106 results about "Laser interference" patented technology

The invention relates to the technical field of nondestructive testing of constructional engineering, and discloses a laser measuring instrument for nondestructive testing of concrete cavities, which comprises a laser interference measuring assembly, a paraxial sound wave excitation assembly, coaxially arranged anti-interference equipment and a cooperative control processing system. The sound wave excitation assembly performs wide-area excitation on the concrete surface, and the laser interference measurement assembly receives returned light through a clean light path constructed by the anti-interference equipment. The cooperative control processing system establishes acousto-optic time-frequency association by using an adaptive control module, generates a phase compensation angle according to ranging data to eliminate phase lock loss caused by sound wave propagation delay, and monitors a spectral gradient to automatically trigger fixed-frequency locking to capture resonance response. And the signal analysis module uses the phase compensation correction signal, and outputs cavity features through dual data cleaning and thermodynamic diagram analysis. According to the invention, the problems of time-space synchronization and weak signal extraction of long-distance non-contact detection in a complex environment are effectively solved.

The invention discloses a nano-scale displacement real-time compensation measurement method and system based on double-frequency laser interference, and belongs to the technical field of precision measurement. In order to solve the problems that three error sources of environmental drift, periodic nonlinear error and dynamic vibration are mutually coupled and have high real-time requirements in dual-frequency laser interference measurement, a multi-source error unified state space model including measured displacement, an air refractive index parameter, a nonlinear error parameter and a vibration disturbance quantity is constructed. A high-dimensional state vector is divided into a displacement-refractive index group and a nonlinear parameter group by adopting an extended Kalman filter of a grouping updating strategy, the displacement-refractive index group and the nonlinear parameter group are alternately updated in an assembly line parallel mode, nonlinear parameters are identified in real time in combination with an online recursive least square algorithm, and the state of the filter is corrected through a state coupling injection mechanism. Real-time compensation with the end-to-end delay smaller than 80 microseconds is achieved, the displacement measurement residual error is controlled within + / -0.3 nm under the composite disturbance condition, and the method is suitable for precise assembly of intelligent glasses optical assemblies.

The invention discloses a spacecraft micro-deformation measurement method and system based on femtosecond laser interference, and relates to the technical field of laser interference measurement, and the method comprises the steps: extracting an interference phase signal corresponding to residual distribution, obtaining frequency domain representation through fast short-time Fourier transform, and calculating the spectral intensity; performing frequency domain decomposition on the spectral intensity by using a Laplacian pyramid, calculating local energy density and performing normalization processing to obtain a scale weight, converting residual distribution into a frequency domain deformation spectrum through Fourier transform, and performing weighted fusion in combination with the scale weight to generate a fusion deformation field; the measurement precision and real-time performance in a complex environment are improved by accurately controlling the optical main axis, temperature compensation and interference fringe analysis, deformation field information can be accurately extracted by combining the Laplacian pyramid and the frequency domain fusion technology, and the measurement sensitivity and accuracy are improved.

The present application belongs to the field of photoelectric countermeasure simulation and digital twin technology, and relates to a laser jamming full-link digital parallel simulation system and method. The system comprises a scene initialization unit, a laser parameter configuration unit, a target characteristic definition unit, an atmospheric transmission calculation unit, a load imaging simulation unit, a jamming effect evaluation unit and a visualization terminal connected in sequence. The method realizes digital simulation of the whole process of laser jamming through the whole process coupling of scene configuration, atmospheric transmission calculation, load imaging simulation, jamming effect evaluation and visualization output. The present application solves the problems of lack of full-link integration, insufficient dynamic process simulation, weak semi-physical verification capability and poor scalability in the prior art by constructing a full-link integrated simulation architecture covering ground radiation, atmospheric transmission, load imaging and image quality evaluation, and can be widely applied to photoelectric countermeasure equipment effectiveness evaluation, countermeasure strategy optimization and equipment performance verification.

The application discloses a wafer polishing laser interference closed-loop pressure control method, and relates to the technical field of semiconductor manufacturing, and comprises the following steps: S1: a ceramic plate is triggered to automatically measure a program after being turned over with a wafer; S2: a laser interference measurement head is driven by a six-axis mechanical arm positioning system to non-contact scan T2 / T4 points of the wafer, and thickness distribution data is acquired; S3: a Zernike polynomial is adopted to fit the thickness distribution data to generate a three-dimensional distribution graph, and a pressure correction amount is calculated based on a pressure prediction model constructed by a process kinetics model and a support vector machine regression algorithm; S4: an abnormal processing module is used to detect data outliers in real time, and a device protection strategy is triggered when a deviation exceeds a set threshold; and S5: a pressure control instruction is transmitted to a polishing head by a PLC controller through a PROFINET bus. By means of non-contact laser interference measurement, the laser interference technology is applied to wafer thickness detection after polishing for the first time, and single measurement time is less than 20 seconds, so that the detection efficiency is significantly improved.

The invention belongs to the technical field of laser interference precision measurement, and provides a full geometric error displacement calculation method based on non-approximate simplification of a light beam track. All optical machine geometric errors can be completely calculated, the real refraction condition can be completely calculated, no approximate error is introduced in the simplification process, and the displacement calculation process conforms to the real light beam track condition; according to the method provided by the invention, all reflection phenomena in the interferometer are simplified, parameter integration is carried out on a reflecting surface and a receiving surface of a reflected light beam, an originally complicated multi-beam calculation process is optimized, the number of parameter items required for completely describing geometric errors is reduced, and the calculation efficiency is improved. And meanwhile, the light beams which do not influence the calculation of the total optical path difference are deleted, so that the calculation efficiency is high.

This invention discloses a high-efficiency laser interferometric transceiver dichroic film with good space environment tolerance, belonging to the field of optical thin film technology. The dichroic film has a multifunctional beam-splitting film deposited on the front side of a fused silica substrate, and a thermal stress-free antireflection film deposited on the back side. The front film system uses TiO2 and SiO2 as high and low refractive index materials, and is designed with a main film system based on a back-cutoff filter superimposed with a multi-layer energy control structure to achieve efficient reflection of 1550±10nm laser light; and eliminates half-wave apertures by matching asymmetric equivalent layers to ensure neutral beam splitting in the 750-900nm band. The back film system is composed of Ta2O5 and SiO2, which not only efficiently eliminates residual reflections (ghost images) but also compensates for surface distortion caused by the front film layer. This laser interferometric transceiver dichroic film exhibits good spectral stability and can withstand the harsh environment of direct exposure to geostationary orbit. It can also be used for spectral and energy control of other laser rangefinders.

The application discloses a laser interference detection parameter adaptive control method based on reinforcement learning, comprising the following steps: obtaining relevant data to form an interference state vector, and constructing an interference optical physics model and a safety constraint model; constructing a sub-target generation unit to generate a target optimization direction set; constructing a hierarchical reinforcement learning structure to output an adjustment control quantity sequence of a detection parameter; constructing an external reward generation unit and an internal reward generation unit, introducing a reward consistency mapping unit to correct the internal reward, and generating an updated hierarchical reinforcement learning structure; periodically updating the interference state vector to realize a laser interference detection parameter adaptive control closed loop. The application utilizes hierarchical reinforcement learning to combine optical physics and safety constraint modeling, realizes adaptive optimization control of a laser interference detection parameter, and has the advantages of high measurement precision, high intelligent degree of parameter adjustment, and safe and stable operation.

The invention discloses a micro-lens array non-scanning type laser interference three-dimensional imaging method and device for a dynamic sample, and relates to the technical field of optical three-dimensional measurement and imaging, and the method comprises the steps: dividing laser into object light and reference light; irradiating a dynamic sample arranged at the focal plane of the micro-lens array with the object light after beam expansion, modulating the object light carrying sample information by the micro-lens array, and combining the modulated object light with the reference light in space to generate a composite interference field containing a plurality of sub-region interference patterns; recording a single-frame composite interferogram by an area array detector; and finally, reconstructing the three-dimensional morphology of the sample at the measurement moment through a phase extraction and unwrapping algorithm. By means of the mode, full-view-field three-dimensional information can be obtained through single exposure by means of the microlens array, mechanical scanning or multi-frame phase shifting is not needed, the problem of motion artifacts generated when a dynamic sample is measured through a traditional interference method is effectively solved, and high-speed and high-resolution three-dimensional imaging of the surface appearance of the dynamically-changed sample is achieved.

The application discloses a kind of high-speed acquisition system and acquisition method applied to optical absolute gravimeter laser interference fringe signal, the system includes analog signal conditioning unit, analog-digital conversion unit, system core control unit, data cache unit, data transmission unit and measurement and control terminal processing display unit.The application is directed to laser interference fringe signal frequency is high, voltage amplitude is low, acquisition rate is fast, and absolute gravity precision measurement requires signal integrity, measurement precision is high, and the high-speed acquisition system of laser interference fringe signal of optical free-fall absolute gravimeter based on FPGA is designed, the advantage of FPGA parallel computation processing is fully utilized, in combination with serial bus transmission technology (USB) and FIFO cache technology, the processing time of acquisition system in interference fringe signal acquisition, storage and transmission etc. is greatly shortened.The application effectively improves the acquisition speed of absolute gravity, and provides basic guarantee for realizing dynamic measurement and monitoring of absolute gravity.

1. The name of the design product: laser jamming device (long-wave infrared laser). 2. The use of the design product: for generating adjustable and stable long-wave laser energy, which can achieve stable laser jamming on the target, and can also verify the ability of the long-wave laser jamming device. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.

The invention relates to a dual-frequency laser frequency aliasing suppression device which comprises a laser, a depolarization light splitting module, a signal detection module, a polarizer and a polarization light splitting module. In the actual use process of the dual-frequency laser frequency aliasing suppression device, polarization state degradation caused by a non-ideal optical element can be compensated through the arrangement of the depolarization light splitting module and the polarization light splitting module, and the optical axis of the polarization light splitting module is enabled to coincide with the polarization direction of the laser of a certain polarization state of the laser output by the laser; therefore, the frequency aliasing in the P light and the S light emitted by the polarization light splitting module is further reduced to a lower level. The optical path structure is simple, the adjusting speed is high, frequency aliasing after double-frequency laser polarization beam splitting can be effectively restrained, and the optical path structure is suitable for the occasion of double-frequency laser interference measurement.

The present invention relates to the field of patterning substrates with periodic dot structures in the micro- or sub-micrometer range, in particular to an apparatus and a method for structuring surfaces and the interior of a transparent substrate by means of laser interference structuring. The pattern produced in this way with periodic dot structures in the micro- or sub-micrometer range is characterized by a pronounced anti-reflective property. In addition, the present invention relates to a patterned substrate with anti-reflective properties comprising a periodic dot structure.

The application relates to the field of wafer defect detection, in particular to a MEMS-based fast zoom wafer detection microscope and a detection method. The microscope comprises an illumination component, a sample stage, a beam splitter, a microscope objective, a MEMS micromirror array zoom module, a CMOS image sensor, a laser interference distance measuring sensor and a FPGA-based synchronous control and processing module. By introducing the MEMS micromirror array zoom module composed of multiple micro-mirror units into the optical path, the deflection state of each micro-mirror unit is adjusted, a dynamic reflection surface with controllable equivalent curvature is formed, the focusing regulation of the imaging light beam is realized, and electronic focusing without mechanical movement is completed. The response speed is superior to that of traditional mechanical regulation, and the high-speed online detection is adapted.

Disclosed is a phase measurement device, comprising: a first wave plate, a first polarization splitting prism, a fourth wave plate, a retroreflector, a third wave plate, a reflector, a second wave plate, a polarizer, a second polarization splitting prism, a third polarization splitting prism, a first photoelectric detector, a second photoelectric detector, and a base, wherein the first to third polarization splitting prisms and the first and second photoelectric detectors are fixed on the base; the first to fourth wave plates are respectively arranged around the periphery of the first polarization splitting prism; the polarizer is arranged on an emitting surface of the third polarization splitting prism; the retroreflector is arranged on an outer side of the fourth wave plate; and the reflector is arranged on an outer side of the third wave plate. An interferometric signal is resolved to obtain a measurement light beam phase.

The invention discloses an intelligent collaborative photovoltaic device and a manufacturing method and system thereof, and relates to the technical field of photovoltaic energy. The device comprises a semiconductor absorber and a carrier-stress collaborative management architecture in a functional interface region, and carrier transport and mechanical stress are synchronously optimized through an integrated gradient region. The manufacturing method adopts a dynamic closed-loop regulation and control process, and ultra-precise combination of laser interference deposition, terahertz activation and the like can be selected. The dynamic regulation and control system integrates sensing, characterization and AI units and intelligently optimizes parameters. Through innovative architecture design, the composite speed is remarkably reduced, stress accumulation is inhibited, the technical bottleneck of efficiency and reliability is broken through, the output capacity of the photovoltaic module is improved, the service life of the photovoltaic module is prolonged, and core support is provided for the next-generation photovoltaic technology.

The invention relates to the technical field of laser interference ranging, and discloses a laser interference displacement sensor transfer function evaluation method and system, and the method comprises the steps: generating a candidate parameter combination set which is composed of a plurality of candidate parameter combinations; for each candidate parameter combination, a corresponding transfer function is obtained, and the transfer function is a mapping relation between a normalized harmonic intensity ratio and a phase; calculating an evaluation coefficient of each candidate parameter combination, wherein the evaluation coefficient is obtained through calculation according to a first-order derivative of the transfer function; and based on the evaluation coefficients, selecting a candidate parameter combination with the highest evaluation coefficient from the candidate parameter combination set as an optimal parameter combination. According to the method, automatic and quantitative optimization of modulation and demodulation parameters is realized, blindness and instability of selection depending on experience are overcome, and consistency and replicability of sensor performance are remarkably improved.

The invention discloses a controllable clamping method for an adhesive layer of a laminated double-sided mirror. The controllable clamping method comprises the following steps: S1, constructing a symmetrical adjustable-pressure clamping mechanism; s2, glue layer thickness presetting and initial positioning are carried out; s3, dynamic pressure regulation and control and adhesive layer leveling are executed; s4, glue layer thickness online monitoring and feedback correction are introduced; and S5, step-type curing and stress-free release are completed. According to the controllable clamping method for the adhesive layer of the laminated double-sided mirror, closed-loop control over the thickness of the adhesive layer within the micron-level range is achieved by fusing laser interference ranging, fiber grating online monitoring and a dynamic pressure feedback mechanism, the thickness uniformity is superior to a preset uniformity threshold value and is remarkably superior to the control level of a traditional rigid clamping process, and the clamping precision is greatly improved. And wavefront distortion and optical performance reduction caused by uneven thickness are effectively inhibited.

The application provides a multimodal surface sound velocity synchronous detection system based on laser ultrasound, which comprises a general control module, a laser scanning excitation module, a visual positioning module, a laser interference vibration detection module and a data backend processing module; the output ends of the general control module are connected with the input ends of the laser scanning excitation module and the laser interference vibration detection module respectively, the output end of the visual positioning module is connected with the input ends of the general control module and the data backend processing module respectively, and the output end of the laser interference vibration detection module is connected with the input end of the data backend processing module.

The application discloses a local frequency spectrum phase demodulation method of a dual-frequency laser interference signal and belongs to the technical field of laser interference precision measurement and digital signal processing. The method first measures the inherent frequency difference of a dual-frequency laser and completes frequency shifting through a DDS module and a fcos mixing module; then, a local STFT module searches a local frequency band near a center frequency given by a frequency feedback module, a main spectrum line CEC judgment module determines target main spectrum line frequency points of a reference path and a measurement path respectively, a CORDIC calculation module extracts complex spectrum value arguments and obtains a phase difference, a GF phase smoothing module performs smoothing processing on the phase difference sequence, and a DF fixed phase shift compensation module implements compensation according to a frequency-fixed phase shift error model, so that displacement and speed are finally obtained. The method reduces the search calculation amount of the whole frequency band, improves the main spectrum line tracking stability and the position and speed demodulation precision under high dynamic conditions by constructing a local frequency spectrum phase demodulation chain driven by a frequency closed loop.

The application relates to a laser interference-based device deformation detection method and system and a terminal, and relates to the field of laser detection, and comprises the following steps: obtaining a deformation detection trigger signal of a device; starting a preset remote laser detection device according to the deformation detection trigger signal, and controlling the remote laser detection device to detect the device to generate a device deformation detection parameter; obtaining a non-deformation detection parameter of the device; judging whether the device deformation detection parameter meets the requirement of the non-deformation detection parameter; if yes, the remote laser detection device is continuously controlled to detect the device to generate the device deformation detection parameter; if not, the device deformation detection parameter and the non-deformation detection parameter are analyzed to determine an actual deformation parameter, and the actual deformation parameter is prompted. The application has the effect of improving the safety of device deformation detection.

The invention provides a gradient temperature field interference mirror group thermal drift compensation method and device, and relates to the technical field of interference mirror group thermal drift. The method comprises the following steps: acquiring the real-time excess temperature of an interference mirror group; the excess temperature is used for representing the difference value between each region in the interference mirror group and the environment temperature; and inputting the real-time excess temperature into the trained thermal drift compensation model to output a compensated thermal drift value of the interference mirror group. According to the application, the excess temperature of the interference mirror group is used as the input value of the thermal drift compensation model, and the adaptation degree of the constructed thermal drift compensation model can be further improved by selecting the proper input parameter, so that the adaptation degree of the thermal drift compensation model can be further improved when the corresponding thermal drift amount is calculated through the thermal drift compensation model in the gradient temperature field. The precision of the thermal drift amount can be improved, so that the problem that the compensation precision of the thermal drift of the non-common-path heterodyne laser interference mirror group in the gradient temperature field is not high in the related technology is solved.

The invention discloses a vertical laser interference comparison length measuring method and device, and the method comprises the steps: monitoring the position of a positioning measuring head in real time to obtain monitoring data, placing a measuring block on a workbench, enabling the positioning measuring head to be in contact with the surface of a measured block, and enabling the measuring head to emit a positioning signal when the contact force of the positioning measuring head reaches a set force value; the measuring head is driven to move up and down, z-direction movement is controlled by adopting a positioning signal of the measuring head during positioning, a measured block is pushed in and pushed out, and the measuring block is positioned to different measuring positions; length measurement data are obtained through instrument control and automatic measurement based on a comparison method measurement principle; and performing environmental error dynamic compensation on the length measurement data to obtain length measurement correction data, and performing data fusion on the length measurement correction data according to the measurement position to obtain a length measurement result. The method not only can improve the precision of vertical laser interference comparison length measurement, but also has good interpretability, and can be directly applied to a vertical laser interference comparison length measurement system.

The invention relates to the technical field of space debris orbit forecasting, in particular to a space debris orbit forecasting correction method based on machine learning and triangular characteristic decomposition. The azimuth angle and the pitch angle are converted into six-dimensional feature vectors through triangular feature decomposition, and a real-time mapping model of orbit forecast deviation is established in combination with a neural network. The two bottleneck problems on which traditional image tracking depends are solved: 1) in a strong laser interference scene, tracking failure caused by background light saturation of an optical camera is avoided, and real-time image feedback is replaced by deviation prediction driven by historical echo data; 2) when space debris in an earth shadow area is invisible, constructing a training set by using deviation data captured at the moment of successful laser ranging, and realizing autonomous correction of forecast errors under a non-illumination condition; the method gets rid of dependence on space debris optical visibility, realizes all-day and all-arc telescope pointing deviation correction, and improves the reliability and continuity of space debris orbit prediction under complex working conditions.

The invention discloses an anti-laser interference imaging system based on intelligent optical calculation, and belongs to the technical field of optics. According to the invention, a set of end-to-end laser immune imaging system from a physical layer to an algorithm layer is constructed, a trainable physical optical neural network is integrated in an imaging light path as a hardware front end, and physical inhibition of laser interference is realized in an optical signal stage through a wavefront modulation mechanism. By utilizing the essential difference between the coherence of the laser and the incoherence of the natural light in physical characteristics, energy scattering is performed on the laser with a specific wavelength through an optimally designed phase modulation diagram, and meanwhile, high-flux transmission of the natural light is kept, so that an overexposure phenomenon is effectively avoided before the sensor receives the light. The mechanism not only solves the problems that a traditional optical filter is fixed in bandwidth and poor in adaptability, but also breaks through the bottleneck that details are difficult to recover due to information loss in pure algorithm processing. Meanwhile, the anti-interference of the multi-spectrum laser is innovatively designed, so that the system can realize wider-spectrum laser protection.

The application relates to a system aberration self-calibration method and device based on a double-interference common-optical-path measurement, wherein the method comprises the following steps: measuring an optical microstructure surface to be measured by using a double-interference common-optical-path measurement system to obtain phase distribution data and three-dimensional topographic height data; taking a Zernike polynomial as a base function to establish an aberration parameterization model of the double-interference common-optical-path measurement system; taking the phase distribution data as a reference, combining an analytical relationship between a laser interference channel and system aberration parameters, and inversely solving actual aberration coefficient sets of the double-interference common-optical-path measurement system in a current measurement state by using an optimization algorithm; reconstructing an aberration field corresponding to an entire measurement field by using the actual aberration coefficient sets of the double-interference common-optical-path measurement system and combining an analytical relationship between a white light interference channel and system aberration parameters, and point-by-point correcting the three-dimensional topographic height data by using the aberration field. The application can compensate system inherent aberration on line, self-reference and high precision.

The invention relates to the technical field of distance detection, in particular to a mica electrothermal film cover surface edge warping detection method and device, and the method comprises the steps: collecting height data of all positions of a mica electrothermal film cover surface, and constructing a height data matrix; all height data are clustered, the position of a clustering center is obtained, a to-be-analyzed edge warping position is screened, the laser interference degree of the height data of the to-be-analyzed edge warping position is calculated, the edge warping position is screened, and an edge warping preliminary detection result is obtained; marking a connecting line path of two different edge warping positions as an edge warping path, and calculating edge warping severity of the edge warping positions; and according to the edge warping severity of all the edge warping positions, obtaining an edge warping fine detection result. According to the invention, the real cover surface edge warping defect of the mica electrothermal film can be identified more accurately.

The invention discloses a seeker anti-laser interference system based on a three-frame differential tracking algorithm, and belongs to the technical field of seeker anti-laser interference testing. The cab is used for driving and moving the vehicle-mounted test platform, and the specific position of the vehicle-mounted test platform can be adjusted in a maneuvering mode. The command operation bin is used for issuing a command command, controlling each device in the system through the main control system, automatically tracking the seeker and applying laser interference in different modes to the seeker; the vehicle-mounted fixing and leveling bracket is used for fixing and leveling the vehicle-mounted test platform; the optical imaging platform is used for tracking the seeker, outputting image signals to the command operation bin, and displaying different images through the image display subsystem. The vehicle-mounted test platform is used for solving the problem that a vehicle-mounted test platform for testing laser interference resistance of a seeker is lacked in the prior art.

The invention provides a micro-nano vibration laser interference dynamics measurement optimization method based on polarization enhancement, which is based on a polarization control system and comprises a laser generator, a reflector, a half slide, a polarization beam splitting cubic mirror, an objective lens, a micro-nano electromechanical resonator, a convex lens, a photoelectric detector, a spectrum analyzer, a network analyzer, a blue laser generator and a long-wave pass filter. Wherein a first quarter-wave slide is arranged between the laser generator and the reflector, a second quarter-wave slide is arranged between the reflector and the half-wave slide, and a third quarter-wave slide is arranged between the polarization beam splitting cubic mirror and the objective lens. According to the optical path enhancement technology based on polarization optimization, the input laser energy is utilized to the maximum extent, and the transmission loss of the laser in the optical path is reduced. The weak response signal of the micro-nano electromechanical resonator in a non-driving thermal vibration state is successfully and substantially amplified and purified, and a better measurement method is provided for deeply researching the dynamic characteristics of the micro-nano electromechanical resonator.