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100 results about "Laser excimer" patented technology

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining.

Preparation method of bionic cornea stroma lens capable of being used for refractive correction

The invention discloses a preparation method of a bionic cornea stroma lens for refractive correction, which comprises the following steps: solution preparation: dissolving type I collagen in an acetic acid solution, adding a film aid, fully stirring, and centrifugally defoaming to obtain a type I collagen composite solution; the I-type collagen composite solution is poured into an assembling groove, the curvature radius of titanium metal is set to be 6.8-8.0 mm, the titanium metal serves as a working electrode material, platinum metal serves as a counter electrode material, current parameters are set according to the needed thickness of the lens blank, the density is 3.50-6.50 mA / cm < 2 >, and the thickness of the lens blank is set to be 3.50-6.50 mA / cm < 2 >; a high-transparency cornea embryo material which is uniform in curvature in all directions and similar to human cornea fiber structure arrangement is formed after electrochemical assembly and cross-linking curing, accurate cutting machining is carried out through excimer laser, a concave / convex matrix lens with the needed correction degree is obtained, the correction precision is high after cornea interlayer implantation, and the correction precision is high. And meanwhile, the compound has excellent performance in the aspects of in-vivo stability and biological safety.
Owner:JIANGSU BOCHUANG BIOTECHNOLOGY CO LTD

Excimer laser cutting parameter optimization method for presbyopia correction

The invention relates to the technical field of ophthalmology medical treatment, in particular to an excimer laser cutting parameter optimization method for presbyopia correction, which comprises the following steps: (1) collecting eye data of a patient: collecting eye structure data and vision information of the patient; (2) establishing a personalized eye model: constructing a personalized eye three-dimensional model of the patient based on the collected eye data; (3) determining an optimization objective function: comprehensively considering the correction effects of far vision, near vision and middle vision and the risk of postoperative complications, and determining the optimization objective function; and (4) constructing a cutting parameter constraint condition: setting the cutting parameter constraint condition according to the eye condition of the patient. The method aims at solving the problems that in the prior art, an excimer laser cutting parameter optimization method for presbyopia correction is insufficient in the aspects of individuation, accuracy, comprehensiveness, safety and the like.
Owner:GUIYANG YANGMING EYE HOSPITAL CO LTD

Calcium fluoride crystal doped with metal ions, preparation method of calcium fluoride crystal and application of calcium fluoride crystal in optical element

The invention belongs to the technical field of crystals, and particularly relates to a calcium fluoride crystal doped with metal ions, a preparation method of the calcium fluoride crystal and application of the calcium fluoride crystal in optical elements. The crystal is a calcium fluoride crystal doped with magnesium ions and barium ions, and in the preparation method of the crystal, the magnesium ions and the barium ions for doping are pretreated and coated with a calcium fluoride precursor, and the calcium fluoride crystal which is uniform in doping and excellent in performance is prepared by combining a traditional Bridgman-Stockbarger method with a gradient doping process. The crystal is applied to an excimer laser lighting system, and after an optical element manufactured by the crystal is exposed to gamma radiation larger than 2.8 Mrads, the 515 / 380 nm transmittance loss ratio of the optical element is lower than 0.4.
Owner:HENAN MICRON OPTICAL TECH CO LTD

Intelligent topographic corneal procedure advisor

ActiveUS12544264B2Laser surgeryImage analysisCorneal surgeryReoperative surgery
Generation of treatment recommendations for topographic-based excimer laser surgical procedures is described that includes generating accurate cylinder compensation and spherical compensation values that are adjusted to compensate for unique characteristics of advanced topographic-based excimer laser surgical systems. Generating treatment recommendations generally includes determining a topographic vector from a topographic corneal map of the eye, determining a posterior astigmatism vector and an anterior astigmatism vector for the eye, and generating an interior astigmatism vector using the topographic vector, the posterior astigmatism vector, the anterior astigmatism vector, and a manifest astigmatism vector. In various embodiments, the cylinder compensation is generated using the interior astigmatism vector and the posterior astigmatism vector, and the spherical compensation is generated using an initial spherical compensation modified by a topographic addback modifier and a cylinder addback modifier.
Owner:ALCON INC

Excimer laser energy detection and feedback regulation system

The invention relates to the technical field of laser control, and discloses an excimer laser energy detection and feedback regulation system, which comprises an energy acquisition module configured to be used for receiving part of light beams of an excimer laser and converting optical signals into analog current signals. For a strong electromagnetic interference (EMI) environment generated by high-voltage discharge of an excimer laser, nanosecond transient pulses are locked as quasi-direct current signals through a peak holding circuit, and the bandwidth requirement is reduced; the optical fiber transmission module is used for realizing electrical full isolation and cutting off common-mode interference; a truncation mean filtering algorithm is introduced at a source end, and discharge peak noise is accurately eliminated. Compared with the traditional technical scheme of directly collecting only depending on a V / F chip and having no MCU digital processing, the measurement error under the severe working condition is reduced to be within + / -3% from + / -8%, and the detection precision and the anti-interference capability are remarkably improved.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Maintenance-friendly valve conduit for cooling water of excimer laser

The utility model relates to excimer laser cooling system technical field especially convenient maintenance's excimer laser cooling water valve pipeline, including cooling water valve main part, water inlet, water outlet, communicating vessel and pipeline body, water inlet is connected in the upper end of cooling water valve main part through, water outlet is connected in the side of cooling water valve main part through, water inlet and water outlet even a group of communicating vessel are connected, and one end of communicating vessel is provided with three groups of branch interfaces, and the connection between pipeline body and communicating vessel is carried out through branch interface, and both ends of pipeline body are connected with a group of communicating vessel, the utility model discloses the both ends of pipeline body are provided with communicating vessel and can connect between the pipeline body and other equipment in the cooling system conveniently, and the one end of communicating vessel sets up three groups of branch interfaces and can connect three pipeline bodies, forms the water pipe passage of redundancy, when the failure of certain pipeline body, need not the shutdown to can maintain the failure pipeline body.
Owner:JIANGSU FENGYUE TECHNOLOGY CO LTD

Pneumatic control system for off-line cleaning and pressure maintaining test of excimer laser discharge cavity

A pneumatic control system for off-line cleaning and pressure maintaining testing of a discharge cavity of an excimer laser relates to the technical field of lasers and comprises a process gas circuit module, an exhaust module, a fluorine gas filtering module and a vacuum pump module which are connected with the discharge cavity through a gas circuit assembly provided with a plurality of controllable valves, and further comprises a pressure sensor and a control module. The control module is configured to execute an offline cleaning process and a pressure maintaining test process; the off-line cleaning process comprises the step of controlling a controllable valve and a vacuum pump module according to the air pressure information, so that the discharge cavity is sequentially subjected to at least one cycle operation of process gas introduction and vacuumizing; the pressure maintaining test process comprises the steps that after the offline cleaning process is completed, a controllable valve and a vacuum pump module are controlled according to the air pressure information, process gas is introduced into the discharge cavity to reach preset pressure, then the controllable valve is closed, the discharge cavity is kept in a sealed state, and the air pressure change of the discharge cavity in the sealed state is monitored through a pressure sensor; and integration of off-line cleaning and pressure maintaining testing of the discharge cavity is realized.
Owner:NEW YIDONG (SHANGHAI) TECH CO LTD

Gas treatment device after gas pressure protection and safety pressure relief of excimer laser

The utility model discloses a gas treatment device after gas pressure protection and safety pressure relief of an excimer laser, which comprises a rupture disk device (1) with one end capable of being communicated with a resonant cavity of the excimer laser. The other end of the rupture disk device (1) is provided with a one-way safety valve (2) which can be jacked open by working gas leaked from the resonant cavity when a diaphragm (14) of the rupture disk device (1) is ruptured, and the one-way safety valve (2) is connected with an absorption device (3) which can purify the leaked working gas; and the absorption device (3) is provided with an exhaust port (4) capable of exhausting purified gas. According to the utility model, the structure is simple, external air can be prevented from flowing backwards into the excimer laser, the internal gas is kept pure, the discharged gas is absorbed and purified, so that the discharged gas can reach the emission standard, and the harm to workers and the environment is eliminated.
Owner:SHENZHEN SHENGFANG TECH CO LTD

A multi-wavelength intelligent excimer laser processing system

The application discloses a kind of multi-wavelength intelligent excimer laser processing systems, including workbench, workbench is equipped with the first laser excitation generator of different wavelength laser that can emit outward, second laser excitation generator and third laser excitation generator, workbench is equipped with first reflector, second reflector and third reflector, workbench is further equipped with the optical system that can make the laser that first reflector, second reflector or third reflector reflects pass through.The application aims at overcoming the shortcomings of prior art, according to the structure and technical characteristics of excimer laser, a kind of multi-wavelength intelligent excimer laser processing system capable of emitting multiple wavelength excimer laser on a single system is provided, and a kind of intelligent real-time control system is designed, to realize online monitoring of processing condition and real-time control and adjustment of excimer laser output parameters during excimer laser precision machining, to achieve efficient, accurate and automatic control processing.
Owner:SHENZHEN TECH UNIV

Pattern forming method

PendingUS20260251978A1Polymer sciencePolymer chemistry
This pattern forming method includes: a laminating step of laminating a curable resin layer and a support film on a substrate; a curing step of curing the entire curable resin layer; a processing step of processing the curable resin layer into a predetermined pattern by irradiating the curable resin layer after curing with excimer laser light from a side of the support film through a mask; a peeling step of peeling the support film from the curable resin layer after processing; and a forming step of forming a plating layer using the curable resin layer after processing as a mask, and then removing the curable resin layer to form a wiring pattern by the plating layer on the substrate.
Owner:RESONAC CORP

Excimer laser control system and method incorporating control, detection and alarm

The application relates to a control system and method of an excimer laser integrating control, detection and alarm, wherein an industrial computer is connected with an ACS master station and connected with an RS232 communication interface of an excimer laser; the ACS master station is in communication connection with an ACS-UDMxa driving module; the ACS-UDMxa driving module is connected with an EtherCAT circuit of a 6-axis PEG laser control module, and connected with an X-axis linear motor of an X-axis motion unit through an X-axis driving interface; the X-axis motion unit is provided with an X-axis grating ruler reading head, and differential A / B / Z grating ruler signals output by the X-axis grating ruler reading head are connected with an X-axis grating ruler input interface; the excimer laser is connected with a laser synchronization signal input interface and a Trig control signal interface of the 6-axis PEG laser control module through a laser synchronization signal interface and a laser Trig signal interface respectively. Submicron laser-motion synchronization is realized, and control, detection and alarm are integrated.
Owner:SUZHOU DELPHI LASER +1

Excimer laser with improved beam uniformity and stability

An excimer laser (100) includes a chamber (110) for containing a gas mixture between a back end (120) and a front end (130) of a linear laser resonator (102), a convex end mirror (122) defining the back end (120), and a plurality of outcoupling mirrors collectively defining the front end (130). The outcoupling mirrors are distributed along an optical axis (190) of the resonator (102) and have respective normal vectors (nR and nF) directed toward the back end (120). The normal vectors (nR and nF) comprise four normal vectors which are not parallel to each other, wherein no three of the four normal vectors which are not parallel to each other are coplanar. These different orientations of the outcoupling mirror cooperate with the convex end mirror (122) to blur fine structures in the output beam (182) of the resonator (102).
Owner:COHERENT LASERSYST

Sulfonium salt monomer, polymer, chemically amplified resist composition, and pattern forming process

A sulfonium salt monomer having the formula (A). The sulfonium salt monomer can be used for a chemically amplified resist composition having a high solvent solubility, a high sensitivity, and a high contrast, and being improved in lithography properties such as EL, LWR, CDU, and DOF, particularly when processed by photolithography using high-energy radiation such as KrF excimer laser, ArF excimer laser, an electron beam (EB), or EUV.
Owner:SHIN ETSU CHEMICAL CO LTD

Method and device for predicting residual service life of excimer laser and electronic equipment

The invention provides a method and device for predicting the remaining service life of an excimer laser and electronic equipment, and relates to the technical field of semiconductor manufacturing. The method comprises the following steps: acquiring target composite characteristics, wherein the target composite characteristics comprise a pulse energy composite characteristic, a discharge parameter composite characteristic and a gas parameter composite characteristic; generating a physical coupling matrix according to a mutual coupling effect among the target composite features, performing weighted fusion on the target composite features through the physical coupling matrix, and setting Hamiltonian energy constraint terms to obtain target fusion features; calculating a global degradation factor based on the target fusion feature; and predicting the remaining service life of the excimer laser according to the target fusion feature and the global degradation factor to obtain a prediction result. According to the method, high-precision and real-time prediction of the residual service life of the excimer laser can be realized through multi-source feature data fusion and dynamic physical constraint.
Owner:NEW YIDONG (SHANGHAI) TECH CO LTD

Laser crystal bonding method based on excimer laser surface activation

The invention discloses a laser crystal bonding method based on excimer laser surface activation, and belongs to the technical field of laser crystal surface modification and bonding. The activation method comprises the following steps: carrying out precise polishing and cleaning treatment on the surface of a laser crystal to be bonded; and carrying out irradiation activation treatment on the treated crystal surface by adopting excimer laser. The bonding method comprises the following steps of: activating the surfaces of the crystals by adopting the activating method, and laminating the surfaces of the two crystals subjected to activating treatment at room temperature to form an initial optical cement interface; and carrying out heat treatment annealing on the crystal assembly subjected to optical cement. High-energy ultraviolet photons of short-wavelength excimer laser are utilized to initiate surface chemical bond breakage, high-activity sites such as dangling bonds are formed, and the surface energy and the surface activity of the crystal are remarkably improved. The method does not need to introduce a chemical reagent, is small in heat influence, remarkably improves the bonding strength after activation, and is suitable for large-size crystal treatment.
Owner:HEFEI INSTITUTE OF PHYSICAL SCIENCE CHINESE ACADEMY OF SCIENCES

Contrast agent for enhancing ELCA volume reduction effect

ActiveCN120939253AX-ray constrast preparationsEster active ingredientsIopromideIodixanol
The invention discloses a contrast agent for enhancing an ELCA volume reduction effect, belongs to the field of medical reagents, and particularly relates to a contrast agent, which comprises a heparin-based compound and a contrast agent, the heparin-based compound comprises heparin, and the content of the heparin-based compound in the contrast agent is 2-64 [mu] g / mL. The contrast agent comprises at least one of iopromide and iodixanol. The heparin-based compound further comprises a heparin derivative, the heparin derivative is prepared by oxidizing heparin and then reacting with a derivating agent, and the derivating agent comprises L-alanyl-L-proline methyl ester hydrochloride. The contrast agent provided by the invention can be combined with ELCA for use, enhances the volume reduction effect of ELCA, has a good ablation effect on vascular plaques, and has high shock wave pressure when acting with excimer laser.
Owner:THE SIXTH MEDICAL CENT OF THE CHINESE PEOPLES LIBERATION ARMY GENERAL HOSPITAL

An excimer laser energy absorbing device and a shutter with a reflecting device

The utility model discloses a excimer laser energy absorption device and optical shutter with reflecting device, and the outer sleeve one end opening constitutes the laser entrance window for laser incidence, and the inner chamber cavity wall of outer sleeve is conical platform and constitutes the first reflection surface of can reflect laser, and the outer sleeve is equipped with the reflection cone of conical body, and the second reflection surface is constituted to the reflection cone outer peripheral surface, and the vertex of reflection cone points to laser entrance window. The utility model discloses still a kind of optical shutter using the absorption device, and laser entrance, first laser exit and second laser exit are equipped on the shell, and laser entrance is communicated with second laser exit, and the shell is rotatably connected with mirror assembly, when mirror assembly is in second position, laser is emitted from first laser exit, when mirror assembly is in first position, laser is emitted from second laser exit to excimer laser energy absorption device after being reflected by mirror assembly. The utility model absorption device absorption is good, and optical shutter can realize higher industrial production efficiency.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Adjustable cathode for life extension in excimer laser discharge chambers

PCT designated stageWO2026133148A1Laser detailsLight beamEngineering
A light source includes a chamber, a first electrode assembly, and a second electrode. The first electrode assembly includes a first electrode, a rod, and a tip portion. The rod extends longitudinally through a portion of the first electrode. The tip portion is coupled to the rod and includes a first discharge surface. The second electrode has a second discharge surface spaced apart from the first discharge surface by a discharge gap. The rod adjusts a position of the tip portion to maintain the discharge gap. The first and second electrodes excite a gas discharge medium of the chamber to generate a light beam. Advantageously, the system maintains the discharge gap over time, maintains flow between the discharge gap, adjusts a position of the first discharge surface based on one or more parameters of the light source, reduces errors in the light beam, and increases lifetime of the light source.
Owner:CYMER INC

Excimer laser therapy instrument (308 nm)

ActiveCN309878905SLight therapyOphthalmology
1. The name of the design product: excimer light therapy instrument (308nm). 2. The use of the design product: for the treatment of vitiligo. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1.
Owner:SICHUAN HUACHUAN XINGGUANG MEDICAL TECH CO LTD

Method and apparatus for analyzing damage cause of excimer laser window element

The application discloses a kind of excimer laser window piece element damage reason analysis methods, by obtaining the damage information corresponding feature information of the window piece element to be analyzed determines the damage category of the window piece element to be analyzed, and determines the actual damage form of the window piece element to be analyzed, the damage category of the window piece element to be analyzed is previously using same or similar operation means, so it is in non-damage area, and the damage corresponding to the formation damage category is reproduced, the reproduced damage is compared with damage information, the information of damage is consistent with the damage information of the window piece element to be analyzed, then determine the damage reason of the window piece element to be analyzed is the same or similar operation means of the reason of forming damage category.The application determines the damage category of the window piece element to be analyzed, and reproduces damage in combination with the same or similar operation means of forming damage category, so as to accurately determine the cause of the damage category, and improve the stability of excimer laser operation.
Owner:RAINBOW SOURCE LASER RSLASER

A high-power excimer laser light-out shutter protection device

The utility model discloses a kind of high-power excimer laser light exit optical shutter protection devices, laser entrance and first laser exit and second laser exit are equipped on shell, reflector assembly is movably connected in shell, the position that reflector assembly can stay includes first position and second position, when reflector assembly is in second position, reflector assembly deviates first laser exit to make laser emit from first laser exit, when reflector assembly is in first position, reflector assembly deviates second laser exit to make laser emit from second laser exit, shell is also equipped with the driving assembly that can drive reflector assembly switching between first position and second position. The utility model can realize laser system seamless switching mode of operation, always keep high-power output state, reduce the time waste caused by the need to reheat due to shutdown, to improve production efficiency.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Device for automatically purifying and passivating cavity of excimer laser

The invention relates to the technical field of laser manufacturing and maintenance, and discloses a device for automatically purifying and passivating a cavity of an excimer laser, and the device comprises a gas supply module which is configured to provide a purifying gas and a passivating gas, and the passivating gas comprises fluorine gas; the cavity connecting port is used for connecting a laser cavity to be processed; a vacuum pump; and an exhaust treatment module fluidly connected between the cavity connection port and the vacuum pump. A dual-mode structure of a first exhaust branch and a second exhaust branch which are connected in parallel is adopted, in the non-passivation emission stage, rapid exhaust is carried out through a large-conductance straight-through branch, a halogen filter with high flow resistance is bypassed, and the vacuumizing time is shortened by about 60% for a standard 100L laser cavity. Meanwhile, a large amount of inert gas is prevented from scouring the halogen filter, physical pulverization and ineffective consumption of the adsorbent are effectively prevented, and the service life of the halogen filter is prolonged.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Excimer laser (LL20)

ActiveCN309909803SWaferingThin membrane
1. Name of the designed product: excimer laser (LL20). 2. Use of the designed product: used in film processing, wafer processing, pulse laser deposition, etc. 3. Design points of the designed product: combination of shape and pattern. 4. Picture or photo best indicating the design points: perspective view 1.
Owner:HEFEI YIKESAI LASER TECH CO LTD

Dual serial port time-sharing control excimer laser communication circuit

The application discloses a double-serial-port time-sharing control excimer laser communication circuit, which comprises at least one communication signal mutual conversion circuit for mutual conversion of excimer laser communication signals and touch screen communication signals and mutual conversion of excimer laser communication signals and intelligent device communication signals, and is connected with a touch screen interface, an intelligent device interface, a laser signal sending circuit and a laser signal receiving circuit. The isolation of switch diode D1 and switch diode D2 in the laser signal receiving circuit makes the levels of two data receiving pins not affect each other, the triode T2 is turned on, the optical fiber receiving head F2 emits light to receive data, when one of the two is at a low level, the RXD signal output by the communication signal mutual conversion circuit is pulled low, so that the triode T2 is cut off and the optical fiber receiving head F2 does not receive data, thereby realizing the time-sharing signal transmission function between the touch screen, the intelligent device computer end and the laser.
Owner:SHENZHEN SHENGFANG TECH CO LTD

Excimer laser thyratron heating voltage automatic adjusting system and method

The invention provides an excimer laser thyratron heating voltage automatic adjustment system and method. The system comprises a thyratron, a thyratron adjustable heating power supply, a heating power supply voltage acquisition module, a thyratron anode current acquisition module, a thyratron grid voltage acquisition module, a thyratron cathode temperature acquisition module and a heating power supply voltage control and adjustment module. Comprising the following steps: (1) powering on a power supply to supply power to a thyratron; (2) carrying out data acquisition; (3) processing and analyzing the data; (4) calculating a voltage Vheat2; (5) generating a corresponding duty ratio signal, and sending the signal to a thyratron adjustable heating power supply; (6) closed-loop control of thyratron heating power supply voltage is realized; and (7) adopting a dynamic adjustment strategy. Therefore, the problem that the performance of the excimer laser is affected due to the fact that the thyratron heating power supply voltage cannot automatically adapt to the change of the working state of the thyratron can be solved, the stability of the working state of the thyratron is realized, and the overall performance of the excimer laser is improved.
Owner:KERNEL MEDICAL EQUIP CO LTD

Method for producing an electrical insulating wire

The present invention describes a method for producing an electrically insulating wire, comprising the steps of providing a copper wire coated with a primary coating, wherein the primary coating comprises at least one thermosetting resin, thermally processing the primary coating to obtain a surface-structured primary coating, and coating the surface-treated primary coating with a secondary coating, wherein the secondary coating comprises at least one thermoplastic material. The thermal processing involves processing by means of UV, IR, SHG / green light, or excimer lasers. Furthermore, an electrically insulating wire, the use of a method according to the invention, and the use of an electrically insulating wire are described.
Owner:VOLKSWAGEN AG

Improved hole drape for excimer laser surgery

This utility model discloses an improved surgical drape for excimer laser surgery, relating to the field of medical supplies technology. It includes a drape body with a Velcro patch fixedly installed on its adhesive surface. A Velcro hook surface is attached to the Velcro patch, and an adhesive layer is fixedly installed on the Velcro hook surface. A sterile absorbent pad is provided on the drape body, and an auxiliary absorbent pad is provided on the sterile absorbent pad. An absorbent pad laying mechanism is provided on both the sterile and auxiliary absorbent pads. A buckle is fixedly installed on the sterile absorbent pad and engages with a retainer. In this utility model, through the design of the sterile absorbent pad, retainer, buckle, auxiliary absorbent pad, and absorbent pad laying mechanism, the waterproof layer can absorb more blood, improving the effectiveness of use and avoiding cross-contamination of the drape body. A micro-bar engages with the insert block, allowing the auxiliary absorbent pad to be laid on the sterile absorbent pad to meet subsequent blood-contaminated use requirements.
Owner:ENSHI TUJIA & MIAO AUTONOMOUS PREFECTURE CENT HOSPITAL

Sulfonium salt, chemically amplified resist composition and pattern forming process

The sulfonium salt consists of an aromatic sulfonate anion having the following formula (1A) and a sulfonium cation having the following formula (1B). The sulfonium salt can be used in a chemically amplified resist composition. The resist composition has a high solvent solubility, high sensitivity and high contrast, and forming a resist film with improved lithography properties such as LWR, CDU, MEF, EL, and DOF when processed by photolithography using high-energy radiation such as a KrF or ArF excimer laser beam, an electron beam (EB) or EUV.
Owner:SHIN ETSU CHEMICAL CO LTD

Excimer laser dose accuracy control method and system and excimer laser

The application discloses a kind of excimer laser dose precision control method and system.The method at least includes the following steps: S3: whether pulse position is greater than preset value n is judged, if less than or equal to, then enter S4;If greater, then enter S5;S4: single pulse energy stability control calculation is carried out, the current discharge voltage Vi of discharge cavity j is obtained, for controlling discharge cavity;Then enter S6;S5: dose precision control calculation is carried out, the current discharge voltage Vi of discharge cavity j is obtained, for controlling discharge cavity;Then enter S6;S6: based on current discharge voltage Vi j adjustment discharge voltage of discharge cavity.The application can inhibit the fluctuation caused by single pulse energy and dose, guarantee the dose precision requirement in the working process of laser.
Owner:RAINBOW SOURCE LASER RSLASER

Sulfonium salt, chemically amplified positive resist composition and resist pattern forming process

The sulfonium salt monomer has the formula (A). The chemically amplified positive resist composition can be processed by photolithography using, in particular, high-energy radiation such as KrF excimer laser, ArF excimer laser, EB or EUV, has good solvent solubility, and is excellent in lithographic performance such as resolution, LER and a pattern profile.
Owner:SHIN ETSU CHEMICAL CO LTD