104 results about "Linearity error" patented technology

The invention relates to a temperature drift compensation method for a pressure instrument, and belongs to the technical field of pressure instruments, and the method comprises the following steps: obtaining output signal values of a pressure sensor at different temperature points, and building a temperature-output signal data set; constructing a polynomial fitting model as a temperature drift compensation model, fitting a temperature coefficient through a least square method, and storing the coefficient into an instrument memory; original values of temperature and pressure are collected in real time and substituted into the model to calculate a compensated pressure value. The method also supports various strategies such as temperature sensor calibration, nonlinear error compensation, Kalman filtering noise reduction, dynamic temperature change rate compensation and neural network compensation, and has self-calibration and remote updating functions. According to the invention, the measurement precision and stability of the pressure instrument in a variable-temperature environment are significantly improved, and the method is suitable for high-precision industrial measurement and intelligent monitoring scenes of the Internet of Things.

The invention relates to the technical field of adaptive filtering, discloses a variable-step robust adaptive filter and a filter network, and aims to solve the technical problem that a traditional adaptive filter cannot effectively consider convergence speed, steady-state precision and impulse noise interference resistance. A non-linear error factor is introduced, large errors caused by impulse noise are effectively suppressed through a generalized function form of the non-linear error factor, and the robustness of the filtering process is remarkably improved; meanwhile, a variable step length mechanism is provided, the theoretically optimal candidate step length is calculated on line by minimizing the mean square deviation of the next moment, and a self-adaptive target variable step length is generated through truncation and time smoothing processing, so that dynamic balance is realized between rapid convergence and low-steady-state maladjustment. According to the invention, the filter is expanded to the distributed network, each node follows a diffusion strategy of first updating and then combining, and global information sharing and performance collaborative optimization are realized by using a combined coefficient.

The invention discloses a non-linear error correction method for an electromagnetic flowmeter based on machine learning. The non-linear error correction method comprises the steps that 1, original monitoring data, working condition parameters and a reference calibration flow value of the electromagnetic flowmeter are collected; 2, performing data preprocessing to obtain a standard feature vector sequence and an original error sequence; 3, performing cycle and trend error feature modeling on the standard feature vector sequence through an improved TimeMixer network; 4, taking the original error sequence as a supervision label, and calculating a joint loss function; 5, designing a double-stage error correction strategy to carry out trend correction and period correction, and generating a corrected flow value sequence; 6, executing physical consistency constraint on the corrected flow value sequence to generate a credible corrected flow value sequence; and step 7, updating the improved TimeMixer network and the credible correction flow value sequence. According to the invention, the measurement precision and the operation stability of the electromagnetic flowmeter under non-linear interference are improved.

The invention discloses a grooving positioning system based on a paperboard digital intelligent grooving machine, relates to the technical field of grooving machine positioning adjustment, and solves the technical problems of insufficient transverse deviation adjustment precision and incomplete longitudinal deviation compensation. Proportional, integral and differential parameters of the incremental PID are dynamically adapted according to the deviation, compared with a fixed parameter PID, the adjustment response time is shortened, the overshoot is controlled within + / -0.01 mm, the transverse positioning precision is improved, and the high-precision grooving requirement is met. A total error model of a linear error and a periodic error is established through a laser interferometer for encoder error calibration. And in combination with a PLC position-compensation amount comparison table, encoder positioning errors are reduced, dynamic environment compensation fits a paperboard stretching model through a humidity sensor, an equipment thermal deformation model is established through a temperature sensor, temperature and humidity influences are comprehensively compensated, and the longitudinal positioning precision fluctuation range is narrowed.

The invention provides an acquired data error compensation method for a small-sized thermohaline instrument, belongs to the technical field of electrical digital data processing, and realizes accurate error compensation by constructing a multi-stage neural network tree structure. According to the method, firstly, errors are classified into system errors, random errors and environment interference errors, and second-level and third-level subdivision is carried out to form a complete error classification system; based on the classification system, an optimal path selection function is adopted to dynamically determine a compensation strategy, and corresponding models are selected from a pre-trained miniature neural network library to form a compensation chain. All compensation model structures are subjected to optimization design, different network structures and parameter configurations are adopted for linear errors, nonlinear errors, noise errors, fluctuation errors, temperature errors and salinity mutual interference errors, the total parameter number is controlled to be at a low level, and efficient operation on small equipment is ensured. The technical problem that in the prior art, a small-sized salt thermometer is insufficient in measurement precision under the condition of low energy consumption is solved.

The invention discloses a nano-scale displacement real-time compensation measurement method and system based on double-frequency laser interference, and belongs to the technical field of precision measurement. In order to solve the problems that three error sources of environmental drift, periodic nonlinear error and dynamic vibration are mutually coupled and have high real-time requirements in dual-frequency laser interference measurement, a multi-source error unified state space model including measured displacement, an air refractive index parameter, a nonlinear error parameter and a vibration disturbance quantity is constructed. A high-dimensional state vector is divided into a displacement-refractive index group and a nonlinear parameter group by adopting an extended Kalman filter of a grouping updating strategy, the displacement-refractive index group and the nonlinear parameter group are alternately updated in an assembly line parallel mode, nonlinear parameters are identified in real time in combination with an online recursive least square algorithm, and the state of the filter is corrected through a state coupling injection mechanism. Real-time compensation with the end-to-end delay smaller than 80 microseconds is achieved, the displacement measurement residual error is controlled within + / -0.3 nm under the composite disturbance condition, and the method is suitable for precise assembly of intelligent glasses optical assemblies.

The invention belongs to the field of electric energy meters, particularly relates to an automatic compensation calibration method for electric energy metering errors of an electric energy meter, and aims to solve the technical problems that a CORDIC algorithm is difficult to give consideration to efficiency and precision and an existing compensation method is difficult to correct multi-dimensional nonlinear errors under wide temperature and wide flow. Outputting an uncorrected x-axis component and a final accumulated phase angle, wherein the improved CORDIC iterative operation comprises M times of coarse rotation iteration and P times of fine rotation iteration; s2, performing amplitude correction on the uncorrected x-axis component to obtain a corrected instantaneous current amplitude; and S3, performing reconstruction by using the corrected instantaneous current amplitude and the final accumulated phase angle to obtain a corrected instantaneous current value, multiplying the corrected instantaneous current value by the instantaneous voltage value to obtain instantaneous active power, and performing accumulated integration on the instantaneous active power to obtain a compensated and calibrated electric energy value. According to the invention, high-precision metering performance of the electric energy meter in a wide current range and a wide temperature change range can be ensured.

The invention discloses an error compensation method of an analog-to-digital converter, a digital device and a controller, and the method comprises the steps: obtaining a to-be-compensated digital quantity and two reference digital quantities, the to-be-compensated digital quantity is obtained through the conversion of an analog signal through the analog-to-digital converter, and the reference digital quantities are obtained through the conversion of a reference signal through the analog-to-digital converter; obtaining a linear error based on the plurality of sampling values of each reference digital quantity under the condition that the reference digital quantity is within a preset effective range; and compensating the digital quantity to be compensated according to the linear error to obtain a compensated digital quantity. According to the invention, the accuracy in the ADC analog-to-digital conversion process can be effectively improved.

The invention provides an angle calculation method and system based on a triaxial accelerometer, and relates to the technical field of inertial navigation, and the method comprises the steps: obtaining an acceleration signal and preprocessing the acceleration signal to obtain an effective acceleration component, constructing a nonlinear error feature vector, carrying out the real-time parameter identification through a recursive least square method, and building a nonlinear error compensation model. And performing dynamic correction by adopting a self-adaptive sliding time window, and finally calculating a pitch angle and a roll angle. The non-linear error of the accelerometer can be effectively inhibited, the angle calculation precision is improved, and the method has the characteristics of good real-time performance and strong adaptability.

The invention provides an exposure apparatus, an exposure method, and an alignment method. In an exposure device provided with a stage or the like, proper alignment is performed in consideration of a linear error generated along with movement of the stage. An exposure device (10) is provided with a pair of calibration scales (62, 64) on which reference marks (CM) facing each other in an X direction (main scanning direction) are disposed, and the reference marks (CM) facing each other are imaged by an alignment camera (80) while a stage (50) moves. The amount of linear error in the amount of movement of the stage (50) is detected on the basis of the amount of misalignment of the reference mark (CM) in the captured image. Then, scale correction processing is performed on the exposure data in accordance with the calculated linear error amount.

The invention discloses a millimeter wave beam tracking method, a computer readable storage medium and node equipment, and belongs to the technical field of wireless communication, and the method comprises the steps: constructing a beam pointing error interval at an initial moment; at the next moment, predicting the interval through a state transition equation; acquiring a channel observation value under the current beam pointing based on a channel model; carrying out shrinkage processing on the predicted error interval; and estimating a beam pointing angle according to the contracted interval, and transmitting the interval as priori information to the next moment so as to repeat the steps. A computer program for executing the method is stored in the computer readable storage medium. The node equipment comprises at least one processor, a memory and a bus, wherein the memory stores a program for executing the method. According to the method, the tracking performance in a nonlinear and non-Gaussian scene can be kept under the condition that the calculation load is not increased, and the method is suitable for the conditions of uncertain and incomplete channel state information introduced by multipath, analog-to-digital conversion quantization, hardware nonlinear errors and the like.

The invention discloses an aperture error and non-linear cooperative calibration circuit and method for a pipeline ADC, and relates to the technical field of mixed signal integrated circuits, the circuit comprises a pipeline ADC basic circuit and a calibration circuit integrated with the pipeline ADC basic circuit, and the calibration circuit comprises an aperture error calibration module and a non-linear error calibration module. And the aperture error calibration module dynamically adjusts the sampling clock phase of the first-stage Sub-ADC by counting a post-stage output code value histogram and combining an SAR logic feedback mechanism so as to compensate the sampling moment deviation between the first-stage Sub-ADC and the MDAC. The nonlinear error calibration module extracts errors by injecting pseudo-random jitter and utilizing double-threshold window crossing statistics, and after EWMA smooth filtering is carried out, a polynomial compensation coefficient is updated in a self-adaptive mode through an LMS algorithm, and harmonic distortion is restrained. According to the method, the linearity under high-speed and high-bandwidth application is remarkably improved, and the method has good robustness for PVT fluctuation.

This invention provides a rapid detection method for critical linear errors of linear axes in CNC machine tools. The method is used to solve for critical linear errors of linear axes in CNC machine tools, including positioning errors and straightness errors. Based on the measurement function of a ballbar, this method ignores angular errors and does not consider the influence of other errors. Detection is performed under two designed circular trajectories. The critical linear errors are expressed and fitted using polynomials, and the coefficients are solved using the least squares method. This method can effectively and quickly obtain the positioning and straightness errors of the linear axis, which is of great significance for improving machine tool accuracy and increasing production efficiency.

The invention discloses a low-cost rapid test system for an ultrahigh-precision analog-to-digital converter, and the system comprises an upper computer which is used for generating and outputting a test instruction; according to analog-to-digital conversion results output by the to-be-tested ADC under different excitation voltages, differential linear errors and integral linear errors of the to-be-tested ADC are obtained through calculation; the test evaluation board is used for applying different excitation voltages to the to-be-tested ADC according to the test instruction; analog-to-digital conversion results output by the ADC to be tested under different excitation voltages are uploaded to the upper computer; and the power supply module is used for supplying power to the test evaluation board. According to the test system, the requirement that the resolution ratio of the excitation source is higher than that of the to-be-tested ADC is not put forward, and compared with a histogram method, the number of required samples is greatly reduced, so that the economic cost and the time cost can be reduced, and the test efficiency of the ultra-high-precision ADC is improved.

The invention discloses a magnetic tunnel junction and a TMR sensor, and belongs to the technical field of magnetic sensing. The magnetic tunnel junction comprises a substrate layer, a ferromagnetic free layer, a barrier layer, a ferromagnetic reference layer and an antiferromagnetic pinning layer, wherein the ferromagnetic free layer, the barrier layer, the ferromagnetic reference layer and the antiferromagnetic pinning layer are sequentially stacked on one side of the substrate layer; wherein the crystal face of the ferromagnetic free layer is a (110) crystal face. According to the embodiment of the invention, the linearity of the magnetic field sensing of the magnetic tunnel junction can be improved, the nonlinear error is reduced, and the TMR sensor can obtain a wider high-linearity measurement range.

The invention discloses a current calibration method for a motor drive controller. The method comprises the following steps: S1, checking a zero point sampling value under the condition that a three-phase copper bar is not electrified; s2, the three-phase copper bar outputs the maximum current, the signal collected by the sampling system at the moment is the maximum value of the sampling signal, and if the signal collected by the sampling system is not the maximum value of the sampling signal, the sampling signal at the moment needs to be calibrated; s3, calibration: sequentially sampling points and checking the output current, and if the linearity error exceeds + / -1%, checking the design of a current sampling module or the quality state of a product, and then carrying out maximum current sampling calibration again; s4, collecting a temperature compensation coefficient function call set, and feeding back a temperature value by a controller according to a temperature sampling system; and S5, writing the standard linearity and the temperature compensation coefficient into a controller for calculating the sampling current. According to the invention, current calibration is carried out on an internal current sampling module of the electric drive controller after the controller is assembled.

Electrode structure for a capacitive grid displacement sensor. The electrode structure comprises a sliding grid plate and a stationary grid plate. The sliding grid plate is mounted on the stationary grid plate. The sliding grid plate includes a transmitter electrode. The transmitter electrode comprises a plurality of mutually inverted trapezoidal structures. These trapezoidal structures are arranged at equal intervals along the displacement direction of the sliding grid plate. The structure is designed to reduce or even largely eliminate the abrupt nonlinear errors that arise when the edges of the insulating grooves between conventional transmitter electrodes align with the edges of the electrodes on the stationary grid plate. This improvement enables an increase in the overall measurement accuracy of a measuring instrument.Furthermore, the proposed electrode structure improves the signal-to-noise ratio of the electrode coupling, resulting in more stable measurement data.

The invention relates to a capacitive flatness measuring device for an ultra-low resistance silicon wafer and a control method thereof, and belongs to the technical field of semiconductor silicon wafer detection.The capacitive flatness measuring device comprises an objective table, a transplanting table is arranged on the objective table, a rack fixedly connected with the objective table is arranged on the periphery of the transplanting table, the ultra-low resistance silicon wafer is arranged on the transplanting table, and the ultra-low resistance silicon wafer is arranged on the rack. A plurality of capacitive sensors which are arranged in a two-dimensional matrix mode and are parallel to the objective table are arranged above the objective table and on the upper portion of the machine frame, and lifting air cylinders are arranged on the capacitive sensors. And by utilizing the capacitance measurement principle, the influence of the high reflectivity of the ultra-low resistance silicon wafer is completely avoided, and the problem that an optical method fails on such materials is solved. The nonlinear error of the system is eliminated through vertical scanning fitting, and the measurement precision of the flatness of the ultra-low resistance silicon wafer is improved.

This invention claims protection for an adaptive background calibration system for pipelined ADCs, comprising: a sample-and-hold module, a first conversion unit, a second conversion unit, a low-speed, high-precision ADC, a pipelined ADC to be calibrated, an LMS adaptive filter, and a subtractor; capable of calibrating linear errors in the pipelined ADC caused by non-ideal factors such as capacitor mismatch, finite op-amp gain, and op-amp offset. By using a low-speed, high-precision ADC as a reference, connected in parallel with the pipelined ADC to be calibrated, and sending the difference between their digital outputs to a digital adaptive filter for processing, the output of the pipelined ADC continuously approximates the output of the low-speed, high-precision ADC, thereby achieving digital calibration. During this process, the normal conversion process remains unaffected and the conversion speed of the original ADC is not reduced, offering advantages such as high calibration accuracy, fast convergence speed, and strong tracking capability.

The invention provides an inverter nonlinear compensation method and system based on a single lookup table method, and relates to the technical field of motor control, and the compensation method comprises the steps: obtaining the original experiment data of a motor under a preset experiment condition; constructing a phase current-nonlinear error voltage single lookup table corresponding to the motor according to the original experimental data; under the fixed bus voltage and the fixed PWM frequency, when the motor operates normally, determining corresponding nonlinear error voltage data according to the expected phase current of the motor based on the single lookup table; and performing Clarke conversion on the three-phase nonlinear error voltage to obtain an alpha-beta-axis compensation voltage of the motor, and superposing the alpha-beta-axis compensation voltage into an alpha-beta-axis control voltage of the inverter to complete nonlinear compensation of the inverter. According to the method, the early-stage experiment calibration and data processing flow is greatly simplified, meanwhile, the dependence on the computing power of a processor is reduced, stable operation on medium and low computing power hardware can be achieved, and the engineering implementation cost is reduced.

The invention discloses a zero setting and calibration method of an angle encoder based on a DSP. The zero setting and calibration method comprises the following steps that 1) a DSP main control module writes configuration data into the angle encoder; (2) the DSP main control module reads current mechanical angle data of an angle encoder; 3) based on the current mechanical angle data and the theoretical angle data, performing zero setting on the angle encoder; 4, the DSP main control module is used for calibrating the angle encoder, and amplitude unbalance, phase deviation and linear error are compensated. Automatic zero setting and calibration are achieved through communication between the DSP and the SPI and CAN of the MT6835 rotary transformer chip, system parameter configuration, angle reading and zero point compensation can be completed without external manual intervention, and precision, efficiency and maintainability are greatly improved.

The invention provides a transformer anti-short-circuit capability influence factor determination method, and belongs to the technical field of transformers, and the method comprises the steps: building a temperature-curing coefficient mapping relation data set, importing a multi-physics field coupling simulation model, completing the loose coupling calculation of electricity-magnetism-force-heat-displacement through employing a step-by-step iteration coupling algorithm, and determining the anti-short-circuit capability influence factor of a transformer. Constructing a suspicious degree evaluation matrix to quantify the contribution weight of each influence factor, adaptively adjusting a weight coefficient threshold according to a simulation result and a linearity error of short-circuit accident statistical data, and starting a standard calibration program or a nonlinear compensation algorithm to correct a material constitutive relationship when the error is relatively large; and finally, extracting the influence factors of which the weight coefficients exceed a threshold value from the suspicious degree evaluation matrix as key influence factors, thereby solving the technical problem that the identification accuracy of the influence factors of the anti-short-circuit capability of the transformer winding is insufficient.

This invention discloses a method, system, device, and medium for nonlinear error compensation of MEMS accelerometers under strong vibration environments, belonging to the technical field of MEMS accelerometers. The method includes acquiring the raw output value of the MEMS accelerometer; calculating an estimated acceleration based on the raw output value and multiple pre-fitted error compensation parameters; calculating a nonlinear error compensation term based on the estimated acceleration and the pre-fitted error compensation parameters; and summing the estimated acceleration and the nonlinear error compensation term to obtain the compensated actual acceleration value. This invention eliminates the need for device redesign, effectively improves the nonlinear accuracy of MEMS accelerometers, and reduces vibration rectification errors under strong vibration environments.

The invention provides a motor controller cooling liquid temperature measuring and calculating method and system and a vehicle. The method comprises the steps that a sampling value is obtained through measurement of a temperature sensor arranged on the side wall of a cooling liquid inlet; preprocessing the sampling value to obtain a preprocessing value; performing delay compensation of the heat conduction path on the pre-processing value to obtain a delay compensation value; and performing linear error compensation based on the delay compensation value and the environment temperature, and finally outputting an estimated value of the cooling liquid temperature. According to the invention, through a double compensation mechanism of time delay compensation and linear error compensation, temperature response delay caused by a sensor installation position and measurement errors caused by an environment thermal field and sensor inherent characteristics are effectively overcome, and an accurate and stable cooling liquid temperature estimation value can be output in real time; and a reliable data basis is provided for accurate heat management and safe operation of the motor controller.

This invention discloses a method for monitoring the state trend of pumped storage units based on an integrated prediction model, comprising the following steps: 1) improving the self-attention mechanism to extract features from the unit's vibration signals; 2) constructing an integrated prediction model, using the first-layer prediction model to achieve individual prediction of time series data; 3) constructing a weighted linear error correction method by integrating and improving the artemisinin optimization algorithm through multi-strategy integration to fuse the prediction results of the first-layer model; 4) optimizing the hyperparameters of the second-layer prediction model based on the improved artemisinin optimization algorithm to achieve efficient and accurate prediction of the fused results; 5) evaluating the lifespan of the pumped storage unit based on the unit state prediction results. The method proposed in this invention can adaptively adjust the weights of predicted and error values ​​and optimize the hyperparameters of the prediction model, improving the efficiency and accuracy of pumped storage unit state trend prediction, accurately warning of abnormal unit operating conditions, ensuring safe and stable unit operation, and improving the overall efficiency of the power station.

The invention discloses a multi-scene power system frequency safety index self-adaptive partition reconstruction method, which comprises the following steps: acquiring multi-type frequency modulation resource parameters of a system, and establishing an analytical expression of nonlinear frequency safety index constraints based on a system multi-machine frequency response dynamic model considering multi-type frequency modulation resources; acquiring an original feasible range of system frequency modulation parameters, and sampling to generate an original frequency modulation parameter region and a frequency safety index sample curved surface set in the feasible range of the system frequency modulation parameters; acquiring all sample point subsets on an inertia boundary in the frequency modulation parameter area by traversing sample points meeting a specific equivalent inertia value of the system, acquiring intersection points of frequency safety indexes corresponding to the sample points and constraint limit values of the sample points on an original frequency modulation parameter area boundary, and re-partitioning the original frequency modulation parameter area into a plurality of subareas; and linearizing the linear sub-region which needs to be linearized, outputting a linearization parameter which meets a linear error threshold value requirement, and reconstructing a frequency safety index constraint after partition linearization.

The invention relates to the technical field of numerical control machine tools, and provides a nonlinear error control method and system for a numerical control machine tool, and the method comprises the steps: constructing a nonlinear error dynamic calculation model fusing the axial speed and acceleration constraints, and traversing the time nodes of an interpolation period between two adjacent cutter location points, obtaining a nonlinear error value of each time node according to the nonlinear error dynamic calculation model, and obtaining a maximum nonlinear error and a corresponding actual position; taking two adjacent cutter location points and the actual position of the maximum nonlinear error as fitting feature points, and constructing a nonlinear error equivalent curvilinear equation by adopting a piecewise quadratic function fitting method; performing error control according to the nonlinear error equivalent curve equation and the error allowable value, if the nonlinear error of the interpolation section meets the precision requirement, not performing optimization, and if the nonlinear error of the interpolation section does not meet the precision requirement, performing interpolation point optimization processing to obtain a theoretical trajectory. According to the invention, the error control accuracy can be improved.

A composite control strategy of a Vienna power factor correction circuit comprises an active-disturbance-rejection voltage control outer loop and an optimized switch sequence model prediction current control inner loop, the active-disturbance-rejection voltage control outer loop designs LTD to arrange a transition process for an output voltage reference value square value to realize rapid tracking, and designs LESO to observe output and total disturbance in real time. An LESF is designed to realize zero static error adjustment through a linear error feedback rate, a switching sequence model is optimized to predict a current control inner ring, redundant vector preprocessing is adopted, a candidate redundant switching sequence is reduced by half according to a redundant vector selection rule, the calculated amount is reduced, a modulation signal is sent to an SVPWM modulation unit, a PWM signal is generated, a switching tube of a main power circuit is driven, and the switching tube of the main power circuit is controlled. And closed-loop control is realized.

The application discloses a gradient field nonlinearity compensation method and system in a low-field magnetic resonance imaging system, and belongs to the technical field of magnetic resonance imaging. The application aims at the gradient field distortion problem caused by the nonlinearity of a gradient power amplifier and the thermal memory effect in a low-field magnetic resonance system, and provides a real-time dynamic compensation scheme integrating feedforward calibration and thermal effect modeling. The application calibrates the nonlinearity error of a gradient current through a pre-scan sequence, generates an initial feedforward lookup table, establishes a thermal model representing the thermal dynamic behavior of the gradient power amplifier, dynamically corrects the feedforward table according to the influence factor of the thermal memory effect estimated in real time according to historical workloads, and iteratively corrects the feedforward table and the thermal model through adaptive filtering technology. The application greatly reduces the computing power requirement of the compensation algorithm, can track the dynamic thermal drift of the gradient field in real time, solves the gradient field nonlinearity problem from the signal source, and significantly improves the geometric fidelity of a low-field magnetic resonance image.

The invention relates to a substrate transfer apparatus, a substrate processing apparatus, and a substrate transfer method. The substrate processing apparatus (1) is provided with a storage unit (73) that stores, for each slot of the carrier, a correction value of a linearity error between a height position measured by the rotary encoder (25) and a real height position known in advance. The control unit (71) uses the rotary encoder (25) to measure the height position for production of the substrate in the carrier placed on the stage by moving the light projecting unit and the light receiving unit of the mapping sensor (27) by means of the gate lifting unit (23). The control unit (71) refers to the storage unit (73), reads the correction value corresponding to the slot into which the substrate is inserted, and corrects the height position for production using the correction value. The control unit (71) controls the take-out operation and the storage operation of the transfer robot (IR) on the basis of the corrected height position for production.