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845 results about "Micro motion" patented technology

Spinal Rod System

ActiveUS20070288011A1Effective and adequate stabilizationSimple to install without the risk of applying excessive forceInternal osteosythesisJoint implantsSpinal columnRange of motion
A multi-axis spinal fixation device which can use a fixed head spinal or pedicle screw in combination with a multi-axial rod assembly to achieve anatomically correct fixation of vertebrae. The orthopedic fixation can be controlled by a different combination of rod elements to provide a varied range of motion between adjacent vertebrae as well as specific flexibility between the adjacent vertebrae or levels. The surgeon can make intra-operative adjustments from rigid fixation to dynamic stabilization and where desired also provide ‘soft-stabilization’ or ‘micro motion’. The unique combination of elements can provide fixed stabilization for the purpose of fusion or dynamic stabilization without fusion.
Owner:LOGAN JOSEPH NICHOLAS

Macro-micro driven bidimensional integrated micro positioning platform

The invention provides a macro-micro driven bidimensional integrated micro positioning platform, which is characterized by including a base, a flexible platform body, two voice coil motors, four piezoelectric ceramic actuators, two displacement sensors and a controller, wherein the flexible platform body is fixed on the base; the two voice coil motors are connected with the flexible platform body; and the controller is in signal connection with the two voice coil motors, the four piezoelectric ceramic actuators and the two displacement sensors. The macro-micro driven bidimensional integrated micro positioning platform adopts a parallel decoupling totally flexible mechanism, and has the advantages of a parallel mechanism, a flexible mechanism and a decoupling mechanism; a macro-motion platform and a micro-motion platform are integrally designed; the same piece of material can be adopted to manufacture the macro-micro driven bidimensional integrated micro positioning platform integrally, and the manufacture is simple and convenient; and the motion decoupling design is applied to the macro-motion platform and the micro-motion platform, so that the motion control is facilitated and the positioning accuracy is improved.
Owner:UNIVERSITY OF MACAU

Magnetic disk apparatus

A magnetic disk apparatus of the present invention is equipped with a microactuator for micro motion using piezoelectric elements in addition to a coarse adjustment actuator such as a voice coil motor or the like, eliminates parts that slide between the microactuator and surrounding members, and alleviates stress on the piezoelectric elements even if an impact is given to the magnetic disk apparatus. Thus, a first actuator fixing portion on a carriage side and a second actuator fixing portion on a magnetic head side of a microactuator mounting portion are coupled with a plurality of flexible coupling portions and coupling portions are placed outside the microactuator in substantially symmetric with respect to a centerline in a longitudinal direction of a suspension.
Owner:WESTERN DIGITAL TECH INC +1

Three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism

The invention relates to a three-chain six-freedom parallel flexible hinge micro motion device, wherein it comprises base platform, movable platform, driver on the base platform, and three support rods via flexible joints connected to the driver and movable platform. Said driver comprises three flexible plates on the base platform and piezoelectric ceramic driver connected to the flexible plates; three flexible plates are integrated processed, while each plate is connected to two piezoelectric ceramic drivers in right angle. The invention has compact structure and low installment error.
Owner:HARBIN INST OF TECH

Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench

The invention relates to a locking control method of a large-travel nano-displacement and positioning macro-motion table as well as a system thereof. The method comprises the operating steps: (1) a communication interface of a computer (upper computer ) sends an instruction for controlling, firstly, a macro-positioning system is started up to drive the macro-motion table and a micro-motion worktable to move together, and the macro-positioning is finished when the detected positioning error is smaller than the switching threshold value; (2) the computer controls and locks the macro-motion worktable, and is switched to a micro-positioning system dynamically in the meanwhile; and (3) the micro-positioning system controls the micro-motion worktable to further reach the target location required by the system and complete the positioning. The system mainly comprises: the macro-motion table and the micro-motion worktable as well as corresponding driving systems; a grating feedback system; a PMAC controller; a laser interferometer calibration system; a computer system; and a vibration isolation and noise elimination device (an air floatation vibration isolation platform) and the like. The hardware structure of the existing system is configured (a piezoelectric ceramic driving device) by adopting the method as required, when the macro-motion table meets the positioning requirements and stops the movement, piezoelectric ceramics lock the table, thereby improving the positioning accuracy of the system.
Owner:SHANGHAI UNIV

Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof

The invention discloses an accuracy compensation method of the coaxial macro-micro composite linear motion platform device. The linear motion platform device comprises a macro motion device, a micro motion device, a control device and a location detection device, wherein the macro motion device is composed of a servo driver, a straight line drive module, a straight line guide rail, a base and a macro moving working platform. The micro motion device is composed of a piezoelectric ceramic driver or a voice coil motor and a flexible hinge amplifying mechanism. The flexible hinge amplifying mechanism is composed of a flexible hinge, a micro motion working platform and a frame. The piezoelectric ceramic driver or the voice coil motor drives the flexible hinge amplifying mechanism to drive the micro motion working platform to generate displacement. The location detection device detects displacement information of a macro-micro motion working platform in real time and sends the displacement information to the control device. The control device drives the micro motion working platform to compensate motion of the macro motion device in real time according to detection information of a macro-micro motion displacement sensor, and thus high static accuracy and high dynamic accuracy of the coaxial macro-micro composite linear motion platform device are achieved.
Owner:SANYING MOTIONCONTORL TIANJIN INSTR CO LTD

Sea surface micro-motion target Radon-linear contact transformation long-time phase-coherent accumulation detecting method

ActiveCN103197301AEffective accumulationFlexible matching and accumulationWave based measurement systemsTarget signalRadar signal processing
The invention relates to a sea surface micro-motion target Radon-linear contact transformation (RLCT) long-time phase-coherent accumulation detecting method which belongs to the technical field of radar signal processing and detection. The method comprises the following steps: (1) performing demodulation and pulse compression on radar echo, and completing calculation in pulse; (2) pre-judging sea conditions and detection target types and determining long-time phase-coherent accumulation parameters; (3) adopting RLCT compensation distance and Doppler migration and calculating micro-motion target signal energy; (4) viewing and searching parameters and establishing a distance-RLCT area detection unit graph, and carrying out constant false-alarm detection on the distance-RLCT area detection unit graph; and (5) evaluating micro-motion feature parameters, and outputting motion trace points. The sea surface micro-motion target Radon-linear contact transformation long-time phase-coherent accumulation detecting method applies sea surface target micro-motion features to target detection, meanwhile utilizes range and phase information of the echo to perform long-time phase-coherent accumulation to carry out long-time phase-coherent accumulation, effectively compensates distance and the Doppler migration, improves accumulation gain, has the capacity to detect a micro-motion target in strong clutter, can obtain the motion trace points of the target, and has popularization application value.
Owner:NAVAL AVIATION UNIV

Modular implant with a micro-motion damper

A modular implant is provided. The modular implant includes a first orthopaedic component, a second orthopaedic component coupled to the first orthopaedic component, and a micro-motion damper interposed between the first orthopaedic component and the second orthopaedic component.
Owner:ZIMMER TECH INC

Minimally invasive total hip replacement

A femoral implant for total hip replacement includes a cage screw, a femoral head and a base plate provided between the cage screw and the femoral head, to minimize the stress transferred from the femoral head to the bone. The femoral implant may optionally include devices for lateral fixation (for example, internal and / or external screws for lateral fixation) and a device for minimizing micro-motion that is integral to, and extends from, the cage screw.
Owner:ARTHREX

Wafer pre-locating device based on machine vision and method thereof

The invention relates to a wafer pre-locating device based on machine vision and a method thereof. The device comprises a vacuum-absorbing type wafer feeding table, an image collecting and processing unit, a large-format infrared face area light source and a two-dimension micro-motion platform system. The method comprises the steps of feeding wafers, collecting images of the wafers; extracting edges; fitting circle centers of the wafers; and adjusting positions of the wafers. The device and the method avoid damage to the edges of the wafers, and have the advantages of being free of any adjustment and capable of meeting requirements for accurate location of the wafers. Meanwhile, the device is simple in structure, low in cost, and capable of meeting requirements of manufacture of IC equipment for pre-location of the wafers.
Owner:SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI

Portable interactive desktop-level virtual reality system

The present invention relates to a portable desktop-level interactive virtual reality system. The system comprises a graphic rendering computer, a polarization stereoscopic display, a micro motion tracking device, a micro operating pen and a pair of polarization stereoscopic glasses. The polarization stereoscopic display and the polarization stereoscopic glasses are adopted to perform stereoscopic image display; an infrared reflective marker point is placed on the polarization stereoscopic glasses, so that an eye position and a line-of-sight direction are captured by using the micro motion tracking device clamped on the polarization stereoscopic display; and the system is equipped with the micro operating pen, the operating pen is provided with an MEMS (Micro-electromechanical Systems) accelerometer, a gyroscope and a magnetometer device, which are capable of capturing motion of a hand, and the operating pen is provided with a vibrating motor, which is capable of performing force feedback according to an impact relationship of a three-dimensional space. The portable interactive desktop-level virtual reality system has the advantages of high reliability, high flexibility, high portability, low cost and the like, and can be widely applied to various fields of education, medical care, virtual display and virtual assembling of industrial sectors and the like.
Owner:CHINA ACAD OF LAUNCH VEHICLE TECH

Macro/micro two-dimensional displacement platform

The invention relates to a macro / micro two-dimensional displacement platform, which comprises a macro-motion platform, a micro-motion platform and a hydraulic driver. The micro-motion platform is fixed onto the macro-motion platform guided by a cross slider, and a steel ball is matched with a V-shaped block for adjustment. The macro / micro two-dimensional displacement platform is simple in structure, free of traditional guide rail side backlash, fine in stability and convenient in adjustment. The micro-motion platform provided with a right-angle flexible hinge mechanism is in cross layout, free of stacking and coupling errors, small in volume and fine in linearity. The hydraulic driver has the advantages of high rigidity, fine linearity, stable performance, convenience in machining and the like. The macro / micro two-dimensional displacement platform solves the contradiction between large stroke and high positioning precision, is small in overall size, high in positioning precision and fine in linearity, and can be used for the field of precision machining, error compensation and precision measurement.
Owner:江苏久日数控机床有限公司

Fork four-freedom parallel connection robot mechanism

The invention discloses a parallel robot mechanism with four branched degrees of freedom and consists of a moving platform, a fixed platform and 2 to 4 movable branched chains which are provided with the same structure and is used for connecting the moving platform and the fixed platform; wherein, the movable branched chains comprises a moving pair, a first rotary pair, a kinematic pair with a single degree of freedom, a second rotary pair and a third rotary pair from the fixed platform to the moving platform respectively; the mechanism is provided with three moving degrees of freedom and two rotary degrees of freedom under the initial configuration; the moving platform can rotate around the axial lines of the two rotary pairs respectively and the axial lines are connected with the moving platform by winding two branches adjacent to the moving platform; when the moving platform begins to rotate along one direction, the other rotary direction is automatically locked, that is to say that the mechanism is provided with only three moving degrees of freedom and a rotary degree of freedom after the moving platform rotates from an initial position. The parallel robot mechanism can be widely applied to parallel robots, micro-motion worktables and virtual axial machine tools, etc. and has the advantages of high rigidity, simple structure, moving and rotary decoupling, easy control, good dynamic performance, good processing and assembling performance, etc.
Owner:ZHEJIANG SCI-TECH UNIV

In-vehicle living body detection system and method based on millimeter-wave radar

The invention relates to the field of in-vehicle living body detection technologies and particularly discloses an in-vehicle living body detection system based on a millimeter-wave radar. The system comprises a front-end perception module, an algorithm analysis module and a control execution module, wherein the front-end perception module is connected with the algorithm analysis module and is usedfor transmitting a millimeter-wave radar signal, acquiring an echo signal reflected back by a target and preprocessing the echo signal; the algorithm analysis module is connected with the control execution module and is used for acquiring human micro-motion frequency parameters according to the preprocessed echo signal and obtaining a result of whether a living body or a living body sign anomalyexists in a vehicle or not through the human micro-motion frequency parameters; and the control execution module is used for controlling the vehicle to do a corresponding action according to the result obtained by the algorithm analysis module. Through the system, living body detection in a vehicle flameout state and detection of the in-vehicle living body sign anomaly during normal travel are realized, and vehicle safety is enhanced on another dimension.
Owner:HUIZHOU DESAY SV INTELLIGENT TRANSPORTATION TECH INST CO LTD

Local user authentication with neuro and neuro-mechanical fingerprints

In accordance with one embodiment, a method for locally verifying the identification of a user with an electronic device is disclosed. The method includes regenerating a neuro-mechanical fingerprint (NFP) in response to a micro-motion signal sensed at a body part. In response to a plurality of authorized user calibration parameters, a match percentage of the neuro-mechanical fingerprint is determined. The match percentage is determined without the use of a calibration NFP that was previously used to generate the user calibration parameters. Access to the electronic device and its software applications is then controlled by the match percentage. If the match percentage is greater than or equal to an access match level, access to the electronic device is granted. If the match percentage is less than the access match level, access is denied. Subsequent access requires further regeneration of the NFP and a determination of its match percentage in response.
Owner:PROPRIUS TECH S A R L

Keyless access control with neuro and neuro-mechanical fingerprints

In accordance with one embodiment, an access control system is disclosed. The access control system comprises an access control panel including a touchable surface, a multi-dimensional touch sensor under the touchable surface, and a processor coupled to the multi-dimensional touch sensor. The multi-dimensional touch sensor captures a multi-dimensional motion signal including a micro-motion signal component representing neuro-mechanical micro-motions of a user touching the multi-dimensional touch sensor. The processor performs signal processing of the multi-dimensional motion signal to obtain the micro-motion signal component; and extracts unique values of predetermined features from the micro-motion signal component to form a neuro-fingerprint (NFP) that uniquely identifies the user. The NFP can be used as a gatekeeper to control entry into homes, offices, buildings, or other real properly typically protected by access control.
Owner:AERENDIR MOBILE INC

Six-degree-of-freedom micro-motion worktable

The invention relates to a six-degree-of-freedom micro-motion worktable. The six-degree-of-freedom micro-motion worktable comprises first electromagnetic force driving modules and second electromagnetic force driving modules, wherein the first electromagnetic force driving modules are used for realizing the rotation of a micro-motion worktable along an X direction and a Y direction and around a Z axis, the second electromagnetic force driving modules are used for realizing the rotation of the micro-motion worktable along a Z direction and around an X axis and a Y axis, both the numbers of the first electromagnetic force driving modules and the second electromagnetic force driving modules are four groups, and four groups of the second electromagnetic force driving modules and four groups of the first electromagnetic force driving modules are alternately distributed. A rotor part of the micro-motion worktable is commonly formed by permanent magnets, yoke irons and permanent magnet frameworks of the first electromagnetic force driving modules and the permanent magnets and the permanent magnet skeletons of the four groups of the second electromagnetic force driving modules; and a stator part of the micro-motion worktable is commonly formed by coils and coil frameworks of four groups of the first electromagnetic force driving modules and the four groups of the second electromagnetic force driving modules as well as a pedestal of a micro-motion table. Compared with the prior art, the six-degree-of-freedom micro-motion worktable has the characteristics of more simplicity, compactness, small driving inertia of center of mass and small inertia of the rotor of the micro-motion table and the like.
Owner:TSINGHUA UNIV +1

Hydraulic control system and hydraulic control method

InactiveUS20130091833A1Wider engine model selection rangeLess fault sourceRotary clutchesTelemotorsHydraulic motorModel selection
A hydraulic control system and a hydraulic control method are disclosed. The hydraulic control system comprises a first closed pump (P1) and a first engine (M1) connected with each other, a second closed pump (P2) and a second engine (M2) connected with each other, and a hydraulic motor (P3). The first closed pump (P1), the second closed pump (P2) and the hydraulic motor (P3) are connected in parallel. Compared with the prior art, the present hydraulic control system has advantages of wider engine model selection range, higher reliability and better micro-motion performance.
Owner:ZOOMLION HEAVY IND CO LTD +1

Initial position detection method for permanent magnet synchronous electric motor rotor

The invention provides a non sensor method for detecting the rotor initial position of a permanent magnet synchronous motor with a simply-assembled incremental encoder, which comprises changing relative magnetic potentials through controlling a driver to output currents and voltage vectors with different directions and amplitudes, namely the interaction with the rotor magnetic potential, then judging the position of the rotor magnetic potential through analyzing the micro-motion of the rotor, finally obtaining the rotor initial position. The invention is unnecessary to compare larger stator current values for increasing the angle resolution like a high frequency injection method, and has the advantages of small noise and extremely weak vibration, simultaneously, can not affect the identification precision.
Owner:东元总合科技(杭州)有限公司

Six-freedom-degree industrial robot with ball screw pair transmission

InactiveCN103737577ARealize two-dimensional translationRealize three-degree-of-freedom attitude adjustmentProgramme-controlled manipulatorBall screw driveDrive motor
The invention relates to a six-freedom-degree industrial robot with ball screw pair transmission. Waist whole circle rotating is achieved through a waist swing mechanism, a shoulder swing mechanism and an elbow swing mechanism form a two-freedom-degree parallel mechanism to achieve two-dimensional horizontal moving, and ball screws are driven by motors arranged on a swing platform respectively. Three mutual-orthometric rotating shafts connected through a front arm rotating mechanism, a wrist swing mechanism and a tool clamping base swing mechanism are driven independently by three motors respectively, and three-freedom-degree gesture adjusting of an executing tail end tool is achieved. The advantage of the large working space of a serial mechanism is kept, ball screw transmission is used, the rigidness of the mechanism is guaranteed, the positions of the driving motors are lowered, good dynamic characteristics are obtained, bearing capacity is large, high-speed or superspeed operation can be easily achieved, and the six-freedom-degree industrial robot has the advantages that side gaps do not exist, rigidness is high, micro-motion feeding can be conveniently achieved, accumulated errors are small, motion accuracy is high, positive and athwart kinematics solving is convenient, and control is convenient.
Owner:GUANGXI UNIV

Microminiature machining cutting force real-time wireless detection and control system

The invention provides a microminiature machining cutting force real-time wireless detection and control system. A force sensor of the system collects an mN-level cutting force applied on a work-piece, and converts the force signal to an electric signal to be outputted to a signal processing module a and to be outputted to a signal processing module b through a wireless transmission module and a wireless receiving module, a controller converts the received electric signal to the cutting force and compares the cutting force with a standard cutting force so as to generate a control order to be outputted to a micro-motion platform, the micro-motion platform adjusts micro displacement of a milling main shaft respectively in an x-axis direction, a y-axis direction and a z-axis direction according to the control order, and further controls a milling cutter to realize the adjustment of the micro displacement, so that the real-time adjustment of cutting parameters can be realized, and the real-time control on the cutting force can be realized. The cutting force is detected through a six-dimensional force sensor and is transmitted to the controller through the wireless module, and further different cutting parameters are controlled, so that the real-time detection and control of the cutting force are realized, and thereby the machining precision and the surface quality of a precise and micro complicated structural member can be improved.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Three-freedom-degree parallel robot wrists with aligning mechanisms

The invention relates to three-freedom-degree parallel robot wrists with aligning mechanisms. Each three-freedom-degree parallel robot wrist comprises a base, a mobile platform, three movement branched chains with the aligning mechanisms, three spherical pair structures and three power sources, wherein the three movement branched chains with the aligning mechanisms are movably connected with the mobile platform respectively; the three power sources directly drive the movement branched chains to enable the mobile platform to do three-freedom-degree movement; and particularly, as each aligning mechanism is arranged in the middle of each movement branched chain of each robot wrist, the positions of axial lines of three revolute pairs in the middle are adjusted conveniently, and the axial lines of the revolute pairs are enabled to intersect at one point as required, so that processing and assembling errors are reduced, and operation accuracy of each robot wrist is improved. The three-freedom-degree parallel robot wrists are easy in processing and assembling, flexible in movement, compact in structure and good in rigidity, and can be applied to parallel robots, micro-motion robots and other robots.
Owner:SHANGHAI UNIV

Host bone stress environment based custom prosthesis optimization design method

ActiveCN105740523AAdapt to boneAdapt to the situationDesign optimisation/simulationSpecial data processing applicationsPersonalizationBones stress
The invention, for reducing a stress shielding effect after prosthesis implantation, proposes a host bone stress environment based custom prosthesis optimization design method. Three criteria, namely, the strength, the surrounding bone stress and the interface micro-motion between a prosthesis and a bone, in prosthesis elastic modulus optimization calculation are proposed, and the mechanical property of the host bone and a personalized kinematic input are considered in optimization; the prosthesis elastic modulus distribution is optimized through finite element software to achieve the purpose of optimizing a porous structure in the prosthesis; and for the designed prosthesis, on the premise of meeting the strength requirement, the stress shielding effect after implantation is reduced and the service life of the prosthesis after implantation is prolonged.
Owner:深圳协同创新高科技发展有限公司

Methods and techniques to measure, map and correlate ocular micro-movement and ocular micro-tremor (OMT) signals with cognitive processing capabilities

An apparatus and method of collecting elements of and assembling various portions of ocular micro motions such as ocular micro-tremor (OMT) movements of the eye, and correlating them directly with OMT waveforms acquired from both known and unknown states of cognition and cognitive function. Comparing newly acquired waveforms from patients with undiagnosed cognitive dysfunctions, permits an individual or caregiver the ability to identify those unknown issues or cognitive states based on matching or relating statistically elements of their waveform with categories of other known cognitive processing normals and abnormals, functional and dysfunctional individuals. It also allows for measuring the effects of therapeutic agents (psychological or pharmacological) by relating them to measurable changes in cognitive function as a result of correlated changes in waveforms.
Owner:LONKY MARTIN L

Sea surface micro-motion target detection and characteristic extraction method based on morphological component analysis

ActiveCN102914768ASuppress sea clutterMulti-signal energyWave based measurement systemsMorphological component analysisFeature extraction
The invention relates to a sea surface micro-motion target detection and characteristic extraction method based on morphological component analysis, which belongs to the technical field of radar signal treatment and detection. The method disclosed by the invention comprises the following steps: 1) sea clutter sparse representation; 2) sea clutter sparse domain inhibition; 3) the sparse representation of a micro-motion target echo signal; 4) micro-motion target signal sparse domain detection; and 5) micro-motion characteristic parameter estimation. Compared with the traditional sea surface target detection method, the sea surface micro-motion target detection and characteristic extraction method disclosed by the invention is characterized in that the morphological difference between the sea clutter and a micro-motion target echo signal composition is fully utilized, different source signals are subjected to sparse representation by different dictionaries, and the sea surface micro-motion target detection and characteristic extraction method has the capability on distinguishing the sea clutter and the micro-motion target, more signal energy is accumulated while the sea clutter is inhibited, and the signal to clutter ratio is improved. The sea surface micro-motion target detection and characteristic extraction method also has the capability on detecting the micro-motion target and estimating the micro-motion characteristic parameter in the strong sea clutter, provides a new path for sea surface weak target detection and characteristic extraction, and has a popularization and application value.
Owner:NAVAL AVIATION UNIV

Earphone wearing state detection method, device and headset

The invention discloses an earphone wearing state detection method, which relates to the technical field of electronic equipment, and solves the problem of increasing the power consumption of headphones caused by inaccurate wearing state detection of headphones in the prior art. The method comprises the following steps of: acquiring data collected by a light sensor and a micro-motion sensor; Determining the wearing state of the headphones according to the data; Wherein, the wearing state of the headphones is the wearing state and the unwearing state; The method changes the prior art process ofdetecting the wearing state only through an acceleration sensor, and adopts a light characteristic which can better reflect the wearing state of a user and a human respiration characteristic to detect the wearing state of an earphone. That is to say, the light sensor and micro-motion sensor can improve the accuracy of headphone wearing state detection, thereby reducing the power consumption of headphones. The invention also discloses an earphone wearing state detecting device, an earphone and a computer-readable storage medium, which have the beneficial effects.
Owner:GEER TECH CO LTD

Long-stroke high-speed dual-drive nano positioning system

The invention discloses a long-stroke high-speed dual-drive nano positioning system, which comprises a motion track instruction system (101), a master control computer (102), a PMAC motion control board (103), a servo motion control system (104), a positioning platform and a measurement control system (107), wherein the positioning platform comprises a macro motion platform (105) and a micro motion platform (106); triaxial measurement and triaxial control are taken into consideration in the nano positioning system so that precision control for X, Y1 and Y2 can be implemented, the positioning platform adopts a motion mode of 'long-stroke linear motor + short-stroke planar motor' and adopts master / slave control as motion control mode, the short-stroke planar motor is the target of master control, and feedback is measured by a laser interferometer to accomplish high-precision motion within a small range; and the long-stroke linear motor serves as a slave control system for the short-stroke motor, and feedback is measured by a grating scale to accomplish long-stroke high-speed gross motion. The response speed and real-time performances of the system are dramatically improved by means of motion decoupling for the planar motor and introduction of the PMAC motion control board.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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