56 results about "Laser interferometry" patented technology

To provide an ultra-precise optical measurement method. [Solution] The system comprises a mounting base 100, a laser system provided on the mounting base 100, a probe system, and a measurement table system. The probe system includes a probe 300 and a Z-direction movement mechanism for moving the probe 300 up and down. The measurement table system includes a stage and an XY movement mechanism for moving the stage along the X and Y directions. The laser system includes a laser transmitter, a set of reflective mirrors, multiple laser interferometers, and a deflection mirror. Inside the probe 300 is a floating rod that can levitate and a stylus sphere attached to the bottom end of the floating rod, and the stylus sphere contacts the workpiece to be measured during measurement. The steps of the roundness error correction algorithm are to place a reference sphere on the stage and measure it, remove the error parameter, solve the shape error of the reference sphere using an aspherical equation, and then correct the measurement data by the shape error in the subsequent measurement process.

This invention relates to a laser interferometric control system and method that integrates multimodal collaborative photoelectric detection and intelligent control algorithms, belonging to the field of laser interferometry. It solves the problems of slow response speed, high complexity, and insufficient adaptability in existing laser interferometric control systems. The system includes: a light source module, whose optical path is connected to a static reference optical path module and an active adjustment optical path module. Both the static reference optical path module and the active adjustment optical path module are optically connected to an interference signal detection module, which outputs the interference contrast. A processing and decision-making module is configured to receive and fuse the interference contrast, first coordinate information, and second coordinate information, output adjustment action commands for the adjustment optical path adjustment components to adjust the interference contrast, and perform autonomous learning optimization based on the change in interference contrast before and after adjustment and the magnitude of the adjustment change, thereby achieving automatic adjustment and stable maintenance of the interference contrast. This invention is applied to laser interferometry.

The application relates to the field of linear rolling guide rails, and discloses a linear rolling guide rail pair straightness error measuring system, which comprises a workbench, a laser interferometer is fixedly connected to the top of the workbench, a measured guide rail is fixedly connected to the top of the workbench, a concave frame is slidably connected to the top of the measured guide rail, and a CCD camera, a light splitting prism and a moving target are arranged on the concave frame. The modular architecture of light source emission, light splitting, reflection receiving and data processing is adopted, and each module is precisely coordinated: the laser interferometer provides a stable reference light path, the light splitting prism constructs a high-precision interference light path, the CCD camera realizes sub-pixel level light spot collection, the data processing module realizes real-time calculation of straightness errors through a gray weighted centroid method and a least square method, the dynamic measurement demand of a high-speed guide rail (2 m / s) is met, the calculation efficiency and the precision reach an industry leading level, and a reliable solution is provided for online detection and processing process control of the precision guide rail.

The application discloses a kind of unknown distribution's laser interferometer measurement result's uncertainty evaluation method, is used to the measurement result of non-Gaussian and distribution type unknown for uncertainty evaluation;The steps of this method include: 1 using beta distribution method to express measurement result;2 the parameter of beta distribution is regarded as to be estimated parameter, and state space model is established using Bayesian statistical method;3 determine the prior distribution of beta distribution parameter, and the beta distribution parameter of measurement result is estimated recursively based on particle filtering method;4 according to distribution parameter estimated value, the distribution type of interferometer measurement result and its uncertainty are obtained.The method of the application can represent the multiple distribution types of laser interferometer measurement result by beta distribution, so as to solve the optimal estimation and uncertainty evaluation problem of the measurement result of distribution type unknown.

This application relates to the field of interferometer protection technology, specifically to a protective device suitable for portable laser interferometers. The protective device includes a housing, a heat dissipation device, and a fixing mechanism. The housing houses the target interferometer and is composed of multiple panels, with at least two panels having ventilation openings. A heat dissipation channel is formed between the ventilation openings on the two panels, and the target interferometer is positioned on the heat dissipation channel when placed inside the housing. The heat dissipation device is connected to the housing to control the temperature inside the housing within a desired range. The fixing mechanism is connected to the housing to adapt and fix the target interferometer according to its size. The target interferometer fixed inside the housing does not directly contact the inner wall of any panel. The protective device provided by this application enhances the protection of portable laser interferometers, extends their service life, and expands the range of sizes to which the protective device can be adapted to portable laser interferometers.

This invention relates to a highly stable zero-difference differential interferometer based on inherent optical symmetry, belonging to the field of optical measurement technology. It addresses the challenge of balancing low temperature drift and ease of use in differential interferometer design. The invention comprises a frequency-stabilized laser, a differential interferometer mirror assembly, a measurement light mirror, a reference light mirror, and an interference signal calculation module. Linearly polarized light emitted by the frequency-stabilized laser is incident perpendicularly onto a polarizing beam splitter. The measurement light mirror is positioned in the output path of the second quarter-wave plate, the reference light mirror is positioned in the output path of the fifth quarter-wave plate, and the interference signal calculation module is positioned in the output path of the polarizing beam splitter next to the frequency-stabilized laser. The inherent symmetry between the reference and measurement arms in the differential interferometer structure of this invention results in theoretically zero thermal drift, good structural thermal stability, simpler optical path arrangement, and easy integration into near-high-end equipment.

The application discloses a kind of asymmetric laser interferometer type long-distance detection demodulation system and disturbance positioning method, including two lasers, Mach-Zehnder fiber interferometer, data acquisition card and industrial computer, two lasers provide the narrow linewidth light source of different central wavelength;Two light sources enter Mach-Zehnder fiber interferometer in clockwise and counterclockwise direction respectively, two signal lights share the same sensing fiber link when detecting;A phase modulator introduces high-frequency carrier signal on a sensing fiber, and the corresponding sensing light signal is modulated with high-frequency carrier;Subsequently two sensing interference light signals enter industrial computer after erbium-doped fiber amplifier, dense wave division multiplexer, photodetector, data acquisition card, two interference sensing light signals are demodulated into phase information introduced by disturbance event by corresponding improved phase generation carrier algorithm respectively, and the specific position information of disturbance event acting on fiber link is analyzed by cross-correlation time delay estimation theory.

The application relates to a geometric error detection device of a machine tool linear shaft and a detection method thereof, and the detection device comprises a mirror, an interferometer, an interferometer bidirectional displacement platform, a laser interferometer, a laser interferometer bidirectional displacement platform, a first grating ruler, a second grating ruler and a computer. The mirror is fixed on a Z-direction sliding guide rail of the machine tool, the interferometer is arranged on the interferometer bidirectional displacement platform, the first grating ruler is arranged on the interferometer bidirectional displacement platform and is used for detecting the displacement of the interferometer moving along the X and Y directions; the laser interferometer is arranged on the laser interferometer bidirectional displacement platform, the second grating ruler is arranged on the laser interferometer bidirectional displacement platform and is used for detecting the displacement of the laser interferometer moving along the X and Y directions; and the computer is used for identifying the geometric error value of the machine tool linear shaft according to the spatial position coordinates. The technical scheme has higher measurement precision and wider measurement bandwidth, the measurement time is short, and the requirement of rapid measurement is met.

The invention relates to the technical field of micro-nano structure preparation, in particular to a double-closed-loop feedback system and laser direct writing equipment, and the double-closed-loop feedback system is characterized in that a laser interferometer obtains a first distance between a first laser head and a sample table and a second distance between a second laser head and an exposure module; the grating ruler positioning module obtains the movement speed of the air floatation movement device; the first controller sends an expected position signal; differentiating the first distance and the second distance to obtain a position feedback signal, and comparing the position feedback signal with an expected position signal to obtain a first comparison signal; filtering and amplifying the first comparison signal to obtain a first processing signal, adding the first processing signal with an expected position signal to obtain an adjustment position signal, performing a differential link, comparing the adjustment position signal with a motion speed to obtain a second comparison signal, and performing filtering and proportional integration to obtain a second processing signal; the first controller controls the air floatation movement device to move by using the second processing signal; according to the scheme, in the preparation process of the mother set, smaller line width and higher precision are achieved.

The application discloses a detonation test method and device based on laser technology in the technical field of detonation experiment test, S1, detonation ignition, makes the flyer pass through the first observation point, the second observation point and the third observation point in turn; S2, laser Doppler effect monitoring, wavelength change data when the laser beam irradiates the flyer is acquired through the end laser interferometer; then the first observation point, the second observation point and the third observation point respectively emit positioning laser beams to carry out again Doppler effect monitoring on the passing flyer, positioning wavelength change data is obtained; S3, the time when the flyer passes through each observation point is determined, the corresponding flying time and passing time of the flyer under the first observation point, the second observation point and the third observation point are obtained based on the wavelength change data and the positioning wavelength change data; then the passing time is corrected based on the flying time; so as to eliminate the cumulative error, make the obtained experimental data more accurate, and facilitate the accurate prediction of the speed of the flyer.

The application relates to the optical technical field, in particular to a light path automatic alignment method and system of a laser interferometer. The method comprises the following steps: S1: a light source generates a double-frequency light beam, and the double-frequency light beam is incident to a light beam adjusting module; S2: the light beam adjusting module receives the double-frequency light beam and transmits the double-frequency light beam to an interference mirror group, the light beam adjusting module comprises m light beam adjusting units, m is an integer greater than or equal to 1; the light beam adjusting unit comprises an optical element, a first adjusting element and a second adjusting element; S3: the interference mirror group makes the double-frequency light beam form reference light and measurement light respectively, and transmits the reference light and the measurement light to a signal conversion module; S4: the signal conversion module converts the reference light and the measurement light into an optical interference fringe electrical signal; S5: an interference contrast generation device receives the optical interference fringe electrical signal and generates an interference contrast value; and S6: a control module executes a scanning alignment process. In this way, the automatic high-precision alignment of the light path can be realized.

This invention provides a laser interferometer that can suppress the reduction in demodulation accuracy even when subjected to external interference such as temperature changes. The laser interferometer includes: a laser source that emits laser light; an optical modulator that includes a vibrating element driven by a drive signal and superimposes the modulated signal onto the laser light; a light-receiving element that receives a laser light containing a sampled signal superimposed by reflection from an object and a laser light containing the modulated signal, and outputs a received light signal; a calculation unit that performs calculations on the received light signal based on a reference signal; and a signal generation unit that outputs a drive signal and a reference signal. The calculation unit includes: a preprocessing unit that outputs a preprocessed signal containing a frequency modulation component based on the reference signal; a demodulation processing unit that demodulates the sampled signal from the preprocessed signal based on the reference signal; and a correction processing unit that outputs a correction signal based on an output signal corresponding to the drive of the vibrating element. The signal generation unit corrects the drive signal and the reference signal based on the correction signal.

The application discloses a static level measuring system calibration device and method, which comprises a rack, a fixed table and a water tank, wherein the rack is provided with a moving table, the moving table moves up and down through a linear displacement module on the rack, the moving table and the fixed table are respectively provided with a first static level and a second static level, the first static level is connected with the second static level through a flexible pipeline, and the second static level is connected with the water tank through a first pipeline; in the calibration process, the height value of the first static level is obtained through formula (4). Compared with the prior art, the position value of the first static level on the guide rail is automatically corrected through formula (4), the perpendicularity deviation existing in the installation environment is solved, and the calibration accuracy is ensured; the correction method is high in efficiency, and the height of the first static level does not need to be measured by using a laser interferometer after the first static level is moved each time.

The present disclosure relates to a mass leveling system and method for a hemispherical resonator, the system comprising: an excitation module for exciting the hemispherical resonator to be leveled to generate vibration; a laser interferometer comprising at least two detection probes for collecting vibration information of at least two positions of the hemispherical resonator; an ion beam etching module for etching the hemispherical resonator using an ion beam; and a control module for determining the orientation of the vibration principal axis of the hemispherical resonator and the size of frequency splitting according to the vibration information of the at least two positions of the hemispherical resonator in the vibration decay process; and controlling the ion beam etching module to etch the hemispherical resonator using the ion beam according to the orientation of the vibration principal axis of the hemispherical resonator and the size of frequency splitting, so as to realize mass leveling of the hemispherical resonator. Thus, mass leveling with higher precision and high automation can be realized without reducing the quality factor of the hemispherical resonator.

The application provides a laser interferometer calibration device and a calibration method, and belongs to the field of laser calibration. Two fixed seats are arranged at two ends of a platform. A first interferometer and a second interferometer are arranged between the two fixed seats. A double-angle prism is arranged on the platform and reciprocally moves between the first interferometer and the second interferometer. The double-angle prism is symmetrically provided with two identical angle prisms on two end faces facing the first interferometer and the second interferometer. The two laser interferometers are simultaneously calibrated by comparing the distances between the first interferometer, the second interferometer and the double-angle prism. The two interferometers are independently arranged and correspond to the laser interferometers, so that the two laser interferometers do not need to share the same optical path when being calibrated, and the two laser interferometers can be simultaneously and independently calibrated. Meanwhile, the reciprocating movement of the double-angle prism makes the measurement changes of the two interferometers present opposite trends, and the common error source can be effectively eliminated through differential calculation.

The application discloses a kind of industrial robot calibration device and method based on one-dimensional distance error model, belongs to industrial robot calibration technical field, and calibration device includes laser interferometer, slide rail assembly, interference mirror assembly, mirror assembly and 45 ° refracting mirror, slide rail assembly is formed by 3 slide rails and is spliced into composite structure, x-y plane movement and z-axis direction adaptation are realized, and mirror assembly contains telescopic rod and inner layer movable slider to ensure continuous optical path;Calibration method is established kinematics and error model by DH method, off-line planning one-dimensional movement path, the actual distance of adjacent points is measured using calibration device, error parameters are identified based on one-dimensional distance error model combined with damped least square method, and finally error compensation is completed.The application simplifies optical path adjustment, improves measurement efficiency and identification accuracy, is low in cost and portable, and the precision of industrial robot after compensation can be improved by more than 70%.

This invention discloses a non-contact laser-ultrasound method and system for detecting internal defects in high-entropy alloys. The method first pre-treats the surface of the high-entropy alloy sample, then adaptively adjusts the laser pulse parameters according to the thermal conductivity characteristics of the high-entropy alloy to excite internal ultrasonic waves via thermoelastic effects. After non-contact signal reception using a laser interferometer, signal pre-processing is performed using a wavelet packet transform and principal component analysis fusion algorithm. Defect features are then extracted using a local outlier factor and support vector machine fusion algorithm to distinguish between defects and lattice distortion interference signals. Defect parameters are analyzed using an improved ultrasonic propagation model, combining mechanical parameters and lattice distortion coefficients. Finally, cross-validation and error correction ensure detection accuracy. The system comprises seven modules, including sample pre-processing, laser excitation, and ultrasonic reception, with a main control module coordinating the collaborative work of each module. This invention achieves non-contact detection, improving detection adaptability and accuracy, and enabling automated batch online detection.

This invention relates to the field of deep ultraviolet laser precision detection technology, specifically to a deep ultraviolet laser interferometer avoidance device based on dynamic adjustment of a beam expander. The device includes: a laser fixing module for fixing the deep ultraviolet laser to provide a constant-direction laser beam incidence; and a beam expander translational adjustment module for supporting the beam expander and driving it to perform pure translational motion in a plane perpendicular to the laser beam incidence direction. This invention utilizes the structural characteristic that the beam expander's aperture is much larger than the required laser incident diameter. By dynamically adjusting the relative position of the beam expander and the incident mirror, it achieves switching of the beam expander's effective working area, actively avoiding areas of light pollution. This ensures that the optical path and optical axis do not shift during adjustment, and the interferometer performance is not affected, achieving in-situ avoidance of polluted areas and avoiding optical axis calibration errors and secondary debugging costs associated with traditional methods.

The present disclosure relates to a surface profile measurement system and method. The surface profile measurement system comprises a displacement stage for carrying a reference sample and a sample and moving the reference sample and the sample. A white light interferometry module is configured to acquire a sequence of white light interference images at each measurement position on the surface of the sample to extract initial height data of different measurement points at each measurement position. A laser interferometry positioning module is configured to acquire a positioning interference image of the corresponding measurement position while the white light interferometry module acquires the sequence of white light interference images. A host computer is in signal connection with the displacement stage, the laser interferometry positioning module and the white light interferometry module, respectively. The host computer compensates the initial height data corresponding to the corresponding measurement points based on the positional offset of the positioning interference image of each measurement position relative to a reference interference image to obtain the height measurement value of each measurement point on the surface of the sample in the scanning direction, thereby eliminating the defocus error of the displacement stage.

The present application relates to the technical field of machine tool error, and discloses a wind power bearing raceway curvature radius machining error prediction method, comprising the following steps: S1. According to the geometric structure of the heavy vertical lathe, a geometric error transmission model of the heavy vertical lathe is established by using rigid body kinematics, and the error transmission law of the machine tool components is described; S2. The geometric error of the machine tool is measured by using a laser interferometer, and the measurement is carried out by extracting feature points; S3. According to the error model and the transformation matrix, the geometric error is superimposed to obtain the position error of any point, and the position error and the profile error between points are calculated; S4. The actual machined wind power bearing raceway curvature radius is measured by using a three-coordinate measuring instrument, and compared with the predicted value, so as to verify the accuracy of the error prediction method, and the present application can provide theoretical and practical guidance for the design and manufacture of heavy machine tools and the vertical turning process of large rotary parts.

This invention discloses an image measurement device and method based on real-time compensation using a laser interferometer. The device includes an X-axis guide rail, an X-axis air-bearing moving platform mounted on the X-axis guide rail, a Y-axis guide rail mounted on the X-axis air-bearing moving platform, a Y-axis moving platform mounted on the Y-axis guide rail, an image acquisition module mounted on the Y-axis moving platform, an X-axis laser interferometry module, a Y-axis laser interferometry module, an X-axis position detection module, and a Y-axis position detection module. This invention accurately measures the straightness errors of the X-axis and Y-axis guide rails in the horizontal and vertical directions using the X-axis and Y-axis laser interferometry modules, respectively. The straightness deviations of the two guide rails are quantified and integrated into the overall positioning error to achieve real-time dual-axis compensation, improving positioning accuracy. Combined with the deep linkage between the positioning system and the image measurement system, this invention meets the practical needs of the precision image measurement field.

This invention discloses a dynamic compensation method for multi-source errors in CNC machine tools under complex working conditions, belonging to the field of precision control technology for CNC machine tools. This method constructs a distributed sensor network to collect multi-physics field data such as temperature field, cutting force, vibration, and environmental parameters in real time, establishes a geometric-thermal-mechanical coupling error propagation model, and uses an improved variational mode decomposition algorithm to achieve high-precision decoupling of multi-source errors. Based on a bidirectional LSTM deep learning network, dynamic compensation amounts are predicted, and combined with a feedforward-feedback composite controller and adaptive coupling matrix adjustment, multi-axis collaborative compensation commands are generated. The compensation effect is evaluated online using a laser interferometer, triggering dynamic updates of model parameters and forming a closed-loop optimization mechanism. This invention overcomes the limitations of traditional single error compensation, solves the problem of real-time analysis and dynamic suppression of multi-physics field coupled errors under complex working conditions, significantly improves the machining accuracy and adaptive capability of CNC machine tools, and is suitable for high-precision machining scenarios such as aerospace precision parts and optical molds.

The application discloses a dynamic compensation method for full closed loop control of a grating ruler-based driver of a scriber, and comprises the following steps: realizing closed loop control positioning of the scriber through motor self-rotation encoder signals and grating ruler signals; long-term monitoring of position difference value data, comparison and analysis of data after grating ruler and rotation encoder failure with factory laser interferometer data to obtain changes of the scriber in service life; and dynamic compensation of precision and rigidity of the scriber. The application takes rotation encoders and grating rulers as main measuring devices, has higher data precision, realizes closed loop control, and improves the precision and reliability of the scriber; the dynamic compensation of precision and rigidity of the scriber can effectively prolong the service life of the scriber, and when the scriber approaches the designed service time and the precision deteriorates, the required precision can be effectively achieved.

This application discloses an adjustable slit coating die for perovskite solar cell production, relating to the field of perovskite solar cell production equipment technology. It includes a modular slit adjustment structure located at the working end of a coating machine, consisting of an upper die lip and a lower die lip connected by a piezoelectric ceramic drive unit that responds to film thickness monitoring signals. A built-in temperature control module includes a miniature thermoelectric cooler, a temperature sensor, and a DLC coating embedded inside the die, covering the inner wall of the flow channel. An online film thickness monitoring device uses laser interferometry data to measure thickness and provide feedback signals. A chambered flow channel structure includes at least two independent liquid supply chambers, each equipped with a high-precision screw pump and a pressure feedback system. The modular slit adjustment structure achieves sub-micron level dynamic control of the perovskite coating thickness, improving slit adjustment accuracy and die durability.

Device for the relative coarse adjustment of a measuring head of a fiber optic laser interferometer and a reflective object to be measured, comprising: a beam splitter designed to split at least one light beam into a reference beam directed towards a reference mirror and an object beam directed towards the object to be measured, a detection surface that enables detection a) an object reflection beam reflected from the object to the beam splitter and b) of a reference reflective beam and / or the reference beam reflected from the reference mirror to the beam splitter, wherein the detection surface is arranged so that it is opposite either a reference mirror or an object to be measured, but not the measuring head where A) the beam splitter is part of a beam splitter cube and one surface of the beam splitter cube is provided with the detection surface, and / or B) the detection surface is designed to be photoluminescent, in particular fluorescent, and can be excited by the reference reflection beam and the object reference beam to emit light with at least one wavelength in the range of 380 nm to 780 nm from the respective point of impact.

The present disclosure provides a method and device for measuring refractive index based on laser interference, and relates to the field of optical precision measurement. The method for measuring refractive index based on laser interference comprises: calculating phase information according to a photocurrent signal; calculating a phase change rate according to the phase information; obtaining a first acceleration and a second acceleration at the same time as the phase information; wherein the first acceleration and the second acceleration are acceleration values of two ends of a to-be-measured region along the propagation direction of a light beam; calculating the length of the to-be-measured region according to the first acceleration and the second acceleration; and calculating the refractive index of the to-be-measured region according to the phase change rate and the length of the to-be-measured region.

The application discloses a machine tool integrating resonator measurement and trimming and an application method thereof. The machine tool is provided with a height adjusting table and a vacuum tank on a vibration isolation table. A laser interferometer is installed on the height adjusting table. A single-shaft designed resonator clamping and moving mechanism, an ion source for ion beam processing of a resonator installed on the resonator clamping and moving mechanism, and a vibration exciting mechanism for providing excitation to the resonator installed on the resonator clamping and moving mechanism are arranged in the vacuum tank. The laser interferometer and the ion source share the same optical path, so that the measurement and processing of the resonator are seamlessly connected without switching the optical path. A variable diaphragm is arranged at an ion beam emission window of the ion source. The application aims to solve the problems of low resonator processing efficiency, precision attenuation caused by dynamic adjustment of the ion source or the workpiece, and limited precision caused by the traditional resonator measurement and trimming separation machine tool.

The present application belongs to the field of intelligent manufacturing, and specifically relates to a machine tool perpendicularity error identification method based on a body diagonal, which comprises the following steps: defining a body diagonal in a machine tool workspace range, measuring a body diagonal space positioning error based on a laser interferometer; defining a machine tool translational axis perpendicularity error element, constructing a space positioning error model considering the perpendicularity error based on homogeneous coordinate transformation and multi-body system theory; selecting positioning error data of multiple detection points where a specified YZ plane intersects the body diagonal, constructing a perpendicularity error decoupling identification model; and averaging the decoupled perpendicularity errors in different YZ planes to obtain a global average perpendicularity error for machine tool compensation. The present application makes full use of the measurement data of the body diagonal, can not only evaluate the machine tool space accuracy, but also be used for machine tool perpendicularity error identification, and has higher identification accuracy based on the least square method and three-axis linkage measurement data.