Long-stroke high-speed dual-drive nano positioning system

Abstract

The invention discloses a long-stroke high-speed dual-drive nano positioning system, which comprises a motion track instruction system (101), a master control computer (102), a PMAC motion control board (103), a servo motion control system (104), a positioning platform and a measurement control system (107), wherein the positioning platform comprises a macro motion platform (105) and a micro motion platform (106); triaxial measurement and triaxial control are taken into consideration in the nano positioning system so that precision control for X, Y1 and Y2 can be implemented, the positioning platform adopts a motion mode of 'long-stroke linear motor + short-stroke planar motor' and adopts master / slave control as motion control mode, the short-stroke planar motor is the target of master control, and feedback is measured by a laser interferometer to accomplish high-precision motion within a small range; and the long-stroke linear motor serves as a slave control system for the short-stroke motor, and feedback is measured by a grating scale to accomplish long-stroke high-speed gross motion. The response speed and real-time performances of the system are dramatically improved by means of motion decoupling for the planar motor and introduction of the PMAC motion control board.

Description

technical field [0001] The invention relates to the technical field of special equipment for microelectronics, in particular to a large-stroke, high-speed, dual-drive nano-positioning system, which is especially suitable for the workpiece stage subsystem of a step-and-scan projection lithography machine. Background technique [0002] The nano-positioning system with large stroke, high speed and high precision occupies an extremely important position in the field of modern cutting-edge industrial manufacturing and scientific research. With the rapid development of integrated circuit (Integrated circuit) manufacturing, biochip technology, high-precision CNC machining technology and high-speed scanning detection, higher requirements are put forward for the stroke, speed, acceleration and accuracy of the positioning system. The research of precision positioning system is also imminent. IC manufacturing is a typical application field of high-speed and high-precision positioning ...

AI Technical Summary

Problems solved by technology

At the same time, the sensor that feeds back position information in the control system is also an important link that limits the improvement of positioning accuracy and movement speed

For example, the resolution of a precision grating ruler used as a displacement sensor can reach the nanometer level, but due to the limitation of the scanning frequency of the signal detection circuit, the maximum allowable moving speed of the grating ruler is inversely proportional to its measurement resolution

On the other hand, the large stroke and high precision of the positioning system are also contradictory

At present, the accuracy of large-stroke driving and transmission methods (precision screw drive, linear motor, voice coil motor, etc.) is generally limited to the micron level; the positioning accuracy of the driver represented by piezoelectric ceramics reaches the nanometer level, but the stroke can only reach the micron level. tens of microns

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