413 results about "Laser interference" patented technology

The invention provides a color steel plate coating flatness evaluation method and system based on artificial intelligence. According to the method, the three-dimensional point cloud data is generated by collecting the interference fringe image, and the surface fluctuation characteristics are quantified; capturing a multi-dimensional vibration spectrum of the transmission roller shaft, generating a servo motor compensation control signal, driving a multispectral scanning head to perform reverse displacement compensation, and generating real-time compensation data; inputting the surface topography features in the three-dimensional point cloud and the real-time compensation data into a lightweight convolutional neural network, and outputting fusion features; and dynamically classifying and identifying surface defects and uneven areas based on the fusion result, adjusting a classification threshold in combination with the speed of the production line, outputting a flatness evaluation result, and synchronizing the flatness evaluation result to a speed regulation system of the production line to realize closed-loop optimization. According to the method, laser interference, vibration compensation and lightweight AI technologies are fused, dynamic high-precision evaluation of the surface flatness of the color steel plate of the high-speed production line is achieved, and the problems of defect misjudgment and measurement distortion caused by vibration interference are solved.

The invention relates to the technical field of laser control, and provides a high-dynamic-range multi-channel laser interference control method and related equipment. Channel signals of a plurality of target channels are obtained in real time according to a plurality of preset photoelectric detectors, time domain-frequency domain-space three-dimensional sampling is performed on the channel signals to construct an original tensor, joint optimization processing is performed on the original tensor to obtain a noise reduction tensor, phase unwrapping is performed on the noise reduction tensor to obtain an absolute phase matrix, and the absolute phase matrix is subjected to noise reduction processing to obtain an absolute phase matrix. Performing dynamic range expansion on the absolute phase matrix to obtain an enhanced phase matrix, performing multi-wavelength calculation and environment compensation on the enhanced phase matrix to obtain a distance matrix, and performing vibration compensation on the distance matrix to obtain a piezoelectric driving signal. According to the channel laser interference control method, through a series of advanced algorithms and processing means such as multi-dimensional signal acquisition, combined noise reduction optimization, precise phase unwrapping, dynamic range expansion and vibration compensation, comprehensive improvement of laser interference measurement signals is realized.

The invention discloses a continuous zooming laser interference end point detection system, which is used for semiconductor etching and thin film process end point detection, and comprises an illumination module, a laser interference module and an imaging module, the laser interference module comprises a laser, a beam splitter, a beam splitting cube, a lens and a detector, a laser beam emitted by the laser passes through the beam splitter, the beam splitting cube and the lens and then is focused to a to-be-detected area on the surface of a wafer, and the surface of the wafer reflects the laser to the detector for detection; the focal length of the lens is continuously adjustable; the illumination module comprises a light source which is arranged on one side of the lens, and an illumination light beam emitted by the light source is used for illuminating a to-be-detected area on the surface of the wafer; and the imaging module comprises a camera which is arranged on one side of the lens and is used for recording and outputting image information of a to-be-detected area on the surface of the wafer. According to the invention, through continuous zooming and large numerical aperture of the lens, high-definition imaging and etching of a long working distance and accurate detection of a thin film process end point are realized.

The embodiment of the invention provides an unmanned aerial vehicle surveying and mapping adaptive control method and device based on image analysis, and belongs to the technical field of laser surveying and mapping. The method comprises the following steps: controlling an unmanned aerial vehicle carrying a laser scanning distance measurement module to fly to a target area and stably hover, and obtaining three-dimensional point cloud data of a target; analyzing target features based on the acquired three-dimensional point cloud data, and determining at least one target measuring point needing fine displacement measurement; acquiring image data of the target measurement point, and judging whether the measurement point meets a laser interference measurement condition or not based on image processing; collecting a laser interference signal of the target measuring point when image judgment meets a measuring condition, and calculating vibration or displacement data of the measuring point; and performing fusion processing on the three-dimensional point cloud data and the vibration / displacement data of the measurement point, and outputting the geometric dimension and displacement measurement result of the target. According to the scheme, the stability and pertinence of infinitesimal displacement measurement in the surveying and mapping task of the unmanned aerial vehicle are effectively improved.

The invention relates to the technical field of damage detection, and discloses a screen protection film damage detection method and system, and the method comprises the steps: carrying out the laser interference thickness scanning of a screen protection film, and obtaining three-dimensional thickness distribution data and thickness gradient vector field data; performing multi-layer polarization interference detection on the circularly polarized light beam based on the three-dimensional thickness distribution data to obtain polarization phase difference distribution data; according to the thickness gradient vector field data, non-periodic phase unenveloping processing is carried out on the polarization phase difference distribution data to obtain continuous polarization phase distribution data; performing stress optical coefficient tensor calculation and dynamic elliptical polarization modulation based on the continuous polarization phase distribution data to obtain stress damage space positioning data; the edge cutting area and the center bending area of the screen protection film are subjected to damage imaging reconstruction, a three-dimensional stress damage imaging result is obtained, and full-chain detection from geometric thickness change to stress distribution and then to damage positioning is achieved.

The invention discloses a wafer polishing laser interference closed-loop pressure control method, and relates to the technical field of semiconductor manufacturing, and the method comprises the following steps: S1, triggering an automatic measurement program after a ceramic plate and a wafer are overturned; s2, driving a laser interference measuring head to perform non-contact scanning on T2 / T4 point positions of the wafer through a six-axis mechanical arm positioning system to obtain thickness distribution data; s3, fitting the thickness distribution data by adopting a Zernike polynomial to generate a three-dimensional distribution diagram, and calculating a pressure correction amount based on a process dynamic model and a pressure prediction model constructed by a support vector machine regression algorithm; s4, detecting a data outlier in real time through an exception handling module, and triggering an equipment protection strategy when the deviation exceeds a set threshold value; and S5, a pressure control instruction is transmitted to the polishing head through the PROFINET bus by means of the PLC. Through non-contact laser interference measurement, the laser interference technology is applied to thickness detection of the polished wafer for the first time, the single measurement time is shorter than 20 seconds, and the detection efficiency is remarkably improved.

The invention relates to the technical field of measurement of mechanical vibration or ultrasonic waves, water sound waves or infrasonic waves, in particular to a vibration liquid column hydrophone calibration device and method based on laser interferometry, and the device comprises a laser vibration meter, a hydrophone to be measured, a liquid column cavity for suspending the hydrophone to be measured, and a vibration table connected with the liquid column cavity. The to-be-measured hydrophone is detachably connected with an adjusting and positioning mechanism, the adjusting and positioning mechanism is connected with a laser vibration measuring instrument for executing vibration measurement, the adjusting and positioning mechanism and the laser vibration measuring instrument are introduced, the problem that accurate calibration of the low-frequency hydrophone cannot be achieved in the prior art is solved, and through sound field modeling calculation and correction, accurate calibration of the low-frequency hydrophone is achieved. The technical problem that the uncertainty and deviation of a hydrophone sensitivity calibration result caused by a non-uniform sound field cannot be effectively reduced in the prior art is solved.

The invention discloses a tracking scanning measurement system and platform, the tracking scanning measurement system comprises a two-dimensional angle measurement driving device, a contact laser tracker, a non-contact laser scanner and a control device, and the control device is connected with the contact laser tracker, the non-contact laser scanner and the two-dimensional angle measurement driving device. The system is used for controlling a two-dimensional angle measurement driving device to drive a laser tracker to track a set tracking cooperative target in real time in a tracking coordinate measurement mode, obtaining coordinate data of a contact point of the tracking cooperative target and the to-be-measured surface through combination of two-dimensional angle measurement and laser interference distance measurement data, and scanning the to-be-measured surface in a scanning measurement mode. The two-dimensional angle measurement driving device is controlled to drive the non-contact laser scanner to scan a to-be-measured surface, and the scanning point cloud data of the to-be-measured surface is obtained through the combination of two-dimensional angle measurement and absolute distance measurement data. According to the invention, high-precision tracking coordinate measurement and high-efficiency scanning measurement can be realized through one instrument, and the detection efficiency is remarkably improved.

The invention relates to the technical field of length measurement, and particularly discloses a length measurement device based on laser interference, which comprises a laser measurement module, an air curtain channel module, an air curtain construction module and a channel adjustment module, the laser measuring module is used for transmitting and receiving laser, the optical path difference change is measured according to the interference principle, and the micro length change of the workpiece can be continuously and accurately measured in real time while the machining module carries out machining operation on the workpiece; a linear channel is formed between the laser head and the measuring reflector through the air curtain channel module, inert gas is continuously introduced into the channel through the air curtain construction module, and an air curtain atmosphere with stable laminar flow is formed, so that pollutants and interference factors such as oil mist, dust, cutting fluid splashing and hot air turbulence generated in a machining area are effectively blocked, and the machining precision is improved. Therefore, the measurement light beam is prevented from being interfered by environmental factors in the propagation process.

The invention provides a laser interference measurement precision traceability system and method. The system comprises an atomic clock, a femtosecond optical frequency comb, a spectrum spreading and frequency doubling module, a beat frequency module and a traceability processing module. The repetition frequency of a spectrum output by a femtosecond optical frequency comb and the frequency reference of an atomic clock are locked, frequency beating is carried out on a femtosecond laser spectrum and an interference measurement light source through spectrum broadening, optical frequency doubling and frequency beating detection, and traceability comparison is carried out on an obtained frequency beating signal and laser interference measurement data. The measurement precision of the to-be-measured laser interferometer is traced to the atomic clock frequency reference, and the traceability of laser interference measurement data is realized. Compared with the prior art, the laser interference measurement precision traceability system measures the wavelength by using the atomic clock frequency reference, has higher precision and resolution, and can realize on-site traceability of laser interference measurement data precision. And through precision traceability, the precision and stability of laser interference measurement are also improved.

The invention discloses a single-frequency laser interference vibration measurement system and method based on optical fiber sensing. The system comprises a laser, a beam splitter, a circulator, a beam combiner, a coupler, a Faraday rotating mirror, a photoelectric detector and a data acquisition and processing module. Single-frequency laser emitted by the first laser is divided into two paths through the beam splitter, one path serves as signal light and irradiates the surface of a measured object after passing through the first circulator and the beam combiner, and reflected light returns through an original path; one path of interference signals is deflected by 90 degrees through a circulator II and a Faraday rotating mirror and then enters a photoelectric detector, the other path of interference signals directly enters the photoelectric detector, orthogonal I / Q signals are output, vibration displacement is extracted through a data acquisition and processing module by adopting a phase calculation method, and the vibration displacement is calculated through a phase calculation method. And the vibration speed is obtained through differential calculation. By optimizing the optical path design and introducing orthogonal signal processing, the system cost is reduced, and the measurement precision and the anti-interference capability are improved.

The invention relates to the field of detection devices, and discloses a high-precision gas bearing static characteristic test board, which comprises an optical base, a gas bearing static characteristic test board and a gas bearing static characteristic test board, the detection table is arranged on the optical base; the suspension bracket is arranged on the optical base; the detection air cylinder is arranged on the suspension bracket, and the detection air cylinder is located right above the detection table; the air floating ball hinge is arranged at the driving end of the detection air cylinder; the pressure sensor is arranged at the bottom of the air floating ball hinge; the upper floating bearing plate is arranged at the bottom of the pressure sensor, and the upper floating bearing plate is used for being pressed on the detection table; and the laser interference measurement assembly is arranged between the lower surface of the floating bearing plate and the upper surface of the optical base and is used for measuring the displacement and inclination of the lower surface of the floating bearing plate. According to the invention, the partial static characteristics of the gas bearing can be accurately evaluated.

The invention provides a hot-rolled seamless steel pipe and a wall thickness controllable processing technology thereof, and aims to solve the problem that the wall thickness of a steel pipe is difficult to accurately control in the prior art. Real-time monitoring and control over the wall thickness of the steel pipe are achieved, so that the wall thickness precision is remarkably improved, raw material components of the seamless steel pipe comprise C, Si, Mn, P, S, Cr, Mo, Ni and Fe, the wall thickness range of the seamless steel pipe is 5-20 mm, and the preparation technology comprises the steps of raw material proportioning, vacuum smelting, mold cylinder preheating and coating treatment, wall thickness laser measurement, rotating speed regulation and control forming, annealing, forced cooling treatment and the like. Through 300-600 times of high-frequency wall thickness measurement per second, the wall thickness uniformity and precision of the steel pipe in the whole production process are ensured in combination with rotating speed regulation and forced cooling, and finally the product quality and economic benefits are improved.

According to the precise cutting machining method and system for the soft material, firstly, the three-dimensional model and the cutting parameters of the material are obtained, the initial cutting track is generated, in the cutting process, material deformation is monitored in real time through the multi-sensor fusion technology, the cutting track and depth are adjusted through the dynamic compensation algorithm, and the cutting precision is improved. And meanwhile, a laser interference measurement system is adopted to track the position of a cutting tool, and micron-level precision is achieved through closed-loop feedback control. According to the method, pressure control and cutting depth adjustment are combined, a specific microstructure is created to achieve differential friction coefficients, in addition, the surface chemical composition is monitored through real-time spectrum analysis, and it is ensured that the preset surface characteristic requirement is met. The cutting track, depth and surface texture of the soft material can be accurately controlled, high-precision and customizable soft material machining is achieved, and key technical support is provided for intelligent machining in the fields of flexible electronics, bionic robots and the like.

The invention relates to an angle dimension linkage detection method based on a laser interference technology. The method comprises the following steps: modeling according to a laser interference principle of three-dimensional space deformation: measuring tiny deformation of an object surface through the laser interference technology; designing a three-dimensional deformation model based on spatial geometric analysis, predicting various deformation modes by integrating equipment, and establishing a mathematical relationship with laser interference data; through combination of multi-beam reflection, displacement of interference fringes and deformation distribution conditions, deformation vectors in a three-dimensional space are obtained; arranging a plurality of laser interference sensors to cover the area of the object to be measured; a three-dimensional space splicing algorithm is utilized, and local data measured by the multiple sensors are synthesized into a three-dimensional deformation model through a coordinate conversion and registration technology; installing a deformation monitoring system, and inputting real-time data into a real-time compensation control system; a compensation result is transmitted to a control system in real time, and deformation compensation is controlled; and self-adaptive interference fringe optimization and dynamic error correction are carried out.

The invention discloses an automobile wire harness detection device based on artificial intelligence and machine vision, and relates to the technical field of visual inspection, and the device comprises a film covering module which enables an automobile wire harness to be immersed in a control groove of magnetic fluid to form a nano film; the marking module projects interference fringes to the nano-film through a laser interference projector, and marks timestamps and capture numbers of fringe images; the image module is used for applying magnetic field pulses in the timestamps of the adjacent stripe images to generate a turbulent flow image sequence; the quantization module is used for respectively carrying out interference fringe phase analysis on the turbulence images in the turbulence image sequence to generate a curvature quantization matrix; the defect module is used for analyzing the curvature quantization matrix through a pre-trained convolutional neural network and identifying a defect type and a coordinate position; and the result module is used for superposing the defect type and the coordinate position to the stripe image to generate a defect distribution thermodynamic diagram. According to the invention, high-precision intelligent defect identification of wire harness detection is realized through cooperation of the nano-film and the convolutional neural network.

The invention provides a perovskite photovoltaic cell ruling machine and a control method thereof, and the method comprises the steps: collecting a cell surface map at the end of first ruling, converting the cell surface map into a cell brightness map, and determining the laser scattering amount of each pixel point in the cell surface map; extracting a laser interference component in the battery brightness diagram based on all laser scattering amounts in the battery surface diagram, determining an equal-brightness-domain sequence of the battery brightness diagram, correcting the laser interference component according to the equal-brightness-domain sequence to obtain a brightness equalization component, determining a brightness equalization diagram through the brightness equalization component, and obtaining a battery scribing auxiliary diagram; the scribing depth of each scribed line on the perovskite photovoltaic cell is determined through the cell scribing auxiliary graph and the brightness balance graph, and the focal length of the corresponding laser on the perovskite photovoltaic cell scribing machine next time is adjusted through the scribing depth of each scribed line on the perovskite photovoltaic cell, so that self-adaptive adjustment of the laser focal length can be realized. Therefore, slag is prevented from appearing in the scribing process of the perovskite photovoltaic cell.

The invention relates to the field of wafer defect detection, in particular to a rapid zooming wafer detection microscope based on MEMS and a detection method. The microscope comprises an illumination part, a sample stage, a spectroscope, a microscope objective, an MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a synchronous control and processing module based on an FPGA. The MEMS micro-mirror array zoom module composed of a plurality of micro-mirror units is introduced into a light path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflecting surface with a controllable equivalent curvature is formed, focusing regulation and control of imaging light beams are achieved, electronic focusing without mechanical movement is completed, the response speed is superior to that of traditional mechanical adjustment, and the imaging quality is improved. And the method is suitable for high-speed online detection.

The application relates to the field of detection devices and discloses a high-precision gas bearing static characteristic test table, which comprises an optical base, a detection table arranged on the optical base, a suspension support arranged on the optical base, a detection cylinder arranged on the suspension support and located directly above the detection table, a gas floating ball hinge arranged at the driving end of the detection cylinder, a pressure sensor arranged at the bottom of the gas floating ball hinge, and an upper floating bearing plate arranged at the bottom of the pressure sensor and used for being pressed on the detection table. A laser interference measurement assembly is arranged between the lower surface of the upper floating bearing plate and the upper surface of the optical base and used for measuring the displacement and inclination of the lower surface of the upper floating bearing plate. The application can accurately evaluate the partial static characteristics of the gas bearing.

The invention relates to the technical field of semiconductor etching, in particular to a semiconductor etching method based on plasma coordinated regulation, which comprises the following steps: alternately using first plasma and second plasma on a semiconductor to be etched to obtain a plurality of groove structures with a preset depth-to-width ratio, the second plasma is used for cleaning side wall residues; detecting by using a laser interference measurement method to obtain an etching rate ratio and a side wall angle corresponding to each groove structure, and determining corresponding treatment according to the change condition of the etching rate ratio and the side wall angle, including maintaining the etching and cleaning parameters of the current stage, or adjusting the corresponding parameters of the first plasma according to the need, or corresponding parameters of the second plasma are adjusted according to needs. According to the method, the first plasma and the second plasma are cooperatively controlled to adjust the groove structure in each stage, so that the uniformity of the groove structure is improved, and the damage to the surface of the side wall is reduced.

The invention discloses a hydrophone low-frequency sensitivity calibration method based on time domain scaling average processing, relates to the technical field of hydrophone low-frequency sensitivity calibration, and solves the problem of inaccurate direct sound wave amplitude measurement caused by boundary sound reflection superposition of an experimental pool and a measuring device in hydrophone calibration. Comprising the following steps: placing a light-reflecting and sound-transmitting thin film in a water body, and carrying out transducer and thin film laying and laser focusing; the underwater sound pressure value is reproduced based on a laser interference method; when reflection sound and direct sound superposition occurs in low-frequency measurement data, adjacent frequency points are selected to carry out multiple times of measurement. The arrival time of the direct sound is accurately measured by transmitting the high-frequency sound pulse, so that alignment of starting points of waveform data with different frequencies is realized; when low-frequency measurement is carried out, not only data of the inspected frequency is collected, but a narrow frequency band near the inspected frequency is selected, and multi-frequency-point data is sequentially collected and subjected to subsequent algorithm processing.

The invention relates to the technical field of pump body structure design and optimization, in particular to a method for acquiring a centrifugal pump blade load distribution curve, which comprises the following steps of: recording the stress distribution condition of a blade under the action of alternating load in real time through a high-precision multi-channel strain gauge and a laser interference measurement technology; a scanning electron microscope, a transmission electron microscope and an X-ray diffraction technology are combined to analyze microstructure characteristics of a composite material and metal bonding interface; through comparison of experimental data and finite element analysis results, deviation is quantified, error analysis is carried out, and key microstructure parameters influencing load distribution are identified. According to the analysis result, experimental conditions and a finite element model are optimized, a design scheme for adjusting the interlayer thickness of the composite material and optimizing the metal treatment process is provided, and the load bearing capacity and durability of the blade are improved. The method can be widely applied to design and optimization of high-performance centrifugal pump blades.

The invention discloses a machine tool cutter space pose on-machine measurement device and a measurement method thereof, and the device comprises a calibration module which is installed at one side of a cutter handle of a cutter; a frequency-modulated continuous wave laser interference system and a galvanometer are installed on a vibration isolation workbench of the machine tool, light beams emitted by the frequency-modulated continuous wave laser interference system achieve conversion of a set angle through the galvanometer so as to cover the calibration module, and a space positioning algorithm is adopted to fit the plane where the target ball is located. And obtaining a deviation value between the mass center and the normal vector in two measurement results before and after machining, and taking the deviation value as the tool space pose error before and after machining of the machine tool, so that rapid and high-precision direct measurement of the tool space pose error is realized. The method has the advantages of being large in measurement range, high in measurement precision, simple in structure and low in cost, and the defect that in an existing method, the position and pose errors of the tool are indirectly calculated through an error model is overcome.

The invention relates to the technical field of frequency modulation laser interference ranging, in particular to a frequency modulation laser interference ranging nonlinear phase error compensation system and method, which can realize effective compensation of intermediate frequency signal phase errors and improve ranging precision under the condition that the algorithm complexity is not greatly improved. According to the system, the nonlinear phase error of the intermediate frequency signals of the reference branch and the measurement branch is accurately compensated, so that the phase error caused by frequency modulation nonlinearity is remarkably reduced, and the overall ranging precision of the laser interference ranging system is further improved. Intermediate frequency signal nonlinear phase error compensation is adopted, the nonlinear phase error is effectively compensated under the condition that hardware consumption is not greatly improved, and finally the ranging precision of the system is improved.

The invention relates to the technical field of optical simulation imaging, in particular to an acquisition method and application of a laser interference spot simulation model, and the method comprises the following steps: carrying out image preprocessing, edge detection, Hough circle detection and radial intensity analysis on a ray tracing result to obtain a characteristic circular ring and the position and size thereof; a related mathematical model is established according to different laser parameters (such as a laser incident angle, a laser transmission distance and laser emission power) and characteristic circular ring parameters (such as different positions, internal power density and peak power density), and finally a laser interference spot simulation model is obtained. The calculation complexity of the simulation model is remarkably reduced, the simulation process carried out by utilizing the simulation model has the characteristics of low calculation complexity, high calculation speed, strong universality and the like, and compared with a ray tracing structure, the fitting precision of a light spot image obtained by simulation is high.

The invention belongs to the technical field of image processing, and particularly relates to a GIS shell girth welding deviation real-time correction method which comprises the steps that a target image and a target image sequence are obtained; positioning a laser region according to a pixel point gray value interval and a pixel point brightness concentration condition in the target image to obtain a laser region sequence; forming a laser centroid sequence by taking the exponential power of the gray values of the pixel points in the laser area as a weight; smoothing the laser centroid sequence to obtain a smooth track point, and generating a laser actual motion track; smoothing the actual movement track of the laser to generate a reference welding track; calculating a real-time correction vector according to the reference welding track and the actual laser motion track; and according to the real-time correction vector and the welding reference position in the reference welding track, a new target position is calculated, the position of a welding head is adjusted, and real-time correction of the welding deviation is achieved. The problem that deviation correction is inaccurate due to the fact that the GIS shell girth welding process is interfered by laser is effectively solved.

The invention discloses a wire bonder transducer, a wire bonder and a vibration amplitude detection and calibration method, and realizes non-contact and high-sensitivity amplitude detection of a vibration part of the transducer by integrating a laser interference detection part in the wire bonder transducer. Continuous laser with a stable wavelength is output through the laser, signal light and reference light are split through the optical splitter, the signal light irradiates the vibration part of the transducer and is reflected, the reference light and the reflected light are combined in the beam combiner to form interference fringes, and finally a phase change signal is collected through the photoelectric detector. According to the invention, the micron-sized vibration displacement of the transducer in the working state can be extracted in real time with high precision. Compared with a traditional judgment mode, the method has the advantages that an objective and quantifiable detection means is provided, the precision and the automation degree of transducer performance consistency evaluation are effectively improved, the method can be widely applied to production line detection, equipment calibration, online quality control and other scenes of wire welding equipment, and the method has important significance in guaranteeing the welding stability and improving the packaging yield.

The present invention discloses a vibration suppression system and method for a star simulation system using laser interference detection. The system includes a laser light source, a first beam splitter, a collimator set, a second beam splitter, a mirror, a detection convergent mirror assembly, a CCD detector, a computer control system, a jitter compensating mirror and a flat splitter; the optical path of the whole system includes a reference optical path and a detection compensating signal optical path. The reference optical path and the detection compensating signal optical path converge at the same time on the CCD detector to constitute a vibration detection interference optical path, and the computer control system performs feedback compensation according to the interferogram intensity change formed by the vibration detection interference optical path. Both the CCD detector and the jitter compensating mirror are connected to the computer control system. The present invention improves the accuracy of spacecraft attitude tracking correction by adding a laser light source and a second beam splitter so that both star simulation imaging and optical path jitter compensation correction can be performed.

The invention discloses a binocular camera calibration method based on laser interference and two-dimensional grating diffraction, and the method comprises the steps: S1, configuring an interference light path: equally dividing a laser beam into two beams, transmitting the two beams through two interference arms, carrying out the beam combination, enabling the diffraction light spots to generate interference, and forming an interference image; s2, calibrating an interference light path: adjusting a light guide system until it is observed that an interference ring continuously diverges outwards from the center; and S3, binocular camera matching: the binocular cameras are placed on the light guide paths of the two interference arms respectively, it is ensured that the light path distances from the binocular cameras to the observation equipment are equal, the positions and angles of the binocular cameras are adjusted, the positions of diffraction spots coincide, and round bright spots are formed in the center. A laser interference measurement method is adopted, the measurement precision can reach one thousandth wavelength magnitude, the matching calibration precision is high, a sensor target surface pixel two-dimensional periodic distribution structure is used as a two-dimensional grating to diffract a measurement laser beam, no additional measurement device is needed, and the equipment cost is saved.

The invention provides a synchrotron radiation scanning imaging system which comprises a first support, a second support and a third support, a through hole is formed in the first support so that X-rays input from the outside can penetrate through the through hole, and the first support is provided with a diffraction assembly, a first lens and a second lens, the diffraction assembly is installed on the first support and used for diffracting the X-rays and focusing the X-rays to obtain X-ray focusing light spots; the sample assembly is used for bearing samples; the laser interference assembly is used for emitting emission laser and receiving reflection laser, calculating an optical path difference generated by vibration between the emission laser and the reflection laser, and converting the optical path difference into a first electric signal; the controller is connected with the laser interference assembly and the sample assembly, and the controller is used for controlling the sample assembly to move based on the first electric signal, so that the X-ray focusing light spot is aligned with the sample for radiation, and an X-ray radiation signal is obtained; and the detection assembly is used for performing laminated coherent diffraction imaging or scanning transmission X-ray microscopic imaging on the sample through the X-ray radiation signal.