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58 results about "Laser excimer" patented technology

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining.

Intelligent topographic corneal procedure advisor

ActiveUS12544264B2Laser surgeryImage analysisCorneal surgeryReoperative surgery
Generation of treatment recommendations for topographic-based excimer laser surgical procedures is described that includes generating accurate cylinder compensation and spherical compensation values that are adjusted to compensate for unique characteristics of advanced topographic-based excimer laser surgical systems. Generating treatment recommendations generally includes determining a topographic vector from a topographic corneal map of the eye, determining a posterior astigmatism vector and an anterior astigmatism vector for the eye, and generating an interior astigmatism vector using the topographic vector, the posterior astigmatism vector, the anterior astigmatism vector, and a manifest astigmatism vector. In various embodiments, the cylinder compensation is generated using the interior astigmatism vector and the posterior astigmatism vector, and the spherical compensation is generated using an initial spherical compensation modified by a topographic addback modifier and a cylinder addback modifier.
Owner:ALCON INC

Excimer laser energy detection and feedback regulation system

The invention relates to the technical field of laser control, and discloses an excimer laser energy detection and feedback regulation system, which comprises an energy acquisition module configured to be used for receiving part of light beams of an excimer laser and converting optical signals into analog current signals. For a strong electromagnetic interference (EMI) environment generated by high-voltage discharge of an excimer laser, nanosecond transient pulses are locked as quasi-direct current signals through a peak holding circuit, and the bandwidth requirement is reduced; the optical fiber transmission module is used for realizing electrical full isolation and cutting off common-mode interference; a truncation mean filtering algorithm is introduced at a source end, and discharge peak noise is accurately eliminated. Compared with the traditional technical scheme of directly collecting only depending on a V / F chip and having no MCU digital processing, the measurement error under the severe working condition is reduced to be within + / -3% from + / -8%, and the detection precision and the anti-interference capability are remarkably improved.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Maintenance-friendly valve conduit for cooling water of excimer laser

The utility model relates to excimer laser cooling system technical field especially convenient maintenance's excimer laser cooling water valve pipeline, including cooling water valve main part, water inlet, water outlet, communicating vessel and pipeline body, water inlet is connected in the upper end of cooling water valve main part through, water outlet is connected in the side of cooling water valve main part through, water inlet and water outlet even a group of communicating vessel are connected, and one end of communicating vessel is provided with three groups of branch interfaces, and the connection between pipeline body and communicating vessel is carried out through branch interface, and both ends of pipeline body are connected with a group of communicating vessel, the utility model discloses the both ends of pipeline body are provided with communicating vessel and can connect between the pipeline body and other equipment in the cooling system conveniently, and the one end of communicating vessel sets up three groups of branch interfaces and can connect three pipeline bodies, forms the water pipe passage of redundancy, when the failure of certain pipeline body, need not the shutdown to can maintain the failure pipeline body.
Owner:JIANGSU FENGYUE TECHNOLOGY CO LTD

Pneumatic control system for off-line cleaning and pressure maintaining test of excimer laser discharge cavity

A pneumatic control system for off-line cleaning and pressure maintaining testing of a discharge cavity of an excimer laser relates to the technical field of lasers and comprises a process gas circuit module, an exhaust module, a fluorine gas filtering module and a vacuum pump module which are connected with the discharge cavity through a gas circuit assembly provided with a plurality of controllable valves, and further comprises a pressure sensor and a control module. The control module is configured to execute an offline cleaning process and a pressure maintaining test process; the off-line cleaning process comprises the step of controlling a controllable valve and a vacuum pump module according to the air pressure information, so that the discharge cavity is sequentially subjected to at least one cycle operation of process gas introduction and vacuumizing; the pressure maintaining test process comprises the steps that after the offline cleaning process is completed, a controllable valve and a vacuum pump module are controlled according to the air pressure information, process gas is introduced into the discharge cavity to reach preset pressure, then the controllable valve is closed, the discharge cavity is kept in a sealed state, and the air pressure change of the discharge cavity in the sealed state is monitored through a pressure sensor; and integration of off-line cleaning and pressure maintaining testing of the discharge cavity is realized.
Owner:NEW YIDONG (SHANGHAI) TECH CO LTD

Gas treatment device after gas pressure protection and safety pressure relief of excimer laser

The utility model discloses a gas treatment device after gas pressure protection and safety pressure relief of an excimer laser, which comprises a rupture disk device (1) with one end capable of being communicated with a resonant cavity of the excimer laser. The other end of the rupture disk device (1) is provided with a one-way safety valve (2) which can be jacked open by working gas leaked from the resonant cavity when a diaphragm (14) of the rupture disk device (1) is ruptured, and the one-way safety valve (2) is connected with an absorption device (3) which can purify the leaked working gas; and the absorption device (3) is provided with an exhaust port (4) capable of exhausting purified gas. According to the utility model, the structure is simple, external air can be prevented from flowing backwards into the excimer laser, the internal gas is kept pure, the discharged gas is absorbed and purified, so that the discharged gas can reach the emission standard, and the harm to workers and the environment is eliminated.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Excimer laser with improved beam uniformity and stability

An excimer laser (100) includes a chamber (110) for containing a gas mixture between a back end (120) and a front end (130) of a linear laser resonator (102), a convex end mirror (122) defining the back end (120), and a plurality of outcoupling mirrors collectively defining the front end (130). The outcoupling mirrors are distributed along an optical axis (190) of the resonator (102) and have respective normal vectors (nR and nF) directed toward the back end (120). The normal vectors (nR and nF) comprise four normal vectors which are not parallel to each other, wherein no three of the four normal vectors which are not parallel to each other are coplanar. These different orientations of the outcoupling mirror cooperate with the convex end mirror (122) to blur fine structures in the output beam (182) of the resonator (102).
Owner:COHERENT LASERSYST

Sulfonium salt monomer, polymer, chemically amplified resist composition, and pattern forming process

A sulfonium salt monomer having the formula (A). The sulfonium salt monomer can be used for a chemically amplified resist composition having a high solvent solubility, a high sensitivity, and a high contrast, and being improved in lithography properties such as EL, LWR, CDU, and DOF, particularly when processed by photolithography using high-energy radiation such as KrF excimer laser, ArF excimer laser, an electron beam (EB), or EUV.
Owner:SHIN ETSU CHEMICAL CO LTD

Laser crystal bonding method based on excimer laser surface activation

The invention discloses a laser crystal bonding method based on excimer laser surface activation, and belongs to the technical field of laser crystal surface modification and bonding. The activation method comprises the following steps: carrying out precise polishing and cleaning treatment on the surface of a laser crystal to be bonded; and carrying out irradiation activation treatment on the treated crystal surface by adopting excimer laser. The bonding method comprises the following steps of: activating the surfaces of the crystals by adopting the activating method, and laminating the surfaces of the two crystals subjected to activating treatment at room temperature to form an initial optical cement interface; and carrying out heat treatment annealing on the crystal assembly subjected to optical cement. High-energy ultraviolet photons of short-wavelength excimer laser are utilized to initiate surface chemical bond breakage, high-activity sites such as dangling bonds are formed, and the surface energy and the surface activity of the crystal are remarkably improved. The method does not need to introduce a chemical reagent, is small in heat influence, remarkably improves the bonding strength after activation, and is suitable for large-size crystal treatment.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

An excimer laser energy absorbing device and a shutter with a reflecting device

The utility model discloses a excimer laser energy absorption device and optical shutter with reflecting device, and the outer sleeve one end opening constitutes the laser entrance window for laser incidence, and the inner chamber cavity wall of outer sleeve is conical platform and constitutes the first reflection surface of can reflect laser, and the outer sleeve is equipped with the reflection cone of conical body, and the second reflection surface is constituted to the reflection cone outer peripheral surface, and the vertex of reflection cone points to laser entrance window. The utility model discloses still a kind of optical shutter using the absorption device, and laser entrance, first laser exit and second laser exit are equipped on the shell, and laser entrance is communicated with second laser exit, and the shell is rotatably connected with mirror assembly, when mirror assembly is in second position, laser is emitted from first laser exit, when mirror assembly is in first position, laser is emitted from second laser exit to excimer laser energy absorption device after being reflected by mirror assembly. The utility model absorption device absorption is good, and optical shutter can realize higher industrial production efficiency.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Adjustable cathode for life extension in excimer laser discharge chambers

PCT designated stageWO2026133148A1Laser detailsLight beamEngineering
A light source includes a chamber, a first electrode assembly, and a second electrode. The first electrode assembly includes a first electrode, a rod, and a tip portion. The rod extends longitudinally through a portion of the first electrode. The tip portion is coupled to the rod and includes a first discharge surface. The second electrode has a second discharge surface spaced apart from the first discharge surface by a discharge gap. The rod adjusts a position of the tip portion to maintain the discharge gap. The first and second electrodes excite a gas discharge medium of the chamber to generate a light beam. Advantageously, the system maintains the discharge gap over time, maintains flow between the discharge gap, adjusts a position of the first discharge surface based on one or more parameters of the light source, reduces errors in the light beam, and increases lifetime of the light source.
Owner:CYMER INC

Excimer laser therapy instrument (308 nm)

ActiveCN309878905SLight therapyOphthalmology
1. The name of the design product: excimer light therapy instrument (308nm). 2. The use of the design product: for the treatment of vitiligo. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1.
Owner:SICHUAN HUACHUAN XINGGUANG MEDICAL TECH CO LTD

Method and apparatus for analyzing damage cause of excimer laser window element

The application discloses a kind of excimer laser window piece element damage reason analysis methods, by obtaining the damage information corresponding feature information of the window piece element to be analyzed determines the damage category of the window piece element to be analyzed, and determines the actual damage form of the window piece element to be analyzed, the damage category of the window piece element to be analyzed is previously using same or similar operation means, so it is in non-damage area, and the damage corresponding to the formation damage category is reproduced, the reproduced damage is compared with damage information, the information of damage is consistent with the damage information of the window piece element to be analyzed, then determine the damage reason of the window piece element to be analyzed is the same or similar operation means of the reason of forming damage category.The application determines the damage category of the window piece element to be analyzed, and reproduces damage in combination with the same or similar operation means of forming damage category, so as to accurately determine the cause of the damage category, and improve the stability of excimer laser operation.
Owner:RAINBOW SOURCE LASER RSLASER

A high-power excimer laser light-out shutter protection device

The utility model discloses a kind of high-power excimer laser light exit optical shutter protection devices, laser entrance and first laser exit and second laser exit are equipped on shell, reflector assembly is movably connected in shell, the position that reflector assembly can stay includes first position and second position, when reflector assembly is in second position, reflector assembly deviates first laser exit to make laser emit from first laser exit, when reflector assembly is in first position, reflector assembly deviates second laser exit to make laser emit from second laser exit, shell is also equipped with the driving assembly that can drive reflector assembly switching between first position and second position. The utility model can realize laser system seamless switching mode of operation, always keep high-power output state, reduce the time waste caused by the need to reheat due to shutdown, to improve production efficiency.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Device for automatically purifying and passivating cavity of excimer laser

The invention relates to the technical field of laser manufacturing and maintenance, and discloses a device for automatically purifying and passivating a cavity of an excimer laser, and the device comprises a gas supply module which is configured to provide a purifying gas and a passivating gas, and the passivating gas comprises fluorine gas; the cavity connecting port is used for connecting a laser cavity to be processed; a vacuum pump; and an exhaust treatment module fluidly connected between the cavity connection port and the vacuum pump. A dual-mode structure of a first exhaust branch and a second exhaust branch which are connected in parallel is adopted, in the non-passivation emission stage, rapid exhaust is carried out through a large-conductance straight-through branch, a halogen filter with high flow resistance is bypassed, and the vacuumizing time is shortened by about 60% for a standard 100L laser cavity. Meanwhile, a large amount of inert gas is prevented from scouring the halogen filter, physical pulverization and ineffective consumption of the adsorbent are effectively prevented, and the service life of the halogen filter is prolonged.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Excimer laser (LL20)

ActiveCN309909803SWaferingThin membrane
1. Name of the designed product: excimer laser (LL20). 2. Use of the designed product: used in film processing, wafer processing, pulse laser deposition, etc. 3. Design points of the designed product: combination of shape and pattern. 4. Picture or photo best indicating the design points: perspective view 1.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Dual serial port time-sharing control excimer laser communication circuit

The application discloses a double-serial-port time-sharing control excimer laser communication circuit, which comprises at least one communication signal mutual conversion circuit for mutual conversion of excimer laser communication signals and touch screen communication signals and mutual conversion of excimer laser communication signals and intelligent device communication signals, and is connected with a touch screen interface, an intelligent device interface, a laser signal sending circuit and a laser signal receiving circuit. The isolation of switch diode D1 and switch diode D2 in the laser signal receiving circuit makes the levels of two data receiving pins not affect each other, the triode T2 is turned on, the optical fiber receiving head F2 emits light to receive data, when one of the two is at a low level, the RXD signal output by the communication signal mutual conversion circuit is pulled low, so that the triode T2 is cut off and the optical fiber receiving head F2 does not receive data, thereby realizing the time-sharing signal transmission function between the touch screen, the intelligent device computer end and the laser.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Improved hole drape for excimer laser surgery

This utility model discloses an improved surgical drape for excimer laser surgery, relating to the field of medical supplies technology. It includes a drape body with a Velcro patch fixedly installed on its adhesive surface. A Velcro hook surface is attached to the Velcro patch, and an adhesive layer is fixedly installed on the Velcro hook surface. A sterile absorbent pad is provided on the drape body, and an auxiliary absorbent pad is provided on the sterile absorbent pad. An absorbent pad laying mechanism is provided on both the sterile and auxiliary absorbent pads. A buckle is fixedly installed on the sterile absorbent pad and engages with a retainer. In this utility model, through the design of the sterile absorbent pad, retainer, buckle, auxiliary absorbent pad, and absorbent pad laying mechanism, the waterproof layer can absorb more blood, improving the effectiveness of use and avoiding cross-contamination of the drape body. A micro-bar engages with the insert block, allowing the auxiliary absorbent pad to be laid on the sterile absorbent pad to meet subsequent blood-contaminated use requirements.
Owner:ENSHI TUJIA & MIAO AUTONOMOUS PREFECTURE CENT HOSPITAL

Sulfonium salt, chemically amplified resist composition and pattern forming process

The sulfonium salt consists of an aromatic sulfonate anion having the following formula (1A) and a sulfonium cation having the following formula (1B). The sulfonium salt can be used in a chemically amplified resist composition. The resist composition has a high solvent solubility, high sensitivity and high contrast, and forming a resist film with improved lithography properties such as LWR, CDU, MEF, EL, and DOF when processed by photolithography using high-energy radiation such as a KrF or ArF excimer laser beam, an electron beam (EB) or EUV.
Owner:SHIN ETSU CHEMICAL CO LTD

Sulfonium salt, chemically amplified positive resist composition and resist pattern forming process

The sulfonium salt monomer has the formula (A). The chemically amplified positive resist composition can be processed by photolithography using, in particular, high-energy radiation such as KrF excimer laser, ArF excimer laser, EB or EUV, has good solvent solubility, and is excellent in lithographic performance such as resolution, LER and a pattern profile.
Owner:SHIN ETSU CHEMICAL CO LTD

Preparation method of anti-dehumidification fluorine-containing polymer filter membrane

The invention provides a preparation method of an anti-dehumidification fluorine-containing polymer filter membrane aiming at the problem that the existing fluorine-containing polymer filter membrane is easy to dehumidify, and belongs to the technical field of membrane separation. The method comprises the following steps: (1) directly infiltrating a fluorine-containing polymer filter membrane by using a monomer (such as perfluoro (4-methyl-3, 6-dioxa-7-octene) sulfonyl fluoride or dodecafluoro-6-heptylene-1-sulfonyl fluoride) of which one end of a molecular chain contains a reactive perfluoroalkyl group and the other end contains a hydrophilic group without alcohol pre-wetting; (2) irradiating the infiltrated filter membrane with ultraviolet light (such as a mercury lamp, excimer laser, an LED or a microwave electrodeless lamp); (3) soaking the treated filter membrane in a perfluoro solvent and an alcohol solvent in sequence; and (4) sequentially soaking the treated membrane in an alkaline liquid, an acidic liquid and deionized water for 1-60 minutes respectively. The prepared filter membrane has excellent anti-dehumidification performance and can be widely applied to the fields of gas separation, liquid filtration and the like.
Owner:WANHUA CHEM GRP CO LTD

Contrast agent for enhancing the effect of elca volume reduction

ActiveCN120939253BX-ray constrast preparationsEster active ingredientsIodixanolIopromide
The application discloses a contrast agent for enhancing the effect of ELCA volume reduction, and belongs to the field of medical reagents, and particularly relates to a contrast agent which comprises a heparin-based compound and a contrast agent, wherein the heparin-based compound comprises heparin, and the content of the heparin-based compound in the contrast agent is 2-64 mu g / mL. The contrast agent comprises at least one of iopromide and iodixanol. The heparin-based compound further comprises a heparin derivative, and the heparin derivative is prepared by subjecting heparin to oxidation and then to reaction with a derivatizing agent. The derivatizing agent comprises L-alanyl-L-proline methyl ester hydrochloride. The application is a contrast agent which can be combined with ELCA, enhances the effect of ELCA volume reduction, has a good effect on blood vessel plaque erosion, and has high shock wave pressure when combined with excimer laser.
Owner:THE SIXTH MEDICAL CENT OF THE CHINESE PEOPLES LIBERATION ARMY GENERAL HOSPITAL

Authentication systems and methods for an excimer laser system

The invention provides an excimer laser system including a means for authenticating laser probes to be used with the excimer laser system via radio-frequency identification techniques.
Owner:ELIOS VISION INC

Magnetic suspension wind wheel structure

The invention relates to the technical field of cross flow fans, and discloses a magnetic suspension wind wheel structure which comprises an outer shell, the middle of an inner cavity of the outer shell is movably sleeved with a wind wheel assembly, the wind wheel assembly comprises a rotary supporting piece fixedly installed on the right side of the inner cavity of the outer shell, and the rotary supporting piece comprises a support fixedly installed on the cavity wall of the right side of the outer shell; an outer shaft sleeve is fixedly installed in the support, a magnetic pole is arranged on the inner wall of the outer shaft sleeve, an inner rotor is movably sleeved with the outer shaft sleeve, and a magnetic ring opposite to the magnetic pole of the inner wall of the outer shaft sleeve is arranged on the outer surface of the inner rotor. According to the magnetic suspension wind wheel structure, for the arrangement of a rotary supporting piece and a structure on the rotary supporting piece, the right end of a wind wheel assembly can be supported in a suspension mode through magnetism so as to achieve the purpose of rotary supporting of the wind wheel assembly; the problem that an existing rotary supporting assembly is prone to being corroded by working gas in the excimer laser to generate corresponding reactants to pollute a cavity can be effectively solved.
Owner:HEFEI YIKESAI LASER TECH CO LTD

A method for directly preparing a resistance-controllable graphene film on a resin film

The application discloses a method for directly preparing a graphene film with controllable resistance on a resin film, and the specific preparation process steps are as follows: step one, mixing graphene powder, deionized water and an additive to prepare a pretreatment dispersion liquid; step two, adopting a gravure transfer method to coat the pretreatment dispersion liquid prepared in the step one to the surface of a preheated resin film, and forming a graphene coating after drying; and step three, adopting an excimer laser to perform specific area high-temperature composite processing operation on the graphene coating prepared in the step two, and obtaining a resin and graphene composite layer film. The process realizes effective improvement of the preparation efficiency and the yield of the graphene flexible conductive film under the condition of lower energy consumption, and the resistance value can be adjusted through the change of the laser condition.
Owner:SHANGHAI LIWUSHENG NANO TECH CO LTD

Onium salt, chemically amplified resist composition, and pattern forming process

The onium salt has the formula (1). The chemically amplified resist composition comprising the onium salt as a photoacid generator. The chemically amplified resist composition has a high solvent solubility, a high sensitivity, and a high contrast, and being improved in lithography properties such as LWR, CDU, MEF, EL, and DOF, particularly when processed by photolithography using high-energy radiation such as KrF or ArF excimer laser radiation, an electron beam (EB) or EUV.
Owner:SHIN ETSU CHEMICAL CO LTD

Corona pre-ionization high-power excimer laser

The utility model discloses a corona preionization high-power excimer laser, which is characterized in that a laser discharge cavity is arranged in a shell, a main discharge electrode is arranged in the laser discharge cavity, and the main discharge electrode comprises a main discharge cathode and a main discharge anode; corona rods capable of conducting discharge preionization on working gas are arranged in the laser discharge cavity and located on one side of the main discharge cathode at intervals, each corona rod comprises a preionization electrode and a ceramic insulator, gaps are formed between the peripheral face of each ceramic insulator and the outer side wall of the main discharge cathode and the inner side wall of the insulation cavity, and the preionization electrodes and the main discharge anode are grounded. The main discharge cathode is connected with a negative high-voltage pulse, and when the excimer laser works, the driving voltage pulse of the corona rod is the same as the driving voltage pulse of the main discharge electrode. Corona discharge preionization is carried out through the corona rod, the main discharge electrode cannot be corroded, discharge dust cannot be generated, and it is ensured that the main discharge electrode carries out uniform glow discharge to generate high-quality laser.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Phase shift mask blank and phase shift mask

The present invention provides a phase shift mask blank and a phase shift mask. The phase shift mask blank includes a substrate and a phase shift film thereon, the phase shift film is composed of a material containing silicon and nitrogen and not containing a transition metal, the phase shift film includes at least one composition gradient layer having a composition continuously varying in a thickness direction, and a refractive index n and an extinction coefficient k for an exposure light, which is a KrF excimer laser, vary in the thickness direction, a difference between a maximum refractive index n(H) and a minimum refractive index n(L) of the composition gradient layer is 0.40 or less, and a difference between a maximum extinction coefficient k(H) and a minimum extinction coefficient k(L) is 1.5 or less.
Owner:SHIN ETSU CHEMICAL CO LTD

Systems and methods for a combined excimer laser and phacoemulsification unit

PendingUS20260108391A1Laser surgerySurgical furnitureMedicineExcimer laser source
An apparatus for treating an eye includes a housing, an excimer laser source within the housing, an ultrasound generator within the housing, an irrigation source within the housing, and an aspiration source within the housing.
Owner:ELIOS VISION INC

Hybrid electromagnetic wave / electron source pumping of high-power gas lasers

PCT designated stageWO2026142731A2Electron sourceOptical pumping
A laser pumping method includes pumping a gas laser medium in a laser chamber by heating electrons in the gas laser medium with electromagnetic radiation from an electromagnetic source, resulting in populating the upper laser level. Electron density in a plasma formed in the gas laser medium is generated and controlled with an electron source that is internal or external to the laser chamber. A high-power excimer laser includes a laser chamber containing a high-power gas laser medium, a pulsed electromagnetic source configured to heat free electrons in the laser medium and thereby generate laser emissions from the gas laser medium, and a pulsed electron source configured to generate free electrons and control the electron density in the gas laser plasma medium.
Owner:THE BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS