High-repetition rate all-solid-state high-voltage pulse generator

A technology of high-voltage pulse and repetition rate, which is applied in the direction of electric pulse generator circuit, excitation method/device, etc., can solve the problems of short life of thyratron, easy misconduct, and need for warm-up time, etc. Effect of aging, avoiding warm-up wait time

Inactive Publication Date: 2012-05-09
ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The purpose of the present invention is to provide a high repetition rate all-solid-state high-voltage pulse generator to solve the problem that excimer lasers in the prior art use thyratrons to generate dischar...

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  • High-repetition rate all-solid-state high-voltage pulse generator

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Embodiment Construction

[0011] Such as figure 1 As shown, the present invention includes a DC power supply, a resonant charging circuit, an energy storage capacitor, a step-up pulse transformer, and a magnetic pulse compression switch circuit. The DC power supply and the filter capacitor are connected in parallel to the resonant charging circuit. Connected to both ends of the filter capacitor, both ends of the primary coil of the step-up pulse transformer are connected to both ends of the energy storage capacitor, and the secondary coil of the step-up pulse transformer is connected to the magnetic pulse compression switch circuit. The magnetic pulse compression switch circuit includes three parallel-connected Capacitors C2, C3, Cd, the high potential ends of the capacitors C2, C3, Cd are grounded, the magnetic pulse compression switch MS1 is connected between the low potential ends of the capacitor C2 and the capacitor C3, and the low potential end of the capacitor C3 and the capacitor Cd is connected...

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Abstract

The invention discloses a high-repetition rate all-solid-state high-voltage pulse generator which comprises a direct current power supply, a resonance charging circuit, an energy storage capacitor, a step-up pulse transformer and a magnetic pulse compression switch circuit, wherein the direct current power supply is connected into the resonance charging circuit after being connected with a filter capacitor in parallel; the resonance charging circuit then is connected with the two ends of the filter capacitor after being connected with the energy storage capacitor; the two ends of a primary coil of the step-up pulse transformer are connected with the two ends of the energy storage capacitor; and a secondary coil of the step-up pulse transformer is connected into the magnetic pulse compression switch circuit. The invention has the beneficial effects that a high-pressure rapid pulse is generated by adopting a method of combining a power semiconductor switch with a magnetic pulse compression switch to replace a thyratron, is used for discharging and exciting a gas laser and can overcome the defects caused by the thyratron; and the running demands of an excimer laser at high repetition rate and long service life are satisfied.

Description

technical field [0001] The invention relates to a high-voltage pulse generator, in particular to a high repetition rate all-solid-state high-voltage pulse generator. Background technique [0002] Discharge-excited excimer lasers are widely used in industrial, medical and scientific research fields. The working characteristics of discharge-excited excimer lasers determine that the pumping system must have a higher power density and a shorter rise time of the excitation pulse. The peak power density of excimer laser pumping such as KrF and ArF is generally on the order of MW / cm3, and the rise time of the excitation pulse is generally less than 150ns. Excimer devices generally use thyristors to release the energy in high-voltage energy storage capacitors to generate rapid discharge excitation. The advantage of the thyratron-based high-voltage pulse generator is that it has a compact structure and a simple main discharge circuit, but its key component, the hydrogen thy...

Claims

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Application Information

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IPC IPC(8): H01S3/09H03K3/02
Inventor 游利兵余吟山王庆胜梁勖方晓东
Owner ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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