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56 results about "Gas laser" patented technology

A gas laser is a laser in which an electric current is discharged through a gas to produce coherent light. The gas laser was the first continuous-light laser and the first laser to operate on the principle of converting electrical energy to a laser light output. The first gas laser, the Helium–neon laser (HeNe), was co-invented by Iranian-American physicist Ali Javan and American physicist William R. Bennett, Jr. in 1960. It produced a coherent light beam in the infrared region of the spectrum at 1.15 micrometres.

Surface spark discharge strong pre-ionization pulse gas laser based on corona

The invention relates to the technical field of lasers, and discloses a corona-based creeping spark discharge strong pre-ionization pulse gas laser which comprises a main frame chamber, a pre-ionization device is fixedly mounted at the top of an inner cavity of the main frame chamber, a cathode electrode is arranged at the top of the inner cavity of the main frame chamber, and a connecting copper sheet is fixedly mounted on the lateral upper portion of the inner wall of the main frame chamber. A flow guide plate is fixedly installed on the connecting copper sheet, and an anode electrode is fixedly installed at the top end of the flow guide plate. A corona-based creeping spark discharge strong pre-ionization pulse gas laser is characterized in that a pre-ionization area can be formed on a pre-ionization device and structures on the pre-ionization device, electrons in the pre-ionization area move in an accelerated manner under the action of electric field force, and in the movement process, the electrons in the pre-ionization area are separated from the pre-ionization device. And the electrons and other gas particles are subjected to inelastic collision and ionization or excitation, so that high-concentration and uniform initial electrons are generated, a micro-discharge channel is formed, and continuous seed electrons are provided for a core discharge region of the micro-discharge channel.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Oil type gas laser monitoring and early warning device and method

The invention relates to the technical field of oil type gas monitoring, in particular to an oil type gas laser monitoring and early warning device and method, and the device comprises a processor control panel, a laser driver, a laser device group, a light path change-over switch, a diffusion type light absorption cell and a tuning fork detector; emergent laser with different gas spectrum absorption wavelengths is generated; switching each path of laser beam to a diffusion type absorption cell; respectively demodulating based on the acquired acquisition signals to obtain second harmonic signal voltages of optical signals of methane, ethane and hydrogen sulfide gas; inputting the second harmonic signal voltage of the optical signal absorbed by the to-be-detected gas into the residual neural network, identifying the methane and ethane gas overlapping spectrum, and outputting the methane and ethane gas concentration in the to-be-detected gas; and generating a multi-parameter early warning signal according to the methane and ethane gas concentrations and the hydrogen sulfide concentration. The light absorption detection can be accurately carried out on methane, ethane and hydrogen sulfide in the oil type gas, and the methane and ethane gas overlapping spectrum can be effectively identified.
Owner:HUANENG COAL TECH RES CO LTD +1

Folding pipe

The invention relates to the technical field of high-power design in gas lasers, in particular to a folded tube which comprises a plurality of laser tubes which are arranged side by side and connected in series through U-shaped elbows. The number of the laser tubes is at least three, each laser tube makes contact with the side walls of at least two laser tubes, and every two adjacent laser tubes making contact with each other are fixedly connected. The natural stability of the triangle is utilized, the torsion resistance of the single laser tube and the overall rigidity of the folding tube are improved, and the transportation stability and the vibration resistance are remarkably improved.
Owner:CHENGDU WEESON TECH

Laser chamber apparatus, gas laser apparatus, and electronic device manufacturing method

To provide a laser chamber apparatus in which non-uniform wear of a first discharge electrode is suppressed.SOLUTION: A laser chamber apparatus for emitting a laser beam includes: a chamber 131; a first discharge electrode 134a disposed in an internal space of the chamber along an optical axis of the laser beam in a longitudinal direction; a second discharge electrode 134b disposed in the internal space opposite to the first discharge electrode and disposed along the optical axis of the laser beam in the longitudinal direction; a return member electrically connected to the chamber and electrically connected from one end side to the other end side in the longitudinal direction of the second discharge electrode; and a support member 400 that is fixed to the chamber and supports the second discharge electrode. The present invention provides the laser chamber apparatus in which the second discharge electrode and the chamber are not electrically connected to each other through the support member.SELECTED DRAWING: Figure 8
Owner:GIGAPHOTON INC

Gas laser extra-cavity light beam shaping method and shaping device

The invention relates to the field of laser processing application, in particular to a gas laser extra-cavity light beam shaping method and device. Comprising the steps that a laser emits laser beams, and an indicating light emitter emits indicating beams; adjusting the position and angle of the laser beam, and expanding the laser beam; adjusting the position and angle of the indication light beam, and combining the indication light beam with the expanded laser beam; the combined beam is intercepted through a small-hole diaphragm, so that the shape and energy distribution of the combined beam are controlled; and focusing the beam-combined laser passing through the small-hole diaphragm to complete beam shaping operation. According to the laser beam shaping method, operation is very simple, the laser beam can be shaped into a needed circle, the indication beam is added for display, observation and operation are convenient, and the precision and efficiency of laser processing operation are greatly improved.
Owner:WUHAN LINGYUN PHOTOELECTRONICS SYST

High-frequency power coupler for a power converter for an industrial process assembly

The invention relates to a high-frequency power coupler (1) for coupling a plurality of HF input signals in order to form an HF output signal for outputting HF power to an industrial process assembly (100), preferably a plasma process assembly, gas laser excitation, or heating assembly, the HF power coupler having: a. a plurality of HF inputs (11, 12, 13, 14, 15), b. an HF output (7), c. a coupling unit (19), d. an impedance matching line (20) which extends from the coupling unit (19) to the HF output (7) and has a length which is designed to bring about an impedance matching function between the output of the coupling unit and the HF output, and e. an upper mounting plate (23), a middle mounting plate (25), and a lower mounting plate (27), the middle mounting plate (25) being provided between the upper and the lower mounting plate, wherein f. the impedance matching line (20) is provided between the upper and the middle mounting plate and between the lower and the middle mounting plate.
Owner:TRUMPF PATENTABTEILUNG

A corona-based streamer discharge intense pre-ionization pulsed gas laser

This application relates to the field of laser technology and discloses a corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, including a main frame chamber. A pre-ionization device is fixedly installed on the top of the main frame chamber, and a cathode electrode is provided on the top of the main frame chamber. A connecting copper plate is fixedly installed on the upper side of the inner wall of the main frame chamber, and a guide plate is fixedly installed on the connecting copper plate. An anode electrode is fixedly installed on the top of the guide plate. In this corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, the pre-ionization device and its structure can form a pre-ionization region on the pre-ionization device. Under the action of an electric field, electrons in the pre-ionization region accelerate. During this motion, electrons collide with other gas particles inelastically and undergo ionization or excitation, thereby generating a high-concentration and uniform initial electron and forming a micro-discharge channel, providing a continuous supply of seed electrons to its core discharge region.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Folding tube reflecting seat, adjustable reflecting mirror seat system and multi-folding laser

The utility model relates to the technical field of gas lasers, in particular to a folding tube reflecting seat, an adjustable reflecting mirror seat system and a multi-folding laser. According to the utility model, the annular boss is arranged at the beveled elliptical interface, the inner side via hole is arranged to have a circular cross section, and the top edge of the via hole is arranged to have an inward concave cambered surface along the annular direction, so that the annular boss and a reflector seat are assembled and installed; an interface matched with the reflector seat is changed from an ellipse to a perfect circle, and is processed on a circular outline, so that compared with the ellipse, the processing difficulty of the interface is reduced, the processing of the top cambered surface of the interface is more convenient, the contact gap between the circular cambered surface and the reflector seat is more uniform, and the sealing performance is better; the concave cambered surface arranged on the annular boss can form a two-dimensional angle-adjustable structure with the plane fitting edge of the existing reflector seat, and can also form a three-dimensional angle-adjustable structure with the spherical fitting edge of the existing reflector seat, so that the debugging is convenient, the grinding amount is small, and the debugging efficiency is favorably improved.
Owner:CHENGDU WEESON TECH

Radio frequency excited gas laser

Radio frequency excited carbon dioxide (CO2) or carbon monoxide (CO) gas lasers include two electrodes with passivated surfaces within a sealed enclosure. A feature in a ceramic plate or ceramic cylinder located between the electrodes defines the gain volume. The surface of the ceramic plate or ceramic cylinder is separated from the passivated surfaces of the electrodes by a small gap to prevent wear. Reducing the compressive forces that secure these components within the enclosure further reduces wear, thereby extending the useful life of the gas laser.
Owner:COHERENT INC

High-power mid-infrared nanosecond pulse hollow-core optical fiber gas laser

The invention discloses a high-power mid-infrared nanosecond pulse hollow-core optical fiber gas laser. Pump light of a pumping source is output to a lens through an optical fiber. The lens comprises a plano-convex lens and a reflecting mirror which are in primary light path connection, and the reflecting mirror and the plano-convex lens focus the pump light; and the gas chamber A is used for loading the hollow-core anti-resonance optical fiber and filling gas. And the focused pump light is coupled into the hollow-core anti-resonance optical fiber through the window. And the gas chamber B is used for loading the hollow-core anti-resonance optical fiber and sealing the gas. And the intermediate infrared band-pass optical filter of the intermediate infrared band-pass optical filter is placed at the tail end of the hollow-core optical fiber and is used for filtering residual pump light. By combining the double advantages of the hollow-core optical fiber and the traditional gas laser, the laser has the characteristics of abundant emission wavelength, high output power, good light beam quality and the like; the method has important application in the fields of military photoelectric countermeasure, laser medical treatment, trace gas detection and the like.
Owner:BEIJING UNIV OF TECH

High-frequency power coupler for a power converter for an industrial process arrangement

RF power coupler (1) for coupling several RF input signals to one RF output signal, for supplying RF power to an industrial process arrangement (1), preferably a plasma process arrangement, gas laser excitation or heating arrangement, wherein the RF power coupler (1) comprises: a. several RF inputs (11, 12, 13, 14, 15), b. an RF output (17) with a specified RF output impedance (88), c. an impedance matching line (20), d. a coupling unit (19) with a predetermined coupling unit output impedance (81), wherein the coupling unit (19) has: i. a common star point (10), ii. one connection each for one of the RF inputs, iii. each a connecting line (41, 42, 43, 44, 45) extending from each of the terminals of the RF inputs to the common star point (10), wherein the connecting lines each have a connecting line reactance (21), and • wherein the impedance matching line (20) is connected to the star point (10) of the coupling unit (19) and extends from the coupling unit (19) to the RF output (17) and has a predetermined length and impedance between these two ends, • where the specified length differs from a λ / 4 length by a difference length (22), • where the specified impedance differs from a calculated impedance by a differential impedance (26), • where the difference length (22) and the difference impedance (26) each depend on the reactance resulting from the connecting line reactances.
Owner:TRUMPF PATENTABTEILUNG

Chamber apparatus, gas laser apparatus, and method for manufacturing electronic device

A chamber device (CH) is provided with: a housing (30) enclosing a laser gas; a pair of discharge electrodes (32a, 32b) for causing light to be generated from the laser gas through application of voltage; windows (31a, 31b) which are arranged on a wall surface of the housing (30) and through which the light passes; a first fan (46) for causing the laser gas to flow between the pair of discharge electrodes (32a, 32b); filters (53a, 53b); and second fans (311, 321) that rotate along with the first fan (46) due to driving force from a drive source (46a) of the first fan (46). The chamber device (CH) is also provided with: fan-side flow paths (313, 323) through which laser gas to be filtered by the filters (53a, 53b) is made to flow by the second fans (311, 321), and which cause some of the laser gas to flow in a direction drawing away from the windows (31a, 31b); and window-side flow paths (315, 325) which communicate with the fan-side flow paths (313, 323) and which cause the laser gas flowing from the fan-side flow paths (313, 323) due to the second fans (311, 321) to flow to the window (31a, 31b) side.
Owner:GIGAPHOTON INC

Method for producing a security element or security document bearing a printed image

ActiveDE102017218804B4Pulsed modePrinting ink
A method for producing a security element (01) or a security document (02) having a printed image (27), in which several image elements (28) of the printed image (27) are formed by applying printing ink to a substrate (26), in which the previously applied printing ink is removed from at least one selected location of a selected image element (28) of the printed image (27) by means of a laser beam (66) emanating from a laser (63), wherein the laser (63) is operated in pulsed mode, characterized in that a gas laser is used as the laser (63), wherein the laser (63) is operated with a pulse duration in the range between 1 ns and 40 ns, wherein a structure with a width in the range between 0.25 µm and 1 µm is formed in the selected image element (28) of the printed image (27) with the laser beam (66).wherein the at least one image element (28) with the at least one area to be freed from printing ink is formed in white printing ink.
Owner:KOENIG & BAUER AG

A dual-modulation absorption spectroscopy gas detection system and method based on optical frequency comb

The application discloses a kind of based on optical frequency comb two-stage modulation absorption spectrum gas detection system and method, facing multi-component gas sensing needs, with optical frequency comb ultrafast pulse as switch modulation, with ultra-narrow linewidth phase shift grating by PZT micro-displacement device selectively implement target waveband narrowband wavelength tuning for specific probe gas, realize the high sensitivity detection of gas concentration, with the characteristics of strong detection specificity, wide broadband spectrum gas coverage, overcome the limitation of traditional TDLAS technology multi-component gas sensing technology, solve the existing optical frequency comb broadband spectrum detection existing system optical path structure complex, long time continuous detection stability requirement is extremely high, broadband spectrum scanning efficiency is low and noisy, easily interfered by low frequency etc., realize high sensitivity, multi-component gas laser spectrum detection.
Owner:ZHEJIANG LAB

A method and device for preferentially selecting the lowest order waveguide mode by coating the electrode to control the electric field

PendingCN122315437ACapacitanceCapacitive effect
This invention relates to the field of waveguide gas laser technology, specifically to a method and device for preferentially controlling the electrode electric field to prioritize the lowest-order waveguide mode through coating, comprising the following steps: S1: determining the beam waist position of the laser resonator; S2: preparing an insulating coating on the surface of the waveguide laser electrode plate corresponding to the beam waist position; S3: performing a gradient transition edge treatment on the insulating coating; S4: constructing an impedance matching compensation network at the electrode feed end in the insulating coating region. This invention, by setting an insulating coating, achieves localized reduction of the electric field intensity in the beam waist region; simultaneously, by constructing an impedance matching compensation network, it accurately compensates for the capacitance effect introduced by the coating, and through dynamic monitoring and adjustment, ensures that the standing wave ratio and discharge voltage fluctuations are within a minimal range, guaranteeing effective coupling of RF power and uniform and stable discharge, thereby improving the overall efficiency and reliability of the device.
Owner:GUANGZHOU NEW CKLASER CO LTD

Optically pumped metastable noble gas laser employing laser induced preionization

The application relates to a kind of optically pumped metastable noble gas lasers using laser-induced preionization, wherein a sample cell is arranged inside a noble gas metastable preparation chamber, a radio frequency electrode and a grounded electrode are arranged inside the noble gas metastable preparation chamber, the sample cell is arranged between the radio frequency electrode and the grounded electrode, a pump light source and a preionization light source are arranged outside the noble gas metastable preparation chamber, and the pump light source and the preionization light source are arranged to emit light perpendicularly and orthogonally to the sample cell, a first mirror is arranged between the pump light source and the noble gas metastable preparation chamber, a second mirror is arranged on the side of the noble gas metastable preparation chamber away from the pump light source, a lens is arranged between the preionization light source and the noble gas metastable preparation chamber, and a heating device is arranged outside the noble gas metastable preparation chamber. The application can quickly generate high-concentration metastable atoms based on laser-induced preionization and electron collision accelerated by an external electric field, and can directly avoid the problem of serious electromagnetic interference caused by the generation of metastable atoms in the traditional discharge mode at the mechanism level.
Owner:DALIAN INSTITUTE OF CHEMICAL PHYSICS CHINESE ACADEMY OF SCIENCES

Heat mitigation in gas-filled hollow-core fiber lasers using gas flow

The disclosure provides a method for heat mitigation in gas-filled hollow-core fibers such as used for gas lasers and a determination of the temperature reduction in the fibers that affects the maximum output power at which gas lasers can operate. A temperature reduction can be achieved by using a differential pressure between the inlet and outlet of the gas-filled hollow-core fiber lasers. The method uses coupled modeling of a gas flow model adapted to compressibility principles rather than the traditional incompressibility principles. The results of the adapted compressible gas flow model are transferred to the heat transfer model and the results of the heat transfer model is transferred iteratively to the compressible gas flow model until there is a predetermined amount of convergence. The convergence approximates a self-consistent stationary solution of operability for the given conditions. The solution can result in manufacturing and operational improvements of hollow-core gas filled lasers.
Owner:BAYLOR UNIVERSITY +2

High-frequency power coupler for a power converter for an industrial process arrangement

High-frequency power coupler (1) for coupling several RF input signals to one RF output signal, for supplying RF power to an industrial process arrangement (1), preferably a plasma process arrangement, gas laser excitation or heating arrangement, wherein the RF power coupler (1) comprises: a. several RF inputs (11, 12, 13, 14, 15), b. an RF output (17), c. a coupling unit (19), d. an impedance matching line (20) which extends from the coupling unit (19) to the RF output (17) and has a predetermined length between these two ends, e. wherein the impedance matching line (20) has a branch line (50) with open-circuit termination, such that this impedance matching line (20) is designed to effect a predetermined impedance matching from the output of the coupling unit (19) to the RF output (7), f. where the given length is less than λ / 6 and greater than λ / 10.
Owner:TRUMPF PATENTABTEILUNG

Laser direct ignition device for releasing torch and control method of laser direct ignition device

PendingCN121025490ACombustion ignitionLaser ignitionFlare
The invention relates to the technical field of industrial waste gas treatment safety equipment, discloses a laser direct ignition device for a release torch and a control method of the laser direct ignition device, and aims to solve the problems of low ignition reliability, dependence on auxiliary fuel and high maintenance cost in the prior art. High-temperature plasma fire cores are directly generated in flare gas flow through high-energy pulse laser, reliable ignition of main flare gas is achieved, and guiding flames and a fuel supply system matched with the guiding flames are thoroughly omitted; comprising a laser generator, a light beam transmission and focusing system, a lens protection and cooling system, a state monitoring unit and an intelligent control system, the laser generator is connected with the intelligent control system through a cable and provides an ignition energy source for the torch head. The light beam transmitting and focusing system is connected with the laser generator, ignition laser generated by the laser generator acts on a torch head to conduct torch gas laser ignition, and the lens protecting and cooling system is used for guaranteeing long-time stable operation of the laser generator and the light beam transmitting and focusing system.
Owner:CHENGDU CHANGLONXIN TECHNOLOGY CO LTD

High-frequency power coupler for a power converter for an industrial process arrangement

High-frequency power coupler (1) for coupling several RF input signals to one RF output signal, for supplying RF power to an industrial process arrangement (100), preferably a plasma process arrangement, gas laser excitation or heating arrangement, wherein the RF power coupler comprises: a. several RF inputs (11, 12, 13, 14, 15), b. an RF output (7), c. a coupling unit (19), d. an impedance matching line (20) extending from the coupling unit (19) to the RF output (7) and having a length designed to effect an impedance matching from the output of the coupling unit to the RF output, e. an upper mounting plate (23), a middle mounting plate (25) and a lower mounting plate (27), wherein the middle mounting plate (25) is arranged between the upper and the lower mounting plate and f. wherein the impedance matching line (20) is arranged between the upper and middle mounting plates and between the lower and middle mounting plates.
Owner:TRUMPF PATENTABTEILUNG

Novel laser device and method

The invention relates to a laser device and a method. The device adopts two small hemispheres, and an insulating material ring 104 is arranged in the middle. The laser injected into the interior can be externally injected or self-generated, 101 and 106 are fixed ports of a high-voltage direct-current electrode, high-temperature plasma can be generated by applying direct-current high voltage, 102 is a quartz window through which incident laser passes, 103 is a metal hemisphere, 104 is an insulating circular ring and is used for avoiding short circuit of the high-voltage direct-current electrode, 105 represents a hemispherical sphere mirror point, and 105 represents a semi-spherical sphere mirror point. The upper and lower hemispheres of the reflection points adopt the same number of reflection points, so that the incident light beam can be ensured to coincide with the front laser beam after being reflected for multiple times, and the cavity is similar to a folded cavity in the laser technology. 107 is used for extracting the rest gas in the device or injecting the required gas, and 108 is an injection port of the mixed gas required by the gas laser. Plasma generated by the upper electrode and the lower electrode provides energy for a gain medium needed by the laser, photons with corresponding wavelengths are generated, the photons are continuously transmitted back and forth in a closed-loop light path formed by continuous reflection of the reflecting surfaces of the spherical laser to be amplified, and finally stable laser output is formed.
Owner:王天昊

Pulse equalization in Q-switched gas lasers

A Q-switched gas laser apparatus with bivariate pulse equalization includes a gas laser, a sensor, and an electronic circuit. A Q-switch that switches the laser resonator between high-loss and low-loss states to generate a pulsed laser beam. The sensor obtains a measurement of the pulsed laser beam indicative of the laser pulse energy. The electronic circuitry operates the Q-switch to (a) repeatedly switch the laser resonator between the high-loss and low-loss states to set a repetition rate of laser pulses of the pulsed laser beam, (b) adjust a loss level of the low-loss state, based on the pulse energy measurement, to achieve a target laser pulse energy, and (c) adjust a duration of the low-loss state to achieve a target laser pulse duration. By adjusting both pulse energy and duration, uniform pulse energy and, if desired, uniform pulse duration are achieved over a wide range of repetition rates.
Owner:COHERENT INC

Passively q-switched pulsed fiber gas laser

In view of the fact that in traditional fiber gas laser, pulse output needs to rely on high-cost pulse pumping source to be realized or to be realized through active Q switching technology, the application provides a kind of passive Q modulation pulse fiber gas laser, comprising pumping source, output coupling mirror, input gas sealed cavity, hollow optical fiber, gain gas, saturable absorber mirror, output gas sealed cavity, passive Q switching is realized in combination with fiber gas laser and saturable absorber mirror, pulse generation is automatically realized by using nonlinear optical characteristics of saturable absorber mirror, and the structure is simple, without external driving, and suitable for miniaturization and integration.
Owner:NAT UNIV OF DEFENSE TECH

A solid-state active laser gyroscope and its measurement method

This application discloses an all-solid-state active laser gyroscope and its measurement method. The technical solution provided by this application uses a millimeter-scale single non-planar ring cavity as the resonant cavity, which has a compact structure and advantages such as structural stability and minimal influence from external environmental factors such as air pressure and temperature. Compared with the disadvantages of existing helium-neon gas laser gyroscopes, which are large in size and difficult to integrate, the laser crystal used in this gyroscope is only on the millimeter scale, which can achieve miniaturized integration and assembly. Moreover, it can avoid the lock-up effect without using complex technical solutions such as mechanical dithering or four-frequency differential, and can achieve measurement of low speed.
Owner:SUN YAT SEN UNIV

Fully mechanized coal mining face gas laser sensor point distribution method

The invention discloses a fully mechanized coal mining face gas laser sensor distribution method, which relates to the technical field of gas laser sensors, and comprises the following implementation steps: constructing a three-dimensional simulation model, constructing the three-dimensional simulation model through FLUENT, carrying out field measurement on site, and carrying out gas laser sensor distribution. Analyzing methane and dust concentration distribution rules under different wind speeds, humidity and spatial positions, analyzing methane and dust concentration distribution rules under different wind speeds, humidity and spatial positions, and further determining dynamic diffusion characteristics of high-risk areas such as an upper corner and the like; discretizing a working face, discretizing the working face into 294 grid units, introducing multiple constraint conditions such as wind speed, humidity and concentration variance (less than or equal to 0.02), and constructing a multi-objective optimization model; and generating a non-dominated solution set, comprehensively evaluating and screening an optimal point distribution scheme through entropy weight TOPSIS, and generating the non-dominated solution set.
Owner:ANHUI UNIV OF SCI & TECH +1

Particle gas laser composite detection decoupling and anti-interference method

The invention discloses a particle gas laser composite detection decoupling and anti-interference method, and relates to the technical field of detection. The particle gas laser composite detection decoupling and anti-interference method comprises the following steps: acquiring a transmission light signal and a scattered light signal through a smog gas composite detector; obtaining the smoke concentration according to the scattered light signal, and constructing a target feature vector based on the transmission light signal and the scattered light signal; and obtaining the final concentration and smoke category of the target gas based on the target feature vector by using a pre-trained multi-task learning model. Therefore, accurate detection of the smoke concentration, the smoke category and the target gas concentration can be realized.
Owner:TSINGHUA UNIVERSITY

Chamber apparatus for laser, gas laser apparatus, and electronic device manufacturing method

A chamber apparatus for a laser includes a chamber, first and second discharge electrodes, a fan, and a return member. The chamber includes a chamber body and an insulating plate. The chamber has an internal space filled with a laser gas. The first and second discharge electrodes are disposed in the internal space. The fan causes the laser gas to flow between the first and second discharge electrodes. The return member is provided upstream of the second discharge electrode in a flow of the laser gas. The return member includes a ladder section and a plate-shaped section. The ladder section includes multiple linear portions. The plate-shaped section is connected to the multiple linear portions. The plate-shaped section is inclined such that the further the return member is away from the top wall, the more downstream the return member is in the flow of the laser gas.
Owner:GIGAPHOTON INC

Laser gas detection device and gas concentration detection method

The application provides a laser gas detection device and a gas concentration detection method. The laser gas detection device comprises a laser, a to-be-detected gas chamber and a photoelectric detector. The to-be-detected gas chamber is an internal optical mechanical structure space of the laser gas detection device. The photoelectric detector comprises a detector main body and a reference gas chamber. The to-be-detected gas chamber is used for loading a to-be-detected gas. The laser is used for emitting laser and shooting the laser into the to-be-detected gas chamber. The reference gas chamber is used for transmitting the laser shot from the to-be-detected gas chamber. The detector main body is used for detecting the laser passing through the to-be-detected gas chamber and the reference gas chamber, so as to obtain an electric signal of the to-be-detected gas. The application can reduce the lower limit of gas concentration detection of the laser gas detection device and improve the performance of the laser gas detection device.
Owner:SHENZHEN NUOAN ENVIRONMENTAL & SAFETY INC

An all-optically pumped gas laser

ActiveCN114400490BResonant cavityFluorescence
The application discloses a kind of all-optical pumping gas laser, including harmonic cavity, extreme ultraviolet laser system, auxiliary pumping semiconductor laser system and main pumping semiconductor laser system;Extreme ultraviolet laser system generates extreme ultraviolet laser, realizes extreme ultraviolet pumping process and generates laser metastable gas particles transition energy state, and auxiliary pumping process and fluorescence transition process are combined with the auxiliary pumping process of auxiliary pumping semiconductor laser system, and generate metastable gas particles, as the effective working material of laser;The main pumping semiconductor laser generated by main pumping semiconductor laser system is transmitted and injected into the resonant cavity, realizes the particle number inversion between laser upper and lower energy levels, and obtains output laser after oscillation amplification.The application has the characteristics of high conversion efficiency, compact structure, small size, high pumping efficiency, etc., which can effectively improve the conversion efficiency of the existing gas laser by electric excitation to generate effective gas working medium.
Owner:HUAZHONG UNIV OF SCI & TECH

Automatic gas supply control device for gas laser

PendingCN122370831ASolenoid valveGas cylinder
This application discloses an automatic gas replenishment control device for a gas laser, belonging to the field of laser technology. The gas replenishment system includes a first solenoid valve and a second solenoid valve, respectively located between a second gas cylinder and the cavity, and between a first gas cylinder and the cavity; the pressure maintenance system includes a third solenoid valve and a vacuum pump; the control and monitoring system includes a laser control board, which is electrically connected to a pressure sensor, each solenoid valve, and the vacuum pump. The laser control board is configured to acquire the cumulative number of discharge pulses and calculate the theoretical gas replenishment amount; during laser downtime, control the gas replenishment system to activate the corresponding solenoid valve to replenish gas according to the theoretical replenishment amount, and after replenishment, determine the replenishment status based on the deviation between the actual gas pressure increment and the theoretical replenishment amount; and control the pressure maintenance system to pump gas to a second threshold based on the total gas pressure, maintaining the total gas pressure within a preset working pressure range. This application achieves precise automatic gas replenishment, with advantages of high replenishment accuracy and high reliability.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI