This invention relates to the field of optical
interferometry, specifically to a method for measuring the interferometric
surface shape of a binary
diffraction grating by separating the upper and lower surfaces. This method addresses the problem that traditional Fizeau
interferometry cannot achieve independent measurement of each surface when measuring periodic
diffraction structures due to fringe
aliasing, phase jumps, and
signal mixing. The method is based on acquiring a phase-shifted interferogram sequence using a standard
Fizeau interferometer. After suppressing
diffraction noise and reconstructing clear fringes using a three-dimensional
Fourier transform and spatial low-pass filtering, a phase-shifting
algorithm is used to extract the continuous phase. To separate the upper and lower surfaces, the zero-frequency component in the
time domain is further extracted to obtain a
reflectivity distribution map, and a segmentation
mask is automatically generated based on its step intensity characteristics, ultimately achieving independent phase separation and
surface shape reconstruction for each surface. This invention requires no changes to the interferometer hardware, effectively overcomes the difficulties of fringe
aliasing and phase unpacking, achieves high-precision and stable measurement of binary diffraction gratings, and possesses strong
noise resistance and good
engineering applicability.