The invention discloses a device for detecting an in-plane error in a micro /
nano device out-of-plane motion test and a compensating method. The device has a control and
image processing unit and a phase shift micro interfering
system which is connected with the control and
image processing unit, wherein the phase shift micro interfering
system comprises a vibration isolating table, a three-dimensional
micro motion probe table, a tested micro /
nano device, a micro interferometer, a nano positioning instrument and a
microscope, which are arranged in turn, and a flash lighting controller, a high-pressure
amplifier driver, an
arbitrary waveform generator, a charged coupled device (CCD) camera, and an
image acquisition card; the input end of the
arbitrary waveform generator is connected with the control and
image processing unit, and the output end of the
arbitrary waveform generator is connected with the flash lighting controller and the high-pressure
amplifier driver; the
CCD camera is connected with a
microscope; and the
image acquisition card is connected with the control and image
processing unit and the
CCD camera respectively. The method comprises: acquiring the motion image of the tested micro /
nano device; testing in-plane displacement; testing out-of-plane motion; and performing two-
phase unwrapping of a time axis and a spatial axis. The invention is easy to use with high reliability.