330 results about "Laser interferometry" patented technology

The invention relates to the technical field of optical detection, in particular to an aspheric lens laser interference detection adjustment error separation system and method, and the method comprises the steps: placing an aspheric lens on a clamping platform, carrying out the multiple laser interference measurement through adjusting different pitch angles and azimuth angles, and collecting a multi-angle interference fringe image; for different installation and adjustment error types, key features of typical error fringe images are extracted and compared with current interference fringe images, and identification of the installation and adjustment error types and levels is achieved; a mathematical model of various installation and adjustment errors is constructed, polynomial parameterization representation is adopted, installation and adjustment compensation parameters are reversely solved according to an identification result, and installation and adjustment are completed; and repeating the measurement and analysis process, and constructing an error adjustment frequency optimization model until the precision requirement is met. The method provided by the invention can improve the adjustment efficiency and precision of the aspherical lens.

The invention discloses a rapid positioning and punching device and method for a precision die, and relates to the technical field of precision die and die casting machining equipment. The device comprises a workbench and an air floatation-vibration suppression and vacuum pre-fixing integrated platform at the bottom of a positioning groove of the workbench, and the air floatation-vibration suppression and vacuum pre-fixing integrated platform can be switched between a vacuum adsorption pre-fixing mode and an air floatation vibration suppression mode. Y-axis modules are arranged on the two sides of the workbench and drive the X-axis module and the Z-axis lifting mechanism to move. The intelligent drilling unit adopts an inner cooling type drill bit with a built-in phase change microcapsule, and the position error is compensated in real time through a laser interferometer. The method integrates the devices and sequentially comprises the steps of workpiece vacuum pre-fixing, air floatation vibration suppression, self-adaptive balanced clamping, vision and laser composite positioning, drilling and phase change self-cooling, laser dynamic error compensation and the like. The problems of positioning drifting, short service life of a drill bit and clamping unbalance during drilling of high-hardness die steel and large die castings (such as electric control boxes of new energy automobiles) are effectively solved.

The invention discloses a wear state and precision degradation prediction method for a ball screw drive system, and the method comprises the steps: employing a dual-label obtaining strategy, and constructing a'strong label + weak label 'mixed label sequence covering a whole life cycle; mapping a macroscopic working condition into a contact interface micromechanical state quantity, and converting a time domain signal into a travel domain / space domain stable sequence by adopting equal travel synchronous resampling, so as to weaken the influence of speed fluctuation on feature extraction; a double-flow physical guidance neural network is further constructed, and a physical attention mechanism is introduced to realize data feature and physical prior fusion; training is completed based on supervision loss and physical consistency constraint, and online recursive correction is carried out by using sparse laser interferometer calibration data. By adopting the method, the prediction deviation caused by equipment aging and working condition change can be reduced, and stable prediction of the wear state and the repeated positioning error degradation trend is realized.

The invention discloses a double-path laser interferometer, a grating measurement method and an optical detection system, and relates to the technical field of optical detection.The double-path laser interferometer comprises a laser light source for providing a laser beam, the light splitting module is used for splitting the laser beam into a first light beam and a second light beam, and the first light path module is used for enabling the first light beam to enter a measured grating and receiving first diffraction light emitted by the measured grating to form a first interferogram; the second light path module is used for enabling the second light beam to enter the measured grating and receiving second diffraction light emitted by the measured grating to form a second interferogram; the imaging acquisition modules are arranged on the light emitting sides of the first light path module and the second light path module respectively, and the imaging acquisition modules are set to determine the measurement result of the measured grating according to the first interference pattern and the second interference pattern, so that the measurement efficiency of the uniformity of the grating is improved on the premise that the measurement precision is not sacrificed.

The invention discloses a dynamic calibration control method for the detection precision of a non-standard automatic testing fixture, and particularly relates to the field of industrial automation and control, which comprises the following steps of: constructing a real-time dynamic error field model of the testing fixture; a distributed optical fiber sensing network and a miniature laser interferometer cooperatively collect real-time detection data and spatial-temporal variation errors under a multi-physics coupling effect, a precision degradation track is predicted based on spatial-temporal variation error data, a pre-compensation signal is generated, and a self-adaptive Kalman filtering algorithm is adopted to generate a precision compensation parameter. Environment temperature, vibration and electromagnetic interference data are monitored in real time, environment disturbance data are generated, a hybrid controller combining nonlinear model predictive control and reinforcement learning is adopted, multi-source data are fused, a calibration instruction is generated through multi-target optimization, and an execution mechanism is driven to achieve online dynamic calibration. And digital threads and transfer learning are integrated to realize full-life-cycle data closed-loop management and continuous optimization.

The invention relates to a global measurement field construction method for a complex scene, and the method comprises the steps: fixedly arranging a plurality of target seats which are suitable for the placement of laser reflection target balls of a laser tracker in the scene, and enabling the target seats to serve as visual reference points; laying a laser tracker station; measuring three-dimensional coordinate values of the laser tracker stations and the visual reference point and laser interference ranging values of the laser tracker stations and the visual reference point, and obtaining measurement data of the visual reference point under different laser tracker stations; the method comprises the following steps: constructing a spatial transformation relationship among station coordinate systems of laser trackers, converting measurement data of the laser trackers to a global coordinate system, and constructing a global measurement field; and carrying out adjustment optimization on the obtained global measurement field. According to the method provided by the invention, high-precision measurement field construction oriented to large-size complex-structure parts is realized, the precision and robustness of coordinate calculation are improved, and the problem that traditional measurement field construction in a complex scene is easy to block is effectively solved.

The invention relates to an anti-falling device integration method and system based on light guide rail coupling and deformation control, and the method comprises the following steps: carrying out the stress distribution scanning of a light guide rail through a laser interference measurement system, and obtaining a guide rail stress distribution map; based on the guide rail stress distribution map, carrying out dynamic rigidity analysis on the light guide rail to obtain a guide rail rigidity characteristic curve; carrying out coupling calculation on the light guide rail based on the guide rail rigidity characteristic curve to obtain guide rail coupling parameters; based on the guide rail coupling parameters, structural design and layout optimization are conducted on the anti-falling device, and an anti-falling device integration scheme is obtained; and performing virtual assembly and performance simulation on the integration scheme of the anti-falling device to obtain a performance evaluation report of the anti-falling system, thereby solving the technical problem that the integrated design of the anti-falling system generally lacks in-depth analysis on the mechanical characteristics of the guide rail body, so that potential safety hazards are difficult to find and correct in time.

The invention discloses a nanoscale high-precision positioning method based on a multi-degree-of-freedom motion workbench, and relates to the field of large-stroke and high-precision positioning, and the method comprises the steps: S1, initializing the motion workbench, and guaranteeing that a system is in a zero position state; s2, sending a target position instruction by the upper computer, and driving the macro moving platform to quickly move to a position near a target; s3, acquiring the current position, calculating the deviation from the target position according to the target displacement and the current actual feedback displacement value, and generating micropositioner control parameters; s4, a control instruction is generated, and nanoscale displacement compensation is executed; and S5, iteratively correcting the displacement of the micropositioner until the deviation fed back by the laser interferometer meets the requirement. According to the invention, the positioning precision of large-stroke (hundred millimeters) movement is improved to a nanometer level, the device is suitable for the fields of photoetching machines, ultra-precision machining, biological micromanipulation and the like, and the equipment performance and the process level are improved. In addition, the system adopts a modular design, can adapt to different driving and sensing units according to requirements, and has strong expansibility.

The invention relates to the technical field of optics, in particular to blade front and tail edge polishing and correcting equipment which comprises a clamp for loading a to-be-detected guide vane, a polishing system is arranged beside the clamp, and the to-be-detected guide vane is vertically placed on the clamp; the system also comprises a laser interferometer system. The laser interferometer system comprises a laser and a beam splitter, and the beam splitter splits a measuring light beam and a reference light beam; linear collimating lenses are respectively arranged on light paths of the measuring light beam and the reference light beam, and the measuring light beam and the reference light beam respectively penetrate through the collimating lenses to form horizontal linear light beams. On-line real-time detection is achieved through the laser interferometer system, the defect portions of the front edge and the tail edge of the guide vane are accurately positioned, the polishing head can conveniently move to the defect portions to conduct fine polishing, the production period is shortened, and the production cost is reduced.

The invention belongs to the technical field of aircraft assembly measurement, and particularly relates to an aircraft assembly tool measurement field measurement reference point spacing laser tracker measurement method, which comprises the following steps of: calibrating and constructing a distance measurement coordinate system by adding an alignment measurement point to be combined with a reference measurement point and utilizing an absolute distance measurement function of a laser tracker; and a multi-degree-of-freedom precision adjustment structure of the articulated arm robot is utilized to position the laser tracker on an epitaxial line of the reference measurement points, so that the high-precision measurement of the distance between the two reference measurement points is realized, the networking measurement error of the laser interferometer can be corrected in a high-precision manner, and the high-precision measurement of a large aircraft assembly site is realized.

The invention provides a composite material machine tool machining precision real-time measurement and thermal deformation compensation control method and system, and relates to the technical field of composite material machining. Collecting data through a temperature sensor and a displacement sensor; establishing a multi-dimensional thermal deformation prediction model; measuring the position of the cutter in real time by adopting a laser interferometer; constructing a self-adaptive compensation controller, and generating a compensation instruction by adopting a fuzzy PID control algorithm; and sending the compensation instruction to a numerical control system to realize real-time compensation of the processing track. Closed-loop control over the machining precision of the composite machine tool is achieved, and the machining precision is improved.

The invention relates to a corrugated steel web accurate positioning device, and relates to the technical field of steel structure construction in bridge engineering, the corrugated steel web accurate positioning device comprises a frame body and a steel web body, the upper end of the frame body is provided with a laser interferometer, one side of the frame body is provided with a controller, the middle part of the frame body is provided with a sliding groove, and two sides of the sliding groove are provided with through grooves; and a hydraulic cylinder is fixed to the inner wall of the upper end of the sliding groove, a sliding block is fixed to the driving end of the hydraulic cylinder, a fixing rod is fixed to one end of the sliding block, a connecting structure is arranged on the fixing rod, and a plurality of clamping frames are arranged on the connecting structure. The hydraulic cylinder drives the sliding block to move, on one hand, the effect of step-by-step positioning is achieved, the effect of improving the use effect of the positioning device is achieved, on the other hand, the effects of automatic sealing and cleaning are achieved, the use convenience of the positioning device is effectively improved, on the other hand, the effect of self-adaptive balance weight adjustment is achieved, and the use safety is improved. And the use stability of the positioning device is effectively improved.

The invention belongs to the technical field of deformation monitoring equipment, and particularly relates to deformation monitoring equipment based on steel structure installation and a monitoring method.The deformation monitoring equipment comprises a frame, walking wheels are symmetrically arranged at the bottom of the frame, a level gauge supporting disc is arranged in a containing groove, a supporting block is fixedly installed on the supporting disc, and a support is arranged on the supporting block; a laser interferometer used for monitoring deformation of the steel structure is arranged in the support, an emitter is arranged on one side of the laser interferometer, and an adjusting assembly used for adjusting the angle of the laser interferometer is arranged on the support. According to the deformation monitoring equipment based on steel structure installation and the monitoring method, sealing protection can be carried out on the space where the emitter is located through the arranged circular ring, movement of the adjusting assembly can be carried out, and the angle of the laser interferometer can be adjusted, so that after the emitter moves to be located in the same center line with the circular ring groove, the first electromagnet is controlled to stop working; the driving spring resets to push the circular ring to move, the circular ring moves to drive the rubber ring to move, and the space where the emitter is located can be sealed and protected.

The invention relates to a dual-frequency laser interference measurement system phase resolving method based on a digital phase-locked loop. According to the method, a reference signal is subjected to photoelectric conversion to generate a sampling clock, and a measurement signal is sampled according to the sampling clock. Phase data can be obtained by analyzing the sampled measurement signal. The technology has the advantages that the influence of laser frequency difference fluctuation is eliminated, high-precision real-time calculation of the phase of the double-frequency laser interferometer is realized, the calculation process is remarkably simplified, and resource occupation is reduced.

The invention discloses a grooving positioning system based on a paperboard digital intelligent grooving machine, relates to the technical field of grooving machine positioning adjustment, and solves the technical problems of insufficient transverse deviation adjustment precision and incomplete longitudinal deviation compensation. Proportional, integral and differential parameters of the incremental PID are dynamically adapted according to the deviation, compared with a fixed parameter PID, the adjustment response time is shortened, the overshoot is controlled within + / -0.01 mm, the transverse positioning precision is improved, and the high-precision grooving requirement is met. A total error model of a linear error and a periodic error is established through a laser interferometer for encoder error calibration. And in combination with a PLC position-compensation amount comparison table, encoder positioning errors are reduced, dynamic environment compensation fits a paperboard stretching model through a humidity sensor, an equipment thermal deformation model is established through a temperature sensor, temperature and humidity influences are comprehensively compensated, and the longitudinal positioning precision fluctuation range is narrowed.

The invention relates to the field of linear rolling guide rails, and discloses a linear rolling guide rail pair straightness error measuring system which comprises a workbench, the top of the workbench is fixedly connected with a laser interferometer, the top of the workbench is fixedly connected with a measured guide rail, the top of the measured guide rail is slidably connected with a concave frame, and the concave frame is fixedly connected with the laser interferometer. The concave frame is provided with a CCD camera, a beam splitter prism and a moving target. A modularized framework of light source emission, light splitting, reflection receiving and data processing is adopted, all the modules are in precise cooperation, the laser interferometer provides a stable reference light path, the beam splitter prism constructs a high-precision interference light path, the CCD camera achieves sub-pixel-level light spot collection, and the laser interferometer provides a high-precision interference light path. The data processing module achieves real-time calculation of straightness errors through a gray scale weighted centroid method and a least square method, the dynamic measurement requirement of the high-speed guide rail (2 m / s) is met, the calculation efficiency and precision reach the industry leading level, and a reliable solution is provided for online detection and machining process control of the precise guide rail.

The invention provides a laser ultrasonic equipment fixing device for identifying micro-damage on the surface of a high-temperature service pipeline, which comprises an upper bracket and a lower bracket, and openings of the upper bracket and the lower bracket abut against each other and can be mounted on a to-be-detected pipeline. A support locking piece is arranged at the abutting position of the upper support and the lower support to fix the upper support and the lower support together. The upper support and the lower support are each provided with a plurality of pipeline fasteners, and the distance between each pipeline fastener and the outer surface of a to-be-detected pipeline can be independently adjusted. When the device is used, the upper bracket and the lower bracket are fixed on the outer surface of a to-be-detected pipeline by using the bracket locking piece, and the pulse laser and the laser interferometer which are used for detecting the damage of the outer surface of the pipeline are integrated on the upper bracket, so that the whole device is compact in structure and only occupies the peripheral space of the pipeline; and the pulse laser and the laser interferometer are not in direct contact with the high-temperature to-be-measured pipeline, so that the effects that the occupied space is small, the device can adapt to a complex pipeline environment and the service life of equipment is prolonged are achieved.

The invention relates to the technical field of machine tool design, and provides a thermal error prediction method and system for a numerical control machine tool feeding system based on Transform-GRU, and the method comprises the steps: S1 to S5, collecting the data of a numerical control feeding system through a temperature sensor, an acceleration sensor and a laser interferometer; and aligning the collected temperature data, vibration data and thermal error data on a time axis and fusing the data into multi-source information fusion data. And dividing the multi-source information fusion data into a training set and a test set, training a model to obtain a trained model, and if an error is smaller than a preset value, outputting a predicted value. The invention also discloses a test system and a thermal error prediction system. According to the method and the system, the thermal error prediction model can be trained and predicted, the effectiveness of the thermal error prediction model is verified through comparative analysis, local dynamic changes in a time sequence can be captured, the prediction precision and stability are improved, the structure is simple, the number of parameters is small, the convergence speed is higher, and the time cost is lower.

This invention discloses a sub-aperture stitching interferometric measurement device and method for optical freeform surfaces. The device includes a laser interferometer, a variable phase compensator, and a multi-axis motion stage for motion control of the mirror under test. The variable phase compensator consists of two freeform surface mirrors and two wedges, used to achieve phase compensation with a large dynamic range for each sub-aperture. The system automatically adjusts the compensation phase of the sub-apertures using a weighted stochastic gradient descent algorithm and performs in-situ measurement of the compensation phase using a micro-translation misalignment measurement method. The system can realize three measurement modes: full aperture coverage stitching measurement, sub-aperture coverage stitching measurement, and comprehensive measurement. This invention enables high-precision measurement of flexible, complex optical freeform surfaces (such as gull-wing surfaces).

The utility model belongs to the technical field of machine tool machining, and particularly relates to a machine tool machining precision real-time monitoring device which comprises a laser interferometer body. A sleeve is arranged on the side wall of the laser interferometer body; an opening is formed in the side wall of the sleeve; the side wall of the opening is fixedly connected with a transparent plate; when external airflow blows air to the laser interferometer body, part of airflow passes through the plurality of vent holes to enter the sleeve, so that the airflow is uniformly distributed, the airflow is guided by the inclined surface of the guide plate, and then the airflow is exhausted to the outside through the air outlet holes after passing through the arc-shaped plate. According to the laser interferometer body, air entering the sleeve can flow uniformly and stably, disturbance of the air flow to laser is reduced, the precision of the laser interferometer body during workpiece monitoring is improved, and the using effect of the laser interferometer body is improved.

To provide an ultra-precise optical measurement method. [Solution] The system comprises a mounting base 100, a laser system provided on the mounting base 100, a probe system, and a measurement table system. The probe system includes a probe 300 and a Z-direction movement mechanism for moving the probe 300 up and down. The measurement table system includes a stage and an XY movement mechanism for moving the stage along the X and Y directions. The laser system includes a laser transmitter, a set of reflective mirrors, multiple laser interferometers, and a deflection mirror. Inside the probe 300 is a floating rod that can levitate and a stylus sphere attached to the bottom end of the floating rod, and the stylus sphere contacts the workpiece to be measured during measurement. The steps of the roundness error correction algorithm are to place a reference sphere on the stage and measure it, remove the error parameter, solve the shape error of the reference sphere using an aspherical equation, and then correct the measurement data by the shape error in the subsequent measurement process.

The utility model discloses an air floating platform for optical lens detection, and belongs to the technical field of precision optical detection and air floating supporting, the air floating platform comprises a base, an air floating platform substrate is arranged above the base, a plurality of groups of air floating holes are formed in the air floating platform substrate, and pressure sensing valves are arranged in the plurality of groups of air floating holes; laser interferometer adjusting mechanisms are arranged on the periphery of the air floating platform base plate, the four laser interferometer adjusting mechanisms are slidably connected with the periphery of the air floating platform base plate, a honeycomb matrix air cushion array is arranged in the base, four supporting adjusting mechanisms are arranged at the bottom of the base, and each supporting adjusting mechanism comprises a supporting frame. A threaded rotating shaft is rotationally connected into the supporting frame. When the device is used, the overall balance of the base can be better adjusted when the device is used or after the position of the device is changed, other tools are not needed during adjustment, the overall balance is accurate through the thread adjustment mode, and the practicability of the device is improved.

This invention relates to a laser interferometric control system and method that integrates multimodal collaborative photoelectric detection and intelligent control algorithms, belonging to the field of laser interferometry. It solves the problems of slow response speed, high complexity, and insufficient adaptability in existing laser interferometric control systems. The system includes: a light source module, whose optical path is connected to a static reference optical path module and an active adjustment optical path module. Both the static reference optical path module and the active adjustment optical path module are optically connected to an interference signal detection module, which outputs the interference contrast. A processing and decision-making module is configured to receive and fuse the interference contrast, first coordinate information, and second coordinate information, output adjustment action commands for the adjustment optical path adjustment components to adjust the interference contrast, and perform autonomous learning optimization based on the change in interference contrast before and after adjustment and the magnitude of the adjustment change, thereby achieving automatic adjustment and stable maintenance of the interference contrast. This invention is applied to laser interferometry.

The embodiment of the invention relates to the technical field of image processing and water quality monitoring, and provides a vertical bombardment method for a movable sample table of a fixed laser source, an analyzer and a system.The method comprises the steps that target position information of a to-be-detected sample is determined according to an image of the to-be-detected sample, and first position information is obtained; the to-be-detected sample image is an image of a to-be-detected sample placed on a sample table, the to-be-detected sample is a spot obtained after a water quality sample is dried, and the target position information is laser bombardment position information; determining pose adjustment information of the sample table according to the first position information by using a laser interferometer to obtain target pose adjustment information; the pose of the sample table is adjusted according to the target pose adjustment information, and the to-be-detected sample on the adjusted sample table is subjected to laser vertical bombardment, so that the accuracy of vertical bombardment of the to-be-detected sample is improved.

The present application belongs to the technical field of wind tunnel test, and discloses a method for adjusting the loading center of a force applying device of a half-model balance calibration system. The method comprises establishing a balance calibration center; comparing the size of the balance to calculate the displacement amount; adjusting the target position of the normal force applying point; and adjusting the target position of the lateral force applying point. The method takes the initial position state of the reference balance at the initial stage of the construction of the half-model balance calibration system as the reference, uses a laser tracker to determine that the loading center of the force applying device coincides with the calibration center of the initial balance, and records the original positions of the force applying points. During subsequent calibration, the size of the balance to be calibrated and the reference balance is iteratively calculated to obtain the target positions of the force applying points, and then the grating ruler and laser interferometer measurement and manual adjustment by the staff are used to adjust the force applying points to the target positions, so that the balance calibration center of the balance to be calibrated coincides with the loading center of the force applying device, and the calibration data accuracy of the balance to be calibrated is ensured.

A kind of telescope active optical correction system correction accuracy testing device, including laser interferometer, multidimensional adjusting table, wave aberration measurement component and plane mirror, laser interferometer is placed in the outside of optical telescope for emitting test light to the inside of optical telescope, to detect the wave aberration data of multiple fields of view;Multidimensional adjusting table is used to adjust the position, angle of optical element in optical telescope, to simulate the situation that telescope imaging quality drops;Wave aberration measurement component is set at the image plane of telescope for measuring the wave aberration after optical telescope imaging quality drops, and plane mirror is used to reflect test light.The present application relates to a kind of telescope active optical correction system correction accuracy testing method, the displacement amount and rotation angle of optical element when comparing when simulating image quality drop and when correcting judge the correction accuracy of active optical correction system, compare wave aberration before simulating image quality drop and after correction, judge whether the image quality after correction reaches the image quality before simulating image quality drop.

The invention discloses a five-axis machine tool geometric error identification method based on single-axis and multi-axis measurement, and belongs to the field of numerical control machine tool precision detection. Error kinematics and multi-axis motion models are established based on a multi-body system theory, and error identification models of a linear axis and a rotating axis are respectively constructed. On the aspect of a linear axis, an identification method based on measurement of a positioning error and a straightness error is provided, two measurement / identification schemes of single-axis motion and two-axis linkage are designed, and 18 linear axis geometric error parameters related to the position and 3 linear axis geometric error parameters irrelevant to the position are obtained through calculation. In the aspect of a rotating shaft, 12 rotating shaft geometric error parameters related to the position and 4 rotating shaft geometric error parameters irrelevant to the position are obtained on the basis of an existing linear shaft result based on a measurement and identification scheme of a double-ball-rod instrument in three directions and six positions. According to the method, positioning and straightness error detection are completed in combination with auxiliary equipment such as a laser interferometer and a double-ball-rod instrument, and the method has good universality.

The application discloses a multi-axis laser interferometer optical axis space position positioning system and a positioning method, which comprises XYZ three-axis laser interferometer optical axis perpendicular adjustment and XYZ three-axis laser interferometer optical axis space intersection adjustment; wherein the optical axis perpendicular adjustment is to move a turntable independent measurement frame into a space coordinate system vertical reference mirror, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence according to displacement information and energy signals displayed on a display terminal until the displacement information is the minimum and the energy signal is the maximum; and the optical axis space intersection adjustment is to move a standard reference sphere above the turntable independent measurement frame, to adjust the Z, Y and X axis laser interferometers of the turntable independent measurement frame in sequence until the displacement information is the minimum and the energy information is the maximum. The application is simple in operation, fast in laser interferometer space position adjustment, and can realize high-precision positioning of multi-axis laser interferometer optical axes in space positions.

The invention discloses a metal fatigue damage detection method based on double-grating laser ultrasonic multi-parameter measurement, and relates to the technical field of metal fatigue damage detection. According to the invention, a double-cycle transient grating is formed on the surface of a to-be-detected metal material by using a pulse laser beam modulated by a double-spacing slit mask, so that double-frequency high-strength resonant ultrasonic surface wave non-contact excitation is realized, and an ultrasonic surface wave signal is acquired through a laser interferometer based on the non-contact excitation. And performing fast Fourier transform on the measurement signal to obtain frequency spectrum information of the measurement signal, and detecting the metal fatigue damage according to multiple laser ultrasonic characteristic parameters extracted from the frequency spectrum information. Ultrasonic detection on the surface of the metal material to be detected is achieved through an all-optical means, the effects of no damage, complete non-contact and high accessibility are achieved, and the detection precision and resolution of local fatigue damage are improved.

The utility model discloses a detection device for an actuator. The detection device comprises a base; the limiting assembly is arranged on the base and used for fixing the actuator; the moving assembly is arranged on the base, is connected with the output end of the actuator and transmits the movement of the actuator; the load assembly is arranged in association with the moving assembly and is used for applying an adjustable load to the moving assembly; the measuring assembly is used for acquiring motion parameters and force parameters of the output end of the actuator; wherein the measuring assembly comprises a force sensor and a displacement measuring unit, the force sensor is arranged on the moving assembly and used for being connected with the output end of the actuator and measuring the output force of the actuator, and the displacement measuring unit comprises a laser interferometer, an interference mirror and a reflecting mirror. The method has the effect of solving the defects of the existing detection technology in the aspects of measurement accuracy, load simulation authenticity and system integration.