coil, and stable positive and negative voltage output is realized through rectification and filtering processing. High-efficiency energy transmission is realized through the coreless transformer, the voltage isolation capability is improved, electromagnetic interference is reduced, and the coreless transformer has the advantages of compact structure, low cost, high power density and the like, and is suitable for solid-state switch driving, high-frequency power conversion and other electronic power systems.

The application relates to the field of industrial automation control and discloses an adaptive adjustment method for a grease refining process, which comprises the following steps: synchronously acquiring raw material flow data and load current signals and storing the data into a historical state register sequence; extracting high-frequency power spectrum amplitudes in the load current signals to determine a dynamic correction coefficient reflecting a pipeline slip state; compensating a physical volume model according to the dynamic correction coefficient and calculating material dynamic time delay parameters; reversely searching time sequence associated process parameters in the sequence by using the dynamic time delay parameters; and correcting control gain according to the numerical deviation between the process parameters and the load current signals by a state observer, so as to adjust frying heating power. Through closed-loop compensation of nonlinear rheological characteristics of a transport process, the application ensures that the extracted historical parameters have physical and causal consistency, solves the time delay distortion problem caused by non-uniform materials, and improves system identification accuracy and operation stability.

The application discloses a kind of ultra-wideband high harmonic suppression power amplifier, including low-frequency power amplification branch, high-frequency power amplification branch, harmonic suppression matching network, the harmonic suppression matching network includes low-frequency harmonic suppression matching network, high-frequency harmonic suppression matching network and common output end;The low-frequency power amplification branch, high-frequency power amplification branch respectively to the frequency different low-frequency band signal, high-frequency band signal in work wideband is carried out power amplification, the low-frequency harmonic suppression matching network, high-frequency harmonic suppression matching network respectively to the impedance matching of fundamental wave in low-frequency band signal, high-frequency band signal after power amplification, while inhibiting second and third harmonic signals.The application solves the problem of low power efficiency and poor high-order harmonic suppression in the prior art.

An ultrasound vibrating-type defect detection apparatus (100) for detecting a defect in a semiconductor apparatus (10) is provided with: an ultrasound vibrator (42); a high-frequency power supply (40); a camera (45); and a controller (50) for adjusting the frequency of high-frequency power supplied from the high-frequency power supply (40) to the ultrasound vibrator (42), and for performing detection of a defect in the semiconductor apparatus (10). The controller (50) causes the camera (45) to capture an image of the semiconductor apparatus (10) while varying the frequency of high-frequency power supplied from the high-frequency power supply (40) to the ultrasound vibrator (42), and performs detection of a defect in the semiconductor apparatus (10) on the basis of the captured image.