A circuit to detect faults in a MEMS device (2) including a
mass (3) that oscillates periodically, which receives a position
signal (px[n]) formed by a succession of samples of an
analog signal (px(t)) that is a function of the position of the
mass (3) and has an amplitude and an oscillation frequency. The circuit includes: a reference stage (32) that generates a first reference
signal (xref[n]) and a second reference
signal (yref[n]) formed by successions of samples of a first sinusoidal signal and a second sinusoidal signal, respectively, with a frequency equal to the oscillation frequency and phase-shifted by 90°; a first multiplier (34) and a second multiplier (36), which generate, respectively, a first product signal (y[n]) and a second product signal (y[n], x[n]) via multiplication of the position signal by the first reference signal and the second reference signal, respectively; a first filter (40) and a second filter (42) of a lowpass type, which filter, respectively, the first and second product signals (y[n], x[n]) and generate a first filtered signal (YLPF[n]) and a second filtered signal (XLPF[n]); an estimator stage (46), which determines estimates of the amplitude, as a function of the first and second filtered signals (YLPF[n], XLPF[n]); and a decision stage (48), which compares the estimates with a range of values and detects the presence of faults on the basis of the outcomes of the comparisons.