Embodiments of the present disclosure provide a fully decoupled three-axis MEMS
gyroscope and an electronic product. The
gyroscope comprises: a substrate, and an X / Y
proof mass, Z proof masses, driving structures and Z decoupling masses that are fixed on the substrate; the X / Y
proof mass is arranged around outer sides of the Z proof masses, the driving structures and the Z decoupling masses; the Z proof masses are oppositely arranged in an x-axis direction; the driving structures are oppositely arranged at outer sides of the Z proof masses in the x-axis direction; and the Z decoupling masses are oppositely arranged at inner sides of the Z proof masses in the x-axis direction. The X / Y
proof mass is elastically connected to the driving structures adjacent thereto, the Z proof masses are elastically connected to the driving structures adjacent thereto, and the Z decoupling masses are elastically connected to the Z proof masses adjacent thereto. The
gyroscope improves the Coriolis conversion rate of the X / Y proof
mass, maximizes the utilization of the
chip area, reduces
chip size and cost, and reduces
coupling errors and quadrature errors, thereby improving sensing accuracy.