Method for the precise measurement operation of a micromechanical
angular rate sensor, comprising at least one deflectably suspended
seismic mass (1, 15, 20), at least one drive device for driving the
seismic mass (1, 15, 20) and at least one first (2, 11, 18) and one second (3, 12, 19) trim
electrode element, which are directly or indirectly jointly assigned to the
seismic mass (1, 15, 20), wherein a first electrical trim
voltage (U) is applied between the first trim
electrode element (2, 11, 18) and the seismic
mass (1, 15, 20). TO1 , U TLO1 , U TRO1 , U TU2 , U T1H , U T2V ) and a second electrical trim
voltage (U) between the second trim
electrode element (3, 12, 19) and the seismic
mass (1, 15, 20) TO2 , U TLO2 , U TRO2 , U TU1 , U T2H , U T1V) are set, whereby the first and second electrical trim voltages depend at least on a quadrature parameter (U). T ) and a
resonance parameter (U f ) are set, characterized by the fact that the first (U TO1 , U TLO1 , U TRO1 , U TU2 , U T1H , U T2V ) and the second (U TO2 , U TLO2 , U TRO2 , U TU1 , U T2H , U T1V ) electrical trim
voltage is set so that the sum of the square of the first electrical trim voltage (U) TO1 , U TLO1 , U TRO1 , U TU2 , U T1H , U T2V ) multiplied by a first constant factor (α) and from the square of the second electrical trim voltage (U) TO2 , U TLO2 , U TRO2 , U TU1 , U T2H , U T1V) multiplied by a second constant factor (β), is kept constant and / or is based on a first reference value of the
resonance parameter (U) f ) is set to the square.