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273 results about "Plane of incidence" patented technology

In describing reflection and refraction in optics, the plane of incidence (also called the incidence plane or the meridional plane) is the plane which contains the surface normal and the propagation vector of the incoming radiation. In wave optics, the latter is the k-vector, or wavevector, of the incoming wave. When reflection is specular, as it is for a mirror or other shiny surface, the reflected ray also lies in the plane of incidence; when refraction also occurs, the refracted ray lies in the same plane.

Simultaneous multi-spot inspection and imaging

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously. In another embodiment, a one-dimensional array of illumination beams are directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
Owner:KLA TENCOR TECH CORP

Light scattering detector

The invention concerns high sensitivity light scattering detection and its application to evaporative light scattering detection in liquid chromatography. The exemplary embodiment includes a detection cell to accept particles suspended in a gas stream and permit a polarized light beam to pass through a trajectory of the particles and gas stream. A sample light detector is disposed to detect light scattered in the detection cell. A light trap accepts the polarized beam after it passes through the detection cell. The light trap includes an elongated housing through which the polarized beam passes, and light absorptive material within the elongated housing. An absorptive filter is aligned such that the angle of incidence of the light beam upon the filter approximates Brewster's angle and the electric field vector of the beam is aligned with the plane of incidence between the beam and the filter. Other embodiments of the invention provide increased light collection. Embodiments of the invention include temperature-controlled entrance and exit ports that control particle trajectory. Embodiments of the invention include a reference cell disposed between a detection cell and a light trap, and the reference cell includes lensing and a spherical mirror to direct light toward a reference light detector. The reference light detector provides a reference signal that may be used with noise cancellation circuitry, operating in either voltage or current mode, to reduce light source noise in the sample signal.
Owner:UNIVERSITY OF MISSOURI

Simultaneous Multi-Spot Inspection and Imaging

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. For patterned surface inspection, a cross-shaped filter is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. In another embodiment, different portions of the same objective may be used for focusing the illumination beams onto the surface and for collecting the scattered radiation from the illuminated spots simultaneously. In another embodiment, a one-dimensional array of illumination beams are directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.
Owner:KLA TENCOR TECH CORP
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