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53 results about "Process variation" patented technology

Process variation is the naturally occurring variation in the attributes of transistors (length, widths, oxide thickness) when integrated circuits are fabricated. The amount of process variation becomes particularly pronounced at smaller process nodes (<65 nm) as the variation becomes a larger percentage of the full length or width of the device and as feature sizes approach the fundamental dimensions such as the size of atoms and the wavelength of usable light for patterning lithography masks.

Lithographic apparatus and device manufacturing method

A lithographic apparatus is provided that uses an array of individually controllable elements to pattern the beam of radiation. The critical dimension uniformity of a substrate patterned using the apparatus is improved by adjusting the pattern data provided to the array of individually controllable elements to compensate for process variation.
Owner:ASML NETHERLANDS BV +1

Dynamic temperature backside gas control for improved within-substrate process uniformity

A method and apparatus are provided to control the radial or non-radial temperature distribution across a substrate during processing to compensate for non-uniform effects, including radial and angular non-uniformities arising from system variations, or process variations, or both. The temperature is controlled, preferably dynamically, by flowing backside gas differently across different areas on a wafer supporting chuck to vary heat conduction across the wafer. Backside gas flow, of helium, for example, is dynamically varied across the chuck to control the uniformity of processing of the wafer. Ports in the support are grouped, and gas to or from the groups is separately controlled by different valves responsive to a controller that controls gas pressure in each of the areas to spatially and preferably dynamically control wafer temperature to compensate for system and process non-uniformities.
Owner:TOKYO ELECTRON LTD +1

Integrated circuit layout design methodology with process variation bands

A system for analyzing IC layouts and designs by calculating variations of a number of objects to be created on a semiconductor wafer as a result of different process conditions. The variations are analyzed to determine individual feature failures or to rank layout designs by their susceptibility to process variations. In one embodiment, the variations are represented by PV-bands having an inner edge that defines the smallest area in which an object will always print and an outer edge that defines the largest area in which an object will print under some process conditions.
Owner:SIEMENS PROD LIFECYCLE MANAGEMENT SOFTWARE INC

Ssta with non-gaussian variation to second order for multi-phase sequential circuit with interconnect effect

In the present invention the issue of SSTA in multi-phase sequential circuit with cross-talk in consideration of non-uniform timing constraint and process variations up to the 2nd order is proposed. Use forward breadth first search to calculate the accumulated probabilities at each node for clock phases and edge probability with respect to input and output clock phases, followed by backward depth first traversal to find all critical paths with their probabilities greater than user specified threshold. A method is proposed to pre-characterize the timing library including second order variations. For cross-talk, the poles and residues of admittance matrix and voltage transfer are carried out to 2nd order variations. Effective capacitances and waveforms at interconnect input or driver's immediate output are calculated to 2nd order variations. Delays at victim outputs are then calculated to 2nd order variations and fed back to SSTA, the probability of path occurrence can be calculated accurately.
Owner:SAGE SOFTWARE

Security application using silicon fingerprint identification

InactiveUS20060236123A1Reducing a bit error rate of the identification valueUnauthorized memory use protectionHardware monitoringSemiconductorSilicon
A method for using an identification value for a security application is disclosed. The method may include the steps of (A) generating the identification value based on a plurality of semiconductor fabrication process variations, (B) generating a key by reducing a bit error rate of the identification value, wherein the key may not be available external to the security application and (C) generating an output signal by one of (i) encoding and (ii) decoding an input signal in response to said key.
Owner:AVAGO TECH WIRELESS IP SINGAPORE PTE

Optical proximity correction method and device

The embodiment of the invention discloses an optical proximity correction method and device. The optical proximity correction method comprises the following steps: manufacturing a test mask; obtaining wafer data under the current photoetching condition by using the test mask; establishing an optical proximity correction model and a process variation bandwidth model by using wafer data; correcting the target graph according to the optical proximity correction model and the process variation bandwidth model to respectively obtain a first corrected graph and a second corrected graph; calculating a difference value between a first simulation contour of the first correction graph and a second simulation contour of the second correction graph; and adjusting the correction mode of the target graph according to the size of the difference value. According to the technical scheme provided by the embodiment of the invention, variation possibly caused by the process variation bandwidth is considered during correction, a photoetching process window is enlarged, and the yield of products is improved.
Owner:CHANGXIN MEMORY TECH INC

Method for analyzing interconnect process variation

The invention provides a method for analyzing interconnect process variation. A method and a corresponding system for analyzing process variation and parasitic resistance-capacitance (RC) elements in an interconnect structure of an integrated circuit (IC) are provided. First descriptions of parasitic RC elements in an interconnect structure of an IC are generated. The first descriptions describe the parasitic RC elements respectively at a typical process corner and a peripheral process corner. Sensitivity values are generated at the peripheral process corner from the first descriptions. The sensitivity values respectively quantify how sensitive the parasitic RC elements are to process variation. The sensitivity values are combined into a second description of the parasitic RC elements that describes the parasitic RC elements as a function of a process variation parameter. Simulation is performed on the second description by repeatedly simulating the second description with different values for the process variation parameter.
Owner:TAIWAN SEMICON MFG CO LTD
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