92 results about "Gas laser device" patented technology

A method of baking a chamber of a gas laser apparatus provided with a cooling passage configured to make a cooling medium that cools the chamber flow on an outer side of a wall surface in contact with an internal space of the chamber for generating light in the internal space includes a heating step of heating the internal space via the wall surface by making a heating medium flow through the cooling passage before generating the light in the internal space, and an exhaust step of exhausting a gas in the heated internal space to an external space of the chamber.

A line narrowing gas laser device includes an actuator changing a center wavelength of pulse laser light, and a processor controlling the actuator. The processor reads parameters including a number of irradiation pulses of pulse laser light to be radiated to one location of an irradiation receiving object, a shortest wavelength, and a longest wavelength; sets a first pattern with which the center wavelength is changed to approach the longest wavelength from the shortest wavelength and a second pattern with which the center wavelength is changed to approach the shortest wavelength from the longest wavelength such that at least one of the first pattern and the second pattern when the number of irradiation pulses is an even number is different from corresponding one when the number of irradiation pulses is an odd number; and controls the actuator so that the first pattern and the second pattern are alternately performed.

A gas laser device includes a chamber configured to enclose a laser gas as including a pair of discharge electrodes having a longitudinal direction oriented along a predetermined direction and facing each other with a space therebetween; a plurality of capacitors arranged along the predetermined direction, each of the capacitors having one terminal electrically connected to one of the discharge electrodes and the other terminal electrically connected to the other of the discharge electrodes; and first and second magnetic switches each electrically connected to the one discharge electrode and the one terminal of each of the capacitors and electrically connected to each other in parallel. The second magnetic switch is arranged closer to a center of the one discharge electrode in the predetermined direction than the first magnetic switch, and a Vt product of the first magnetic switch is smaller than a Vt product of the second magnetic switch.

A chamber of a gas laser apparatus, the chamber configured to encapsulate a laser gas in an internal space, includes an anode disposed in the internal space and having a longitudinal direction along a predetermined direction; a cathode disposed in the internal space and including a base and a discharge section protruding from the base toward the anode, the cathode having a longitudinal direction along the predetermined direction, the cathode being separate from and facing the anode; a cathode-side cover disposed in the internal space, being separate from a portion of the base and the discharge section, and covering the base; and a cathode-side sound absorbing member provided in a gap between the portion of the base and the cathode-side cover.

In a chamber of a gas laser apparatus, a distance from an imaginary axis extending along a predetermined direction to a first end portion between first and second primary electrodes increases from one side toward the other side in the predetermined direction, and a distance from the imaginary axis to a second end portion decreases from the one side toward the other side in the predetermined direction.

A gas laser apparatus includes a laser oscillator including a pair of discharge electrodes disposed to face each other and configured to generate light from laser gas upon application of voltage, and a laser-side resonator in which the light resonates; an amplifier including an amplification unit and an amplification-side resonator; a beam splitter configured to reflect a part of the light from the laser-side resonator; an optical sensor configured to detect the light reflected by the beam splitter; and a processor configured to control the voltage based on an output from the optical sensor. The amplification-side resonator includes a rear mirror and an output coupling mirror. The laser-side resonator includes a grating and an output coupling mirror. The processor maintains the voltage at a constant value equal to or larger than a threshold of the voltage when the voltage is to be smaller than the threshold.

A laser chamber according to an aspect of the present disclosure includes a container, a first electrode, a second electrode, and a sound absorber. The container is filled with a laser gas. The first electrode is disposed in the container. The second electrode is disposed in the container and faces the first electrode. The sound absorber is disposed on at least one of an upstream side and a downstream side of the laser gas from the first electrode. The sound absorber is configured to cause a propagation speed of an acoustic wave generated in a discharge space between the first electrode and the second electrode to decrease as a distance from the discharge space increases.

The invention provides a method for manufacturing an optical module, a method for manufacturing a gas laser device, and a jig for manufacturing an optical module. In the method of manufacturing an optical module, the optical module includes: an output coupling mirror that transmits a portion of a laser beam and reflects another portion of the laser beam; and a plane mirror including a plane reflection surface perpendicular to the surface of the output coupling mirror on the incident side of the laser light, the method for manufacturing the optical module having the steps of: disposing the first autocollimator such that the emitted light is vertically incident on the surface of the incident side; an optical element is disposed between a surface on the incidence side and the first autocollimator such that light emitted from the first autocollimator is vertically incident on a first reflection surface included in the optical element, the optical element including a second reflection surface that faces the surface on the incidence side and forms an angle of 45 DEG with the first reflection surface; a second auto-collimator is disposed so that the emitted light is reflected by a second reflection surface and is vertically incident on a surface on the incident side; the optical element is removed, and the plane mirror is disposed such that the light emitted from the second autocollimator is vertically incident on the reflection surface of the plane mirror.

A gas laser apparatus according to an aspect of the present disclosure includes a laser chamber, a primary electrode, a preliminary ionization electrode, a power supplier, and a processor. The laser chamber is configured to encapsulate a laser gas containing a fluorine gas. The primary electrode is disposed in the laser chamber. The preliminary ionization electrode is disposed in the laser chamber. The power supplier is configured to supply power to the primary electrode and the preliminary ionization electrode. The processor is configured to control the power supplier to perform first discharge control that causes the preliminary ionization electrode and the primary electrode to perform discharge, and second discharge control that causes only the preliminary ionization electrode to perform discharge without causing the primary electrode to perform discharge.

The invention provides a laser chamber, a gas laser apparatus, and a manufacturing method of an electronic device. A laser chamber according to one aspect of the present disclosure is a laser chamber of a gas laser device that outputs laser light, the laser chamber being provided with: a container filled with a laser gas; a first electrode extending in a first direction and disposed inside the container; a second electrode extending in the first direction and disposed at a position closer to the inner wall of the container than the first electrode in a state of facing the first electrode in a second direction perpendicular to the first direction; a fan that causes the laser gas to flow in a discharge space between the first electrode and the second electrode; a plurality of heat pipes disposed on the inner wall of the container; and a plurality of heat exchangers disposed in the container so as to be separated from each other.

A gas laser device that amplifies laser light output from a laser oscillator by means of an amplifier and emits the amplified laser light, the amplifier being provided with: a chamber device that amplifies laser light from the laser oscillator; a resonator that resonates the laser light emitted from the chamber device between both sides sandwiching the chamber device; and a beam expander, the resonator including an output coupling mirror disposed on one side sandwiching the chamber device, through which a portion of the laser beam emitted from the chamber device passes, and which reflects the other portion of the laser beam emitted from the chamber device so as to return to the chamber device, the beam expander including: a convex mirror, which is disposed on the other side of the chamber device, and which reflects the other portion of the laser beam emitted from the chamber device so as to return the other portion of the laser beam to the chamber device; a reflection mirror disposed between the chamber device and the output coupling mirror and reflecting the laser beam emitted from the chamber device so as to enlarge the beam width of the laser beam; and a concave mirror that reflects the laser beam reflected by the convex mirror toward the output coupling mirror so as to perform collimation such that the amplified beam width of the laser beam is constant.

To provide a chamber device for a gas laser device capable of outputting laser light with stable pulse energy even at a high repetition frequency.SOLUTION: A chamber device of a gas laser device includes: a chamber body; an anode extending along a Z direction; a cathode extending along the Z direction and including a base portion 401 and a discharge portion 403 protruding from the base portion; a cathode side sound absorbing portion 470 including a base facing portion 453 spaced apart from the base portion in a V direction and overlapped partially and spaced apart from the discharge portion in an H direction and overlapped partially, and arranged in a space between a cathode side cover portion 450 covering the base portion and the base portion; and an inclined portion 480a arranged in a space on the base portion side than the base facing portion in the V direction and on the discharge portion side than the base facing portion in the H direction, expanding in a direction away from the discharge portion when progressing in a direction from the discharge portion side toward the base portion side along the V direction, and having an inclined surface extending in the Z direction.SELECTED DRAWING: Figure 6

A discharge electrode used in a gas laser device that excites a fluorine-containing laser gas by discharging is provided with a cathode and an anode. The positive electrode and the negative electrode are disposed so as to face each other, and comprise: an electrode base material containing a metal; and a coating layer that covers a part of a side surface parallel to the longitudinal direction of the electrode base material and contains an insulating material. The coating includes: a first portion covering a first region in the side surface; and a second portion that covers a second region in the side surface and is thicker than the first portion, the second region being located farther from the cathode than the first region in a discharge direction perpendicular to the longitudinal direction.

A chamber device includes a pair of discharge electrodes arranged with a longitudinal direction oriented along a predetermined direction as being apart from and facing each other; a chamber having an internal space where the pair of discharge electrodes are arranged; capacitors arranged in parallel along the predetermined direction; a power supply terminal electrically connecting one discharge electrode and one terminal of each capacitor to a high-voltage power source; and a connection member extending in the predetermined direction, electrically connected to the other terminal of each capacitor, and having a portion away from a side electrically connected to the other terminal in the direction perpendicular to the predetermined direction be connected to the ground. The connection member includes an inductance compensation structure that makes a distribution of inductance due to a distance between the power supply terminal and the one terminal of each of the capacitors close to be uniform.

To provide a gas laser device having a narrow spectral linewidth.SOLUTION: A laser apparatus includes a laser chamber 10 containing a laser gas containing fluorine, a pair of discharge electrodes arranged within the laser chamber 10, a gas supply port 10d arranged in the laser chamber 10, and XeF2 crystals arranged in a XeF2 vaporization space communicating with the gas supply port and vaporized.SELECTED DRAWING: Figure 4

A chamber for a gas laser device in which a laser gas is sealed in an internal space, the chamber comprising: an anode disposed in the internal space and having a longitudinal direction along a predetermined direction; a cathode disposed in the internal space, including a base and a discharge portion protruding from the base toward the anode, the length direction of the cathode being along a predetermined direction, the cathode being spaced apart from the anode and facing the anode; a cathode-side cover disposed in the internal space, separated from a part of the susceptor and the discharge portion, and covering the susceptor; and a cathode-side sound-absorbing member provided in a gap between a part of the susceptor and the cathode-side cover.

A laser chamber, a discharge electrode, and a method of manufacturing an electronic device are provided. A laser chamber for a gas laser device that excites a fluorine-containing laser gas by discharge, the laser chamber comprising: a cathode electrode having a cathode discharge surface extending in a first direction; an anode electrode having an anode discharge surface extending in a first direction and disposed in a posture in which the anode discharge surface and the cathode discharge surface face each other in a second direction orthogonal to the first direction; a fan that circulates the laser gas through a discharge space between the cathode electrode and the anode electrode in a third direction orthogonal to the first direction and the second direction; and a preionization electrode disposed on the upstream side of the cathode electrode and the anode electrode with respect to the laser gas. In an initial state, the cross-sectional shape of the cathode discharge surface cut by a plane orthogonal to the first direction is asymmetrical with respect to an axis parallel to the second direction, and the cross-sectional shape of the anode discharge surface cut by the plane is axisymmetric with respect to the axis.

A gas laser device includes an optical plate in an accommodating portion, a monitor module including a light entrance region and slidable on the optical plate, a positioning member on the optical plate for positioning the monitor module at a predetermined position on the optical plate, and a guide extending parallel to an optical axis of light traveling to the entrance region and guiding the monitor module toward the positioning member in the parallel direction. The monitor module includes a through-hole penetrating therethrough in the parallel direction and provided at a position deviating from the entrance region, slides on the optical plate to a predetermined region perpendicularly to the optical axis, then slides along the guide in the parallel direction toward the positioning member spaced apart from the predetermined region in the parallel direction, and is fixed in an internal space of the accommodating portion with a fixing member.

A control method for a narrowband gas laser device, the narrowband gas laser device outputs pulsed laser containing a first wavelength component and a second wavelength component. Among them, the narrowband gas laser device has: a laser cavity, which includes a pair of electrodes; an optical resonator, which includes an adjustment mechanism, and the adjustment mechanism adjusts a parameter of the energy ratio between the first wavelength component and the second wavelength component; and a processor, which stores relationship data, and the relationship data represents the relationship between the parameter of the energy ratio and the control parameter of the adjustment mechanism. The control method includes the following steps: receiving an instruction value of the parameter of the energy ratio from an external device; and obtaining the value of the control parameter corresponding to the instruction value according to the relationship data, and controlling the adjustment mechanism according to the value of the control parameter.

A chamber device for laser light is provided with: a chamber which has a conductive chamber main body having an opening in the top wall thereof and an insulating plate for closing the opening, and which is filled with a laser gas in the internal space thereof; a first discharge electrode disposed on the inner space side of the insulating plate; a second discharge electrode disposed in the internal space so as to face the first discharge electrode; a fan that causes the laser gas to flow between the first discharge electrode and the second discharge electrode in a direction perpendicular to the optical axis of the laser light; and a return member that is provided on the upstream side of the flow of the laser gas with respect to the second discharge electrode, electrically connects the second discharge electrode and the chamber main body, and has an end portion on the opposite side from the second discharge electrode side connected to the top wall. The linear part comprises a plurality of linear parts which are arranged in parallel along the optical axis; and a plate-shaped part which is provided on the top wall side of the return member, is connected to the plurality of linear portions, and is inclined so as to be on the downstream side of the laser gas further away from the top wall.

A Q-switched gas laser device with binary pulse equalization technology includes a gas laser, a sensor, and electronic circuitry. A Q-switch switches the laser resonator between high-loss and low-loss states to generate a pulsed laser beam. The sensor receives a measurement of the pulsed laser beam representing the laser pulse energy. The electronic circuitry operates the Q-switch to (a) repeatedly switch the laser resonator between the high-loss and low-loss states to set a repetition rate of the laser pulses in the pulsed laser beam, (b) adjust a loss level in the low-loss state based on the pulse energy measurement to achieve a target laser pulse energy, and (c) adjust a duration in the low-loss state to achieve a target laser pulse duration. By adjusting both the pulse energy and duration, uniform pulse energy is achieved over a wide repetition rate range, and, if necessary, uniform pulse duration is achieved.

Discharge electrodes to be used in a gas laser device for exciting a laser gas containing fluorine by discharge include a cathode and an anode. The anode is arranged as facing the cathode and includes an electrode base member including a metal, and a coating layer including an insulating material and coating a part of a side surface, parallel to a longitudinal direction, of the electrode base member. The coating layer includes a first portion coating a first region of the side surface and a second portion coating a second region of the side surface, located farther from the cathode than the first region in a discharge direction perpendicular to the longitudinal direction, and being thicker than the first portion.

The present disclosure provides a laser chamber, a gas laser device, and a method of manufacturing an electronic device. A laser chamber of one aspect of the present disclosure includes a container filled with a laser gas; a first electrode disposed in the container; a second electrode disposed in the container in an opposed state to the first electrode; and an acoustic absorption material disposed on at least one of an upstream side and a downstream side of the laser gas with respect to the first electrode, so that a propagation speed of a sound wave generated in a discharge space between the first electrode and the second electrode is reduced in a direction away from the discharge space.

The invention discloses a high-power intermediate infrared optical fiber gas laser based on spectral beam combination. The high-power intermediate infrared optical fiber gas laser comprises an acetylene optical fiber gas laser, a dichroic mirror, a reflector group and a diffraction grating, the acetylene optical fiber gas laser devices are divided into five paths and are used as laser light sources for grating beam combination, and a laser spectrum output by each path of acetylene optical fiber gas laser device contains two different wavelengths; dichroic mirrors are respectively arranged on output light paths of the acetylene optical fiber gas lasers, and the dichroic mirrors are used for separating lasers with two wavelength components in the lasers output by the corresponding acetylene optical fiber gas lasers; the five paths of acetylene optical fiber gas lasers are split by the corresponding dichroic mirrors respectively to obtain ten paths of laser with different wavelengths; the ten paths of laser are incident to the diffraction grating at different angles after light paths of the ten paths of laser are adjusted by the corresponding reflecting mirror groups respectively; the ten paths of incident laser are diffracted in the same direction on the diffraction grating and have the same diffraction angle, spectrum beam combination is achieved, and therefore the existing upper power limit is broken through.

To provide an optical pulse expander that is used for a gas laser device.SOLUTION: An optical pulse expander comprises: a beam splitter that separates a laser beam entering into an optical surface into a reflection laser beam and a transmissivity laser beam; a holder 210 that fixes the beam splitter so as to be inclined to an optical path of the laser beam entering to the optical surface of the beam splitter; a plurality of mirrors that guide the reflection laser beam to the beam splitter; and a slide mechanism that moves the beam splitter in a direction that is parallel to the optical surface. The slide mechanism comprises: a slide plate 214 to which the holder is coupled; and a case 300 that movably holds the slide plate in a slide direction with respect to a base plate on which the plurality of mirrors are arranged. The case comprises a screw hole 301 in which a female screw is formed. The slide plate comprises a penetration hole 215B positioned at a position corresponded to the screw hole.SELECTED DRAWING: Figure 10

A chamber device includes a housing into which a laser gas is filled, a pair of discharge electrodes generating light from the laser gas when a voltage is applied thereto, a window arranged at a wall surface of the housing and transmitting the light therethrough, a first fan causing the laser gas to flow between the discharge electrodes, a filter, a second fan rotating together with the first fan by a drive force of a drive source of the first fan, a fan-side flow path causing the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window, and a window-side flow path communicating with the fan-side flow path and causing the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.

A gas laser apparatus includes a chamber; a window provided in the chamber; an optical path tube connected to the chamber; a gas supply port that supplies a purge gas into the optical path tube; an exhaust port that exhausts a gas in the optical path tube; and a control unit, the exhaust port including a main exhaust port provided in the optical path tube, and an auxiliary exhaust port provided in the optical path tube upstream of a flow of the gas in the optical path tube with respect to positions of the window and the main exhaust port, the control unit causing the gas to be exhausted through the main exhaust port before a laser beam is emitted from the chamber and causing the gas to be exhausted through the auxiliary exhaust port in at least a partial period when the laser beam is emitted.

A laser processing system for forming recesses by radiating pulse laser light to processing receiving regions separate from each other in a first direction on a surface of a workpiece includes a gas laser apparatus that outputs the pulse laser light, a mover that moves a radiation receiving region on the surface that is irradiated with the pulse laser light in the first direction, and a first galvanometric scanner that changes the optical path of the pulse laser light to move the radiation receiving region in the first direction. The mover moves the radiation receiving region such that the moved radiation receiving region overlaps with a part of the radiation receiving region irradiated immediately before. The first galvanometric scanner moves the radiation receiving region such that the moved radiation receiving region is located within the processing receiving region different from the processing receiving region irradiated immediately before.

A laser chamber of a discharge-excitation-type gas laser device includes first and second discharge electrodes, a fan arranged in the laser chamber and causing a laser gas in the laser chamber to circulate, and a cooling unit arranged in the laser chamber and cooling the laser gas. Here, at least a part of a gas guide surface out of an inner surface of the laser chamber extends between first and second virtual curves over a first section corresponding to a phase angle of a magnitude of 90° or more of first and second virtual logarithmic spirals. The inner surface defines a flow path of the laser gas through which the laser gas flows between the first and second discharge electrodes to a vicinity of the cooling unit. The first and second virtual curves each have a curvature decreasing along the flow direction.

A discharge chamber for a gas laser apparatus has an internal space in which a pair of discharge electrodes facing each other with a spacing therebetween are disposed and which encapsulates a laser gas. The discharge chamber includes a first chamber part and a second chamber part combined with each other to enclose at least a portion of the internal space, and a metal seal including a straight section and a curved section, disposed between the first chamber part and the second chamber part, and pressed by the first chamber part and the second chamber part to seal a gap between the first chamber part and the second chamber part. The curved section of the metal seal, when assumed to be made straight, has a spring constant in a pressing direction smaller than a spring constant of the straight section of the metal seal in the pressing direction.