233 results about "Beam laser" patented technology

The invention discloses a double-beam laser interference detection device and a detection method, the double-beam laser interference detection device is used for semiconductor etching and thin film process end point detection, and the double-beam laser interference detection device comprises an imaging unit, a detection unit and a reference unit; the detection unit comprises a first emitting part used for emitting detection light rays, and the detection light rays are focused to the wafer through the imaging unit; the first detector outputs a first reflection signal; the reference unit comprises a second emitting part and is used for emitting reference light to the imaging unit, so that the reference light is focused on the semiconductor equipment window; the second detector outputs a second reflected signal. And in the detection process, performing difference calculation on the first reflection signal and the second reflection signal to obtain a light intensity signal after interference elimination, and calculating the etching depth or the film deposition thickness of the wafer according to the light intensity signal after interference elimination. According to the invention, the problem of insufficient accuracy of detection of the wafer etching depth and the thin film deposition thickness end point caused by factors of vibration of semiconductor equipment and unstable environment can be eliminated.

The utility model relates to a multi-beam laser deposition printing head device. The multi-beam laser deposition printing head device comprises a printing head base, a plurality of shaping optical lens sets, a plurality of mounting bases, a plurality of optical fiber connectors, a plurality of laser position adjusting jackscrews, a plurality of printing head guide nozzles, a feeding pipe and a feeding guide nozzle. By screwing one or more laser position adjusting jackscrews on the mounting seats, the laser position adjusting jackscrews move back and forth in respective laser position adjusting screw holes, the positions of the optical fiber connectors mounted on the mounting seats can be adjusted, and the positions of the optical fiber connectors mounted on the mounting seats can be adjusted by adjusting the positions of the optical fiber connectors on one or more mounting seats. Focusing light spots of multiple light beams are aligned with the feeding position of a coaxial material, and a complex adjusting mechanism does not need to be additionally designed in the whole process for secondary adjustment of the light spot position. Therefore, the multi-beam laser deposition printing head device has the advantages of being simple in structure, small in size and low in manufacturing cost while ensuring that the multi-beam focusing light spots can be accurately aligned with the feeding position of the coaxial material.

Provided is a handheld device and a method for detecting weld defects on a weld surface. The handheld device projects a thin beam laser light on the weld surface using a laser emitter. A processor receives the projected thin beam laser light from a laser receiving sensor, which indicates captured contours of the weld surface. The captured contours are processed to filter laser lines and extract contours. The extracted contours are utilized to classify a type of weld surface such as, surface joints, butt joints, corner joints, and tee joints. The processor, upon classifying, automatically adjusts angle and position of the laser light to be projected on the weld surface and detects deviation patterns by employing an ensemble of a laser line extraction process and a pixel width measurement process. The processor determines the detected deviation patterns as one or more defects on the weld surface that is being inspected.

Laser-scanning systems for augmented reality glasses displays and LiDAR (light detection and ranging) use photonic integrated circuits to generate multiple collimated (or low-divergence) modulated laser beams. Laser light is guided on the photonic chip, expanded, and emitted from the surface of the chip (using grating coupler devices) as one or more large-diameter (e.g., millimeter-scale), collimated or low-divergence beams. These gratings may be integrated onto movable microelectromechanical systems (MEMS) plates to steer the beam along two angular axes. Alternatively, the beam(s) from the grating(s) may be steered by a separate MEMS mirror integrated onto the photonic chip or on another chip. Such systems enable multi-beam laser scanning systems without collimation lenses, reducing the size and packaging complexity of high-performance laser scanning systems for augmented reality glasses and LiDAR.

The invention relates to a multi-beam space angle positioning device and a using method, and belongs to the technical field of laser optics, the multi-beam space angle positioning device comprises a main positioning plate and a secondary positioning plate which are coaxially arranged, a plurality of main positioning holes are formed in the main positioning plate, and the number of the main positioning holes is equal to that of laser beams; a plurality of main positioning holes are formed in the main positioning plate, the arrangement shape formed by the plurality of main positioning holes is the same as the arrangement shape of the plurality of laser beams focused to the same target spot, a plurality of secondary positioning holes are formed in the secondary positioning plate, and the number of the secondary positioning holes and the arrangement shape formed by the plurality of secondary positioning holes are the same as those of the main positioning holes; according to the multi-beam laser positioning device, the positioning problem in the application of the multi-beam laser technology in the prior art can be solved, the multi-beam positioning requirements of different space angles are met, and the multi-beam laser positioning device is simple in structure and suitable for table-board type or small-sized optical machine instruments.

The invention belongs to the technical field of aircraft surface drilling, and particularly relates to a six-degree-of-freedom positioning drilling tool for an aircraft surface, which comprises a posture adjusting mechanism, a controller electrically connected with the posture adjusting mechanism, a zero point positioner and a stand column, the two stand columns are arranged in parallel and used for positioning the tool and an aircraft wing. The plurality of zero point positioners are correspondingly and uniformly distributed on the two stand columns; the posture adjusting mechanism is arranged on the zero point positioners corresponding to the two stand columns and comprises a fixing mechanism and a moving mechanism capable of reciprocating along the fixing mechanism. The fixing mechanism is connected with the zero-point positioner through a connecting piece, and the moving mechanism comprises a left-right moving mechanism, a front-back moving mechanism and a three-beam laser moving mechanism which are sequentially arranged from bottom to top. According to the method, the distances from the three laser beams to the curved surface are fed back, whether the drilling position is in the normal direction of the curved surface or not is determined without calculation, the normal line is automatically found for aircraft surface drilling, and therefore high-precision drilling is conducted.

The invention is applicable to the technical field of marine oil and gas resource exploration, and provides an intelligent monitoring system and method for carbon isotopes of wellbore gas, the system comprises an explosion-proof shell, and further comprises a gas pretreatment module for removing impurities affecting CH4 and C2H6 gas spectral lines and adjusting temperature and pressure of measured gas; the optical cavity detection module comprises a laser, a collimator, a detector and an MPC, and is used for completing the energy level excitation of the infrared light to the gas to be detected, the injection of a detection light source into the MPC from the laser, the multiple reflection of the detection light in the MPC, the built-in multi-beam laser light source, and the absorption detection of the multi-component gas through a single optical cavity; and the data processing module is used for collecting, processing, displaying and outputting the measured data in real time. The system is high in detection precision, high in environmental adaptability, high in response speed and miniaturized in equipment, and has a wide market prospect.

The present invention relates to a dual-beam laser welding device and method, belonging to the field of material processing engineering, and comprising a structured light sensor, a front-side laser control system, a rear-side laser control system, a front-side laser, a rear-side laser, and a galvanometer system; the structured light sensor is arranged at the starting position of the welding joint of the base body, and the front-side laser control system is respectively connected to the structured light sensor and the front-side laser; the rear-side laser control system is respectively connected to the structured light sensor and the rear-side laser; the galvanometer system is arranged on the output optical paths of the front-side laser and the rear-side laser; the rear-side laser and the front-side laser are sequentially arranged along the welding direction; the present invention can achieve high-quality connection of complex structural parts that are difficult to weld by conventional lasers, and achieve the comprehensive control purpose of simultaneously reducing the porosity of the weld seam, improving the working condition adaptability, and improving the weld seam forming quality.

The invention discloses a wire harness laser coding system based on CCD camera recognition. The wire harness laser coding system comprises a mechanical arm, a wire harness clamping jaw, a wire harness end clamping unit, a horizontal guide rail, a ccd visual detection unit and a laser coding device. The sides, close to each other, of the two wire harness end clamping units are coaxially provided with two wire harness end insertion ports. The two wire harness clamping jaws are arranged on the displacement mechanical arm, the two wire harness clamping jaws can clamp the positions, close to the two ends, of the target wire harness respectively, and drive the clamped target wire harness to move to the position between the two wire harness end clamping units under the action of the mechanical arm, so that the two ends of the target wire harness are coaxially aligned with wire harness end inserting openings of the two wire harness end clamping units respectively; the two wire harness end clamping units can synchronously move in the extending direction of the horizontal guide rail. Original characters and patterns on the target wire harness are made to deviate from the sight line of the ccd visual detection unit through the ccd visual detection unit, and therefore finally achieved code printing effectively avoids the original characters and patterns on the surface of the wire harness.

The invention provides a double-energy different-beam laser arc composite efficient welding method for a large thick-wall component, a composite heat source comprises a common single laser beam, a scanning laser beam and a welding arc which are sequentially arranged, and the welding method comprises the following steps that before welding, a groove with a certain angle and a penetrating gap is formed in the large thick-wall component; the groove of the large thick-wall component is sequentially divided into a truncated edge penetrating area, a middle expansion area and a remaining coverage area outside the truncated edge penetrating area from bottom to top in the thickness direction; during welding, one-time welding double-face forming of the large thick-wall component is achieved through the synergistic effect of the three heat sources; wherein the common single laser beam is used for completely penetrating through the truncated edge penetrating area so as to carry out penetrating welding on a gap at the truncated edge; the scanning laser beam is used for welding the side wall of the middle expansion area so as to effectively fuse the middle side wall; the welding arc is used for full-coverage welding and effective filling of the remaining coverage area. The technical problem of single-pass welding bottleneck of the large thick-wall component with the thickness being 20 mm or above is solved.

A system for drying a battery electrode coating includes two laser diode arrays and a laser module. Each laser diode array emits multi-beam laser radiation to an edge region including a respective edge of a coating lane deposited on a metal foil. The laser module emits a diverging laser beam to an interior area of the coating lane between the two edges. The intensity distribution of the diverging laser beam at the coating lane spans a gap in the widthwise dimension between respective intensity distributions of the multi-beam laser radiation from the two laser diode arrays. The use of laser diode arrays to perform the edge drying allows for tailoring the intensity distribution of the combined laser irradiation to dry the coating lane without over-drying and delaminating the edges. The use of a single, diverging laser beam in the interior area allows for optimizing affordability and energy efficiency.

According to the multi-beam laser-induced sintering method, a first electrode is arranged on the first surface of a photovoltaic cell to make contact with a first grid line, a second electrode is arranged on the second surface or the first surface of the photovoltaic cell to make contact with a second grid line, and the first electrode and the second electrode are connected with the positive electrode and the negative electrode of a power source respectively to apply reverse bias voltage to the cell; and a plurality of split light spots are adopted to simultaneously scan different scanning areas of the photovoltaic cell for laser-induced sintering. The scanning area is divided into a plurality of strip-shaped blocks in the direction perpendicular to the extending direction of the first electrode, one light splitting light spot corresponds to one scanning area for laser scanning, and different light splitting light spots are different in power density. By means of the method, the laser-induced machining effects of the areas close to and away from the first electrode tend to be consistent; the situation that multiple split light irradiates the same grid line at the same time to reduce the influence of generated large current on the grid line and a cell substrate is avoided, and the laser-induced sintering effect is improved; and the bad EL black edge caused by reverse breakdown and over-processing of the edge area of the battery piece is avoided.

A river channel flow estimation method based on an unmanned aerial vehicle and decision tree regression comprises the steps that the unmanned aerial vehicle is used for carrying a small dual-beam laser radar and an ultrasonic flow meter to measure the coordinates of a river channel section measuring point, the water depth and the water body surface flow velocity; according to the determined riverway water surface range, fine segmentation division is carried out, and the abscissa of the vertical line of each segment is determined; performing supervised learning by using a decision tree regression algorithm, determining a subset after model training according to the set maximum depth of a decision tree, and predicting the water depth and the surface flow velocity corresponding to each segment vertical line; and according to the predicted water depth and surface flow velocity of each vertical line, calculating the water passing area and the average flow velocity between adjacent vertical lines, and obtaining the cross-section flow of the river channel by multiplying and accumulating the area of each section and the average flow velocity. The method has an important practical value in river flow measurement under any complex water regimen.

The invention discloses metal material surface treatment equipment and a surface treatment method. The surface treatment method comprises the following steps: performing surface pretreatment on a metal matrix to form an activated matrix with target surface roughness; metal ceramic powder is directionally deposited on the surface of the activated substrate through a spraying system, and a porous substrate layer with uniform micropore channels is generated; depositing a gradient functional coating on the porous substrate layer, and dynamically adjusting the mixing proportion and the spraying angle of spraying powder to sequentially form a bottom layer bonding interface, a transition strengthening layer and a surface layer protection layer; the gradient functional coating is subjected to laser remelting treatment, and a coating interface is scanned through a multi-beam laser array, so that metallurgical bonding is achieved between the surface protection layer and the transition strengthening layer, and between the transition strengthening layer and the bottom bonding interface; in a single treatment process, multiple protection performances of high temperature resistance, corrosion resistance and fatigue resistance are synergistically improved, so that the problem of interface stripping caused by thermal expansion mismatch of a protective coating and a matrix is solved.

The invention discloses a laser beam wide-area directional angle high-precision calibration device and method. The laser beam wide-area directional angle high-precision calibration device comprises an optical measurement assembly, a multi-dimensional motion adjusting mechanism and an upper computer. The multi-dimensional motion adjusting mechanism comprises a driving mechanism and a mounting platform, and the driving mechanism is used for driving the mounting platform to move towards a required pose; the optical measurement assembly is fixed on the mounting platform, and the driving mechanism drives the optical measurement assembly to move through the mounting platform, so that the orientation direction of the optical measurement assembly is adjusted, and the optical measurement assembly can receive to-be-measured laser beams with different direction angles. The output of the driving mechanism and the output of the optical measurement assembly are connected with the upper computer, and the upper computer is used for carrying out secondary calculation on the relative directional angle calculated by the optical measurement assembly according to output data of the driving mechanism so as to achieve final calibration of the directional angle. According to the invention, the sub-milliradian-level calibration precision of the wide-field directional angle can be realized, the calibration efficiency is improved, and a large-view-field and high-precision synchronous calibration technical guarantee is provided for the multi-beam laser wind-finding radar.

The invention discloses an unknown environment mapping method for a single-beam laser of aircraft, which belongs to the field of three-dimensional map reconstruction technology. Firstly, the data collected by a single-beam LiDAR is aligned with the timestamp of the stepper motor, and the obtained point cloud data is filtered and matched to obtain three-dimensional map information. The pose of the aircraft is estimated by the wheel odometer and IMU, and the loop detection is performed to reduce the cumulative error and update the three-dimensional map information in real time. The frontier search algorithm is used to determine the target point of the aircraft flight, the A* algorithm is used to plan the path trajectory, and the B-spline curve optimization algorithm is used to make the trajectory of the aircraft smoother. The control command is sent to the aircraft, and then the global three-dimensional map of the unknown environment is obtained.

The utility model provides a coaxial double-vision control device for double-beam laser processing, which comprises a welding frame and a laser beam generator, a suspension beam close to the top is connected in the welding frame in an up-down sliding manner, a rotating shaft is arranged at the bottom of the suspension beam, a transverse plate is fixedly connected to the bottom of the rotating shaft, and a lead screw is rotatably connected to the bottom of the transverse plate. According to the utility model, the transverse plate is arranged, the screw sleeve I and the screw sleeve II of which the distance is controlled by the lead screw are arranged below the transverse plate, and the adapter seats for mounting the laser beam generators are arranged at the bottoms of the screw sleeve I and the screw sleeve II, so that compared with the prior art, the laser beam generator has a function of adjusting the distance between the two laser beam generators; the double-beam laser welding device is suitable for laser welding of two welding positions with different distances, and the application range of double-beam welding is enlarged.

The invention relates to the technical field of multi-beam laser radar'low, small and slow 'target detection, in particular to a multi-channel TDC signal processing board card and a multi-beam laser radar signal processing system. According to the multichannel TDC signal processing board card, a pulse broadening circuit, a delay chain signal sampling circuit, a coding circuit, a synchronous coarse counting circuit and a data integration generation circuit are constructed based on an FPGA (Field Programmable Gate Array); the pulse broadening circuit is used for adjusting a starting moment and an ending moment of an input pulse to obtain a pulse broadening signal; the delay chain signal sampling circuit comprises a delay chain and a D trigger array; the pulse broadening signal is interpolated and delayed by a delay chain and then a thermometer code is generated by a D trigger array; the coding circuit is used for coding thermometer codes output by the D trigger array; and the synchronous coarse counter is used for triggering the data integration generation circuit, so that the data integration generation circuit integrates and outputs the coded data output by the coding circuit. According to the invention, the problem of synchronous acquisition and identification of the transmitting signal and the echo signal in the multi-beam laser radar is solved, and the time detection and measurement precision is improved.

The invention discloses a multi-beam laser cutting device integrated with a cooling injection system, the multi-beam laser cutting device comprises a processing table and a cutting mechanism, the cutting mechanism comprises an equipment box, a beam tube is arranged outside the equipment box, the beam tube is sleeved with a fixing sleeve, the outer surface of the fixing sleeve is fixedly connected with the outer surface of the equipment box, and the outer surface of the fixing sleeve is fixedly connected with the outer surface of the equipment box. The laser cutting device comprises a fixing sleeve, a fixing ring is fixedly connected to the interior of the fixing sleeve, the interior of the fixing ring is hollow, a water inlet pipe is communicated with the interior of the fixing ring in a penetrating mode, and a water spraying pipe is communicated with the interior of the fixing ring in a penetrating mode. The problems that local hardness is increased and toughness is reduced due to the fact that metal grains are prone to coarse oxidation and the like in a heat affected zone, meanwhile, material micro-deformation is caused by thermal expansion and shrinkage, slag and an oxide layer are prone to being attached, additional working procedures are needed for cleaning, and machining precision and machining efficiency become poor are solved.

The invention provides a multi-beam laser quenching method, and relates to the technical field of quenching, the multi-beam laser quenching method comprises the step of providing a plurality of laser beam sources during quenching, and more accurate heating and cooling control is realized through dynamic adjustment of the laser beam irradiation sequence, time and power by the multi-beam laser quenching method. According to real-time surface temperature data, the uniformity and depth adjustability of a hardened layer on the surface of the workpiece are ensured, the power, irradiation time and scanning path of the laser beam are adjusted according to the real-time surface temperature data, and uniform distribution of the surface temperature of the workpiece is realized, so that the thermal stress problem in the traditional technology is reduced, the heating effect is optimized, and the uniformity of the surface temperature of the workpiece is ensured; and the cooling rate is controlled, the compactness of a hardened layer is ensured, the wear resistance and fatigue resistance of the workpiece are enhanced, the quenching process is optimized, the surface quality of the workpiece is improved, higher innovativeness and adaptability are achieved, and the method is particularly suitable for surface hardening treatment of workpieces in complex shapes or made of special materials.

The utility model discloses a three-beam laser equipment automatic side-leaning workbench, which belongs to the technical field of laser processing equipment, and comprises a conveying platform and three groups of laser cutting components, and the three groups of laser cutting components are arranged on the conveying platform along the feeding direction and are connected with the conveying platform in a sliding manner; the conveying platform comprises a base, a mounting plate, a rolling shaft and a flange assembly; the two sets of mounting plates are symmetrically fixed to the two sides of the upper portion of the base. The multiple rolling shafts are parallel to one another and form included angles with the feeding direction, the two sides of each rolling shaft are rotationally connected with the base, multiple discs are evenly arranged on the rolling shafts, and the discs on every two adjacent sets of rolling shafts are arranged in a staggered mode. A guide plate is arranged on the inner side of the end, close to the discharging end, of the push plate. A limiting rod is arranged at the end, close to the conveying platform discharging end, of the conveying platform. By means of the rolling shafts and the discs which are arranged in an inclined mode, plates are close to the mounting plate on one side; and meanwhile, the plate is limited and clamped through the flange assembly.

The invention discloses a fan unit main shaft displacement monitoring device and a working method thereof, and belongs to the technical field of concrete pole pre-embedded foundation structures. The device comprises a main shaft mounting bottom plate, a mounting table, a fan main shaft and a bearing seat assembly. A displacement monitoring sensor assembly is arranged between the bearing seat assemblies at the front end and the rear end and comprises three sets of laser correlation sensors arranged on the periphery of the draught fan main shaft, and the three sets of laser correlation sensors are located in different directions. The distance between the correlation laser straight line of each laser correlation sensor and the central axis of the fan main shaft is r + alpha + beta; the displacement change of the main shaft of the wind turbine can be monitored in real time, when the main shaft of the wind turbine deviates in the radial direction, the monitoring system can accurately judge the displacement state under the condition that the roundness error of the main shaft is eliminated, the displacement condition of the main shaft of the wind turbine can be more timely and accurately detected, and stable operation of the wind turbine is guaranteed.

The invention discloses a composite laser cutting device which comprises a first light source, a second light source, a first reflecting mirror, a spectroscope, a focusing mirror, a first energy distribution adjusting assembly and a second energy distribution adjusting assembly, and further discloses a composite laser cutting method which comprises the following steps that a light beam is emitted, and energy distribution of the composite light beam is controlled. The method has the beneficial effects that distribution control and application of multi-level energy are achieved, and the efficiency and quality of composite beam laser cutting can be rapidly improved by controlling the energy density of the whole body and the center. The laser cutting machine can be well applied to laser cutting, is particularly suitable for cutting thick plates and composite plates, can cut transparent materials with high efficiency, and can overcome the technical problem that a laser cutting machine in the prior art is difficult to effectively cut the transparent materials and superhard materials.

The application provides a robot tool coordinate system calibration device and method. The robot tool coordinate system calibration device comprises a control device configured to be in communication connection with a robot; a laser device, the laser device comprising a laser emitting module and a laser receiving module, both of which are in communication connection with the control device, the laser emitting module being configured to be capable of forming a cross-shaped laser beam, the laser receiving module being capable of receiving the cross-shaped laser beam, two first laser beams forming the cross-shaped laser beam being perpendicular to each other. The technical scheme of the application can solve the problem of low calibration accuracy and efficiency of the calibration mode of the prior art.

The invention discloses a machining method for a laser quenching cutter point, and belongs to the technical field of metal surface treatment and cutter machining. According to the method, efficient and uniform quenching of the cutter point is achieved through multi-beam laser composite scanning and artificial intelligence real-time feedback control; the method comprises the steps of workpiece pretreatment, multi-beam laser scanning, real-time monitoring and feedback control, post-treatment and quality evaluation. The method has the effects of reducing heat affected zones, improving hardening uniformity and reducing energy consumption.

The invention discloses a medium and long distance range finder. A laser emission module emits a first laser beam to a to-be-measured object; the to-be-measured object performs diffuse reflection on the first laser beam to form a second laser beam; the laser receiving module receives the second laser beam to detect the to-be-detected object; the control module measures the distance of the to-be-measured object based on the emitting time of the first laser beam and the receiving time of the second laser beam received by the laser receiving module; wherein the first optical axis of the laser transmitting module is parallel to the second optical axis of the laser receiving module, and the light spot divergence angle of the laser transmitting module is smaller than 0.25 mrad. Therefore, the light spot divergence angle of the laser emission module is set to be within the range, the divergence angle is small, it can be guaranteed that light spots are as small as possible and energy in unit area is more concentrated when the laser irradiates a long-distance object, and therefore distance measurement of the long-distance object is achieved.

The invention discloses a laser light source-based baffle-free integrated automobile headlamp optical system, which comprises a low-beam laser light source, a high-beam laser light source, a low-beam focusing reflector, a high-beam reflection cup and a high-beam and low-beam light distribution lens, the high-beam and low-beam laser light source comprises a blue laser diode, a laser collimating lens, a laser focusing reflector and a curved reflector embedded with yellow fluorescent powder, and the low-beam focusing reflector and the high-beam reflection cup are used for reflecting light to the lower half portion and the upper half portion of the high-beam and low-beam light distribution lens respectively. The high-beam and low-beam light distribution lens is a double-free-form-surface lens of a segmented structure, the upper half portion of the lens is a two-section symmetrical fan-shaped lens and used for high-beam illumination, and the lower half portion of the lens is a four-section fan-shaped lens and used for low-beam illumination. According to the baffle-free dual-light integrated structural design, the weight of the headlamp can be effectively reduced, the size is reduced, and the system stability is improved.

A system for drying a battery electrode coating includes two laser diode arrays and a laser module. Each laser diode array emits multi-beam laser radiation to an edge region including a respective edge of a coating lane deposited on a metal foil. The laser module emits a diverging laser beam to an interior area of the coating lane between the two edges. The intensity distribution of the diverging laser beam at the coating lane spans a gap in the widthwise dimension between respective intensity distributions of the multi-beam laser radiation from the two laser diode arrays. The use of laser diode arrays to perform the edge drying allows for tailoring the intensity distribution of the combined laser irradiation to dry the coating lane without over-drying and delaminating the edges. The use of a single, diverging laser beam in the interior area allows for optimizing affordability and energy efficiency.

This invention provides a multi-aperture coherent combining system with split-path phase modulation detection, relating to the field of optoelectronic technology. The system, along the optical path, sequentially includes a split-beam laser source module, a signal generation module, a multi-aperture emission module, a signal demodulation module, and a marker feedback module. The signal generation module receives multiple split-beam lasers and generates different modulation signals, using these signals to modulate different split-beam lasers. The signal demodulation module, located at the optical axis of a far-field target, demodulates the modulated split-beam lasers in the combined beam to obtain split-beam lasers deviating from the optical axis. The marker feedback module marks the deviated split-beam lasers and feeds them back to the optical axis processing module connected to the split-beam laser source module, thereby enabling the detection of far-field spots. This invention solves the problems of low compensation accuracy and efficiency in closed-loop correction during multi-aperture coherent combining.

The utility model discloses a laser device which comprises a laser, a light splitting assembly, a plurality of attenuation modules, a plurality of focusing assemblies and a light emitting reflector. The light splitting assembly is arranged at the downstream of the laser and is used for splitting a light beam generated by the laser into multiple light beams; the plurality of attenuation modules are in one-to-one correspondence with the plurality of light beams, and the attenuation modules are used for attenuating the light beams; the multiple focusing assemblies are in one-to-one correspondence with the multiple attenuation modules. The light-emitting reflector is arranged on the downstream of the focusing assemblies, and the multiple sets of focusing assemblies are all used for focusing the light beams on the light-emitting reflector so that the light-emitting reflector can reflect multiple parallel scribing laser beams. Laser beams generated by the laser device form multiple light beams through the light splitting assembly, the light beams are reflected and output through the light emitting reflector after being attenuated and focused, the multiple scribing laser beams reflected and output by the light emitting reflector are parallel to one another, and the multiple scribing laser beams can scribe a film at the same time. Therefore, the scribing efficiency is effectively improved. The utility model further discloses scribing equipment.