The invention relates to the field of
radio frequency power supplies, in particular to a
radio frequency power supply frequency tuning dynamic tracking method and
system, and the method comprises the following steps: S1, generating a
frequency modulation signal based on the initial carrier frequency and the frequency of a preset modulation
signal; s2, carrying out
coupling sampling on the
radio frequency signal which is output by the radio frequency power supply and is subjected to power amplification, carrying out filtering
processing on the sampled signal, extracting corresponding signal components, and respectively calculating corresponding
reflection coefficient amplitudes; s3, the corresponding
reflection coefficient amplitudes are compared, and the minimum
reflection coefficient amplitude is selected; s4, taking the frequency corresponding to the minimum reflection coefficient amplitude as a new carrier frequency, and obtaining a new first
sideband frequency and a second
sideband frequency based on the new carrier frequency; and S5, repeatedly executing the steps S1 to S4 according to the updated frequency. According to the scheme, through loop iteration updating of the carrier frequency and the
sideband frequency, the real-time detection and tracking capability of the reflection coefficient amplitude is achieved, and the tuning time is remarkably shortened.