A monolithic electronic device includes a substrate, a semi-insulating, piezoelectric Group III-
nitride epitaxial layer formed on the substrate, a pair of input and output interdigital transducers forming a
surface acoustic wave device on the epitaxial layer and at least one electronic device (such as a HEMT,
MESFET,
JFET,
MOSFET,
photodiode, LED or the like) formed on the substrate. Isolation means are disclosed to electrically and acoustically isolate the electronic device from the
SAW device and vice versa. In some embodiments, a trench is formed between the
SAW device and the electronic device.
Ion implantation is also disclosed to form a semi-insulating Group III-
nitride epitaxial layer on which the
SAW device may be fabricated. Absorbing and / or reflecting elements adjacent the interdigital transducers reduce unwanted reflections that may interfere with the operation of the SAW device.