185 results about "Laser interferometry" patented technology

The invention discloses a wear state and precision degradation prediction method for a ball screw drive system, and the method comprises the steps: employing a dual-label obtaining strategy, and constructing a'strong label + weak label 'mixed label sequence covering a whole life cycle; mapping a macroscopic working condition into a contact interface micromechanical state quantity, and converting a time domain signal into a travel domain / space domain stable sequence by adopting equal travel synchronous resampling, so as to weaken the influence of speed fluctuation on feature extraction; a double-flow physical guidance neural network is further constructed, and a physical attention mechanism is introduced to realize data feature and physical prior fusion; training is completed based on supervision loss and physical consistency constraint, and online recursive correction is carried out by using sparse laser interferometer calibration data. By adopting the method, the prediction deviation caused by equipment aging and working condition change can be reduced, and stable prediction of the wear state and the repeated positioning error degradation trend is realized.

The invention relates to a corrugated steel web accurate positioning device, and relates to the technical field of steel structure construction in bridge engineering, the corrugated steel web accurate positioning device comprises a frame body and a steel web body, the upper end of the frame body is provided with a laser interferometer, one side of the frame body is provided with a controller, the middle part of the frame body is provided with a sliding groove, and two sides of the sliding groove are provided with through grooves; and a hydraulic cylinder is fixed to the inner wall of the upper end of the sliding groove, a sliding block is fixed to the driving end of the hydraulic cylinder, a fixing rod is fixed to one end of the sliding block, a connecting structure is arranged on the fixing rod, and a plurality of clamping frames are arranged on the connecting structure. The hydraulic cylinder drives the sliding block to move, on one hand, the effect of step-by-step positioning is achieved, the effect of improving the use effect of the positioning device is achieved, on the other hand, the effects of automatic sealing and cleaning are achieved, the use convenience of the positioning device is effectively improved, on the other hand, the effect of self-adaptive balance weight adjustment is achieved, and the use safety is improved. And the use stability of the positioning device is effectively improved.

The invention relates to a dual-frequency laser interference measurement system phase resolving method based on a digital phase-locked loop. According to the method, a reference signal is subjected to photoelectric conversion to generate a sampling clock, and a measurement signal is sampled according to the sampling clock. Phase data can be obtained by analyzing the sampled measurement signal. The technology has the advantages that the influence of laser frequency difference fluctuation is eliminated, high-precision real-time calculation of the phase of the double-frequency laser interferometer is realized, the calculation process is remarkably simplified, and resource occupation is reduced.

This invention discloses a sub-aperture stitching interferometric measurement device and method for optical freeform surfaces. The device includes a laser interferometer, a variable phase compensator, and a multi-axis motion stage for motion control of the mirror under test. The variable phase compensator consists of two freeform surface mirrors and two wedges, used to achieve phase compensation with a large dynamic range for each sub-aperture. The system automatically adjusts the compensation phase of the sub-apertures using a weighted stochastic gradient descent algorithm and performs in-situ measurement of the compensation phase using a micro-translation misalignment measurement method. The system can realize three measurement modes: full aperture coverage stitching measurement, sub-aperture coverage stitching measurement, and comprehensive measurement. This invention enables high-precision measurement of flexible, complex optical freeform surfaces (such as gull-wing surfaces).

The utility model belongs to the technical field of machine tool machining, and particularly relates to a machine tool machining precision real-time monitoring device which comprises a laser interferometer body. A sleeve is arranged on the side wall of the laser interferometer body; an opening is formed in the side wall of the sleeve; the side wall of the opening is fixedly connected with a transparent plate; when external airflow blows air to the laser interferometer body, part of airflow passes through the plurality of vent holes to enter the sleeve, so that the airflow is uniformly distributed, the airflow is guided by the inclined surface of the guide plate, and then the airflow is exhausted to the outside through the air outlet holes after passing through the arc-shaped plate. According to the laser interferometer body, air entering the sleeve can flow uniformly and stably, disturbance of the air flow to laser is reduced, the precision of the laser interferometer body during workpiece monitoring is improved, and the using effect of the laser interferometer body is improved.

To provide an ultra-precise optical measurement method. [Solution] The system comprises a mounting base 100, a laser system provided on the mounting base 100, a probe system, and a measurement table system. The probe system includes a probe 300 and a Z-direction movement mechanism for moving the probe 300 up and down. The measurement table system includes a stage and an XY movement mechanism for moving the stage along the X and Y directions. The laser system includes a laser transmitter, a set of reflective mirrors, multiple laser interferometers, and a deflection mirror. Inside the probe 300 is a floating rod that can levitate and a stylus sphere attached to the bottom end of the floating rod, and the stylus sphere contacts the workpiece to be measured during measurement. The steps of the roundness error correction algorithm are to place a reference sphere on the stage and measure it, remove the error parameter, solve the shape error of the reference sphere using an aspherical equation, and then correct the measurement data by the shape error in the subsequent measurement process.

The utility model discloses an air floating platform for optical lens detection, and belongs to the technical field of precision optical detection and air floating supporting, the air floating platform comprises a base, an air floating platform substrate is arranged above the base, a plurality of groups of air floating holes are formed in the air floating platform substrate, and pressure sensing valves are arranged in the plurality of groups of air floating holes; laser interferometer adjusting mechanisms are arranged on the periphery of the air floating platform base plate, the four laser interferometer adjusting mechanisms are slidably connected with the periphery of the air floating platform base plate, a honeycomb matrix air cushion array is arranged in the base, four supporting adjusting mechanisms are arranged at the bottom of the base, and each supporting adjusting mechanism comprises a supporting frame. A threaded rotating shaft is rotationally connected into the supporting frame. When the device is used, the overall balance of the base can be better adjusted when the device is used or after the position of the device is changed, other tools are not needed during adjustment, the overall balance is accurate through the thread adjustment mode, and the practicability of the device is improved.

This invention relates to a laser interferometric control system and method that integrates multimodal collaborative photoelectric detection and intelligent control algorithms, belonging to the field of laser interferometry. It solves the problems of slow response speed, high complexity, and insufficient adaptability in existing laser interferometric control systems. The system includes: a light source module, whose optical path is connected to a static reference optical path module and an active adjustment optical path module. Both the static reference optical path module and the active adjustment optical path module are optically connected to an interference signal detection module, which outputs the interference contrast. A processing and decision-making module is configured to receive and fuse the interference contrast, first coordinate information, and second coordinate information, output adjustment action commands for the adjustment optical path adjustment components to adjust the interference contrast, and perform autonomous learning optimization based on the change in interference contrast before and after adjustment and the magnitude of the adjustment change, thereby achieving automatic adjustment and stable maintenance of the interference contrast. This invention is applied to laser interferometry.

The embodiment of the invention relates to the technical field of image processing and water quality monitoring, and provides a vertical bombardment method for a movable sample table of a fixed laser source, an analyzer and a system.The method comprises the steps that target position information of a to-be-detected sample is determined according to an image of the to-be-detected sample, and first position information is obtained; the to-be-detected sample image is an image of a to-be-detected sample placed on a sample table, the to-be-detected sample is a spot obtained after a water quality sample is dried, and the target position information is laser bombardment position information; determining pose adjustment information of the sample table according to the first position information by using a laser interferometer to obtain target pose adjustment information; the pose of the sample table is adjusted according to the target pose adjustment information, and the to-be-detected sample on the adjusted sample table is subjected to laser vertical bombardment, so that the accuracy of vertical bombardment of the to-be-detected sample is improved.

A kind of telescope active optical correction system correction accuracy testing device, including laser interferometer, multidimensional adjusting table, wave aberration measurement component and plane mirror, laser interferometer is placed in the outside of optical telescope for emitting test light to the inside of optical telescope, to detect the wave aberration data of multiple fields of view;Multidimensional adjusting table is used to adjust the position, angle of optical element in optical telescope, to simulate the situation that telescope imaging quality drops;Wave aberration measurement component is set at the image plane of telescope for measuring the wave aberration after optical telescope imaging quality drops, and plane mirror is used to reflect test light.The present application relates to a kind of telescope active optical correction system correction accuracy testing method, the displacement amount and rotation angle of optical element when comparing when simulating image quality drop and when correcting judge the correction accuracy of active optical correction system, compare wave aberration before simulating image quality drop and after correction, judge whether the image quality after correction reaches the image quality before simulating image quality drop.

The invention discloses a five-axis machine tool geometric error identification method based on single-axis and multi-axis measurement, and belongs to the field of numerical control machine tool precision detection. Error kinematics and multi-axis motion models are established based on a multi-body system theory, and error identification models of a linear axis and a rotating axis are respectively constructed. On the aspect of a linear axis, an identification method based on measurement of a positioning error and a straightness error is provided, two measurement / identification schemes of single-axis motion and two-axis linkage are designed, and 18 linear axis geometric error parameters related to the position and 3 linear axis geometric error parameters irrelevant to the position are obtained through calculation. In the aspect of a rotating shaft, 12 rotating shaft geometric error parameters related to the position and 4 rotating shaft geometric error parameters irrelevant to the position are obtained on the basis of an existing linear shaft result based on a measurement and identification scheme of a double-ball-rod instrument in three directions and six positions. According to the method, positioning and straightness error detection are completed in combination with auxiliary equipment such as a laser interferometer and a double-ball-rod instrument, and the method has good universality.

The application discloses a multi-axis laser interferometer optical axis space position positioning system and a positioning method, which comprises XYZ three-axis laser interferometer optical axis perpendicular adjustment and XYZ three-axis laser interferometer optical axis space intersection adjustment; wherein the optical axis perpendicular adjustment is to move a turntable independent measurement frame into a space coordinate system vertical reference mirror, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence according to displacement information and energy signals displayed on a display terminal until the displacement information is the minimum and the energy signal is the maximum; and the optical axis space intersection adjustment is to move a standard reference sphere above the turntable independent measurement frame, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence until the displacement information is the minimum and the energy information is the maximum. The application is simple in operation, fast in laser interferometer space position adjustment, and can realize high-precision positioning of multi-axis laser interferometer optical axes in space positions.

The utility model discloses a detection device for an actuator. The detection device comprises a base; the limiting assembly is arranged on the base and used for fixing the actuator; the moving assembly is arranged on the base, is connected with the output end of the actuator and transmits the movement of the actuator; the load assembly is arranged in association with the moving assembly and is used for applying an adjustable load to the moving assembly; the measuring assembly is used for acquiring motion parameters and force parameters of the output end of the actuator; wherein the measuring assembly comprises a force sensor and a displacement measuring unit, the force sensor is arranged on the moving assembly and used for being connected with the output end of the actuator and measuring the output force of the actuator, and the displacement measuring unit comprises a laser interferometer, an interference mirror and a reflecting mirror. The method has the effect of solving the defects of the existing detection technology in the aspects of measurement accuracy, load simulation authenticity and system integration.

A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator including a vibration element that generates a vibration component in a direction intersecting an incident surface of the first laser light, and configured to modulate the first laser light by using the vibration element to generate second laser light including a modulation signal; a photodetector configured to receive the second laser light and third laser light that includes a sample signal generated by the first laser light being reflected by an object, and output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal based on a reference signal; and an oscillation circuit configured to operate using the vibration element as a signal source and output the reference signal to the demodulation circuit.

A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator including a vibration element and configured to modulate the first laser light using the vibration element and generate second laser light including a modulation signal; a light receiving element configured to receive third laser light including a sample signal generated by the first laser light being reflected by an object and the second laser light, and output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal; and a correction circuit configured to detect a force acting on the vibration element from a change in vibration of the vibration element and correct the light reception signal based on the force.

This invention proposes a comprehensive compensation method for key errors in five-axis in-machine measurement. This method compensates for pre-travel errors along the normal vector in the machine tool coordinate system during five-axis in-machine measurement, avoiding the inaccuracy of compensation along the normal vector in the part coordinate system in existing technologies. Furthermore, a high-precision and stable laser interferometer is used to identify the positioning deviations of the two rotation axes, and the identified deviations are substituted into the machine tool kinematics chain to offset the rotational angle positioning deviations introduced in the five-axis in-machine measurement. The calculation method of this invention is simple and reliable, and can be extended to in-machine measurement on four-axis machine tools or other five-axis machine tools with different structures.

The application provides a large-aperture aspheric mirror geometric parameter testing method based on gravity unloading, which comprises the following steps: establishing a theoretical testing optical path model, and obtaining optical compensator parameters; building an actual testing optical path according to the optical compensator and the theoretical testing optical path model; adjusting the pose of the optical compensator and a laser interferometer so that the aberration of the actual testing optical path is 0, and measuring the long-axis distance and the short-axis distance of the actual testing optical path; setting up a gravity unloading device on the back of the measured mirror to eliminate the influence of the gravity of the aspheric mirror on the aberration of the actual testing optical path; measuring the long-axis distance and the short-axis distance of the actual testing optical path when the aberration of the actual testing optical path after gravity unloading is 0; and bringing the long-axis distance and the short-axis distance of the actual testing optical path before and after gravity unloading into the theoretical testing optical path model for simulation calculation to obtain the actual value of the aspheric coefficient of the aspheric mirror. The application effectively solves the problem of low testing precision of the geometric parameters of a large-aperture aspheric mirror supported discretely.

A kind of three-coordinate measurement probe based on negative feedback regulation and measurement method, belong to precision measurement technical field.The present application solves the problems of poor precision and complex calibration process of three-coordinate measuring machine for measuring rigid object profile in prior art.The present application includes probe assembly, optical measurement system and elastic control module, the probe assembly includes first fixed plate and probe fixed on the bottom end of first fixed plate, the optical measurement system includes mirror frame fixed on the top surface of first fixed plate, reflecting mirror horizontally installed on the top of mirror frame, first refracting mirror and second refracting mirror vertically installed below mirror frame and distributed perpendicular to each other, laser interferometer arranged above reflecting mirror, first laser and first photosensitive position sensor distributed on both sides of first refracting mirror, and second laser and second photosensitive position sensor distributed on both sides of second refracting mirror, the elastic control module includes second fixed plate and a plurality of elastic columns.The present application is used for object profile measurement.

The application discloses a kind of in-situ measurement methods of large-size annular part shape and position tolerance, belong to detection technical field, for large-size annular optical, in-situ measurement of mechanical parts, its steps are: (1) using scale, laser interferometer, standard ball calibration numerical control machining center precision;(2) using indicating meter measurement and debugging workpiece and turntable parallel, concentric;(3) using laser tracker measurement workpiece parameter establishes workpiece coordinate system;(4) using laser tracker combines machine tool to measure part profile parameters;(5) analysis part geometric quantity shape and position error.The application method solves the in-situ measurement problem of large-size annular workpiece machining process, reduces the risk and cost that workpiece needs to be repeatedly transported and inspected, with the characteristics of convenient operation, safe and efficient, high measurement precision.

The utility model discloses a glass surface flatness detection structure for glass processing, which belongs to the technical field of glass processing, and is characterized by comprising a detection table, a rack is arranged on the rear side of the detection table, a moving assembly is arranged at the top of the inner wall of the rack, and the moving assembly comprises a moving block. A cylinder is fixedly connected to the bottom of the moving block, a mounting block is fixedly connected to the telescopic end of the cylinder, a laser interferometer is fixedly connected to the bottom of the mounting block, a cleaning assembly is arranged on the front side of the mounting block, and dust and impurities on the surface of glass can be swept and sucked away through the cleaning assembly; meanwhile, when large-area glass is detected, the cleaning assembly and the laser interferometer can move synchronously, detection while cleaning is achieved, it is guaranteed that a detection area is in a clean state all the time, extra waiting for cleaning is not needed, and therefore the detection efficiency is improved.

The invention relates to the technical field of laser interference measurement, and discloses a very long baseline laser interference ground time delay simulation method, which comprises the following steps of: outputting a laser beam through a laser to form an interference signal through unequal arm interference, and measuring and acquiring real-time change data of laser frequency by using a phase meter; storing the data, performing multi-path delay processing, converting the data into a voltage signal through digital-to-analog conversion, and modulating the voltage signal back to a laser beam through an acousto-optic modulator; and finally, performing beam splitting and beam combining interference on the laser beams subjected to different delay modulation to obtain an interference signal simulating very long baseline time delay, and analyzing delay information by a phase meter. The device comprises a laser, an unequal arm interference assembly, a phase meter, a digital analog converter, an acoustic optical modulator group, a beam splitting and combining assembly and a detection assembly. The method does not need to depend on an ultra-long distance physical baseline, and precise simulation of very long baseline time delay is realized through real-time measurement of frequency noise, delay modulation and interference feedback.

The utility model discloses a rotation sensitivity testing device for a servo turntable. The rotation sensitivity testing device comprises a workbench for installation, a supporting frame stably installed on the left side of the upper end of the workbench and a controller installed on the right side of the upper end of the workbench. The laser measuring mechanism is arranged on the supporting frame, the laser measuring mechanism comprises a first telescopic rod and a laser interferometer host, and the laser interferometer host is arranged at the lower end of the first telescopic rod; a clamping mechanism is arranged in the testing platform, the clamping mechanism comprises a reference axis body, a connecting rod, a threaded rod and a sliding clamping block, and the reference axis body is arranged in the testing platform. The servo turntable rotation sensitivity testing device is convenient for stably testing the rotation sensitivity of the servo turntable, is convenient for adjusting the mounting distance between the servo turntable and the reference shaft according to the size of the rotation center of the servo turntable, avoids detection errors, and is convenient for stably mounting the servo turntable.

The present application relates to a kind of control system index evaluation method based on external fine measurement mode, first based on analog star body builds external fine measurement system, provides control system index evaluation system environment.The angle between the two pointing target angles before and after the theodolite calibration analog star body maneuver is recorded The total time of maneuver, verify attitude control maneuver speed index.Using autocollimator measure the angle change of the initial pointing position of load simulator and the return position after maneuver, calculate the angle difference between the two stable positions before and after maneuver, combined with system error and random error, verify the attitude control precision index of control system.Using dual-frequency laser interferometer and analog star body form stable interference measurement optical path, from the imaging start time to the imaging end time, the stability of the real-time data measured by dual-frequency laser interferometer Angle, verify the attitude control stability index of control system, realize the index evaluation of spacecraft control system through external fine measurement mode, reduce professional requirements, good universality.

The application relates to the technical field of optical element surface shape detection, in particular to a surface shape detection device and method for detecting the surface shape of a microcrystal bottom by using a laser interferometer. The surface shape detection device comprises a support assembly, the support assembly is connected with a measured microcrystal and is used for supporting the measured microcrystal; a high-precision auxiliary mirror, the high-precision auxiliary mirror is used for reflecting detection laser from the laser interferometer to the measured surface and sending reflected light from the measured surface back to the laser interferometer according to the original light path; an angle adjusting assembly, the angle adjusting assembly is used for adjusting the mirror surface inclination angle of the high-precision auxiliary mirror; a position adjusting assembly, the position adjusting assembly is used for adjusting the position of the high-precision auxiliary mirror; and a calibration reference mechanism, the calibration reference mechanism is used for detecting whether the position or the mirror surface inclination angle of the high-precision auxiliary mirror meets the expectation. By adopting the scheme, high-precision microcrystal surface shape detection of a special position can be realized under limited conditions, the application range of the existing laser interferometer is expanded, and the detection cost is saved.

The application belongs to the technical field of aircraft assembly measurement, and particularly relates to a laser tracker measurement method for measuring the distance between reference points in an aircraft assembly tool measurement field, which combines the alignment measurement point and the reference measurement point, uses the absolute ranging function of the laser tracker to calibrate, constructs a ranging coordinate system, and uses the multi-degree-of-freedom precise adjustment structure of the articulated arm robot to position the laser tracker on the extension line of the reference measurement point, so as to realize high-precision measurement of the distance between the two reference measurement points, correct the error of network measurement of the laser interferometer with high precision, and realize high-precision measurement of the large aircraft assembly site.

A laser ultrasonic inspection apparatus includes a first laser light source, and a laser interferometer configured to use a second laser beam to detect a vibration of the target, wherein the laser interferometer includes a second laser light source configured to irradiate the target with the second laser beam, a light modulator configured use a vibrator to modulate a frequency of the second laser beam, a photodetector configured to receive the second laser beam from the light modulator and the second laser beam from the target to output a light reception signal, and a signal processor configured to detect the vibration based on the light reception signal and a reference signal, and measure, based on the reference signal, an elapsed time from the first laser light source emits the first laser beam to the vibration is detected, and the vibrator is a signal source of the reference signal.

The invention discloses a method for measuring straightness circle run-out of a spinning cylinder, which not only adapts to spinning cylinders with different lengths and outer diameters, but also can avoid the problem of deformation of a thin-wall spinning cylinder caused by clamping of a traditional manual detection platform through a roller base and a roller which are adjustable in spacing, and guarantees the stability of a measurement reference. Meanwhile, expensive and complex equipment such as a laser interferometer and a three-coordinate detector does not need to be relied on, the detection cost of the large or overweight spinning cylinder is effectively reduced, and the high-cost burden brought by a special customized instrument is eliminated; by means of the PLC servo system, constant-speed sliding of the dial indicator and constant-speed autorotation of the spinning cylinder are achieved, operation is convenient and fast, controllability is high, comprehensive measurement of generatrix straightness at different angles and run-out of different section circles can be accurately completed, detection accuracy, practicability and economical efficiency are considered, and detection requirements in actual production are better met. The device is especially suitable for a thin-wall spinning cylinder, external force cannot be applied to the spinning cylinder in the measurement process, and the deformation risk caused by measurement operation is avoided.

An optomechanical inertial sensor includes a monolithic mechanical resonator having a frame and a test mass coupled to the frame by two leaf spring flexures such that the test mass is displaced along a sensing direction relative to the frame when the frame accelerates along the sensing direction, the test mass including a mirror, and a heterodyne laser interferometer for measuring motion of the test mass in the sensing direction. Multiple optomechanical inertial sensors may be combined to sense in three or more directions.

A bonding apparatus configured to bond substrates includes a first holder configured to vacuum-exhaust a first substrate to attract and hold the first substrate on a bottom surface thereof; a second holder disposed under the first holder, and configured to vacuum-exhaust a second substrate to attract and hold the second substrate on a top surface thereof; a mover configured to move the first holder and the second holder relatively in a horizontal direction; a laser interferometer system configured to measure a position of the first holder or the second holder which is moved by the mover; a linear scale configured to measure a position of the mover; and a controller configured to control the mover based on a measurement result of the laser interferometer system and a measurement result of the liner scale.