The invention discloses a miniature piezoelectric driving type detection contact integrated
laser module and a
contact type calibration method, particularly relates to the technical field of precision measurement, is used for solving the problem of dynamic time-varying interference of high-
voltage driving pulses on micro-force signals, and is an interference
coupling path synchronous acquisition and dynamic resolving technology based on a distributed electromagnetic probe.
Online identification of transient interference
energy distribution characteristics is realized; a multi-dimensional parameter
fusion mechanism of an interference-response dynamic model quantifies cross-domain characteristics of interference energy,
system response and
signal noise into a comprehensive suppression coefficient, and reverse compensation waveform injection and
adaptive filter dynamic adjustment are performed, so that
full life cycle offset of common-mode
noise is realized, and damage of
residual interference to closed-
loop control is avoided; through cross-domain collaborative analysis of
laser-mechanical data, a self-healing iteration mechanism of
contact type calibration parameters is established, progressive
pollution of dynamic interference to a calibration reference is eradicated, and long-term consistency of detection precision under complex working conditions is ensured.