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236results about How to "Constant width" patented technology

Deep reactive ion etching process and microelectromechanical devices formed thereby

A process for forming a microelectromechanical system (MEMS) device by a deep reactive ion etching (DRIE) process during which a substrate overlying a cavity is etched to form trenches that breach the cavity to delineate suspended structures. A first general feature of the process is to define suspended structures with a DRIE process, such that the dimensions desired for the suspended structures are obtained. A second general feature is the proper location of specialized features, such as stiction bumps, vulnerable to erosion caused by the DRIE process. Yet another general feature is to control the environment surrounding suspended structures delineated by DRIE in order to obtain their desired dimensions. A significant problem identified and solved by the invention is the propensity for the DRIE process to etch certain suspended features at different rates. In addition to etching wider trenches more rapidly than narrower trenches, the DRIE process erodes suspended structures more rapidly at greater distances from anchor sites of the substrate being etched. At the masking level, the greater propensity for backside and lateral erosion of certain structures away from substrate anchor sites is exploited so that, at the completion of the etch process, suspended structures have acquired their respective desired widths.
Owner:GOOGLE LLC

Method for forming uniformly-variable-height component through laser

The invention relates to a method for forming a uniformly-variable-height component through laser. According to the method, each cladding layer is segmented through normal direction layering, then, the difference value between the actual stacking height of each small segment of each layer and the ideal stacking height of the small segment is measured and calculated, the scanning speed of each small segment of the next cladding layer is corrected through calculating, and thus closed-loop control of the cladding layer height is achieved; the cladding layers with continuously variable heights can be automatically formed through the method for forming the uniformly-variable-height component through the laser, meanwhile, the width of the cladding layers is kept to be constant, the bevel step effect is eliminated, the complexity and the forming efficiency of the laser 3D forming component are improved, and the forming quality is ensured. Compared with the prior art, the uniformly-variable-height component formed through the method is high in stability and precision, a lot of earlier-stage cladding layer orthogonal tests are omitted, a large amount of time can be saved, and a large amount of cost can be reduced. The forming process is completed fully automatically, process parameters can be subjected to self adaptation and correction according to feedback data of a layer-height control sensor, and manual intervention can be avoided.
Owner:SUZHOU UNIV
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