272 results about "Laser interference" patented technology

The invention provides a color steel plate coating flatness evaluation method and system based on artificial intelligence. According to the method, the three-dimensional point cloud data is generated by collecting the interference fringe image, and the surface fluctuation characteristics are quantified; capturing a multi-dimensional vibration spectrum of the transmission roller shaft, generating a servo motor compensation control signal, driving a multispectral scanning head to perform reverse displacement compensation, and generating real-time compensation data; inputting the surface topography features in the three-dimensional point cloud and the real-time compensation data into a lightweight convolutional neural network, and outputting fusion features; and dynamically classifying and identifying surface defects and uneven areas based on the fusion result, adjusting a classification threshold in combination with the speed of the production line, outputting a flatness evaluation result, and synchronizing the flatness evaluation result to a speed regulation system of the production line to realize closed-loop optimization. According to the method, laser interference, vibration compensation and lightweight AI technologies are fused, dynamic high-precision evaluation of the surface flatness of the color steel plate of the high-speed production line is achieved, and the problems of defect misjudgment and measurement distortion caused by vibration interference are solved.

The invention relates to the technical field of damage detection, and discloses a screen protection film damage detection method and system, and the method comprises the steps: carrying out the laser interference thickness scanning of a screen protection film, and obtaining three-dimensional thickness distribution data and thickness gradient vector field data; performing multi-layer polarization interference detection on the circularly polarized light beam based on the three-dimensional thickness distribution data to obtain polarization phase difference distribution data; according to the thickness gradient vector field data, non-periodic phase unenveloping processing is carried out on the polarization phase difference distribution data to obtain continuous polarization phase distribution data; performing stress optical coefficient tensor calculation and dynamic elliptical polarization modulation based on the continuous polarization phase distribution data to obtain stress damage space positioning data; the edge cutting area and the center bending area of the screen protection film are subjected to damage imaging reconstruction, a three-dimensional stress damage imaging result is obtained, and full-chain detection from geometric thickness change to stress distribution and then to damage positioning is achieved.

The invention discloses a wafer polishing laser interference closed-loop pressure control method, and relates to the technical field of semiconductor manufacturing, and the method comprises the following steps: S1, triggering an automatic measurement program after a ceramic plate and a wafer are overturned; s2, driving a laser interference measuring head to perform non-contact scanning on T2 / T4 point positions of the wafer through a six-axis mechanical arm positioning system to obtain thickness distribution data; s3, fitting the thickness distribution data by adopting a Zernike polynomial to generate a three-dimensional distribution diagram, and calculating a pressure correction amount based on a process dynamic model and a pressure prediction model constructed by a support vector machine regression algorithm; s4, detecting a data outlier in real time through an exception handling module, and triggering an equipment protection strategy when the deviation exceeds a set threshold value; and S5, a pressure control instruction is transmitted to the polishing head through the PROFINET bus by means of the PLC. Through non-contact laser interference measurement, the laser interference technology is applied to thickness detection of the polished wafer for the first time, the single measurement time is shorter than 20 seconds, and the detection efficiency is remarkably improved.

The invention relates to the technical field of length measurement, and particularly discloses a length measurement device based on laser interference, which comprises a laser measurement module, an air curtain channel module, an air curtain construction module and a channel adjustment module, the laser measuring module is used for transmitting and receiving laser, the optical path difference change is measured according to the interference principle, and the micro length change of the workpiece can be continuously and accurately measured in real time while the machining module carries out machining operation on the workpiece; a linear channel is formed between the laser head and the measuring reflector through the air curtain channel module, inert gas is continuously introduced into the channel through the air curtain construction module, and an air curtain atmosphere with stable laminar flow is formed, so that pollutants and interference factors such as oil mist, dust, cutting fluid splashing and hot air turbulence generated in a machining area are effectively blocked, and the machining precision is improved. Therefore, the measurement light beam is prevented from being interfered by environmental factors in the propagation process.

According to the precise cutting machining method and system for the soft material, firstly, the three-dimensional model and the cutting parameters of the material are obtained, the initial cutting track is generated, in the cutting process, material deformation is monitored in real time through the multi-sensor fusion technology, the cutting track and depth are adjusted through the dynamic compensation algorithm, and the cutting precision is improved. And meanwhile, a laser interference measurement system is adopted to track the position of a cutting tool, and micron-level precision is achieved through closed-loop feedback control. According to the method, pressure control and cutting depth adjustment are combined, a specific microstructure is created to achieve differential friction coefficients, in addition, the surface chemical composition is monitored through real-time spectrum analysis, and it is ensured that the preset surface characteristic requirement is met. The cutting track, depth and surface texture of the soft material can be accurately controlled, high-precision and customizable soft material machining is achieved, and key technical support is provided for intelligent machining in the fields of flexible electronics, bionic robots and the like.

The invention discloses an automobile wire harness detection device based on artificial intelligence and machine vision, and relates to the technical field of visual inspection, and the device comprises a film covering module which enables an automobile wire harness to be immersed in a control groove of magnetic fluid to form a nano film; the marking module projects interference fringes to the nano-film through a laser interference projector, and marks timestamps and capture numbers of fringe images; the image module is used for applying magnetic field pulses in the timestamps of the adjacent stripe images to generate a turbulent flow image sequence; the quantization module is used for respectively carrying out interference fringe phase analysis on the turbulence images in the turbulence image sequence to generate a curvature quantization matrix; the defect module is used for analyzing the curvature quantization matrix through a pre-trained convolutional neural network and identifying a defect type and a coordinate position; and the result module is used for superposing the defect type and the coordinate position to the stripe image to generate a defect distribution thermodynamic diagram. According to the invention, high-precision intelligent defect identification of wire harness detection is realized through cooperation of the nano-film and the convolutional neural network.

The invention provides a perovskite photovoltaic cell ruling machine and a control method thereof, and the method comprises the steps: collecting a cell surface map at the end of first ruling, converting the cell surface map into a cell brightness map, and determining the laser scattering amount of each pixel point in the cell surface map; extracting a laser interference component in the battery brightness diagram based on all laser scattering amounts in the battery surface diagram, determining an equal-brightness-domain sequence of the battery brightness diagram, correcting the laser interference component according to the equal-brightness-domain sequence to obtain a brightness equalization component, determining a brightness equalization diagram through the brightness equalization component, and obtaining a battery scribing auxiliary diagram; the scribing depth of each scribed line on the perovskite photovoltaic cell is determined through the cell scribing auxiliary graph and the brightness balance graph, and the focal length of the corresponding laser on the perovskite photovoltaic cell scribing machine next time is adjusted through the scribing depth of each scribed line on the perovskite photovoltaic cell, so that self-adaptive adjustment of the laser focal length can be realized. Therefore, slag is prevented from appearing in the scribing process of the perovskite photovoltaic cell.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The application relates to the field of detection devices and discloses a high-precision gas bearing static characteristic test table, which comprises an optical base, a detection table arranged on the optical base, a suspension support arranged on the optical base, a detection cylinder arranged on the suspension support and located directly above the detection table, a gas floating ball hinge arranged at the driving end of the detection cylinder, a pressure sensor arranged at the bottom of the gas floating ball hinge, and an upper floating bearing plate arranged at the bottom of the pressure sensor and used for being pressed on the detection table. A laser interference measurement assembly is arranged between the lower surface of the upper floating bearing plate and the upper surface of the optical base and used for measuring the displacement and inclination of the lower surface of the upper floating bearing plate. The application can accurately evaluate the partial static characteristics of the gas bearing.

The invention relates to the technical field of semiconductor etching, in particular to a semiconductor etching method based on plasma coordinated regulation, which comprises the following steps: alternately using first plasma and second plasma on a semiconductor to be etched to obtain a plurality of groove structures with a preset depth-to-width ratio, the second plasma is used for cleaning side wall residues; detecting by using a laser interference measurement method to obtain an etching rate ratio and a side wall angle corresponding to each groove structure, and determining corresponding treatment according to the change condition of the etching rate ratio and the side wall angle, including maintaining the etching and cleaning parameters of the current stage, or adjusting the corresponding parameters of the first plasma according to the need, or corresponding parameters of the second plasma are adjusted according to needs. According to the method, the first plasma and the second plasma are cooperatively controlled to adjust the groove structure in each stage, so that the uniformity of the groove structure is improved, and the damage to the surface of the side wall is reduced.

The invention relates to the technical field of optical simulation imaging, in particular to an acquisition method and application of a laser interference spot simulation model, and the method comprises the following steps: carrying out image preprocessing, edge detection, Hough circle detection and radial intensity analysis on a ray tracing result to obtain a characteristic circular ring and the position and size thereof; a related mathematical model is established according to different laser parameters (such as a laser incident angle, a laser transmission distance and laser emission power) and characteristic circular ring parameters (such as different positions, internal power density and peak power density), and finally a laser interference spot simulation model is obtained. The calculation complexity of the simulation model is remarkably reduced, the simulation process carried out by utilizing the simulation model has the characteristics of low calculation complexity, high calculation speed, strong universality and the like, and compared with a ray tracing structure, the fitting precision of a light spot image obtained by simulation is high.

The invention belongs to the technical field of image processing, and particularly relates to a GIS shell girth welding deviation real-time correction method which comprises the steps that a target image and a target image sequence are obtained; positioning a laser region according to a pixel point gray value interval and a pixel point brightness concentration condition in the target image to obtain a laser region sequence; forming a laser centroid sequence by taking the exponential power of the gray values of the pixel points in the laser area as a weight; smoothing the laser centroid sequence to obtain a smooth track point, and generating a laser actual motion track; smoothing the actual movement track of the laser to generate a reference welding track; calculating a real-time correction vector according to the reference welding track and the actual laser motion track; and according to the real-time correction vector and the welding reference position in the reference welding track, a new target position is calculated, the position of a welding head is adjusted, and real-time correction of the welding deviation is achieved. The problem that deviation correction is inaccurate due to the fact that the GIS shell girth welding process is interfered by laser is effectively solved.

The invention discloses a wire bonder transducer, a wire bonder and a vibration amplitude detection and calibration method, and realizes non-contact and high-sensitivity amplitude detection of a vibration part of the transducer by integrating a laser interference detection part in the wire bonder transducer. Continuous laser with a stable wavelength is output through the laser, signal light and reference light are split through the optical splitter, the signal light irradiates the vibration part of the transducer and is reflected, the reference light and the reflected light are combined in the beam combiner to form interference fringes, and finally a phase change signal is collected through the photoelectric detector. According to the invention, the micron-sized vibration displacement of the transducer in the working state can be extracted in real time with high precision. Compared with a traditional judgment mode, the method has the advantages that an objective and quantifiable detection means is provided, the precision and the automation degree of transducer performance consistency evaluation are effectively improved, the method can be widely applied to production line detection, equipment calibration, online quality control and other scenes of wire welding equipment, and the method has important significance in guaranteeing the welding stability and improving the packaging yield.

The invention provides a laser interference processing optimization method and system for improving the performance of a micro-nano structure, and relates to the technical field of laser micro-nano machining.The method comprises the steps that firstly, micro-nano structure sample processing parameters are extracted, a sensitive tracking model is constructed to analyze parameter sensitivity, and a lifting-retaining parameter set is obtained; according to the simulation modeling, processing and lifting a dynamic model diagram, analyzing the period consistency of the dynamic model diagram and a reference design diagram through foreground and background maximum flow cutting, and determining a structure period; if the local photoetching model diagram is of a periodic structure, projecting the actual local photoetching model diagram to a local photoetching model diagram of one type in a sine manner, analyzing the curve slope, and optimizing a periodic interference angle and a light beam wavelength; and if the structure is a non-periodic structure, interpolating a gradient processing chromaticity layout for the second-class local photoetching model diagram according to a chromaticity tradeoff criterion, and analyzing and optimizing a dynamic phase in real time. According to the method, high-precision optimization of the processing parameters of the micro-nano structure with consistency in different periods is realized, and the overall performance and stability of the micro-nano structure are effectively improved.

The invention provides an unmanned aerial vehicle (UAV) countering method and device for interfering the AI vision of a UAV, and a medium, and the method comprises the steps: determining a fixed countering point information set in a protection region, including the unique identification, type and position information of countering points, generating a countering patrol route based on the position information, and issuing the countering patrol route to a target countering UAV; when temporary threat reporting information is received, judging whether the threat point is a to-be-added threat point; and if yes, adding the temporary threat report information into a temporary threat report information set, generating an updated countering route in combination with the set and the countering patrol route, and controlling the target countering unmanned aerial vehicle to execute a laser interference action according to the updated route. The method can efficiently and flexibly deal with the threat of the unmanned aerial vehicle in the protection area, and improves the safety protection capability of the area.

The invention relates to the technical field of laser measurement, in particular to a laser interference surface shape measurement method based on a calibration plate, a medium, equipment and a system. Comprising the following steps: attaching a reflecting mirror to a reference mirror, and obtaining reflecting surface shape data of the reflecting mirror; the calibration glass plate is tightly clamped between the reflector and the reference mirror, and light facing surface reflection surface shape data and mixed transmission surface shape data of the calibration glass plate are obtained; removing the reflector, moving the calibration glass plate to a preset measurement distance along a laser optical axis, carrying out multi-surface synchronous measurement through a laser interferometer, and respectively obtaining light facing surface mixed reflection surface shape data and to-be-measured surface shape mixed data; and obtaining target surface shape data of the surface to be measured. According to the invention, the movable calibration glass plate is introduced to establish a double-reference measurement system, so that the space calibration of the airflow disturbance error can be realized. The device is simple in structure and low in measurement environment requirement. Interference of air turbulent flow can be eliminated only through single-time measurement, and the measurement time is saved.

The invention relates to the technical field of position control feedback, and particularly provides a laser interference feedback positioning system and a positioning method thereof, and the system comprises a wave source phase modulation subsystem, a dynamic path compensation subsystem and a multi-dimensional feedback calibration subsystem. The method comprises the following steps: establishing a dynamic phase encoding model through nonlinear time sequence analysis; an original fixed phase beam of a laser wave source is converted into a tuning beam with space-time correlation, and a phase characteristic matrix of the tuning beam is used as an input parameter of a dynamic path compensator; constructing a compensation field model based on the tuning beam phase feature matrix; generating a dynamic compensation gradient by using the phase characteristic matrix; integrating the dynamic compensation gradient and the environment sensing data of the laser wave source, and constructing a six-dimensional state space calibration model; and outputting comprehensive positioning parameters including the displacement vector, the confidence interval and the environmental stability coefficient. Static measurement of a traditional interferometer is converted into an active regulation and control process with high adaptability and controllable errors.

The invention discloses a ship sheet welding part deformation monitoring method and system. According to the method, controllable elastic disturbance is introduced into a welding area through a phased array sound wave excitation module, and tiny response of the surface of a welding part under the action of thermal stress is excited; a multi-frequency interference light intensity image of a welding area is obtained through a laser interference measurement module, phase responses under all sound wave frequencies are extracted through Fourier spectrum analysis, and a multi-frequency comprehensive disturbance amplitude graph is obtained; and in combination with temperature gradient information acquired by the thermal infrared imager, a disturbance direction vector field is constructed, and then a two-dimensional disturbance vector field of the welding area is generated. An abnormal deformation area possibly generated in the welding process is recognized in real time by constructing a judgment early warning mechanism, and visual early warning information is output. The method has the technical characteristics of non-contact, high precision, real-time performance and multi-dimensional cooperation, and is suitable for intelligent deformation monitoring and early risk early warning in the ship thin plate component welding process.

The invention provides a fiber laser interference vibration measurement method and device, and relates to the technical field of fiber laser interference vibration measurement. The laser is divided into reference light and measuring light through the 1 * 2 coupler, the measuring light is divided into multiple paths through the 1 * N coupler, the multiple paths of light are irradiated to the same measuring point from multiple directions through the circulator and the collimation / focusing optical element, a redundant light return channel is constructed, and the light return success rate and interference stability under a rough surface or a curved surface or a diffuse reflection surface are effectively improved. The return light and the reference light are superposed in the interference unit to form interference fringe signals, high-precision vibration displacement data are extracted through signal detection and three-phase demodulation, and the method is suitable for non-contact vibration measurement scenes which are low in cost and easy to deploy.

The embodiment of the invention provides a blade tip timing non-contact measurement method and system based on laser interference, belongs to the technical field of blade tip monitoring, and solves the problems that an existing method depends on an advanced signal processing algorithm to extract vibration characteristics, but cannot solve the problems of high-frequency signal aliasing, phase noise suppression and multi-target crosstalk. The method comprises the steps that a high-bandwidth photoelectric detector is used for responding to and obtaining an interference signal, and self-adaptive phase solution and timestamp capture are conducted on the interference signal based on a self-adaptive phase unwrapping method in combination with a dynamic signal compensation mechanism. According to the method, the interference signals are processed on the basis of the self-adaptive phase unwrapping method in combination with a dynamic signal compensation mechanism, signal phase solution information can be effectively extracted, noise is effectively suppressed, multi-blade signal crosstalk is separated, and the method is suitable for being applied to the field of multi-blade multi-modal parameter identification and analysis. And more accurate blade tip multi-modal parameters are obtained.

The invention relates to a method for producing a glass pane having an anti-fogging structure, comprising the following steps: • - providing a surface to be structured, the surface being at least a portion of a glass pane or a portion of a glass pane coated with a transparent oxide coating, • - introducing an anti-fogging structure into the portion of the surface of the glass pane by laser interference structuring with a pulsed laser in such a way that at least two laser beams are made to interfere with one another so that a pattern that is determined by the interference and has depressions with a depth of < 200 nm is created, any coating having a lower thickness than the depth of the structuring depressions. • - In the case of an uncoated glass pane, coating the structured portion with a transparent oxide coating, the coating having a lower thickness than the depth of the structuring depressions made in the surface. • The invention also relates to a glass pane produced in this way and having an anti-fogging structure and to the use thereof.

The invention relates to the technical field of nondestructive testing of constructional engineering, and discloses a laser measuring instrument for nondestructive testing of concrete cavities, which comprises a laser interference measuring assembly, a paraxial sound wave excitation assembly, coaxially arranged anti-interference equipment and a cooperative control processing system. The sound wave excitation assembly performs wide-area excitation on the concrete surface, and the laser interference measurement assembly receives returned light through a clean light path constructed by the anti-interference equipment. The cooperative control processing system establishes acousto-optic time-frequency association by using an adaptive control module, generates a phase compensation angle according to ranging data to eliminate phase lock loss caused by sound wave propagation delay, and monitors a spectral gradient to automatically trigger fixed-frequency locking to capture resonance response. And the signal analysis module uses the phase compensation correction signal, and outputs cavity features through dual data cleaning and thermodynamic diagram analysis. According to the invention, the problems of time-space synchronization and weak signal extraction of long-distance non-contact detection in a complex environment are effectively solved.

The invention relates to a battery finished product defect detection method, system and terminal, and belongs to the technical field of battery detection.The battery finished product defect detection method comprises the steps that laser interference scanning is conducted along the side angle of a top seal of a finished product battery pack, and the scanning mode is spiral scanning; acquiring scanning data in a spiral scanning process, wherein the scanning data comprises stripe spacing and contrast; judging whether the fringe spacing is not less than 1.2 times of a fringe spacing normal value or not and whether the contrast is lower than a contrast normal value or not; and if yes, marking the scanning area corresponding to the current stripe spacing as a preliminary liquid leakage area. The method has the beneficial effect of improving the safety of the finished battery after leaving the factory.

The invention discloses a nano-scale displacement real-time compensation measurement method and system based on double-frequency laser interference, and belongs to the technical field of precision measurement. In order to solve the problems that three error sources of environmental drift, periodic nonlinear error and dynamic vibration are mutually coupled and have high real-time requirements in dual-frequency laser interference measurement, a multi-source error unified state space model including measured displacement, an air refractive index parameter, a nonlinear error parameter and a vibration disturbance quantity is constructed. A high-dimensional state vector is divided into a displacement-refractive index group and a nonlinear parameter group by adopting an extended Kalman filter of a grouping updating strategy, the displacement-refractive index group and the nonlinear parameter group are alternately updated in an assembly line parallel mode, nonlinear parameters are identified in real time in combination with an online recursive least square algorithm, and the state of the filter is corrected through a state coupling injection mechanism. Real-time compensation with the end-to-end delay smaller than 80 microseconds is achieved, the displacement measurement residual error is controlled within + / -0.3 nm under the composite disturbance condition, and the method is suitable for precise assembly of intelligent glasses optical assemblies.

The invention relates to the technical field of semiconductor thickness measurement, in particular to a VCSEL epitaxial wafer thickness measurement method based on laser interference. The method comprises the steps that a self-adaptive band-pass filter is constructed for any effective measurement point, the center frequency of the self-adaptive band-pass filter is the correction frequency center of the effective measurement point, and the bandwidth of the self-adaptive band-pass filter is inversely proportional to the local quality factor of the effective measurement point; and filtering the initial frequency spectrum of each measurement point by adopting a self-adaptive band-pass filter, and calculating the thickness of the epitaxial wafer based on the filtered frequency spectrum. Through a self-adaptive filtering strategy, frequency spectrum drift and deformation can be effectively compensated, so that the thickness of the epitaxial wafer is calculated more accurately, and the accuracy and stability of epitaxial wafer measurement are improved.

The invention provides a Raman spectrum calibration method and system based on transient stimulated Raman scattering. The Raman spectrum calibration method comprises the following steps: acquiring stimulated Raman signals in a time domain in a transient stimulated Raman scattering mode; the time delay of each sampling point of the time domain Raman signal is tracked in real time through the reference laser interference fringes, and Raman displacement after Fourier transform is determined; detecting an exciting light spectrum obtained by sampling through a photoelectric detector, and calculating excitation efficiency at different Raman displacement positions to obtain an excitation efficiency curve; the intensity of Raman spectrums at different Raman displacement positions is calibrated through the excitation efficiency curve, the self-calibrated Raman spectrums are obtained, the self-calibration transient stimulated Raman scattering technology inherits the advantages of high time resolution and high spectral resolution of the transient stimulated Raman scattering technology, the self-calibration transient stimulated Raman scattering technology is combined with a self-calibration mechanism, and the self-calibration effect of the self-calibration transient stimulated Raman scattering technology is improved. The influence of excitation light fluctuation is eliminated, the Raman spectrum measurement accuracy and repeatability are remarkably improved, and the quantitative analysis capability is comparable to that of spontaneous Raman spectrum.

The invention relates to a laser interference surface type measurement method using random mechanical disturbance for resolving. The method comprises the following steps: acquiring an interference image of a measured element by using a surface type measurement device based on laser interference; applying random mechanical disturbance to the surface type measuring device to cause the change of the relative pose between the reference mirror and the measured element so as to acquire N frames of interference images in different disturbance states; and processing the acquired interference images through a natural phase decoding algorithm to obtain the surface topography of the measured element. Compared with the prior art, high-precision measurement of the surface type of the measured element can be realized without vibration isolation equipment and a high-precision phase shifter, and the method has the advantages of low cost, low system complexity and high adaptability.

The invention discloses a BNCT target disc temperature detection system and method. The method comprises the steps that a magneto-optical film with the thickness of 20 + / -1 nm grows on the back surface of a rotating lithium target through magnetron sputtering; a dual-wavelength laser interference light source is introduced into a vacuum target chamber through a coaxial optical fiber probe to form a dual-cavity interference link; the magneto-optical film generates nanoscale displacement by using centrifugal force generated when the rotary lithium target rotates, so that the instantaneous temperature rise of the rotary lithium target is amplified into a phase polarization composite signal capable of being optically detected; the integrated micro slip ring coupling optical path is used for coupling the phase polarization composite signal to a static end photoelectric detector; a phase polarization composite signal output by the photoelectric detector is input into the field programmable gate array, and the transient micro-area temperature field of the rotating lithium target is solved in real time; and the generated transient micro-area temperature field is used as a boundary condition for driving, so that closed-loop verification and temperature control protection of the rotating lithium target are realized. According to the invention, millisecond-level temperature control protection of the ultrathin rotary lithium target can be realized.

The invention provides a laser interference coding image restoration optimization method, and belongs to the technical field of photoelectric imaging in image processing. According to the method, comprehensive optimization of image quality is realized through directional search and removal of light spot noise, restoration of coding information and restoration of background information.

The invention discloses a spacecraft micro-deformation measurement method and system based on femtosecond laser interference, and relates to the technical field of laser interference measurement, and the method comprises the steps: extracting an interference phase signal corresponding to residual distribution, obtaining frequency domain representation through fast short-time Fourier transform, and calculating the spectral intensity; performing frequency domain decomposition on the spectral intensity by using a Laplacian pyramid, calculating local energy density and performing normalization processing to obtain a scale weight, converting residual distribution into a frequency domain deformation spectrum through Fourier transform, and performing weighted fusion in combination with the scale weight to generate a fusion deformation field; the measurement precision and real-time performance in a complex environment are improved by accurately controlling the optical main axis, temperature compensation and interference fringe analysis, deformation field information can be accurately extracted by combining the Laplacian pyramid and the frequency domain fusion technology, and the measurement sensitivity and accuracy are improved.