The invention relates to the technical field of
laser manufacturing and maintenance, and discloses a device for automatically purifying and passivating a cavity of an
excimer laser, and the device comprises a
gas supply module which is configured to provide a purifying gas and a passivating gas, and the passivating gas comprises
fluorine gas; the cavity connecting port is used for connecting a
laser cavity to be processed; a
vacuum pump; and an exhaust treatment module fluidly connected between the cavity connection port and the
vacuum pump. A dual-mode structure of a first exhaust
branch and a second exhaust
branch which are connected in parallel is adopted, in the non-
passivation emission stage, rapid exhaust is carried out through a large-conductance straight-through
branch, a
halogen filter with high flow resistance is bypassed, and the vacuumizing time is shortened by about 60% for a standard 100L laser cavity. Meanwhile, a large amount of
inert gas is prevented from scouring the
halogen filter, physical pulverization and ineffective consumption of the adsorbent are effectively prevented, and the service life of the
halogen filter is prolonged.