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141 results about "High frequency power" patented technology

High frequency power devices provide many benefits, but as switching frequency rises so does the potential for switching loss. Effective design minimizes that loss while maintaining the benefits of high frequency switching. There is no one-size-fits-all solution; each device must be carefully designed to fit the application.

Method for optimizing high frequency power supply circuitry

PCT designated stageWO2026139952A1DatasheetHigh frequency power
A method for providing high frequency high voltage alternating high current to a powered device the operation of which may generate a substantial change in inductance with common switching devices while exceeding their typically characterized datasheet specifications.
Owner:N T TAO LTD

A combined superposition control system for high voltage and high frequency power supplies

This invention relates to the field of power electronics technology, and more particularly to a combined superimposed waveform control system suitable for high-voltage, high-frequency power supplies. The system includes a voltage amplitude control module, a phase angle control module, a modulation signal generation module, and a sorting algorithm module. The voltage amplitude control module takes as input the voltage amplitude setpoint and feedback for each frequency band, and outputs the amplitude of the modulation voltage for each frequency band. The phase control module takes as input the phase setpoint and feedback for each frequency band voltage, and outputs the phase of the modulation voltage for each frequency band. The modulation signal generation module takes as input the amplitude and phase of the modulation voltage for each frequency band, and outputs the target modulation signal required by the high-voltage, high-frequency power supply. The sorting algorithm module takes as input the target modulation signal and the feedback voltage of each module, and outputs the on / off commands for each power module. This invention can effectively avoid the influence of sampling delay and noise, generating a rich variety of voltage waveforms acting on power equipment.
Owner:CHINA ENERGY ENG GRP GUANGDONG ELECTRIC POWER DESIGN INST CO LTD +1

Hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation

The invention discloses a hybrid energy storage cooperative control method and system for stabilizing new energy fluctuation, and belongs to the technical field of energy storage control, and the method comprises the steps: collecting new energy output data and electric load data on a power supply bus in real time, and calculating a stabilizing error; decomposing the stabilizing error into a high-frequency power instruction, an intermediate-frequency power instruction and a low-frequency power instruction by adopting a variable filtering time constant method; the high-frequency power instruction is sent to a bidirectional converter of a super capacitor, the intermediate-frequency power instruction is sent to a bidirectional converter of lithium ion energy storage, and the low-frequency power instruction is sent to a heat pump electricity storage system; energy storage states of the three hybrid energy storage systems are obtained, and a filtering time constant of a coupling control layer is periodically updated according to a preset safety threshold; through operation strategies of the system super capacitor, the lithium ion energy storage system and the heat pump power storage system, fluctuation stabilization of photovoltaic, wind power and other new energy power stations in different time scales is achieved, and stable output of energy and safe and reliable operation of a power grid are guaranteed.
Owner:STATE GRID JIANGSU ELECTRIC POWER CO LTD RESEARCH INSTITUTE +2

A magnetic core structure suitable for high frequency power converters

The utility model relates to high frequency power converter technical field, concretely is a kind of magnetic core structure suitable for high frequency power converter.The utility model, including coil and fixed frame, the coil is installed in the inner wall of fixed frame, the lower surface of fixed frame is fixedly connected with two connecting seats, the inside of connecting seat is installed with several pins, the inner wall of fixed frame is covered with insulating coating, the inner wall of fixed frame is movably installed with two ferrite magnetic cores, two the ferrite magnetic core adsorbs and connects, the surface of pin is covered with protection tube, the protection tube is silica gel tube, the surface of two the ferrite magnetic core is wound with fixed band, the fixed band is magnetic core fixed band.Solved under high frequency operating condition, the magnetic hysteresis loss and eddy current loss of magnetic core sharply increase, lead to the serious heating of magnetic core, not only reduce the conversion efficiency of power converter, also possibly influence its long-term reliability problem.
Owner:SHENZHEN JIEXIN IND DEVELOPMENT CO LTD

Positive and negative voltage output circuit based on coreless transformer isolation

The utility model relates to the technical field of electronic power, in particular to a positive and negative voltage output circuit based on coreless transformer isolation, which comprises a cross-coupled oscillation circuit, a coreless transformer and a rectification filter circuit, the cross-coupled oscillation circuit generates sine wave oscillation, and energy is transmitted to a secondary coil through a primary coil of the coreless transformer. The secondary coil adopts a center tap structure, the rectification filter circuit receives signals transmitted by the secondary coil, and stable positive and negative voltage output is realized through rectification and filtering processing. High-efficiency energy transmission is realized through the coreless transformer, the voltage isolation capability is improved, electromagnetic interference is reduced, and the coreless transformer has the advantages of compact structure, low cost, high power density and the like, and is suitable for solid-state switch driving, high-frequency power conversion and other electronic power systems.
Owner:桂林星云电子科技有限公司

An adaptive adjustment method for an oil refining process

The application relates to the field of industrial automation control and discloses an adaptive adjustment method for a grease refining process, which comprises the following steps: synchronously acquiring raw material flow data and load current signals and storing the data into a historical state register sequence; extracting high-frequency power spectrum amplitudes in the load current signals to determine a dynamic correction coefficient reflecting a pipeline slip state; compensating a physical volume model according to the dynamic correction coefficient and calculating material dynamic time delay parameters; reversely searching time sequence associated process parameters in the sequence by using the dynamic time delay parameters; and correcting control gain according to the numerical deviation between the process parameters and the load current signals by a state observer, so as to adjust frying heating power. Through closed-loop compensation of nonlinear rheological characteristics of a transport process, the application ensures that the extracted historical parameters have physical and causal consistency, solves the time delay distortion problem caused by non-uniform materials, and improves system identification accuracy and operation stability.
Owner:HUNAN FOUR SEASONS OIL CO LTD

An ultra-wideband high harmonic rejection power amplifier

The application discloses a kind of ultra-wideband high harmonic suppression power amplifier, including low-frequency power amplification branch, high-frequency power amplification branch, harmonic suppression matching network, the harmonic suppression matching network includes low-frequency harmonic suppression matching network, high-frequency harmonic suppression matching network and common output end;The low-frequency power amplification branch, high-frequency power amplification branch respectively to the frequency different low-frequency band signal, high-frequency band signal in work wideband is carried out power amplification, the low-frequency harmonic suppression matching network, high-frequency harmonic suppression matching network respectively to the impedance matching of fundamental wave in low-frequency band signal, high-frequency band signal after power amplification, while inhibiting second and third harmonic signals.The application solves the problem of low power efficiency and poor high-order harmonic suppression in the prior art.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Resonant power conversion systems and methods

Embodiments pertain to a resonant power conversion system comprising switching circuitry configured to convert a low frequency AC power signal to a high frequency AC power signal, power conversion circuitry electrically connected in parallel with a source of the low frequency AC power signal and additionally connected in parallel with a consumer of the high frequency AC power signal. The source and the consumer may be electrically connected in series, and a low-pass filter may be serially connected between an output of the switching circuitry and the source of low frequency AC power signal.
Owner:BG NEGEV TECHNOLOGIES & APPLICATIONS LTD

Matching device and plasma processing apparatus

A matching device disclosed herein comprises a plurality of reactance elements, a plurality of relays, a ground element, and an inductor element. The plurality of reactance elements are connected to a high frequency supply line for high frequency power for plasma generation. The plurality of relays include a relay coil and a relay switch each having a first contact connected to each of the plurality of reactance elements. A second contact different from the first contacts of some relay switches among the plurality of relay switches is connected to the ground element. A third contact different from the first contacts of the remaining relay switches among the plurality of relay switches is connected to the inductor element and is connected to the high frequency supply line. The plurality of reactance elements include a lower electrode, a dielectric plate, a plurality of first upper electrodes, and a plurality of second upper electrodes.
Owner:TOKYO ELECTRON LTD

V2G-microgrid cooperative scheduling system and method based on improved particle swarm optimization

The invention discloses a V2G-microgrid cooperative scheduling system and method based on an improved particle swarm algorithm, and belongs to the technical field of intelligent microgrid and electric vehicle energy management. In order to solve the problems of slow response of fixed energy storage, low utilization rate of V2G mobile energy storage, uncontrollable battery loss and the like, a V2G electric vehicle and a fixed storage battery are constructed into a hybrid energy storage system, and an improved particle swarm optimization algorithm is adopted for optimization. According to the method, the frequency modulation precision, the operation economy and the battery life are synchronously optimized in a fitness function through a double-layer architecture of optimizing the total power through an upper layer and dynamically distributing instructions through a lower layer. Finally, the V2G cluster responds to high-frequency power fluctuation in a millisecond level, and a basic load is supported in a fixed energy storage minute level, so that advantage complementation is formed. According to the invention, the frequency modulation response speed and the renewable energy consumption capability of the system are effectively improved, the operation cost is reduced, and the service life of the battery is prolonged.
Owner:CHANGZHOU UNIV

Supporting capacitor module, motor controller, electric drive system, automobile and electronic equipment

The embodiment of the invention provides a supporting capacitor module, a motor controller, an electric drive system, an automobile and electronic equipment. The supporting capacitor module comprises a first current path passing through the first capacitor bank and a second current path passing through the second capacitor bank. The impedance of the first current path is smaller than that of the second current path in a first frequency interval; in a second frequency interval, the impedance of the first current path is greater than that of the second current path; the first frequency interval is smaller than the second frequency interval; a stray inductance of the first current path is greater than a stray inductance of the second current path. In the ripple current generated when the power switch is turned off, the low-frequency current component mainly passes through the first current path and is absorbed by the first capacitor group, and the high-frequency current component mainly passes through the second current path and is absorbed by the second capacitor group, so that the turn-off instantaneous voltage of the high-frequency power switch can be better stabilized.
Owner:HUAWEI TECH CO LTD

Bipolar transistor and high frequency power amplifier module

A bipolar transistor having a structure capable of thinning a base layer to achieve high speed is provided. A collector layer, a base layer, and an emitter layer are formed on a substrate composed of a compound semiconductor. The emitter layer is disposed inside compared with the edge of the base layer in plan view. A base electrode is disposed on a region of a part of the emitter layer and the base layer to form a path from the inside of the emitter layer to the outside of the base layer in plan view. An insulating film is disposed between a part of the base layer not overlapping the emitter layer and the base electrode. An alloy layer penetrates the emitter layer from the base electrode in the thickness direction and reaches the base layer. The alloy layer contains a part of the constituent elements of the base electrode and the constituent elements of the emitter layer and the above base layer.
Owner:MURATA MFG CO LTD

Pumping unit control system and method

The invention provides a pumping unit control system and method, and relates to the technical field of oil field oil extraction equipment control. According to the system, a control module is connected with a high-precision sampling module and a high-frequency power module; the high-precision sampling module is used for sampling the oil pumping unit based on the oversampling rate to obtain sampling data; the control module is used for determining state data of the oil pumping unit based on the sampling data and switching between an open-loop control mode and a closed-loop control mode based on the state data; and the high-frequency power module is used for starting a motor of the oil pumping unit in a closed-loop control mode. The high-precision sampling module and the high-frequency power module are cooperated to work, so that the working performance of the oil pumping unit is fundamentally improved, flexible starting of the oil pumping unit can be realized, heavy-load starting can be realized at ultra-low frequency, and the oil pumping unit can be effectively controlled on the basis that the original unit installed power of the oil pumping unit is not increased or even reduced. And strong instantaneous overload capacity is provided for the oil pumping unit, so that the oil pumping unit can reliably cope with various special working conditions.
Owner:DAQING HOLLY TECH DEV CO LTD

High-frequency power dividing circuit and antenna module

PendingUS20260113062A1Modulation transferenceTransmissionHigh frequency powerDividing circuits
A high-frequency signal is input to a first node. A high-frequency signal is output from each of a plurality of second nodes. A first branch transmission line connects the first node to each of the plurality of second nodes. The first branch transmission line includes a plurality of cascade-connected dividers, each of which has one input node and two output nodes. At least one of the dividers is an unequal divider with a distribution ratio of 2 or less. The first branch transmission line is configured to equally divide a high-frequency power input to the first node to the plurality of second nodes.
Owner:MURATA MFG CO LTD

Composite energy storage system integrating super capacitor and storage battery and control method

The invention discloses a composite energy storage system integrating a super capacitor and a storage battery and a control method, and relates to the technical field of power electronics and energy storage. The first storage battery pack is connected to the direct-current bus through the first bidirectional DC / DC converter and executes voltage regulation and energy transmission; the second super capacitor bank is connected to the direct current bus through the second bidirectional DC / DC converter and executes high-frequency power exchange and transient response; the first storage battery group and the second super capacitor group are connected in parallel to form a double-energy-storage branch and share the bidirectional alternating current conversion unit with the direct current bus; the control unit controls the first storage battery pack to execute energy scheduling under rated voltage according to the voltage state of the power grid, controls the second super capacitor bank to provide transient power support during voltage sag, and controls the first storage battery pack to output continuous energy to perform power grading compensation; the system provided by the invention realizes the cooperative operation of the double energy storage branches, and has the capability of quick response and dynamic scheduling.
Owner:JIANGSU WEITENG ECOLOGICAL TECH DEV CO LTD

Connection assembly, plasma process flow supply system, plasma process system, and method for operating a plasma process

A connection assembly for a plasma process flow supply system, including a first inner conductor configured to provide a first direct voltage via a first direct current (DC) power supply; a second inner conductor configured to provide a second direct voltage via a second DC power supply; and an outer conductor which surrounds the first and second inner conductor to shield the first and second inner conductor and displays the reference potential of the first and second inner conductor. The connection assembly is configured to be connected to: a plasma process assembly, the first and second DC power supply, and a high frequency (HF) power supply, and / or an impedance adaptation circuit. The connection assembly is configured to guide an HF power signal related to the outer conductor via the first and second inner conductor to supply the plasma process assembly with HF power via the HF power supply.
Owner:TRUMPF PATENTABTEILUNG

High-frequency power coupler for a power converter for an industrial process assembly

The invention relates to a high-frequency power coupler (1) for coupling a plurality of HF input signals in order to form an HF output signal for outputting HF power to an industrial process assembly (100), preferably a plasma process assembly, gas laser excitation, or heating assembly, the HF power coupler having: a. a plurality of HF inputs (11, 12, 13, 14, 15), b. an HF output (7), c. a coupling unit (19), d. an impedance matching line (20) which extends from the coupling unit (19) to the HF output (7) and has a length which is designed to bring about an impedance matching function between the output of the coupling unit and the HF output, and e. an upper mounting plate (23), a middle mounting plate (25), and a lower mounting plate (27), the middle mounting plate (25) being provided between the upper and the lower mounting plate, wherein f. the impedance matching line (20) is provided between the upper and the middle mounting plate and between the lower and the middle mounting plate.
Owner:TRUMPF PATENTABTEILUNG

Condensation cleaning system

The invention discloses a condensation cleaning system which comprises at least one condensation cleaning module, and each condensation cleaning module comprises a condensation module and a cleaning module which correspond to each other. In the condensation module, the polarity of current flowing through a semiconductor refrigeration and heating Peltier patch is changed through a full-bridge converter or a relay to change the refrigeration and heating states of the semiconductor refrigeration and heating Peltier patch, so that the purposes of condensing impurities attached to gas, increasing the temperature and reducing the adhesive force of the impurities on the surface of the condensation module are achieved as required; an ultrasonic transducer is applied in the cleaning module to assist in cleaning impurities attached to the surface of the condensation module, the cleaning purpose is achieved, and meanwhile a half-bridge conversion circuit or a full-bridge conversion circuit is applied in the module to output a high-frequency power excitation source meeting the requirement of the ultrasonic transducer. When the condensation cleaning system is applied to the smoke exhaust pipeline, the quality of gas exhausted out of the pipeline can be effectively improved.
Owner:HUASHENG INTELLIGENT TECHNOLOGY (JIANGSU) CO LTD

Energy storage control method and device based on hydrogen energy, equipment and storage medium

The invention provides an energy storage control method and device based on hydrogen energy, equipment and a storage medium, and belongs to the technical field of hydrogen energy storage, and the method comprises the steps: determining a fluctuation capture window FCW, and for each time slice in the FCW, extracting a response potential vector of the time slice; the response potential vector comprises response potential values of an electrolytic cell hydrogen production unit, a graded hydrogen storage unit and a fuel cell power generation unit in the hydrogen energy storage system in time slices; obtaining a response coupling vector based on the response potential vector corresponding to each time slice and the inter-node coupling gain coefficient matrix; acquiring power grid side power change rate data in the FCW; and generating an operation parameter configuration instruction of each unit of the hydrogen energy storage system based on the response coupling vector and the power grid side power change rate data so as to control each unit. According to the invention, the delay time of each link in the energy conversion process can be reduced, and the suitability of the hydrogen energy storage system and the power grid side power demand under the high-frequency power fluctuation scene is improved.
Owner:TIANJIN PAUWAY POWER EQUIP CO LTD

High-frequency electrotome control device and control system

The embodiment of the invention discloses a high-frequency electrotome control device and a high-frequency electrotome control system. A specific embodiment of the device comprises a control unit configured to control a high-frequency power generator to output high-frequency electric energy; the data acquisition unit is configured to perform multi-dimensional data acquisition on human tissues; the signal acquisition unit is configured to perform signal acquisition on sound waves and perform feature extraction on sound wave signals; the feature extraction unit is configured to perform feature extraction on the tissue impedance information sequence and the human tissue image sequence; the feature fusion unit is configured to perform feature fusion on the acoustic wave feature tensor, the tissue impedance feature tensor and the human tissue feature tensor; the generation unit is configured to generate a high-frequency electrotome control instruction; and the adjusting unit is configured to adjust the output power and perform waveform modulation on the high-frequency electric energy. According to the implementation mode, excessive heat injury in the operation process can be reduced or the cutting and blood coagulation efficiency can be improved.
Owner:BAISHENG MEDICAL

Composite power distribution method and terminal

The invention discloses a composite power distribution method and a terminal, which are applied to a hybrid energy storage system, and comprise an energy unit for processing low-frequency energy exchange and a power unit for processing high-frequency energy exchange, the power grid frequency and the change rate of a grid-connected point are monitored in real time, and the initial required total power issued by a superior system is acquired; judging whether the power grid frequency or the change rate exceeds a respective corresponding preset threshold, if so, skipping a wave filtering link, and generating feed-forward power based on a preset droop coefficient; superposing the initial total demanded power and the feed-forward power to generate final total demanded power at the current moment; based on a signal processing algorithm, decomposing the final required total power into a low-frequency power component and a high-frequency power component; and distributing the low-frequency power component to the energy unit for processing, and distributing the high-frequency power component to the power unit for processing. According to the invention, a working state with coexistence of stability and rapidity can be maintained for various tasks such as frequency modulation, peak clipping and valley filling, power impact suppression and the like.
Owner:FUZHOU ZHIHU ENERGY TECH CO LTD

Plasma treatment method

The present invention provides a plasma treatment method for etching a silicon nitride film isotropically and highly selectively relative to a silicon oxide film. This plasma treatment method is for etching a silicon nitride film by using plasma, and comprises an etching step for etching the silicon nitride film with radicals by using a gas mixture of SF6 gas, H2 gas, and CO2 gas. Furthermore, in the etching step, plasma is generated by high-frequency electrical energy, and no high-frequency bias is applied to a sample stage on which a sample comprising the silicon nitride film has been placed.
Owner:HITACHI HIGH TECH CORP

Power feed-in coupling coil based on high-frequency cavity

The utility model relates to the technical field of high-frequency power coupling transmission, and discloses a power feed-in coupling coil based on a high-frequency cavity, which comprises a bottom plate, the top of the bottom plate is provided with a radio frequency cavity, the left and right sides of the radio frequency cavity are respectively provided with a power optimization mechanism, the top of the bottom plate is fixedly connected with a plurality of fixing plates, and the fixing plates are fixedly connected with the radio frequency cavity. The top of the fixed plate is fixedly connected with a bunching mechanism, the power optimization mechanism comprises a winding coupling coil, the front side of the winding coupling coil is fixedly connected with cables, the front sides of the two cables are fixedly connected with a hardware optimization module, and the top of the bottom plate, namely the front side of the hardware optimization module, is provided with a power distribution module. And a total power module is arranged at the top of the bottom plate, namely the right side of the power distribution module. According to the utility model, the purpose of enhancing the stability and the working reliability of the device is achieved, the phase adjustment precision is improved, and the power transmission efficiency of the device is improved.
Owner:SHANGHAI AIPUQIANG PARTICLE EQUIP

High-frequency power inductance device with self-adaptive heating function

The invention discloses a high-frequency power inductance device with a self-adaptive heat dissipation function, which comprises a protective frame, an overhead cover plate is arranged at the upper end of the protective frame, mounting grooves are formed in the inner sides of the protective frame and the overhead cover plate, a placement plate is movably connected between the protective frame and the overhead cover plate, and the placement plate is movably connected with the protective frame and the overhead cover plate. The number of the placing plates is two, and the two placing plates are symmetrically distributed. The middle shaft rod drives the rotating bevel gear, the multiple sets of linkage bevel gears and the threaded rod to rotate synchronously, so that the position of the movable frame is changed according to rotation of the threaded rod, and in the moving process, the different spacing distances of the two guide plates are accurately controlled and adjusted; according to the inductance device, the winding mode and direction of the wire on the outer side of the guide plate can be flexibly operated according to actual requirements, meanwhile, the limiting inclined faces effectively prevent the wire from being dislocated and falling off, the applicability and flexibility of the inductance device are greatly improved, and diversified use scenes are met.
Owner:滁州市检验检测院

Electromagnetic heating device for an injection molding machine

The utility model relates to the field of heating device discloses an electromagnetic heating device for injection molding machine, including material pipe protective sleeve shell, mix material pipe and electromagnetic heating group, the mix material pipe sets up in material pipe protective sleeve shell inner chamber, electromagnetic heating group sets up in material pipe protective sleeve shell, electromagnetic heating group includes first electromagnetic heating part, second electromagnetic heating part and third electromagnetic heating part, first electromagnetic heating part The second electromagnetic heating part and third electromagnetic heating part are all with control terminal electricity is connected. The utility model is arranged with multiple electromagnetic heating parts on mix material pipe, and each group of electromagnetic heating parts includes independently arranged heating pipe up and down, and the two poles of each heating pipe are connected with external high frequency power respectively, so that the electromagnetic coil generates alternating magnetic field, and the heat pipe generates high heat under the action of alternating magnetic field and transmits to mix material pipe, heats the material in different mixing stages in mix material pipe.
Owner:NINGBO TIANMAO PLASTIC PRODUCTS CO LTD

Plasma chamber with direct coupling of capacitively controlled power to edge ring for voltage equalization at interface between substrate and edge ring

A system including a plasma chamber configured for generating plasma with a lower electrode located within an electrostatic chuck (ESC), and an upper electrode disposed above the lower electrode. The system includes an edge ring surrounding the lower electrode. A main power generator is electrically coupled to the lower electrode and the edge ring via a common node, and is configured to supply a pulsed direct current (DC) power signal to the common node. A variable capacitor is electrically coupled between the common node and the edge ring, wherein the variable capacitor splits the pulsed DC power signal into a bias power signal delivered to the lower electrode and a tunable edge sheath (TES) power signal delivered to the edge ring. A high frequency power source is electrically coupled to the upper electrode and configured to supply a high frequency radio frequency (RE) power signal to the upper electrode.
Owner:LAM RES CORP

High-frequency power coupler for a power converter for an industrial process arrangement

RF power coupler (1) for coupling several RF input signals to one RF output signal, for supplying RF power to an industrial process arrangement (1), preferably a plasma process arrangement, gas laser excitation or heating arrangement, wherein the RF power coupler (1) comprises: a. several RF inputs (11, 12, 13, 14, 15), b. an RF output (17) with a specified RF output impedance (88), c. an impedance matching line (20), d. a coupling unit (19) with a predetermined coupling unit output impedance (81), wherein the coupling unit (19) has: i. a common star point (10), ii. one connection each for one of the RF inputs, iii. each a connecting line (41, 42, 43, 44, 45) extending from each of the terminals of the RF inputs to the common star point (10), wherein the connecting lines each have a connecting line reactance (21), and • wherein the impedance matching line (20) is connected to the star point (10) of the coupling unit (19) and extends from the coupling unit (19) to the RF output (17) and has a predetermined length and impedance between these two ends, • where the specified length differs from a λ / 4 length by a difference length (22), • where the specified impedance differs from a calculated impedance by a differential impedance (26), • where the difference length (22) and the difference impedance (26) each depend on the reactance resulting from the connecting line reactances.
Owner:TRUMPF PATENTABTEILUNG

CVD film formation equipment

To provide a CVD film deposition apparatus that can promote film deposition on inner surfaces, which are difficult to deposit films on. [Solution] A CVD film deposition apparatus comprising a vacuum chamber containing an object to be film-deposited, a gas introduction unit for introducing a raw material gas into an inner space formed by the wall portion of the object to be film-deposited, a cathode electrode positioned outside the wall portion to which high-frequency power is supplied, and an anode electrode positioned in the inner space, wherein a film is deposited on the inner surface of the wall portion in contact with the inner space by plasma CVD under predetermined vacuum conditions by introducing the raw material gas into the inner space and supplying the high-frequency power, wherein a magnet is placed on a part of the outside of the wall portion corresponding to a part of the inner space to generate a stronger magnetic field in a part of the inner space than in other parts, and the inner surface is film-deposited in that state.
Owner:JAPANCREATE

Plasma processing apparatus and method of controlling frequency of source high frequency power

A plasma processing apparatus disclosed in the present invention has a chamber, a substrate support section, a high-frequency power source, and a bias power source. The high-frequency power source generates source high-frequency power for generating plasma in the chamber. The bias power source applies a pulse of bias energy to a bias electrode in each of a plurality of pulse periods. The high-frequency power source sets a source frequency of the source high-frequency power in each of a plurality of phase periods in each of a plurality of overlap periods overlapping the plurality of pulse periods, respectively, in accordance with a change in a degree of reflection. The degree of reflection is determined by using mutually different source frequencies in the same phase period within two or more preceding overlap periods.
Owner:TOKYO ELECTRON LTD