23 results about "Micro motion" patented technology

The application discloses a kind of multimodal collaborative motion control method and system of semiconductor probe station, the method includes: in the transition period of macro motion table carrying wafer to execute large stroke deceleration and at deceleration end section, the coupling disturbance characteristics that the estimated disturbed trend that macro motion table will cause micro motion table is obtained based on the residual motion state of macro motion table and is characterized, based on coupling disturbance characteristics drive micro motion table to execute reverse feedforward compensation trajectory, inhibit the residual oscillation that the residual oscillation of micro motion table is excited by the structural coupling transmission of macro motion table sudden stop kinetic energy;In the process that micro motion table carries probe approaches wafer, the occurrence of physical contact event is judged according to the transient singular feature extracted to the driving signal of micro motion table time-frequency analysis, in response to the determination result, the control mode of micro motion table is switched from trajectory tracking mode with position follow as target to energy dissipation mode with mechanical resonance energy as target, realize the effect of giving priority to both efficiency and high accuracy.

The invention discloses a macro-micro composite automatic feeding and positioning robot system and method, relates to the technical field of intelligent assembly and robots, and is used for solving the technical problems of dynamic response lag and low motion precision during macro-motion and micro-motion switching of an existing macro-micro robot motion system. The macro-micro composite automatic feeding and positioning robot system comprises a first displacement mechanism, a second displacement mechanism, a micro positioning mechanism, a sample storage chamber and a linear importer, wherein the micro-positioning mechanism is connected with the first displacement mechanism; the first displacement mechanism drives the micro-positioning mechanism to move in the vertical direction; the sample storage chamber is connected with the second displacement mechanism; the second displacement mechanism drives the sample storage chamber to move in the vertical direction and the horizontal direction; a clamping jaw and a cleaning frame are arranged at one end, close to the sample storage chamber, of the linear introducer.

The invention relates to the field of material testing devices, and particularly discloses a spindle sample piece simulation bench testing device which comprises a base, a liquid environment tank, a torsion driving mechanism and a linear micro-motion driving mechanism, the liquid environment tank is used for containing a liquid medium, and a spindle sample piece is immersed in the liquid medium; the torsion driving mechanism is used for driving the two ends of the main shaft sample piece to generate relative torsion, and the linear micro-motion driving mechanism is used for driving the liquid environment tank to slide back and forth in the horizontal direction, so that the liquid medium contained in the liquid environment tank is shaken, and relative motion is generated between the liquid medium and the main shaft sample piece. Simulation of various environmental factors (including torsion, corrosion and micro motion) in the service process of the main shaft is integrated, the various environmental factors can be independently applied to the main shaft sample piece, and the various environmental factors can also be applied to the main shaft sample piece at the same time, so that behaviors of a main shaft sample piece material under the coupling action of a single environmental factor or various environmental factors are researched.

The utility model belongs to the technical field of photoetching machines, and particularly relates to a six-degree-of-freedom precise motion platform which comprises a base, a macro motion module, a micro motion module, an air floatation module and a substrate platform, the macro motion module comprises an X-direction driving module and a Y-direction driving module, and the micro motion module comprises a base, a vertical driving module, a rotary driving module and a handover module. The air floatation module comprises an air floatation left side assembly, an air floatation right side assembly and an air floatation middle assembly. The base table comprises a micropositioner and a base suction cup. According to the utility model, the macro-motion module realizes the movement of the substrate table in the X direction and the Y direction through the X-direction driving module and the Y-direction driving module respectively, and the micro-motion module realizes the adjustment of the substrate table in the Z direction, the Rx direction and the Ry direction, the adjustment of the substrate table in the Rz direction and the uploading and downloading of the substrate table through the vertical driving module, the rotation driving module and the handover module respectively. Therefore, the six-degree-of-freedom control of the motion platform can be realized.

Contact heads are sleeved at two ends of a supporting rod, a melt is welded on the inner sides of the contact heads, one end of the contact head for welding the melt penetrates into a fusion tube and is fixed, the fusion tube is filled with an arc extinguishing filler, a micro-motion base mounting support is mounted on the outer side of the fusion tube, a micro-motion switch base is fixed on the micro-motion base mounting support, and the micro-motion switch base is fixed on the micro-motion base mounting support. A microswitch spring is installed in the microswitch base installation support, a microswitch is installed on a microswitch base, and a plurality of circles of step type melt welding arrangement platforms are arranged on the inner side of a contact in a concentric circle mode. The fuse body can be conveniently divided into multiple layers to be installed and distributed on the platform in a concentric circle mode, so that the bearing current of the fuse contact which is only used for bearing small current originally is improved under the condition that the diameter of a fusion tube is small or not enlarged, the rated current bearing capacity and the breaking speed and breaking capacity of fault voltage and current are effectively improved, and the service life of the fuse contact is prolonged. The device can be used for protecting a frequency converter, an IGBT, a high-voltage large-current battery pack, a super capacitor and other large energy storage and electric equipment.

The utility model relates to the technical field of focalizers, and discloses a precise micro-motion astronomical photography manual focalizer which comprises an installation box, a micrometer head is fixedly connected in the installation box, a micrometer screw is arranged in the micrometer head, and an adjusting assembly is installed on the inner wall of the installation box. The adjusting assembly comprises a fixing seat, the lower surface of the fixing seat is fixedly connected to the bottom of the inner wall of the mounting box, a sliding block is fixedly connected to the upper surface of the fixing seat, a sliding rail is slidably connected into the sliding block, a rack is fixedly connected to the upper surface of the sliding rail, and a connecting plate is fixedly connected to one side of the outer wall of the rack. According to the utility model, through linkage of the micrometer head and the slide rail, micron-order linear displacement can be realized through high-precision position identification of the micrometer head and the slide rail; the rack is matched with the lens focusing wheel, so that the micro linear displacement of the micrometer head is accurately converted into the rotation of the focusing wheel, and accurate focusing is realized; compared with traditional manual focusing, the device reduces personal errors and improves the star point focusing stability.

The utility model provides a pre-breaking trigger rod detection tool. The pre-breaking trigger rod detection tool comprises a detection base, a toggle clamp and a micro-motion detection assembly. The detection base is provided with a groove used for placing the pre-breaking unit, and the groove is internally provided with a micro-motion detection assembly used for detecting a trigger rod of the pre-breaking unit; a toggle clamp is arranged on one side of the detection base and used for fixing the pre-breaking unit in the groove of the detection base. According to the utility model, the structure is simple, the operation is convenient, and whether the trigger rod in the pre-breaking unit is provided with the spring can be rapidly detected; a manual observation and detection mode is replaced, and the situation of missing detection is avoided.

The utility model provides a kind of intelligent bone external fixation support of micro motion, including tail box, control system, fixed sliding block and micro motion sliding block, tail box one end is equipped with connecting rod and micro servo electric jar, fixed sliding block is installed on connecting rod and position is adjustable, micro motion sliding block is slidably arranged on connecting rod, the telescopic end of micro servo electric jar is hinged with micro motion sliding block, for driving micro motion sliding block moves along connecting rod, fixed sliding block and micro motion sliding block are all installed with screw for fixing bone, force sensor for measuring the telescopic end of micro servo electric jar thrust and position sensor for measuring the telescopic displacement of telescopic end of micro servo electric jar are equipped on micro servo electric jar, control system is arranged in tail box, and respectively with micro servo electric jar, force sensor and position sensor electric connection.The utility model cooperates through control system, micro servo electric jar and sensor, can realize high-precision micro motion control, it is easy to operate and cost is reasonable.

The application provides a device for driving a wafer carrier, comprising: a wedge and a shock-absorbing seat; the wedge comprises a wedge body and a piezoelectric driving element embedded therein, the piezoelectric driving element is configured to expand when energized, drive a part of the wedge body to generate micro motion, and lift the wafer carrier; the upper surface of the shock-absorbing seat is arranged to be higher than the upper surface of the wedge in the initial state, so that the wafer carrier preferentially contacts the shock-absorbing seat to achieve buffering when falling. The application cooperatively designs the shock-absorbing seat and the piezoelectric driving wedge, which can not only realize high-precision driving at the nanometer level, but also effectively buffer the falling impact and protect the wafer.

The invention relates to the technical field of micro-motion sensor detection, and discloses a stability test method and system for a micro-motion sensor, and the method comprises the steps: determining a first preset number of test points according to coordinate parameters and a to-be-detected target; determining a test environment according to the environment parameters; according to the test environment and each test point, obtaining a measurement value of each test point and a standard value of each test point; determining an error value of each test point according to the measured value of each test point and the standard value of each test point; when the error values are smaller than a first preset value, marking the test environment detected by each test point as a general environment file; and when any error value is greater than or equal to a first preset value, determining a calibration coefficient of each test point, and according to the calibration coefficient of each test point and a test environment detected by each test point, generating a calibration data file to ensure the precision and consistency of the micro-motion sensor in a complex working environment.

The invention provides a device for driving a wafer carrying disc. The device comprises a wedge block and a damping seat, the wedge block comprises a wedge block body and a piezoelectric driving element embedded in the wedge block body, and the piezoelectric driving element is configured to expand when being electrified to drive a part of the wedge block body to generate micro-motion so as to jack the wafer carrying disc; and the upper surface of the damping seat is arranged to be higher than the upper surface of the wedge block in an initial state, so that the wafer carrying disc is preferentially in contact with the damping seat to realize buffering when falling down. According to the invention, the damping seat and the piezoelectric driving wedge block are cooperatively designed, so that nanoscale high-precision driving can be realized, falling impact can be effectively buffered, and a wafer is protected.

The invention relates to the technical field of industrial robot intelligent welding, in particular to an industrial robot linear driving macro-micro combined motion platform for electric vehicle assembly, which comprises a vertical lifting assembly, a macro-micro motion platform, a welding robot for assembly, a preheating piece, a far-point air suction assembly and a near-point air suction assembly, a macro-micro motion platform is installed on the surface of the vertical lifting assembly, a welding robot for assembling is installed on the macro-micro motion platform, preheating parts are installed on a flange at the tail end of the welding robot for assembling and the vertical lifting assembly respectively, and a far-point air suction assembly is installed on a base of the welding robot for assembling. A near-point air suction assembly is installed at a flange at the tail end of the welding robot for assembling, and a far-point air suction assembly is located at the position of a base of the welding robot for assembling. The problems that in the movable welding process of an industrial robot for electric vehicle assembling, due to dislocation of the adsorption range and the smoke dust generation point, an airflow field cannot be accurately covered, welding smoke dust influences transmission accuracy and welding quality, and the product quality is reduced are solved.

A system and method for determining a vital sign of a subject includes a plurality of pressure sensors configured to be placed in a vicinity of the subject to sense movements of the subject's skin within a region on the skin and generate data corresponding to the region. The data comprises signals indicative of a physiological events differentiated in time and intensity. A control unit comprising an analyser processing utility receives the sensing data, generates a pressure variation profile for the pressure sensors associated with each region, identifies predetermined signatures indicative of at least one physiological event of the subject; generate signature data thereof; extract at least one time stamp from the signature data; and generate vital sign data indicative of at least one vital sign of the subject based thereon.

The application discloses a kind of micro motion stroke range finding device for high-precision measurement, it is related to stroke range finding technical field, including bearing shell, the top of bearing shell is equipped with reference loading plate, executive drive plate, reference loading plate is installed with electric signal trigger wiring board, signal processor, the side of reference loading plate is installed with first cross bar, second cross bar, first cross bar is provided with pressure trigger mechanism;The substrate in bearing shell is installed with reference frame, force transmission cooperation mechanism is installed in reference frame, inductive generator, inductive motor are fixedly installed on the outside of bearing shell.The application can ensure the synchronism of trigger action on the one hand, reduce security risks;On the other hand, it can realize the stroke measurement of micron level precision, by setting resistance touch switch and slot photoelectric sensor, so that it jointly constitutes multiple high-precision feedback system, avoids the error of manual reading, ensures the accuracy of micro switch installation position.

The invention relates to the technical field of intelligent personal care electric appliances, and discloses an oral cavity contact recognition and tooth brushing state intelligent switching control method and an electric toothbrush, and the method comprises the following steps: a micro control module controls a motor to drive an output shaft to generate mechanical micro motion, and injects an electric excitation signal to the output shaft; acquiring a real-time mechanical phase of the vibration motor, and performing synchronous demodulation operation on the loop feedback electric signal based on the phase; calculating a mechanical and impedance coupling coefficient according to the result, comparing the mechanical and impedance coupling coefficient with a threshold to judge whether the brush head is in contact with oral biological tissues, and if so, controlling the motor to enter a cleaning working state; the system also dynamically adjusts the decision threshold based on the ambient reference impedance. According to the invention, by utilizing the characteristic of periodic impedance modulation caused by viscoelasticity of biological tissues, false signal interference generated by fluid media such as water flow and foam is effectively shielded, the problem that the prior art is easily triggered by fluid mistakenly to cause accidental starting and splashing of a motor is solved, and oral cavity contact identification and accurate automatic starting and stopping control are realized.

The utility model discloses a kind of micro motion adjustment platform, including base, power mechanism, sliding assembly, bearing platform and feedback device being set on base, wherein, recess, first recess and second recess are equipped with on the base, the recess is between first recess and second recess;The power mechanism is set on the recess, for driving the bearing platform moves along the sliding assembly, the power mechanism includes stator and mover;The bearing platform is set on the power mechanism and sliding assembly, for carrying the workpiece being adjusted and measured;The feedback device includes first feedback device and second feedback device, the first feedback device is used to feedback the maximum preset in-place position of bearing platform movement, the second feedback device is used to feedback the real-time displacement of bearing platform movement.The utility model passes through the power mechanism of direct drive control design, and the displacement of bearing platform is fed back by feedback device, improves the adjustment precision of adjustment platform.

The application discloses a video motion magnification method based on a Transformer network, and steps of the method comprise the following steps: 1, extracting motion representation by using a proposed motion representation encoder; 2, calculating the difference of the motion representation to obtain motion changes; 3, performing nonlinear magnification by using a proposed motion magnification conversion module to obtain magnified motion representation; 4, fusing the magnified motion representation with the features of the motion representation of a query frame; 5, obtaining fine magnified fusion features by using a proposed multi-refinement decoder; and 6, reconstructing a high-quality motion magnification image. The application can quickly and accurately magnify and visualize the micro motion in a video which is difficult for the human eye to observe, and the proposed Transformer network can effectively suppress problems such as ringing artifacts, noise and motion blur existing in the motion magnification video, so that a high-quality motion magnification video can be generated.

The application discloses a kind of laser cutting auxiliary devices for intelligent robot, it is related to industrial automation production equipment technical field.The laser cutting auxiliary devices for intelligent robot, including micro motion platform, micro motion platform side is fixed with connecting shaft, the other end of connecting shaft is fixed with flange, micro motion platform drive end is fixed with micro motion shaft, micro motion shaft is detachably installed with laser through bolt, laser side is provided with connecting line;Micro motion platform both sides are detachably installed with mounting bracket by bolt, the middle part of each mounting bracket is provided with rack slot, the middle part of each rack slot is provided with through slot.The laser cutting auxiliary devices for intelligent robot, realize inertia offset and dynamic steady speed effect, simultaneously resolve trajectory reversing, offset and sway caused by stress change, assembly gap superposition in arc continuous advancing process, ensure that motion posture is always stable, substantially improve the overall operation stability of auxiliary device.

The application discloses a nano-imprint ceramic actuator and belongs to the technical field of nano-imprint. The ceramic actuator comprises a coarse motion mechanism for providing a coarse displacement stroke, multi-legged components arranged on both sides of the coarse motion mechanism for driving the coarse motion mechanism to realize coarse displacement of the stroke, a micro motion mechanism fixedly connected with the coarse motion mechanism for providing a micro displacement stroke, and direct drive components built in the coarse motion mechanism for driving the micro motion mechanism to realize micro displacement of the stroke. The application has the characteristics of high rigidity and nanoscale minimum displacement, provides better positioning precision and servo rigidity, and thus guarantees the imprint quality.

The invention discloses a miniature transformer structure and parameter optimization method suitable for micro-motion model physical simulation, a storage medium and electronic equipment, and the method comprises the following steps: quantifying the size relation between magnetic resistance and a transformer for a three-phase three-column structure; a micro-motion model physical simulation platform is constructed, and a full-working-condition verification environment is provided; optimizing variables and establishing a magnetic circuit-circuit coupling total loss model; a standard snake optimization algorithm is improved; and a rectangular magnetic cross section is optimized into a circular arc transition type, so that collaborative optimization of loss and volume is realized. According to the method, the real characteristics of physical simulation are reserved, the problems that digital simulation depends on model parameters and the network operation risk is high are solved, the full working conditions of the electric power system can be safely reproduced, and protection device verification and personnel training are adapted. It can be comprehensively confirmed from electrical and electromagnetic field levels that the miniature transformer is equivalent to a traditional transformer and has no magnetic saturation risk.

The present application provides a kind of heterogeneous linear motor direct-drive static pressure air floatation and flexible hinge stroke scaling type two-dimensional macro-micro compound positioning system, it relates to precision mechatronics field.The system includes macro motion platform and micro motion platform.Macro motion platform adopts the heterogeneous combination of X-axis U-shaped flat plate linear motor driven static pressure air floatation guide rail and tube type linear motor driven precision linear guide rail, realizes large stroke, high-speed coarse positioning.Micro motion platform is integrated on the macro motion platform, adopts piezoelectric ceramic actuator to drive symmetric two-stage lever flexible hinge mechanism, the mechanism will actuator input displacement be reduced by ≥7:1 ratio and be converted into nanometer level displacement output, the positioning error of macro motion platform is dynamically compensated.The present application solves the problem that large stroke, high speed and nanometer level positioning accuracy are difficult to consider through two-stage cooperation of macro motion coarse positioning and micro motion fine compensation, and the comprehensive performance is excellent, applicable to high-precision field such as semiconductor manufacturing, ultra-precision machining.

A microswitch installation structure comprises a box body and a box cover installed at an opening of the box body, and a microswitch used for sensing the opening and closing state of the box cover is installed at the opening of the box body. The electric control box is characterized in that the top of the microswitch is provided with a shifting piece used for sensing the micro-motion condition, and a forward support used for pressing the shifting piece installed in the forward direction and a reverse support used for pressing the shifting piece installed in the reverse direction are formed at the bottom of the box cover; a mounting position for mounting the microswitch is formed in the box body, and a support frame for supporting the height of the microswitch is arranged at the bottom of the microswitch; compared with the prior art, the forward support and the reverse support are arranged, so that the shifting piece which is installed in the forward direction or the reverse direction can be conveniently pressed, the installation direction of the micro switch does not need to be considered when the micro switch is installed, installation of the micro switch is facilitated, and meanwhile under the effect of the installation position, the shifting piece can be conveniently and rapidly installed. The microswitch can be stably installed in the box body, and it is ensured that the microswitch can accurately recognize the opening and closing state of the box body.

In accordance with an embodiment, a method includes: receiving radar data; extracting micro motion information from the radar data of a considered range bin and generating a first value from the micro motion information for each frame and for each range bin of a plurality of range bins of the radar data, wherein each range bin corresponds to a distance window relative to the radar sensor; determining a second value based on the first value determined for the considered range bin at a considered frame and a prior first value determined for the considered range bin at a prior frame for each receive channel, for each frame, and for each range bin; determining a third value for the considered range bin based on the respective second values for each range bin to produce third values; and determining occurrence of the micro motion in the scene based on the third values.