The invention discloses an
optical thin film thickness monitoring device and an
optical thin film coating system, and belongs to the technical field of
vacuum coating. A workpiece disc of the
optical film thickness monitoring device is provided with a monitoring hole group, the monitoring hole group comprises a first through hole, a second through hole and an interval shielding area, and a
film coating monitoring piece is arranged in the first through hole; the
irradiation light source is used for emitting light signals to the monitoring hole group; the receiving
assembly comprises a light converging element and at least two
grating monochromators. The actual physical or optical thickness of the thin film can be calculated by monitoring the transmission or
reflectivity of multiple wavelengths and combining the dispersion of the material, and the precision is higher than the precision of monitoring the thickness of the single-
wavelength thin film. A plurality of
grating monochromaters respectively and correspondingly monitor one
wavelength, each
grating monochromator can freely select the
wavelength, the wavelength selection range is wide, and the problems that the monitoring wavelength is changed and the positioning precision deviation is large in the same grating
monochromator are solved. According to the invention, the
optical film thickness
measurement precision in the online monitoring
film coating process can be improved, and the
film coating success rate is improved.