The invention discloses a high-resolution and high-flux small-angle
scatterometer which comprises a focus lens which is an
ellipsoid multilayer film focus lens, the
optical surface shape of the focus lens is determined by an
ellipsoid, and a
light source and a
detector are arranged at the positions of a first focus and a second focus of the
ellipsoid respectively. The focusing lens focuses the X-
ray from the
light source to the
light sensing plane of the
detector, and the focus of the straight-through light falls on the plane of the
detector. According to the invention, the ellipsoid multilayer film focus lens is introduced to form a
confocal light path, and the
light source and the detector are respectively located at two focuses of the ellipsoid. Photons
cut off by a traditional slit are actively collected, focused and utilized, and the
luminous flux is greatly improved while the
high resolution is kept; the
light spot size d is matched with the pixel size of the detector, so that the
light spot size d is controlled, and the
light spot size d cooperates with the distance L to determine the
angular resolution. In this way, the resolution performance of the device can be precisely customized, and the
angular resolution and the incident
luminous flux can be improved at the same time.