The invention discloses a high-integration micro-mechanical
accelerometer-
gyroscope, and belongs to the technical field of inertial sensing. According to the invention, by sharing a mechanical structure and an
electrode, applying a pair of direct-
current voltage,
resonance voltage and carrier
voltage with opposite symbols on a symmetrical parallel-plate
capacitor structure, and combining a PLL phase closed-
loop control method,
resonance driving, amplitude detection and
frequency detection of a three-axis structure can be realized at the same time;
force balance feedback
voltage can be obtained through weighted fusion and controller calculation, the position of the
mass block is kept constant, and at the moment, the feedback voltage reflects the acceleration; meanwhile, the three-axis resonant structure is subjected to the
coriolis force coupling effect, the sum of the resonant frequencies of the two orthogonal axes comprises
angular velocity information of the third orthogonal axis, and the
angular velocity can be obtained through multiplication
demodulation and low-pass filtering calculation with a sinusoidal
signal with the frequency being the difference between the two frequencies. The micro-mechanical
accelerometer-
gyroscope integration method is simple, and temperature drift can be effectively inhibited at the same time.