1393 results about "Mirror plane" patented technology

The invention discloses an intelligent steel pipe surface defect recognition system based on deep learning, and particularly relates to the technical field of pipe surface defect analysis. An annular polarization light source array and a high-frame-rate CMOS sensor are adopted to synchronously collect visible light and near-infrared multi-polarization images; a surface normal is calculated based on Stokes parameters, mirror surface suppression and diffuse reflection enhancement are realized, a defect candidate area is generated by fusing multi-scale Laplacian pyramid residual error and Renyi entropy segmentation threshold positioning, multi-physical quantity registration is completed through white light interference and infrared thermal imaging, a six-channel feature cube is constructed, and a three-dimensional image is obtained. According to the method, space, spectrum and thermal characteristics are jointly extracted in the multi-head attention convolutional neural network, the confidence coefficient is evaluated in combination with Jensen-Shannon divergence, and the polarization angle and the focal length are dynamically adjusted according to the confidence coefficient, so that closed-loop parameter self-optimization is realized, and the micro-scale pitting corrosion and millimeter-scale crack detection precision is remarkably improved.

The invention discloses a multi-mode end point detection system and method for a semiconductor dry process, and relates to the field of gas concentration detection. A gas absorption cell; the reference light path adjusting unit comprises an adjustable attenuator used for adjusting signals; the first photoelectric detector is used for detecting a transmission signal; the second photoelectric detector is used for detecting a reference signal; the lateral scattered light detector is used for detecting a scattered signal of the particulate matters in the gas absorption tank; and the signal processing unit is in signal connection with the first photoelectric detector, the second photoelectric detector and the lateral scattering light detector and is used for performing compensation calculation on the transmission signal based on the reference signal and the scattering signal so as to obtain a corrected gas absorption signal. By adopting the scheme, measurement signal distortion caused by optical mirror surface pollution and particulate matter scattering interference in a semiconductor tail gas optical detection technology is avoided.

The invention discloses an indoor scene three-dimensional reconstruction method based on deep fusion and confidence modeling, and belongs to the technical field of computer vision. According to the method, composite data frames such as a color image, a depth map, an IMU (Inertial Measurement Unit) and a camera attitude are comprehensively utilized to carry out regional three-dimensional reconstruction on an indoor scene: firstly, the scene is divided into a smooth region (such as a wall, a ground, a ceiling, a glass plane, a mirror surface, a blackboard and other planes) and a complex curved surface region; aiming at the smooth area, adopting geometric prior guide plane fitting provided by a visual large model, and combining sensor attitude information to quickly reconstruct a regular plane model; for a complex curved surface area, a multi-frame point cloud fusion strategy is adopted to accumulate different view angle information, and a deep residual error refining network is utilized to recover curved surface details, so that a high-precision curved surface model is obtained. According to the method, the three-dimensional structure of the indoor scene can be efficiently reconstructed, the global framework of the smooth area is reserved, and the details of the surface of a complex object are depicted in detail.

The invention relates to the technical field of machine vision and optical detection, in particular to a tea color automatic evaluation method and system based on machine vision. The method comprises the following steps: constructing a stable and repeatable optical measurement environment and calculating radiation baseline parameters; performing multi-band polarization sequence imaging on the tea sample to obtain original data with spectrum and structural characteristics; separating mirror surface and diffuse reflection components on the surfaces of the tea leaves, and performing spectrum consistency correction by combining a radiation baseline; performing multiband spectrum reconstruction and normalization processing on the basis of the corrected diffuse reflection image, mapping to a CIE Lab color space, extracting pixel-level brightness, chromaticity and color distribution statistical indexes, and generating a color feature vector in combination with spatial weighting matrix optimization; a final score is calculated by constructing a quantitative evaluation and grade judgment model and integrating perception color separation, drying calibration color separation and a penalty term, and a grade result is output. According to the method, objective, accurate and automatic evaluation of the color of the tea leaves is realized.

The invention discloses a primary and secondary mirror combined detection system and method for a beam shrinking system, and belongs to the technical field of optical detection.The method comprises the steps that a first micro-spherical mirror and a second micro-spherical mirror are arranged, reflection light spots are captured through an interferometer, the position offset is calculated, and a first control instruction for adjusting the pose of a secondary mirror is generated; a dual-band light source is integrated in a detection light path, wavefront data and alignment monitoring data are collected, and temperature drift is corrected to obtain effective combined wavefront; an error separation model is constructed based on the primary mirror compensator parameter and the Zernike aberration coefficient, and a primary mirror surface shape error component and a secondary mirror offset error component are decoupled and separated by using a preset aberration coupling coefficient; feeding the error component back to a polishing process and a displacement table for closed-loop iterative correction until the RMS value and the PV value of the effective combined wavefront meet a preset imaging quality index; through precise positioning, error correction and decoupling separation, the precision and efficiency of primary and secondary mirror combination detection are improved, and targeted correction is realized.

A micron-sized speckle preparation method for quasi-in-situ OIM-DIC mesoscopic strain field analysis comprises the following steps: (1) polishing the surface of a sample to be detected to obtain a bright and scratch-free mirror surface; (2) preparing Si powder turbid liquid; (3) dipping speckles of a sample to be detected in the Si powder turbid liquid to obtain micron-sized speckles; and (4) observing and shooting speckle morphology, and if Si particles are uniformly distributed and dispersed, applying the Si particles to quasi-in-situ OIM-DIC mesoscopic strain field analysis. The method is simple, convenient and rapid, low in operation and construction cost, high in practicability, good in particle dispersity, high in precision, more suitable for calculation of a quasi-in-situ OIM-DIC mesoscopic strain field, controllable in preparation process, low in cost and free of damage to the surface of a sample, the definition and stability of speckle characteristics are remarkably improved, DIC mesoscopic micron-scale operation under a quasi-in-situ OIM mechanical test can be effectively achieved, and the method is suitable for large-scale industrial production. And the grain and mesoscopic strain field information is successfully coupled.

The invention provides a large-mirror-surface MEMS two-dimensional scanning micromirror which comprises a fast scanning shaft, a slow scanning shaft, a balance frame with multiple turns of coils, a micromirror surface and reinforcing ribs on the back face of the micromirror, the fast scanning shaft extends in the first direction, one end of the fast scanning shaft is connected with the micromirror surface, the slow scanning shaft extends in the second direction, and the other end of the fast scanning shaft is connected with the micromirror surface. The other end is connected with a balance frame with a plurality of turns of coils; the slow scanning shaft extends in a second direction perpendicular to the first direction, one end of the slow scanning shaft is connected with the balance frame with the multi-turn coil, and the other end of the slow scanning shaft is used for being connected with an external substrate; the balance frame with a plurality of turns of coils is of a hollow structure and is arranged around the mirror surface of the micro-mirror; the reinforcing ribs on the back face of the micro-mirror are of an oval hollow structure and are fixedly arranged on the lower surface of the mirror face of the micro-mirror, and the reinforcing ribs are connected in the first direction and the second direction to form a supporting structure. According to the structure, the rigidity of the mirror surface is greatly improved, and the capability of resisting external force interference is remarkably enhanced.

The invention belongs to the field of solar photovoltaics, and provides a CCLFR concentrating solar photovoltaic system and power generation equipment. The CCLFR concentrating solar photovoltaic system comprises a CCLFR concentrator, a supporting structure and PV assemblies which are arranged from bottom to top, wherein the PV assemblies are symmetrical left and right; the CCLFR condenser is of an axisymmetric structure and is a condensing mirror field formed by alternately arranging a plurality of plane mirrors; each plane mirror is used for reflecting incident light to the surface of the corresponding PV assembly; wherein the layout of each plane mirror is related to the width of the battery, the placement height of the photovoltaic battery, the inclination angle of the photovoltaic battery, the inclination angle of the mirror surface, the X-axis coordinate value of the mirror surface end point, the included angle between the reflection light of the mirror surface end point and the X axis, the width of the mirror surface, the width of the mirror field and the transverse distance between two adjacent mirror surfaces.

The invention relates to the technical field of high-precision optical detection, in particular to a fixing assembly for installing a lens measuring instrument and the measuring instrument, and the fixing assembly comprises a rooting block which is used for being connected to the back surface of a lens in a gluing manner; the base is connected with the rooting block through a fastening assembly, the base is provided with at least three first contacts opposite to the back face of the lens and at least two second contacts opposite to the side face of the lens, and the fastening assembly is configured to be capable of generating first elastic force on the base in the first direction; and a second elastic force in a second direction. The rooting block is adhered to the back surface of the lens, so that a mechanical attachment point is prevented from being found on a vulnerable optical surface; meanwhile, the base is elastically connected with the rooting block through the fastening assembly instead of being rigidly and directly fixed, and the base elastically abuts against the back face and the side face of the lens through the first contact and the second contact respectively, so that self-adaptive accurate positioning of the base with the mirror face as the benchmark is achieved.

The invention relates to the technical field of hot melting salt storage, and discloses a photo-thermal system mirror surface micro-angle linkage adjustment method based on thermal perception, which breaks through the limitation of traditional single data monitoring and experience judgment through multi-source data fusion and triple physical constraint decoupling, and remarkably improves the fault diagnosis accuracy. And secondly, the problem of poor model timeliness caused by traditional static partitioning and long-period updating is solved through dynamic partitioning deployment and real-time contribution identification, so that the contribution degree matrix can be updated in real time along with the mirror surface state. Accurate tracking of parameters of different time scales and safe rehearsal of a control strategy are achieved through parameter hierarchical updating and digital twinborn verification, and parameter aliasing and optimization failure caused by a traditional single updating strategy are avoided.

The invention discloses an optical multi-pass pool modeling and optimizing method, and belongs to the technical field of optical detection. In order to solve the problems that an existing multi-pass cell is too long in length, large in size and inconvenient to carry or transfer, and meanwhile, the mirror surface utilization rate of the multi-pass cell is low, a light path in a multi-pass cell system is accurately modeled by adopting a light ray tracing principle, and the system does not depend on traditional paraxial approximation. The problems that in the prior optical design, due to the fact that equipment is large in size, carrying is inconvenient, and due to the fact that aberration is neglected due to paraxial approximation, large deviation is generated between a calculated value and an actual value are solved. In addition, the light spot distribution is automatically optimized through the genetic algorithm, and the design and debugging time of the optical system is shortened. According to the innovative design strategy, the utilization rate of the reflector is improved, space waste is avoided, the sensitivity and accuracy of a reflection system can be remarkably improved, and further development of the optical multi-pass cell technology is promoted.

The invention relates to the technical field of optical detection, and particularly provides a mirror surface detection method for a large-aperture spliced telescope, which comprises the following steps of: emitting light from a focus position by using a light source, reflecting the light through a mirror surface of the large-aperture spliced telescope to enter a discrete lens arranged at the rear end, and splitting the light by using a spectroscope to obtain a split light beam; the first light beam enters the camera to obtain interference fringes of the splicing seams, the second light beam enters the optical switch to carry out aperture coding, and the mirror surface precision of the large-aperture spliced telescope can be determined according to the code of each splicing seam and the confocal and co-phase information of the sub-reflectors on the two sides of the splicing seam. According to the invention, splicing seam detection is carried out through focus reverse auto-collimation, the problem that an oversized collimator is needed traditionally is avoided, point-by-point detection is carried out on the sub-reflectors according to the splicing seam, and confocal and co-phase detection of the adjacent sub-reflectors is realized according to interference fringes.

The invention provides an airborne high-speed image hierarchical compression and encrypted storage method and system, electronic equipment and a storage medium, and relates to the technical field of airborne image processing and data security storage. The method comprises the following steps: acquiring an airborne high-speed image sequence, synchronously monitoring surface pneumatic pressure pulsation data of an aircraft, converting the surface pneumatic pressure pulsation data into a deformable mirror surface group curvature control signal, adjusting mirror surface deformation parameters to compensate optical path wavefront distortion, and generating a stable image; air vortex characteristics are extracted to calculate an intensity distribution diagram, turbulence levels are divided, and corresponding compression strategies are adopted; extracting vortex phase features of each level to generate a dynamic key, and encrypting the layered compressed data stream; according to the invention, layered high-efficiency compression and dynamic encryption storage of airborne high-speed images in a turbulent environment can be realized, and data processing effectiveness and storage security are guaranteed.

The invention relates to an optical lens mounting device and method, and belongs to the technical field of optical system assembly.The device comprises two lens bracket supporting and adjusting assemblies and lens supporting and adjusting assemblies, the two lens bracket supporting and adjusting assemblies are used for supporting the bottom and the top of a lens bracket respectively, and the lens supporting and adjusting assemblies are used for supporting the lens bracket. The heights of the positions of the bottom and the top of the spectacle frame are respectively adjusted; the lens supporting and adjusting assemblies are used for supporting the optical lens and adjusting the height of the position where the optical lens is located, the lens supporting and adjusting assemblies are located between the two lens frame supporting and adjusting assemblies, and the distance between the lens supporting and adjusting assemblies is adjustable, and the technical problems that in the prior art, operation safety is low, assembling precision is poor, efficiency is low and the mirror surface pollution risk is high can be solved.

The invention discloses a wafer high-precision alignment mechanism, and relates to the technical field of semiconductor manufacturing and packaging, the wafer high-precision alignment mechanism comprises a casing and a vertical box integrally and fixedly connected to the upper part of the rear side of the casing, a cantilever is fixedly connected to the center of the upper part of the front side of the vertical box, and a detection mechanism for performing optical detection on a wafer is arranged between the cantilever and the upper wall of the casing. A circular movable hole is formed in the upper wall of the machine shell, the central axis of the movable hole is located on the central axis face of the cantilever, and an alignment mechanism used for adjusting the position of the wafer is arranged in the movable hole. By arranging the cleaning assembly and adopting a closed-loop design combining blowing and suction, the invention has the following remarkable beneficial effects: firstly, the structure forms an air curtain barrier with directional flow through the synergistic effect of positive-pressure blowing and negative-pressure suction, not only can dust on the mirror surface of the optical probe be continuously removed, but also pollutants can be actively discharged from the inside of equipment, so that the cleaning efficiency is greatly improved; the secondary pollution is fundamentally avoided, and the thoroughness and reliability of cleaning are greatly improved.

The invention relates to the technical field of optical precision measurement, in particular to a rotation and translation absolute calibration method based on a nerve radiation field, a medium and equipment. The method comprises the following steps: acquiring at least three groups of interference measurement data of a measured mirror under original, rotation and translation poses by using an interference measurement system to be calibrated, inputting pixel coordinates and position coding information in the data into a neural radiation field network, optimizing network parameters through a self-supervised training strategy, and completing calibration of a reference mirror surface shape. Compared with a traditional Zernike method, the scheme adopts a neural radiation field to construct a double-branch network, can adaptively learn complex surface shape space distribution, and improves medium-high frequency error separation precision; the error of the reference mirror and the measured mirror is synchronously and directly output by double branches without successive dependence, so that error transmission and accumulation are avoided; the self-supervised training mechanism implicitly compensates pose deviation and noise interference through redundancy constraint, and shows higher engineering robustness.

The invention discloses a three-degree-of-freedom adjusting mechanism for finely adjusting the normal direction of a reflecting mirror. The three-degree-of-freedom adjusting mechanism comprises a mirror frame, a translation table, a pitching table, a rotating table, a base and a translation table top seat, wherein the rotating table is rotatably mounted on the base; a rotating table is arranged on the base, a rotating protruding block is arranged on one side of the rotating table, two protruding bases are further arranged on the base, the rotating protruding block is located between the two protruding bases, rotating jackscrews are transversely arranged on the protruding bases in a threaded and penetrating mode, and the two rotating jackscrews abut against the two sides of the rotating protruding block respectively. The pitching table can be installed on the rotating table in an up-down overturning mode, a pitching jackscrew is further arranged on the pitching table in a threaded and penetrating mode, and the lower end of the pitching jackscrew abuts against the rotating table; the translation table is installed on the pitching table, the mirror frame is transversely arranged on the translation table in a sliding mode, a translation jackscrew penetrates through the translation table in a threaded mode, and one end of the translation jackscrew abuts against the mirror frame. According to the invention, the rotation angle and the pitching angle of the mirror surface of the reflector and the translation adjustment along the normal direction of the mirror surface can be completed.

The invention belongs to the technical field of defect detection, and particularly relates to a mirror surface type surface defect detection method and system, a laser device is used for emitting a laser beam to a detected mirror surface type surface, the laser beam is reflected on a receiving plate through the detected mirror surface type surface to form an elliptic arc scanning path, and the elliptic arc scanning path is discretized into a plurality of continuous path points; obtaining a theoretical reflection light spot track of the roi area to be detected on the receiving plate, dividing the theoretical reflection light spot track into multiple equal parts, and establishing a mapping relation with each path point; the method comprises the following steps: controlling a laser to scan a detected mirror surface type surface along an elliptic arc scanning path, identifying path points corresponding to defects, recording actual position coordinates on a receiving plate, and obtaining equal division point positions on a theoretical reflection light spot track; acquiring an optical path offset, and determining normal vector deflection information of the defect at the surface of the detected mirror surface; obtaining a three-dimensional space coordinate of the defect; and constructing a three-dimensional model of the detected mirror surface type surface, and marking defect positions.

The invention relates to a micromirror element (200) as it can be used in micro-electro-mechanical systems (100), in particular for use in equipment (1) for semiconductor technology, and to a corresponding micro-electro-mechanical system (100) with at least one micromirror element (200). The micromirror element (200) comprises a mirror substrate (210) and a reflective coating (220) applied to the mirror surface (215) of the mirror substrate (210) which is intended to reflect, wherein at least one intermediate layer (230) is provided between the mirror substrate (210) and the reflective coating (220), wherein the at least one intermediate layer (230) is designed such that the at least one intermediate layer (230) together with the reflective coating (220) can be regarded as a combined layer (240) in relation to the mirror substrate (210) and the combined coefficient of thermal expansion of the reflective coating (220) and the at least one intermediate layer (230) corresponds essentially to the coefficient of thermal expansion of the mirror substrate (210) at least for a predetermined temperature.

A Kaleidoscopic Geometric Vision Platform (KGVP) that transforms three-dimensional (3D) machine vision through an optical system that creates multiple virtual laser projectors from a single moving component. A spindle mirror mechanism (SMM) rotates a reflective surface to sweep collimated laser beams in circular patterns. These beams strike a series of kaleidoscopic mirror facets (KMFs) arranged concentrically around the SMM in a concave configuration. Each KMF redirects the rotating beam, creating a virtual projector with a distinct origin point and sweep direction. As the SMM completes one rotation, it generates N distinct laser trajectories (where N equals the number of KMFs), each sweeping from a different virtual origin point. Event-based cameras / sensors positioned strategically around the KMFs detect laser light reflected from object surfaces with microsecond precision. The KGVP triangulates 3D surface coordinates by determining correspondence between detected light and specific virtual projectors based on precise timing information.

Embodiments of the invention disclose an image processing method and apparatus, and an electronic device. The method comprises the steps of obtaining a first image block including a mirror surface area from a first panoramic image; determining a corresponding area of the to-be-removed object in the first image block; removing the to-be-removed object from the first image block based on the corresponding area of the to-be-removed object by using an image restoration model, and performing image restoration on the first image block after the to-be-removed object is removed to obtain a second image block; and replacing the first image block in the first panoramic image with the second image block to obtain the second panoramic image, so that the to-be-removed object in the panoramic image can be removed, the condition of mistakenly removing the object can be avoided, and seamless image reconstruction can be realized through accurate image restoration.

The invention provides a composite light spot laser processing head and a processing method, and belongs to the technical field of laser processing. The composite light spot laser processing head comprises a light source, a collimating lens, a light splitting cone lens and a multi-curvature focus lens, the light source, the collimating lens, the light splitting cone lens and the multi-curvature focus lens are sequentially arranged in the direction of a light beam emitted by the light source, a center hole is formed in the center of the light splitting cone lens, and a light incident surface of the multi-curvature focus lens is a convex aspheric cambered surface. The aspheric cambered surface comprises a first mirror surface area and a second mirror surface area which are arranged from inside to outside in the radial direction, and the mirror surface curvature of the first mirror surface area is smaller than that of the second mirror surface area. By the adoption of the composite light spot laser processing head, point-ring composite light spots can be stably generated, meanwhile, the structural complexity and the manufacturing cost are reduced, and structural miniaturization and improvement of scene use adaptability are achieved.

Provided are a detection circuit and an image generation device capable of accurately generating a detection signal corresponding to a change in a scanning speed. Mirror detection circuit (detection circuit) inputs a voltage generated in a monitoring piezoelectric element for monitoring an operation state of a second scanning part (light deflecting element) to a gate of field effect transistor constituting a source follower circuit, and generates a detection signal corresponding to expansion or contraction of the piezoelectric element from a source voltage of field effect transistor.

The invention discloses a visual inspection sorting method and system for surface defects of intelligent electric meter shell injection molded parts, and relates to the technical field of visual inspection, and the method comprises the following steps: selecting an intelligent electric meter shell as a reference part, dividing the surface of the shell into a plurality of functional partitions, collecting structured light form and brightness information, and obtaining a reference appearance map; and positioning a to-be-detected electric meter shell to a position consistent with the reference part, obtaining the online three-dimensional form and brightness response of each functional zone, mapping the online three-dimensional form and brightness response to the reference appearance map, marking a stable mirror surface with high brightness, and interpolating along an observation track to generate an online appearance map. According to the invention, through functional partition sampling layout of a window sealing area, a wiring terminal area, a stud and reinforcing rib area, a nameplate and two-dimensional code area and a general decoration side wall area, and in cooperation with double-light-source collection of diffused light and oblique incident light combined with structured light, a reference appearance map containing a highlight tolerance mask is constructed; stable characterization of mirror reflection and a transparent window is realized, and false detection caused by high brightness of the mirror surface is remarkably reduced.

Mounting device for receiving at least one mirror with at least one marking on a mirror surface for checking at least one pupil axis in an arc with sight and vertical plane of the chord movement, characterized in that at least one mirror can be firmly connected or screwed to the central part of the arc by means of the mounting, wherein at least one inclination angle of the mirror with respect to at least one axis in an angular range ≥ 0° can be selected in the orientation of a mirror relative to the central part.

The invention relates to the technical field of space telescope calibration, in particular to a telescope pointing calibration method based on optical fiber interconnection, which comprises the following steps: providing reference light beams in different directions, enabling each lens to correspondingly receive the reference light beams by adjusting the lens pointing, splitting the reference light beams received by the lenses through an optical splitter, and obtaining a split beam; one beam is aligned and corrected through a camera, and the other beam is coupled into an optical fiber to record direction information; the calibration light beams are reversely emitted by the optical fiber through the optical switch and are emitted by the lens, each reference light beam in the known direction is reproduced, a reference light field is formed, the telescope to be calibrated is placed in the reference light field, the miss distance of each calibration light beam in the known direction on the mirror surface of the telescope to be calibrated is measured, and the pointing error is calculated and corrected according to the miss distance. The optical fiber network is used for establishing the unique mapping relation between the space direction and the optical fiber channel, miss distance measurement is carried out through dynamic time-sharing reproduction, and the problems of mechanical accumulative errors and the like existing in a traditional mechanical calibration method are solved.

The invention belongs to the technical field of optical absorption cell parameter design, and particularly relates to an optical absorption cell design method and system based on PSO particle swarm optimization, and the method comprises the steps: S1, building a PSO model, defining each particle as an optical path, setting the number of particles and the maximum number of iterations, discretizing an absorption cell optical mirror surface into a movable grid, and defining the moving direction of the particles; s2, initializing the position and speed of a particle swarm based on the curvature radius, spacing and incident angle parameters of a reflector of the absorption cell; s3, performing optical simulation on each particle, and calculating a fitness value reflecting the optical length, the absorption cell volume and the light spot coverage based on a simulation result; updating an individual historical optimal path and a global historical optimal path; s3 is repeated after the speed and the position are updated and the state of each particle is adjusted; and S4, outputting the optical length, the volume and the lens number of the absorption cell corresponding to the final global optimal path. According to the method, efficient search can be carried out in the parameter space, and a globally optimal or approximately optimal solution is found.

The invention discloses a PMD three-dimensional measurement method of a self-adaptive fringe projection mode. The method comprises the following steps: firstly, based on the surface topography characteristics of a measured mirror surface element, acquiring phase gradient distribution of the measured mirror surface element under a camera visual angle; secondly, according to the phase gradient distribution, self-adaptively modulating the local period of the projected fringes, so that the structured light fringes formed on the imaging surface of the camera after being reflected by the measured surface are integrally kept uniform and have moderate sparsity; projection is carried out by using the adaptive fringe pattern, a fringe image modulated by a measured surface is collected, and a corresponding relation between camera pixels and projection pixels is established; and finally, reconstructing the three-dimensional shape of the measured mirror surface element through ray tracing. According to the method, the local density of the stripes on the projection screen is adaptively adjusted according to the angle transformation characteristic of the reflected light of the measured surface, so that the measured structured light stripes in the visual angle of the camera are uniformly distributed and are properly sparse, and the PMD measurement precision is maximized under the condition that the morphology analysis integrity is ensured.

The invention relates to the technical field of laser communication, and discloses a deflection-maintaining mirror, a coarse tracking pointing mechanism and laser communication terminal equipment, so that the deflection-maintaining mirror has high polarization-maintaining performance and high thermal stability. The deflection-maintaining oscillating mirror comprises a mirror frame and a reflecting mirror, a mounting hole is formed in the middle of the mirror frame, and the reflecting mirror is mounted in the mounting hole. The mirror surface of the reflecting mirror is provided with a polarization-maintaining reflecting film layer group, the polarization-maintaining reflecting film layer group comprises a first reflecting film layer and a multi-layer compensation dielectric film layer which are stacked, the first reflecting film layer is located between the multi-layer compensation dielectric film layer and the mirror surface of the reflecting mirror, the reflectivity of the first reflecting film layer to laser with the wave band of 800-1570 nm is larger than 99%, and the reflectivity of the second reflecting film layer to laser with the wave band of 800-1570 nm is larger than 99%. The overall reflectivity of the polarization-maintaining reflecting film layer set is larger than 99%, and the overall thickness of the polarization-maintaining reflecting film layer set is smaller than or equal to 600 nm.