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Automatic testing method of mode matching voltage of MEMS gyroscope

An automatic test and gyro technology, which is applied to the gyro effect for speed measurement, current/voltage measurement, gyroscope/steering sensing equipment, etc., which can solve the problems of high level of repairing personnel, high cost, and high cost. , to shorten test time and improve efficiency

Active Publication Date: 2016-05-11
BEIJING AUTOMATION CONTROL EQUIP INST
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Problems solved by technology

The first method requires precision adjustment equipment, high cost, high level of adjustment requirements for adjustment personnel, long adjustment process time, low efficiency, and high cost

Method used

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  • Automatic testing method of mode matching voltage of MEMS gyroscope
  • Automatic testing method of mode matching voltage of MEMS gyroscope
  • Automatic testing method of mode matching voltage of MEMS gyroscope

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Embodiment Construction

[0021] Hereinafter, the present invention will be further described in conjunction with the drawings and specific embodiments.

[0022] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0023] The MEMS gyroscope of the present invention comprises two modes, i.e. a driving mode and a sensitive mode (also known as a detection mode), and the sensitive mode resonance frequency is higher than the driving mode resonance frequency; the driving mode comprises a driving electrode and drive detection electrodes; the sensitive mode includes sensitive detection electrodes and tuning electrodes; the mode matching voltage is the voltage applied to the tuning electrodes when the resonant frequencies of the gyroscope driving mode and the sensitive mode are equal.

[0024] Such as figure 1 and figure 2 is the frequency response curve of the MEMS gyroscope under the condition of mode mismatch and mode matching. When the M...

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Abstract

The invention relates to an automatic testing method of a mode matching voltage of an MEMS gyroscope. The automatic testing method comprises the following steps: step 1, adding a driving closed control loop between a driving electrode of a driving mode of the MEMS gyroscope and a driving detection electrode to ensure that the driving mode of the MEMS gyroscope vibrates at resonant frequency and a specified indicated constant amplitude is maintained, and acquiring a driving displacement voltage signal VDP at the moment; step 2, connecting a sensitive mode detection electrode of the MEMS gyroscope with a preposition read-out circuit, and converting a quadrature error displacement variable quantity generated by the sensitive mode of the gyroscope into a voltage variable quantity through the preposition read-out circuit, so as to obtain a quadrature error voltage signal Vsp of the sensitive mode of the gyroscope; step 3, adjusting the controlled quantity VT inputted to the sensitive mode of the gyroscope, so that the phase difference between the driving displacement voltage signal VDP and the quadrature error voltage signal Vsp is 0, and the controlled quantity VT at the moment is the mode matching voltage. The automatic testing method disclosed by the invention can automatically test the mode matching voltage under different environmental temperatures in real time.

Description

technical field [0001] The invention relates to an automatic test method, in particular to an automatic test method for micromachine (MEMS) gyroscope mode matching voltage. technical background [0002] MEMS gyro is an inertial device with a characteristic size in the order of microns processed by microelectronics technology. It is used to measure the angular motion information of the carrier in the inertial space. It is widely used in industrial and civilian fields such as automobiles and consumer electronics, as well as tactical missile guidance. military field. [0003] MEMS gyroscopes are composed of support beams and mass blocks, and mostly adopt the form of electrostatic drive and capacitive detection. MEMS gyro includes two modes: driving mode and sensitive mode. The mass block performs simple harmonic vibration along the direction of the driving axis under the action of the driving force, which is called the driving mode; when there is an angular velocity signal al...

Claims

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Application Information

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IPC IPC(8): G01C19/5719G01R19/00
Inventor 崔健王晓磊郭中洋林梦娜杨军
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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