Laser interference displacement measuring system

Abstract

The invention discloses a laser interference displacement measuring system. The laser interference displacement measuring system comprises a laser device, a polarizer, an depolarization beam splitting prism, a polarization beam splitting prism, 1 / 4 wave plates, a pyramid mirror, plane reflectors and a photoelectric detector. Measuring light enters the mobile pyramid mirror, and the light path change of the light reflected back in the original path caused by displacement of the pyramid mirror is four times that of the displacement of the pyramid mirror. In the design of the laser interference displacement measuring system, the measuring light enters and exits the mobile pyramid mirror twice along the same direction by utilizing the polarization optical principle, and an octuple path relation between the displacement of the pyramid mirror and the change of light path difference between the measuring light and reference light is achieved, thereby realizing optical octuple subdivision measurement of the displacement. The laser interference displacement measuring system has the advantages of high measurement resolution and accurate measuring result, is convenient and simple in structural installation, is low in cost, and is wide in application range.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and more specifically relates to a laser interference displacement measurement system, in particular to an ultra-precise laser interference displacement measurement system with optical eightfold subdivision. Background technique [0002] At present, with the rapid development of modern industry, displacement measurement has become very important, and such as the measurement of micro-deformation displacement of machine tools under load conditions, the measurement of the profile of precision optical components, etc., the requirements for displacement measurement speed and accuracy are very high. Common displacement measurements include mechanical, electronic, and geometric optics. Mechanical displacement measuring instruments such as vernier calipers have the disadvantages of low measurement accuracy and the measurement results are heavily dependent on labor. Inductive and capacitive pre...

AI Technical Summary

Problems solved by technology

However, the grating measurement device must always be close to the grating, which has very strict requirements on the position. Not only is it inconvenient to install and difficult to adjust, but the limitation of its position will also limit the performance parameters such as the movement stroke and movement accuracy of the working machine.

Images