The invention discloses microelectronic magnetic force detection equipment and a method thereof, and belongs to the technical field of microelectronic magnetic force. The microelectronic magnetic force detection equipment comprises an equipment main body, a
locking mechanism, a clamping mechanism and a detection mechanism; the lower portion of the equipment body is connected with the
locking mechanism, the upper portion of the equipment body is connected with the clamping mechanism, and the detection mechanism is arranged on the right side of the equipment body. By means of the mode, the function of
continuous feeding and discharging is achieved through the clamping mechanism and the
locking mechanism, detection continuity is achieved, automatic operation is achieved in the whole process, and the operation stability is achieved while the working efficiency is improved; the detection capability is further expanded by adopting an array form of the atomic magnetometers, multi-angle
synchronous detection can be realized after a plurality of atomic magnetometers are combined into an array, and meanwhile, the surface of the
chip is cooled by blowing air through the cooling pipes at different angles, so that non-uniform temperature of the
magnetic core in the detection process is prevented, and the detection precision is improved. And the stability of magnetic force detection is improved.