Laser multiple degree-of-freedom measuring system and method

A technology of measurement system and degree of freedom, applied in the field of laser precision measurement system, can solve problems such as difficult to achieve fast and convenient measurement, inconvenient on-site measurement, complex optical system, etc., to achieve convenient measurement, simple structure, and simple optical path adjustment Effect
CN1439864AInactive Publication Date: 2003-09-03BEIJING JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING JIAOTONG UNIV
Publication Date
2003-09-03
Estimated Expiration
Not applicable · inactive patent

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Abstract

A multi-freedom laser measuring system is composed of laser emitter, polarizing-splitting unit, 4-freedom error sensing unit, photoelectric receiver unit and signal processing unit. Said 4-freedom error sensing unit consists of quater-wavelength wave plate, optical splitter and optical reflector. The laser beam is splitted into the perpendicular mutually linear polarized light beams in two polarizing directions. The light beam received by said 4-freedom error sensing unit is splitted to two beans received by two photoelectric receiver. The linearity error of an object in two directions and the pitch angle error can be obtained after signal processing.
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Description

(1) Technical field

[0001] The invention relates to a laser precision measurement system and method, which is especially suitable for simultaneous measurement of multi-degree-of-freedom errors or motion postures of workpieces or objects when they move along a guide rail. (2) Background technology

[0002] The detection of the accuracy of CNC machine tools and machining centers is an indispensable key link in the machine tool industry and machining industry, and is also an important means to ensure the machining accuracy and product quality of machine tools. To sum up, machine tool accuracy detection is mainly used in the following occasions: 1) Measure and draw the geometric accuracy error curve of the machine tool to correct and compensate the geometric error of the machine tool; 2) Conduct a decisive test on the new machine tool to be purchased to determine whether to purchase it ; 3) Periodic inspection of existing machine tools to ensure the machining accuracy of the mac...

Claims

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