The invention provides a method for manufacturing a square
quartz substrate, which comprises the following steps of:
cutting a square
quartz substrate blank to be processed into blank pieces by using a
cutting machine, then respectively carrying out profiling contour
grinding on each piece, and carrying out double-sided coarse
grinding and accurate
grinding on two large surfaces of a square
quartz substrate workpiece according to the thickness removal amount and roughness requirements; placing the square
quartz substrate workpiece subjected to double-sided accurate grinding on a side edge
polishing machine carrying table, and
polishing the four side surfaces of the square
quartz substrate workpiece at the same time; the square
quartz substrate workpiece with the side face polished is loaded in a
polishing jig of a double-face polishing
machine, double-face rough polishing, medium polishing and fine polishing are conducted on the two large faces of the square quartz substrate workpiece respectively, and the thickness removal amount, roughness and surface quality requirements of all procedures are met; and the polished square quartz substrate workpiece is placed in an ultrasonic cleaning machine to be cleaned and detected, and the square quartz substrate workpiece is cleaned and packaged after being detected to be qualified. The method is mainly completed by combining the working procedures of single-line
cutting, multi-line cutting, CNC profiling, double-face grinding, side edge polishing, double-face polishing, ultrasonic cleaning and the like, the method is suitable for manufacturing high-flatness, low-roughness and low-defect quartz glass substrates, the complete manufacturing technological process and specification of the quartz glass substrates are established through batch
machining, sampling inspection and full inspection, and the production efficiency of the quartz glass substrates is improved. The
processing efficiency and the yield of the product are improved, and the quartz substrate is particularly suitable for a
photomask plate used in a
semiconductor associated electronic material and belongs to the technical field of ultra-precision
processing.