The invention discloses a phase external synchronization method of a
radio frequency power supply in the technical field of
radio frequency power supplies, which comprises the following steps: providing a synchronous
clock by an
external reference clock source, and distributing the synchronous
clock to a master and a slave through a synchronous interface to serve as a
system synchronous clock of an internal DDS (
Direct Digital Synthesizer) and an ADC (
Analog to Digital Converter); the slave sends out a
synchronizing signal according to the received host test
signal, calculates path inherent
delay according to the
phase difference between the test
signal and the
synchronizing signal and stores the path inherent
delay; the slave generates an ideal reference signal, an actual
radio frequency signal is sampled through an ADC, an actual
baseband signal is obtained through a DDC module, a
phase error is solved after a complex error is calculated, a
phase correction value is output through a
PID controller, and a final offset value is obtained by combining a target phase and path inherent
delay and written into a DDS
phase offset register in real time. According to the phase external synchronization method, through external clock source sharing,
path delay automatic calibration and closed-loop
phase control, the problems that a traditional
simulation PLL is insufficient in static precision and poor in dynamic stability are solved, and dynamic high-precision stable synchronization is achieved.