151 results about "Laser excimer" patented technology

The invention discloses a preparation method of a bionic cornea stroma lens for refractive correction, which comprises the following steps: solution preparation: dissolving type I collagen in an acetic acid solution, adding a film aid, fully stirring, and centrifugally defoaming to obtain a type I collagen composite solution; the I-type collagen composite solution is poured into an assembling groove, the curvature radius of titanium metal is set to be 6.8-8.0 mm, the titanium metal serves as a working electrode material, platinum metal serves as a counter electrode material, current parameters are set according to the needed thickness of the lens blank, the density is 3.50-6.50 mA / cm < 2 >, and the thickness of the lens blank is set to be 3.50-6.50 mA / cm < 2 >; a high-transparency cornea embryo material which is uniform in curvature in all directions and similar to human cornea fiber structure arrangement is formed after electrochemical assembly and cross-linking curing, accurate cutting machining is carried out through excimer laser, a concave / convex matrix lens with the needed correction degree is obtained, the correction precision is high after cornea interlayer implantation, and the correction precision is high. And meanwhile, the compound has excellent performance in the aspects of in-vivo stability and biological safety.

The invention discloses a high-power corona preionization excimer laser, which is characterized in that a laser discharge cavity is arranged in a shell, a main discharge electrode is arranged in the laser discharge cavity, and the main discharge electrode comprises a main discharge cathode and a main discharge anode; corona rods capable of conducting discharge preionization on working gas are arranged in the laser discharge cavity and located on one side of the main discharge cathode at intervals, each corona rod comprises a preionization electrode and a ceramic insulator, gaps are formed between the peripheral face of each ceramic insulator and the outer side wall of the main discharge cathode and the inner side wall of the insulation cavity, and the preionization electrodes and the main discharge anode are grounded. The main discharge cathode is connected with a negative high-voltage pulse, and when the excimer laser works, the driving voltage pulse of the corona rod is the same as the driving voltage pulse of the main discharge electrode. Corona discharge preionization is carried out through the corona rod, the main discharge electrode cannot be corroded, discharge dust cannot be generated, and it is ensured that the main discharge electrode carries out uniform glow discharge to generate high-quality laser.

The invention relates to an optical waveguide coupler based on a hard substrate and a preparation method thereof, and belongs to the technical field of couplers. The method comprises the following steps: preparing a lower rectangular waveguide core layer on a hard substrate through an ultraviolet lithography technology; preparing a lower reflecting micro-mirror through an excimer laser technology, and plating a reflecting film on the surface of the lower reflecting micro-mirror; then preparing an upper rectangular waveguide core layer through an ultraviolet lithography technology on the basis; preparing an upper reflecting micro-mirror at a corresponding vertical position of the lower reflecting micro-mirror through an excimer laser technology, and plating a reflecting film on the surface of the upper reflecting micro-mirror; the optical waveguide coupler prepared by the method realizes high-density interlayer interconnection, and is relatively high in application flexibility and high in interlayer coupling efficiency.

The invention relates to the technical field of ophthalmology medical treatment, in particular to an excimer laser cutting parameter optimization method for presbyopia correction, which comprises the following steps: (1) collecting eye data of a patient: collecting eye structure data and vision information of the patient; (2) establishing a personalized eye model: constructing a personalized eye three-dimensional model of the patient based on the collected eye data; (3) determining an optimization objective function: comprehensively considering the correction effects of far vision, near vision and middle vision and the risk of postoperative complications, and determining the optimization objective function; and (4) constructing a cutting parameter constraint condition: setting the cutting parameter constraint condition according to the eye condition of the patient. The method aims at solving the problems that in the prior art, an excimer laser cutting parameter optimization method for presbyopia correction is insufficient in the aspects of individuation, accuracy, comprehensiveness, safety and the like.

The invention relates to the technical field of microporous structure processing, and discloses an excimer laser and LIGA process combined microporous structure processing method and system, and the method comprises the following steps: S1, substrate pretreatment, S2, excimer laser photoetching, S3, development and electroforming mold preparation, and S4, injection molding and demolding. The system comprises the following modules: a module M1, an excimer laser module, a module M2, an LIGA process module, a module M3, an online detection module, a module M4 and a multi-material compatible module. According to the invention, the plasma density is inhibited to be below 1016cm <-3 > through a helium environment, the surface temperature gradient of the polymer substrate is synchronously reduced in combination with low-temperature cooling airflow, the width of a heat affected zone is compressed to 1.8 microns from 5 microns in a traditional process, and more than 80% of laser thermal stress is absorbed through a silicon dioxide buffer layer through a synergistic thermal response mechanism of a multi-layer photoresist structure. And interface stripping and microcracks are avoided.

A method of lamellar corneal graft implantation is disclosed herein. The method includes the steps of: (i) forming one or more intrastromal incisions in a cornea of an eye of a patient; (ii) removing a cut portion of the cornea defined by the one or more intrastromal incisions from the eye of the patient; (iii) applying laser energy to a lamellar corneal graft using an excimer laser so as to modify the refractive power of the lamellar corneal graft, the lamellar corneal graft being in the form of a autologous corneal graft or a homologous corneal graft; and (iv) implanting the lamellar corneal graft into the eye of the patient in a location previously occupied by the cut portion of the cornea so as to correct the refractive power of the eye of the patient.

The invention belongs to the technical field of crystals, and particularly relates to a calcium fluoride crystal doped with metal ions, a preparation method of the calcium fluoride crystal and application of the calcium fluoride crystal in optical elements. The crystal is a calcium fluoride crystal doped with magnesium ions and barium ions, and in the preparation method of the crystal, the magnesium ions and the barium ions for doping are pretreated and coated with a calcium fluoride precursor, and the calcium fluoride crystal which is uniform in doping and excellent in performance is prepared by combining a traditional Bridgman-Stockbarger method with a gradient doping process. The crystal is applied to an excimer laser lighting system, and after an optical element manufactured by the crystal is exposed to gamma radiation larger than 2.8 Mrads, the 515 / 380 nm transmittance loss ratio of the optical element is lower than 0.4.

This invention relates to the production of integrated optical waveguides on the surface of planar polymer substrates (polymer chips) using UV laser lithography. The resulting optical waveguides are multilayer optical waveguides that, when light is guided in the lower part of the optical waveguide, form radiation modes. As a result, light energy is radiated from the underside of the optical waveguide into the volume of the polymer substrate, so that it is lost to the actual light guide.Since the associated attenuation losses are usually undesirable, two different partial solutions are presented, which can then be combined to suppress the unwanted radiation modes as completely as possible. A parameter window for the UV laser lithographic production of polymeric, integrated-optical (planar) optical waveguides is presented, which is located shortly before the UV photon-induced carbonization (discoloration) of the irradiated zone of the optical waveguides to be produced. Due to the thermal effect of the incident high-energy UV excimer laser radiation, a change in the refractive index depth profile within the irradiated zone occurs above a certain radiation dose, so that no more radiation modes can form there.As a further solution, polyacrylate layers are produced by spin-coating and subsequently curing acrylate layers on a carrier substrate. These layers are too thin for radiation modes to form on the underside of the optical waveguides produced by subsequent UV exposure.

The invention provides an excimer laser system including a means for calibrating laser output to compensate for increased variation in laser optical fibers.

The invention provides an excimer laser monopulse energy real-time detection system and a calibration method thereof. The excimer laser monopulse energy real-time detection system comprises a real-time energy detection module, an FPGA energy control module, a laser air pressure detection and adjustment module, a power supply voltage pulse width adjustment module and an excimer laser. Comprising the following steps: S1, collecting a monopulse energy value in real time; s2, performing transmission filtering processing on the energy value, and performing optimal estimation on laser monopulse energy data; s3, comparing the energy value with a target energy value, and calculating an energy error; s4, calculating a control signal; s5, adjusting the discharge voltage, the pulse width and the gas pressure to enable the output energy to approach the target value; and S6, repeating the steps. Therefore, the problem that the single pulse energy of the excimer laser cannot be calibrated in real time and at high precision can be solved, the single pulse energy of the excimer laser is always kept within the set precision range under various complex working conditions, and the quality and the stability of laser in skin treatment are improved.

Generation of treatment recommendations for topographic-based excimer laser surgical procedures is described that includes generating accurate cylinder compensation and spherical compensation values that are adjusted to compensate for unique characteristics of advanced topographic-based excimer laser surgical systems. Generating treatment recommendations generally includes determining a topographic vector from a topographic corneal map of the eye, determining a posterior astigmatism vector and an anterior astigmatism vector for the eye, and generating an interior astigmatism vector using the topographic vector, the posterior astigmatism vector, the anterior astigmatism vector, and a manifest astigmatism vector. In various embodiments, the cylinder compensation is generated using the interior astigmatism vector and the posterior astigmatism vector, and the spherical compensation is generated using an initial spherical compensation modified by a topographic addback modifier and a cylinder addback modifier.

The invention relates to the technical field of laser control, and discloses an excimer laser energy detection and feedback regulation system, which comprises an energy acquisition module configured to be used for receiving part of light beams of an excimer laser and converting optical signals into analog current signals. For a strong electromagnetic interference (EMI) environment generated by high-voltage discharge of an excimer laser, nanosecond transient pulses are locked as quasi-direct current signals through a peak holding circuit, and the bandwidth requirement is reduced; the optical fiber transmission module is used for realizing electrical full isolation and cutting off common-mode interference; a truncation mean filtering algorithm is introduced at a source end, and discharge peak noise is accurately eliminated. Compared with the traditional technical scheme of directly collecting only depending on a V / F chip and having no MCU digital processing, the measurement error under the severe working condition is reduced to be within + / -3% from + / -8%, and the detection precision and the anti-interference capability are remarkably improved.

The utility model relates to excimer laser cooling system technical field especially convenient maintenance's excimer laser cooling water valve pipeline, including cooling water valve main part, water inlet, water outlet, communicating vessel and pipeline body, water inlet is connected in the upper end of cooling water valve main part through, water outlet is connected in the side of cooling water valve main part through, water inlet and water outlet even a group of communicating vessel are connected, and one end of communicating vessel is provided with three groups of branch interfaces, and the connection between pipeline body and communicating vessel is carried out through branch interface, and both ends of pipeline body are connected with a group of communicating vessel, the utility model discloses the both ends of pipeline body are provided with communicating vessel and can connect between the pipeline body and other equipment in the cooling system conveniently, and the one end of communicating vessel sets up three groups of branch interfaces and can connect three pipeline bodies, forms the water pipe passage of redundancy, when the failure of certain pipeline body, need not the shutdown to can maintain the failure pipeline body.

The invention provides an excimer laser gas supply system detection method, a gas supply system, a photoetching machine light source and a computer program product, and relates to the field of photoetching machines. The detection method comprises the following steps: acquiring a detection signal output by a fluorine detector, and detecting whether the tail exhaust assembly is in a running state or not; waiting for a preset time under the condition of determining that the exhaust assembly is in the running state; and determining whether the fluorine detector outputs the detection signal again or not. Whether the tail exhaust assembly is in the running state or not is detected, under the condition that it is determined that the tail exhaust assembly is in the running state, the preset time is waited so that the next detection process can be started, the situation that the interval time between the two detection processes is too short is avoided, and the detection precision is improved; under the condition that the fluorine detector does not output the detection signal again, the maintenance prompt information is output, it is ensured that no fluorine exists in the sealing cavity, the safety of the gas supply system is improved, and harm to the health of operators is avoided.

A pneumatic control system for off-line cleaning and pressure maintaining testing of a discharge cavity of an excimer laser relates to the technical field of lasers and comprises a process gas circuit module, an exhaust module, a fluorine gas filtering module and a vacuum pump module which are connected with the discharge cavity through a gas circuit assembly provided with a plurality of controllable valves, and further comprises a pressure sensor and a control module. The control module is configured to execute an offline cleaning process and a pressure maintaining test process; the off-line cleaning process comprises the step of controlling a controllable valve and a vacuum pump module according to the air pressure information, so that the discharge cavity is sequentially subjected to at least one cycle operation of process gas introduction and vacuumizing; the pressure maintaining test process comprises the steps that after the offline cleaning process is completed, a controllable valve and a vacuum pump module are controlled according to the air pressure information, process gas is introduced into the discharge cavity to reach preset pressure, then the controllable valve is closed, the discharge cavity is kept in a sealed state, and the air pressure change of the discharge cavity in the sealed state is monitored through a pressure sensor; and integration of off-line cleaning and pressure maintaining testing of the discharge cavity is realized.

The utility model discloses a gas treatment device after gas pressure protection and safety pressure relief of an excimer laser, which comprises a rupture disk device (1) with one end capable of being communicated with a resonant cavity of the excimer laser. The other end of the rupture disk device (1) is provided with a one-way safety valve (2) which can be jacked open by working gas leaked from the resonant cavity when a diaphragm (14) of the rupture disk device (1) is ruptured, and the one-way safety valve (2) is connected with an absorption device (3) which can purify the leaked working gas; and the absorption device (3) is provided with an exhaust port (4) capable of exhausting purified gas. According to the utility model, the structure is simple, external air can be prevented from flowing backwards into the excimer laser, the internal gas is kept pure, the discharged gas is absorbed and purified, so that the discharged gas can reach the emission standard, and the harm to workers and the environment is eliminated.

The application discloses a kind of multi-wavelength intelligent excimer laser processing systems, including workbench, workbench is equipped with the first laser excitation generator of different wavelength laser that can emit outward, second laser excitation generator and third laser excitation generator, workbench is equipped with first reflector, second reflector and third reflector, workbench is further equipped with the optical system that can make the laser that first reflector, second reflector or third reflector reflects pass through.The application aims at overcoming the shortcomings of prior art, according to the structure and technical characteristics of excimer laser, a kind of multi-wavelength intelligent excimer laser processing system capable of emitting multiple wavelength excimer laser on a single system is provided, and a kind of intelligent real-time control system is designed, to realize online monitoring of processing condition and real-time control and adjustment of excimer laser output parameters during excimer laser precision machining, to achieve efficient, accurate and automatic control processing.

This pattern forming method includes: a laminating step of laminating a curable resin layer and a support film on a substrate; a curing step of curing the entire curable resin layer; a processing step of processing the curable resin layer into a predetermined pattern by irradiating the curable resin layer after curing with excimer laser light from a side of the support film through a mask; a peeling step of peeling the support film from the curable resin layer after processing; and a forming step of forming a plating layer using the curable resin layer after processing as a mask, and then removing the curable resin layer to form a wiring pattern by the plating layer on the substrate.

The application relates to a control system and method of an excimer laser integrating control, detection and alarm, wherein an industrial computer is connected with an ACS master station and connected with an RS232 communication interface of an excimer laser; the ACS master station is in communication connection with an ACS-UDMxa driving module; the ACS-UDMxa driving module is connected with an EtherCAT circuit of a 6-axis PEG laser control module, and connected with an X-axis linear motor of an X-axis motion unit through an X-axis driving interface; the X-axis motion unit is provided with an X-axis grating ruler reading head, and differential A / B / Z grating ruler signals output by the X-axis grating ruler reading head are connected with an X-axis grating ruler input interface; the excimer laser is connected with a laser synchronization signal input interface and a Trig control signal interface of the 6-axis PEG laser control module through a laser synchronization signal interface and a laser Trig signal interface respectively. Submicron laser-motion synchronization is realized, and control, detection and alarm are integrated.

An excimer laser (100) includes a chamber (110) for containing a gas mixture between a back end (120) and a front end (130) of a linear laser resonator (102), a convex end mirror (122) defining the back end (120), and a plurality of outcoupling mirrors collectively defining the front end (130). The outcoupling mirrors are distributed along an optical axis (190) of the resonator (102) and have respective normal vectors (nR and nF) directed toward the back end (120). The normal vectors (nR and nF) comprise four normal vectors which are not parallel to each other, wherein no three of the four normal vectors which are not parallel to each other are coplanar. These different orientations of the outcoupling mirror cooperate with the convex end mirror (122) to blur fine structures in the output beam (182) of the resonator (102).

A sulfonium salt monomer having the formula (A). The sulfonium salt monomer can be used for a chemically amplified resist composition having a high solvent solubility, a high sensitivity, and a high contrast, and being improved in lithography properties such as EL, LWR, CDU, and DOF, particularly when processed by photolithography using high-energy radiation such as KrF excimer laser, ArF excimer laser, an electron beam (EB), or EUV.

The electrostatic dust removal device of the present application includes: at least one dust charging chamber and at least one dust removal chamber communicating therewith; wherein, the dust charging chamber includes a chamber wall and a high-voltage electrode disposed in the chamber; the chamber wall of the dust removal chamber is provided with opposite flat electrodes, and when the flat electrodes are energized, an electric field intersecting the direction of air flow is formed, and the chamber of the dust removal chamber is a looped and bent structure, and the opposite flat electrodes are disposed along the inner wall of the looped and bent structure. In the above device, a multi-zone electrostatic dust removal structure is provided. Charge is carried by gas dust in the dust charging chamber; opposite flat electrodes are provided on both the chamber wall of the dust removal chamber and the inner wall of the looped and bent structure in the chamber. An electric field is formed between the opposite flat electrodes. When the gas flows along the air flow channel formed by the inner side of the chamber wall and the looped and bent structure, the dust particles carrying charge in the gas migrate to the surface of the flat electrodes, thereby improving the efficiency of the electrostatic dust removal device in removing gas dust.

The present invention discloses a high-precision uranium-lead ratio testing system and method for apatite, which relates to the technical field of uranium-lead dating. The testing system includes a Resolution LR-S155 193nm ArF excimer laser ablation system and a Thermo Scientific iCap TQ inductively coupled plasma mass spectrometer; the testing system follows the standard methods commonly used in laboratories. The testing method includes the following steps: S1. Pretreatment: cutting, cleaning, drying, and target preparation of the apatite sample; S2. Instrument analysis: including instrument debugging, pre-ablation of the sample, and data processing; S3. Data processing: obtaining the U-Pb age calculation result of the apatite sample according to the data results obtained in the instrument analysis in step S2 and the corresponding age calculation method. The testing system and method of the present invention can meet the limitation that the dating method has no age time range, and solve problems such as the lack of suitable absolute dating techniques for the early Cenozoic strata and the rarity of absolute dating of late Miocene sedimentary rocks and fossils.

The invention provides a method and device for predicting the remaining service life of an excimer laser and electronic equipment, and relates to the technical field of semiconductor manufacturing. The method comprises the following steps: acquiring target composite characteristics, wherein the target composite characteristics comprise a pulse energy composite characteristic, a discharge parameter composite characteristic and a gas parameter composite characteristic; generating a physical coupling matrix according to a mutual coupling effect among the target composite features, performing weighted fusion on the target composite features through the physical coupling matrix, and setting Hamiltonian energy constraint terms to obtain target fusion features; calculating a global degradation factor based on the target fusion feature; and predicting the remaining service life of the excimer laser according to the target fusion feature and the global degradation factor to obtain a prediction result. According to the method, high-precision and real-time prediction of the residual service life of the excimer laser can be realized through multi-source feature data fusion and dynamic physical constraint.

The application provides a gas recovery device applied to a laser excimer annealing device. The gas recovery device is provided with a mixed gas collecting tank, a gas dryer, a separation device and a nitrogen gas collecting tank. The mixed waste gas generated in the annealing chamber can be collected, dried, pressurized, condensed, fractionated and stored, so that the nitrogen in the mixed waste gas can be purified and recycled, thereby improving the resource utilization efficiency and reducing the procurement cost of high-purity nitrogen gas.

The invention discloses a laser crystal bonding method based on excimer laser surface activation, and belongs to the technical field of laser crystal surface modification and bonding. The activation method comprises the following steps: carrying out precise polishing and cleaning treatment on the surface of a laser crystal to be bonded; and carrying out irradiation activation treatment on the treated crystal surface by adopting excimer laser. The bonding method comprises the following steps of: activating the surfaces of the crystals by adopting the activating method, and laminating the surfaces of the two crystals subjected to activating treatment at room temperature to form an initial optical cement interface; and carrying out heat treatment annealing on the crystal assembly subjected to optical cement. High-energy ultraviolet photons of short-wavelength excimer laser are utilized to initiate surface chemical bond breakage, high-activity sites such as dangling bonds are formed, and the surface energy and the surface activity of the crystal are remarkably improved. The method does not need to introduce a chemical reagent, is small in heat influence, remarkably improves the bonding strength after activation, and is suitable for large-size crystal treatment.

The invention discloses a contrast agent for enhancing an ELCA volume reduction effect, belongs to the field of medical reagents, and particularly relates to a contrast agent, which comprises a heparin-based compound and a contrast agent, the heparin-based compound comprises heparin, and the content of the heparin-based compound in the contrast agent is 2-64 [mu] g / mL. The contrast agent comprises at least one of iopromide and iodixanol. The heparin-based compound further comprises a heparin derivative, the heparin derivative is prepared by oxidizing heparin and then reacting with a derivating agent, and the derivating agent comprises L-alanyl-L-proline methyl ester hydrochloride. The contrast agent provided by the invention can be combined with ELCA for use, enhances the volume reduction effect of ELCA, has a good ablation effect on vascular plaques, and has high shock wave pressure when acting with excimer laser.

The present invention relates to a positioning fixture and an installation method for a preionization tube of an excimer laser. The positioning fixture comprises a base and a step member extending upward from the base. The base comprises a base side surface. The step member comprises a protruding portion protruding from a top of the base. The step member comprises a first side surface and a second side surface opposite to the first side surface. At least two positioning members are formed extending from the second side surface. Each positioning member comprises a cylinder and a rectangular positioning strip integrally extending and formed on the cylinder. The positioning fixture is suitable for being arranged on a step end surface of an anode base of an excimer laser and can accurately maintain the distance between the terminal end surface of the preionization tube and the step end surface. The positioning fixture can also limit the axial and radial movement of the preionization tube, so that the preionization tube can be quickly and accurately positioned, thereby ensuring the assembly quality of the preionization tube.

The present invention provides a metal fluoride trap and an excimer laser. The metal fluoride trap comprises: a cylinder, a fan and a boost motor; an air inlet is provided in the middle of the cylinder; a boost chamber is provided at both ends of the cylinder; an air outlet is provided on the side wall of the boost chamber; the fan is rotatably arranged in the boost chamber; the power output shaft of the boost motor is connected to the fan, driving the fan to rotate, and forcing the purified working gas to be discharged from the air outlet. This application achieves a boosting effect by adding a boost motor and a fan at both ends of the cylinder of the metal fluoride trap, utilizing the high-speed rotation of the fan to increase the working gas flow rate of the reflux discharge chamber and enhance the metal fluoride trap's ability to filter metal fluorides; while boosting and increasing the airflow, the circulation of the purified working gas greatly improves the ability of the Brewster window to purge and remove dust, and the dust removal effect is also improved.

The invention provides an excimer laser preionization electron density measuring method and device, and the method comprises the steps: turning off the power supply between a preionization unit and a main discharge electrode, and carrying out the preionization of environment gas in an area between the main discharge electrodes through the preionization unit, so as to form initial electrons; then forming an electric field for driving the initial electrons to directionally drift towards the main discharge electrodes in an area between the main discharge electrodes by using the electron density measurement unit; and finally, acquiring an electric signal variation generated by the main discharge electrode during initial electron directional drift by using an electron density measurement unit, and further calculating the electron density of the initial electrons. The electronic density of the initial electrons generated in the pre-ionization process can be directly calculated, errors caused by power loss when the electronic density is calculated through power in the prior art are avoided, and the pre-ionization effect can be reflected more accurately.