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Vertical-type capacitor structure and manufacturing method thereof

The invention relates to a vertical-type capacitor structure and a manufacturing method of the vertical-type capacitor structure, and belongs to the technical field of micro-electronic passive devices. The vertical-type capacitor structure structurally and specifically comprises a deep-groove structure, insulating layers, conducting layers and a dielectric layer, wherein the deep-groove structure is located inside a wafer substrate, the insulating layers and the conducting layers are sequentially deposited on the inner side wall of a deep groove, and the dielectric layer is filled between the conducting layers. The insulating layers, the conducting layers, the dielectric layer and the deep groove are the same in height. On the basis of the principle that the area of a capacitor is expanded in the direction perpendicular to the substrate, the area of an plate electrode in the perpendicular direction is utilized, the processes such as sputtering and electroplating are adopted to manufacture a metal plate electrode, and the plate electrode is made of low electrical resistivity materials, like metal. With the combination of a silicon through hole technology, the vertical-type capacitor with a large depth-to-width ratio is achieved. With the combination of a substrate back thinning technology, the vertical-type capacitor structure penetrates through the substrate, the vertical-type capacitor structure can be used as a high-frequency channel between multi-layer chips, the area of the plate can be greatly saved, and the integration level of an integrated circuit is improved.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY
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