The present application relates to the technical field of
semiconductor manufacturing, in particular to a self-
adaptive matching control method and
system for
plasma process. The method comprises: synchronously collecting multiple parameters such as
incident wave power, reflected
wave power, phase and air pressure in the process chamber in real time; inputting the parameters into a pre-trained self-
adaptive algorithm model; solving the optimal cooperative adjustment amount and adjustment timing for adjusting the
radio frequency power, frequency and the
capacitor or
inductor of the matching device by the model in real time; generating a control instruction according to the result to cooperatively drive multiple actuators to move synchronously, thereby realizing
impedance matching. The
system comprises corresponding functional modules. Through real-time sensing of multiple parameters and cooperative optimization
algorithm combined with high-precision
synchronous control, the present application realizes
millisecond-level fast matching, significantly reduces power reflection and improves process consistency; and with the help of
online learning and self-adaptive mechanism, the
system can continuously adapt to equipment aging and
process changes, and has high intelligence and reliability.