The invention relates to the technical field of power
semiconductor packaging, in particular to a multi-stage modular packaging method of an MARX pulse power generator, comprising a
copper substrate and at least one sub-packaging unit fixed on the
copper substrate; the sub-packaging unit comprises a
DBC substrate and a shell, and the shell is connected with the
DBC substrate to form a hollow cavity; a high-
voltage SiC
MOSFET chip, a high-
voltage SiC SBD
chip, an integrated
capacitor and a
DBC substrate are arranged in the hollow cavity, the bottom face of the DBC substrate is connected with the DBC substrate, the high-
voltage SiC
MOSFET chip, the high-voltage SiC SBD chip and the integrated
capacitor are arranged on the top face of the DBC substrate, and the high-voltage SiC
MOSFET chip, the high-voltage SiC SBD chip and the high-voltage
energy storage capacitor are electrically connected through bonding wires. And other gap parts of the hollow cavity are filled with
silica gel. According to the
Marx generator, each stage of independent
subunit packaging of the
Marx generator is formed by adopting modular packaging, the design of a driver is simplified, the electrical complexity caused by series connection of multiple devices is reduced, and the
Marx generator has good expansibility and flexibility.