The invention relates to a uniaxial out-of-plane MEMS
gyroscope, which comprises a substrate, an
anchor point unit, a motion unit and an
electrode unit, the motion unit comprises four driving frames, the four driving frames are arranged in an array along an x direction and a y direction, and the driving frames have
degrees of freedom of
linear motion along the x direction; two
mass blocks arranged in the x direction are arranged between the two driving frames arranged in the x direction, the
mass blocks are connected with the adjacent driving frames in the x direction through first decoupling beams, a detection frame is arranged between the two
mass blocks arranged in the x direction, and the detection frame has the freedom degree of swinging around the y direction. The detection frame is connected with two adjacent mass blocks in the x direction through a second decoupling beam, and the
electrode unit comprises a
driving mode excitation
electrode and a sensitive mode detection electrode. The two-stage decoupling mode is adopted to realize the decoupling of the motion of the driving frame and the motion of the detection frame, so that the
quadrature error of the
gyroscope can be reduced from the
structural level, the zero offset index of the
gyroscope is further reduced, and a foundation is laid for realizing the high-performance uniaxial out-of-plane MEMS gyroscope.